TWI833424B - Detection apparatus for pressure leakage - Google Patents

Detection apparatus for pressure leakage Download PDF

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TWI833424B
TWI833424B TW111142330A TW111142330A TWI833424B TW I833424 B TWI833424 B TW I833424B TW 111142330 A TW111142330 A TW 111142330A TW 111142330 A TW111142330 A TW 111142330A TW I833424 B TWI833424 B TW I833424B
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chamber
standard
internal space
pressure
control valve
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TW111142330A
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Chinese (zh)
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TW202419837A (en
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張鈞富
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和碩聯合科技股份有限公司
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Priority to CN202311139774.8A priority patent/CN117990296A/en
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Publication of TW202419837A publication Critical patent/TW202419837A/en

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Abstract

The present invention provides a detection apparatus for pressure leakage. The detection apparatus includes a standard chamber, a testing chamber, a first gas supply device, a second gas supply device, an intercommunicated device, and a differential pressure sensor. The standard chamber is configured for accommodating a standard object. The testing chamber is configured for accommodating a device under test (DUT). Each of the first gas supply device and the second gas supply device is connected to the standard chamber and the testing chamber, and the first gas supply device and the second gas supply device are configured to input gases having different temperatures and different pressures into the standard chamber and the testing chamber during different periods. The intercommunicated device is connected to the standard chamber, an interior space of the standard object, the testing chamber, and an interior space of the DUT. The differential pressure sensor is connected to the interior spaces of the standard object and the DUT for detecting a pressure difference there-between.

Description

壓力洩漏檢測設備Pressure leak detection equipment

本發明涉及一種檢測設備,尤其涉及一種壓力洩漏檢測設備。 The present invention relates to a detection device, in particular to a pressure leakage detection device.

現有壓力洩漏檢測設備是以施加正壓或負壓方式進行受測產品的測試,據以通過壓力差變化來判別上述受測產品是否達到所需的要求。然而,現有壓力洩漏檢測設備並未考量到溫度要求與壓力要求同時存在的測試環境。 Existing pressure leakage detection equipment tests the product under test by applying positive pressure or negative pressure, and uses the change in pressure difference to determine whether the product under test meets the required requirements. However, existing pressure leakage detection equipment does not take into account the testing environment where temperature requirements and pressure requirements coexist.

於是,本發明人認為上述缺陷可改善,乃特潛心研究並配合科學原理的運用,終於提出一種設計合理且有效改善上述缺陷的本發明。 Therefore, the inventor believed that the above-mentioned defects could be improved, so he devoted himself to research and applied scientific principles, and finally proposed an invention that is reasonably designed and effectively improves the above-mentioned defects.

本發明實施例在於提供一種壓力洩漏檢測設備,其能有效地改善現有壓力洩漏檢測設備所可能產生的缺陷。 An embodiment of the present invention provides a pressure leakage detection device that can effectively improve the possible defects of existing pressure leakage detection equipment.

本發明實施例公開一種壓力洩漏檢測設備,其包括:一標準腔室,用以供一標準件設置;一測試腔室,用以供一待測件設置;一第一供氣裝置,其連接所述標準腔室及所述測試腔室,用以通入一第一氣體至所述標準腔室及所述測試腔室,所述第一氣體具有一第一溫度值與一第一壓力值;一第二供氣裝置,其連接所述標準腔室與所述測試腔室,用以通入一第二氣體至所述標準腔室及所述測試腔室,所述第二氣體具有一第二溫度值與一第二 壓力值,所述第一溫度值不同於所述第二溫度值,所述第一壓力值不同於所述第二壓力值;一互通裝置,其連接於所述標準腔室、所述標準件的一內部空間、所述測試腔室、及所述待測件的一內部空間;以及一差壓感測器,其連接所述標準件的所述內部空間及所述待測件的所述內部空間,用以量測所述標準件的所述內部空間及所述待測件的所述內部空間之間的一壓力差值;其中,所述第一供氣裝置能通過所述互通裝置而對所述標準腔室、所述標準件的所述內部空間、所述測試腔室、及所述待測件的所述內部空間通入所述第一氣體,使所述標準腔室、所述標準件的所述內部空間、所述測試腔室、及所述待測件的所述內部空間具有所述第一溫度值和所述第一壓力值;其中,當所述標準腔室、所述標準件的所述內部空間、所述測試腔室、及所述待測件的所述內部空間具有所述第一溫度值和所述第一壓力值時,所述第二供氣裝置對所述標準腔室和所述測試腔室通入所述第二氣體,以使所述標準腔室及所述測試腔室具有所述第二溫度值及所述第二壓力值;其中,當所述標準腔室及所述測試腔室具有所述第二溫度值和所述第二壓力值時,所述差壓感測器量測所述壓力差值。 An embodiment of the present invention discloses a pressure leakage detection equipment, which includes: a standard chamber for setting a standard part; a test chamber for setting a component to be tested; a first air supply device connected The standard chamber and the test chamber are used to pass a first gas into the standard chamber and the test chamber, and the first gas has a first temperature value and a first pressure value. ; A second gas supply device, which connects the standard chamber and the test chamber, and is used to introduce a second gas to the standard chamber and the test chamber, and the second gas has a the second temperature value and a second Pressure value, the first temperature value is different from the second temperature value, the first pressure value is different from the second pressure value; an interconnection device connected to the standard chamber, the standard part An internal space, the test chamber, and an internal space of the component under test; and a differential pressure sensor that connects the internal space of the standard component and the component under test. The internal space is used to measure a pressure difference between the internal space of the standard part and the internal space of the part to be tested; wherein the first air supply device can pass through the intercommunication device The first gas is introduced into the standard chamber, the internal space of the standard part, the test chamber, and the internal space of the part to be tested, so that the standard chamber, The internal space of the standard part, the test chamber, and the internal space of the part to be tested have the first temperature value and the first pressure value; wherein, when the standard chamber , when the internal space of the standard part, the test chamber, and the internal space of the part to be tested have the first temperature value and the first pressure value, the second air supply The device passes the second gas into the standard chamber and the test chamber, so that the standard chamber and the test chamber have the second temperature value and the second pressure value; wherein , when the standard chamber and the test chamber have the second temperature value and the second pressure value, the differential pressure sensor measures the pressure difference.

綜上所述,本發明實施例所公開的壓力洩漏檢測設備,其屬於非破壞檢測(nondestructive testing,NDT),並且通過所述第一供氣裝置、所述第二供氣裝置、及所述互通裝置的配合來模擬具有溫度要求與壓力要求的不同環境條件,據以使得所述待測件能與所述標準件在不同溫度下進行壓力比對測試。 To sum up, the pressure leakage detection equipment disclosed in the embodiment of the present invention belongs to nondestructive testing (NDT), and through the first air supply device, the second air supply device, and the The cooperation of the interconnection device simulates different environmental conditions with temperature requirements and pressure requirements, so that the component to be tested can perform pressure comparison tests with the standard component at different temperatures.

為能更進一步瞭解本發明的特徵及技術內容,請參閱以下有關本發明的詳細說明與附圖,但是此等說明與附圖僅用來說明本發明,而非對本發明的保護範圍作任何的限制。 In order to further understand the characteristics and technical content of the present invention, please refer to the following detailed description and drawings of the present invention. However, these descriptions and drawings are only used to illustrate the present invention and do not make any reference to the protection scope of the present invention. limit.

100:壓力洩漏檢測設備 100: Pressure leak detection equipment

1:標準腔室 1: Standard chamber

2:測試腔室 2: Test chamber

3:第一供氣裝置 3: First air supply device

31:第一壓縮機 31:First compressor

32:第一乾燥機 32:First dryer

33:第一存氣槽 33: The first air storage tank

34:加熱器 34:Heater

4:第二供氣裝置 4: Second air supply device

41:第二壓縮機 41:Second compressor

42:第二乾燥機 42: Second dryer

43:第二存氣槽 43:Second air storage tank

44:冷凝器 44:Condenser

5:第五控制閥 5:Fifth control valve

6:互通裝置 6: Interoperability device

60:控制閥組 60: Control valve group

61:第二控制閥 61: Second control valve

611:連通位置 611: Connected location

612:斷開位置 612: Disconnect position

62:第三控制閥 62:Third control valve

621:排氣位置 621:Exhaust position

622:斷開位置 622: Disconnect position

623:連通位置 623: Connected location

63:第四控制閥 63:Fourth control valve

631:連通位置 631: Connected location

632:斷開位置 632: Disconnect position

64:溫度偵測器 64:Temperature detector

65:壓力偵測器 65: Pressure detector

7:第一控制閥 7: First control valve

8:差壓感測器 8: Differential pressure sensor

S:標準件 S: standard parts

S0:內部空間 S0: internal space

S1:本體 S1: body

S11:開孔 S11: Open hole

S2:密封蓋板 S2:Sealing cover

S3:進氣接頭 S3: Air intake joint

S4:測壓接頭 S4: Pressure measuring joint

S5:密封膠層 S5:Sealant layer

T:待測件 T: piece to be tested

T0:內部空間 T0: internal space

T1:本體 T1: Ontology

T11:開孔 T11: opening

T2:密封蓋板 T2:Sealing cover

T3:進氣接頭 T3: Air intake joint

T4:測壓接頭 T4: pressure measuring joint

T5:墊圈 T5: Washer

G1:第一氣體 G1: first gas

G2:第二氣體 G2: second gas

S110~S140:步驟 S110~S140: steps

圖1為本發明實施例的壓力洩漏檢測設備於運作時的步驟S110的示意圖。 FIG. 1 is a schematic diagram of step S110 during operation of the pressure leakage detection device according to the embodiment of the present invention.

圖2為圖1的標準腔室、標準件、測試腔室、及待測件的放大示意圖。 Figure 2 is an enlarged schematic diagram of the standard chamber, standard parts, test chamber, and parts to be tested in Figure 1.

圖3為圖1的第一供氣裝置與第二供氣裝置的放大示意圖。 FIG. 3 is an enlarged schematic diagram of the first air supply device and the second air supply device of FIG. 1 .

圖4為圖1的互通裝置的放大示意圖。 FIG. 4 is an enlarged schematic diagram of the interworking device of FIG. 1 .

圖5為本發明實施例的壓力洩漏檢測設備於運作時的步驟S120的示意圖(一)。 FIG. 5 is a schematic diagram (1) of step S120 during operation of the pressure leakage detection device according to the embodiment of the present invention.

圖6為本發明實施例的壓力洩漏檢測設備於運作時的步驟S120的示意圖(二)。 FIG. 6 is a schematic diagram (2) of step S120 during operation of the pressure leakage detection device according to the embodiment of the present invention.

圖7為本發明實施例的壓力洩漏檢測設備於運作時的步驟S130的示意圖(一)。 FIG. 7 is a schematic diagram (1) of step S130 during operation of the pressure leakage detection device according to the embodiment of the present invention.

圖8為本發明實施例的壓力洩漏檢測設備於運作時的步驟S130的示意圖(二)。 FIG. 8 is a schematic diagram (2) of step S130 during operation of the pressure leakage detection device according to the embodiment of the present invention.

圖9為本發明實施例的壓力洩漏檢測設備於運作時的步驟S140的示意圖。 FIG. 9 is a schematic diagram of step S140 of the pressure leakage detection device in operation according to the embodiment of the present invention.

以下是通過特定的具體實施例來說明本發明所公開有關“壓力洩漏檢測設備”的實施方式,本領域技術人員可由本說明書所公開的內容瞭解本發明的優點與效果。本發明可通過其他不同的具體實施例加以施行或應用,本說明書中的各項細節也可基於不同觀點與應用,在不悖離本發明的構思下進行各種修改與變更。另外,本發明的附圖僅為簡單示意說明,並非依 實際尺寸的描繪,事先聲明。以下的實施方式將進一步詳細說明本發明的相關技術內容,但所公開的內容並非用以限制本發明的保護範圍。 The following is a description of the implementation of the "pressure leakage detection equipment" disclosed in the present invention through specific embodiments. Those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are only simple schematic illustrations and are not based on Actual size depictions, stated in advance. The following embodiments will further describe the relevant technical content of the present invention in detail, but the disclosed content is not intended to limit the scope of the present invention.

應當可以理解的是,雖然本文中可能會使用到“第一”、“第二”、“第三”等術語來描述各種元件或者信號,但這些元件或者信號不應受這些術語的限制。這些術語主要是用以區分一元件與另一元件,或者一信號與另一信號。另外,本文中所使用的術語“或”,應視實際情況可能包括相關聯的列出項目中的任一個或者多個的組合。 It should be understood that although terms such as “first”, “second” and “third” may be used herein to describe various elements or signals, these elements or signals should not be limited by these terms. These terms are primarily used to distinguish one component from another component or one signal from another signal. In addition, the term "or" used in this article shall include any one or combination of more of the associated listed items depending on the actual situation.

請參閱圖1至圖9所示,其為本發明的一實施例。如圖1至圖4所示,本實施例公開一種壓力洩漏檢測設備100,其能用來模擬具有溫度要求與壓力要求的不同環境條件,據以使得一待測件T能與一標準件S進行壓力比對測試,並有效地降低所述待測件T所需的測試時間。 Please refer to FIG. 1 to FIG. 9 , which is an embodiment of the present invention. As shown in Figures 1 to 4, this embodiment discloses a pressure leakage detection device 100, which can be used to simulate different environmental conditions with temperature requirements and pressure requirements, so that a piece to be tested T can be compared with a standard piece S Carry out pressure comparison testing and effectively reduce the testing time required for the test piece T.

進一步地說,所述待測件T包含有至少一個本體T1(本實施例以兩個來說明)、一密封蓋板T2、一進氣接頭T3、及一測壓接頭T4。其中,兩個所述本體T1彼此組接而包圍形成一內部空間T0,並且其中一個所述本體T1具有連通於所述內部空間T0的一開孔T11。再者,所述密封蓋板T2封閉所述開孔T11,並且所述進氣接頭T3與所述測壓接頭T4裝設於所述密封蓋板T2而連通於所述內部空間T0,以使所述內部空間T0能通過所述進氣接頭T3及所述測壓接頭T4而連通於外。 Furthermore, the piece to be tested T includes at least one body T1 (two bodies are used for illustration in this embodiment), a sealing cover T2, an air inlet joint T3, and a pressure measuring joint T4. Two of the bodies T1 are assembled together to form an internal space T0, and one of the bodies T1 has an opening T11 connected to the internal space T0. Furthermore, the sealing cover T2 closes the opening T11, and the air inlet joint T3 and the pressure measuring joint T4 are installed on the sealing cover T2 and communicate with the internal space T0, so that The internal space T0 can be connected to the outside through the air inlet joint T3 and the pressure measuring joint T4.

再者,所述標準件S的內部空間S0具有等同於所述內部空間T0的體積,並且所述標準件S較佳是與所述待測件T形成有大致類似的構造,據以減少變數的產生。也就是說,所述標準件S於本實施例中也包含有至少一個本體S1(如:兩個)、一密封蓋板S2、一進氣接頭S3、及一測壓接頭S4。其中,兩個所述本體S1彼此組接而包圍形成所述內部空間S0,並且其中一個所述本體S1、T1具有連通於所述內部空間S0的一開孔S11。再者,所述密封蓋板 S2封閉所述開孔S11,並且所述進氣接頭S3與所述測壓接頭S4裝設於所述密封蓋板S2而連通於所述內部空間S0,以使所述內部空間S0能通過所述進氣接頭S3及所述測壓接頭S4而連通於外。 Furthermore, the internal space S0 of the standard part S has a volume equal to the internal space T0, and the standard part S is preferably formed with a substantially similar structure to the part to be tested T, so as to reduce variables. of production. That is to say, in this embodiment, the standard part S also includes at least one body S1 (eg, two), a sealing cover S2, an air inlet joint S3, and a pressure measuring joint S4. The two bodies S1 are assembled with each other to surround the internal space S0, and one of the bodies S1 and T1 has an opening S11 connected to the internal space S0. Furthermore, the sealing cover plate S2 closes the opening S11, and the air inlet joint S3 and the pressure measuring joint S4 are installed on the sealing cover S2 and connected to the internal space S0, so that the internal space S0 can pass through The air inlet joint S3 and the pressure measuring joint S4 are connected to the outside.

進一步地說,所述標準件S能與所述待測件T於本實施例中僅形成有下述構造差異:所述標準件S具有密封其兩個所述本體S1之交界處的一密封膠層S5,據以使所述標準件S的所述內部空間S0能夠完全與外部環境隔絕;所述待測件T具有夾持於其兩個所述本體T1之間的一墊圈T5,以使所述內部空間T0與外部環境之間的隔絕程度受所述墊圈T5影響。也就是說,在所述壓力洩漏檢測設備100所模擬的不同環境條件之下,所述墊圈T5所能實現的密封程度即為本實施例所欲測試的目標。 Furthermore, the standard part S can only have the following structural difference with the part to be tested T in this embodiment: the standard part S has a seal that seals the junction of its two bodies S1. The glue layer S5 enables the internal space S0 of the standard part S to be completely isolated from the external environment; the part to be tested T has a gasket T5 clamped between its two bodies T1. The degree of isolation between the internal space T0 and the external environment is affected by the gasket T5. That is to say, under the different environmental conditions simulated by the pressure leakage detection device 100, the sealing degree that the gasket T5 can achieve is the target of the test in this embodiment.

所述壓力洩漏檢測設備100於本實施例中包含有一標準腔室1、一測試腔室2、一第一供氣裝置3、一第二供氣裝置4、兩個第五控制閥5、一互通裝置6、一第一控制閥7、及一差壓感測器8,但本發明不以此為限。舉例來說,在本發明未繪示的其他實施例中,所述第五控制閥5及所述第一控制閥7可以依據設計需求而加以省略或是以其他構件取代。 In this embodiment, the pressure leak detection equipment 100 includes a standard chamber 1, a test chamber 2, a first air supply device 3, a second air supply device 4, two fifth control valves 5, and a Intercommunication device 6, a first control valve 7, and a differential pressure sensor 8, but the invention is not limited thereto. For example, in other embodiments not shown in the present invention, the fifth control valve 5 and the first control valve 7 may be omitted or replaced with other components according to design requirements.

所述標準腔室1用以供所述標準件S設置,並且所述標準件S能通過所述密封膠層S5,以使所述標準腔室1內的氣體不會洩漏至所述標準件S的所述內部空間S0;也就是說,所述標準件S的所述內部空間S0是完全密封,且其壓力值是與所述標準腔室1的壓力值為彼此獨立(即,沒有連動關係)。 The standard chamber 1 is used for setting the standard part S, and the standard part S can pass through the sealant layer S5 so that the gas in the standard chamber 1 will not leak to the standard part. The internal space S0 of S; that is to say, the internal space S0 of the standard part S is completely sealed, and its pressure value is independent of the pressure value of the standard chamber 1 (that is, there is no linkage relation).

再者,所述測試腔室2用以供所述待測件T設置,並且所述測試腔室2與所述待測件T的所述內部空間T0之間僅以所述墊圈T5實現彼此隔絕,因而所述墊圈T5的密封程度將決定所述測試腔室2的壓力值與所述待測件T的所述內部空間T0的壓力值之間是否會相互影響。此外,所述標準腔室1與所述測試腔室2於本實施例中採用相同的內容積、並皆具備有隔熱與承受高壓的功 能。 Furthermore, the test chamber 2 is used for the device under test T to be placed, and the test chamber 2 and the internal space T0 of the device under test T are only connected to each other by the gasket T5 Isolation, therefore the sealing degree of the gasket T5 will determine whether the pressure value of the test chamber 2 and the pressure value of the internal space T0 of the object under test T will affect each other. In addition, the standard chamber 1 and the test chamber 2 use the same internal volume in this embodiment, and both have the functions of heat insulation and high pressure. able.

所述第一供氣裝置3連接所述標準腔室1及所述測試腔室2,用以通入一第一氣體G1至所述標準腔室1及所述測試腔室2,並且所述第一氣體G1具有一第一溫度(如:攝氏52度)與一第一壓力值(如:15.93psi)。於本實施例中,所述第一供氣裝置3包含有一第一壓縮機31、連接於所述第一壓縮機31的一第一乾燥機32、連接於所述第一乾燥機32的一第一存氣槽33、及連接於所述第一存氣槽33的一加熱器34。 The first gas supply device 3 connects the standard chamber 1 and the test chamber 2 for introducing a first gas G1 to the standard chamber 1 and the test chamber 2, and the The first gas G1 has a first temperature (eg, 52 degrees Celsius) and a first pressure value (eg, 15.93 psi). In this embodiment, the first air supply device 3 includes a first compressor 31 , a first dryer 32 connected to the first compressor 31 , and a first dryer 32 connected to the first dryer 32 . The first air storage tank 33 and a heater 34 connected to the first air storage tank 33 .

進一步地說,所述第一壓縮機31用以自外部環境抽取氣體並對其加壓(如:外部環境的氣體溫度為攝氏25度且壓力為14.7psi);例如,所述第一壓縮機31用以將空氣進行壓縮並轉換成壓縮空氣,使所述壓縮空氣具有所述第一壓力值。所述第一乾燥機32能用來過濾所述第一壓縮機31所抽取的氣體之濕氣(如:將所述壓縮空氣的溼度降低至35%以下),所述第一存氣槽33用來存放經由所述第一乾燥機32過濾濕氣之後的氣體且其具備有所述第一壓力值,而所述加熱器34則是用以使自所述第一供氣裝置3輸出至所述標準腔室1與所述測試腔室2的所述第一氣體G1維持在所述第一溫度值。 Furthermore, the first compressor 31 is used to extract gas from the external environment and pressurize it (for example: the gas temperature of the external environment is 25 degrees Celsius and the pressure is 14.7 psi); for example, the first compressor 31 is used to compress the air and convert it into compressed air, so that the compressed air has the first pressure value. The first dryer 32 can be used to filter the moisture of the gas extracted by the first compressor 31 (for example, reduce the humidity of the compressed air to below 35%). The first air storage tank 33 It is used to store the gas after the moisture has been filtered by the first dryer 32 and has the first pressure value, and the heater 34 is used to output the gas from the first gas supply device 3 to The first gas G1 in the standard chamber 1 and the test chamber 2 is maintained at the first temperature value.

再者,所述第二供氣裝置4連接所述標準腔室1與所述測試腔室2,用以通入一第二氣體G2至所述標準腔室1及所述測試腔室2。其中,所述第二氣體G2具有一第二溫度值(如:攝氏25度)與一第二壓力值(如:17.35psi),所述第一溫度值高於所述第二溫度值,所述第一壓力值低於所述第二壓力值。於本實施例中,所述第二供氣裝置4包含有一第二壓縮機41、連接於所述第二壓縮機41的一第二乾燥機42、連接於所述第二乾燥機42的一第二存氣槽43、及連接於所述第二存氣槽43的一冷凝器44。 Furthermore, the second gas supply device 4 connects the standard chamber 1 and the test chamber 2 for introducing a second gas G2 to the standard chamber 1 and the test chamber 2 . Wherein, the second gas G2 has a second temperature value (such as 25 degrees Celsius) and a second pressure value (such as 17.35 psi), and the first temperature value is higher than the second temperature value, so The first pressure value is lower than the second pressure value. In this embodiment, the second air supply device 4 includes a second compressor 41 , a second dryer 42 connected to the second compressor 41 , and a second dryer 42 connected to the second air supply device 4 . a second air storage tank 43, and a condenser 44 connected to the second air storage tank 43.

進一步地說,所述第二壓縮機41用以自外部環境抽取氣體並對其加壓(如:外部環境的氣體溫度為攝氏25度且壓力為14.7psi);例如,所 述第二壓縮機41用以將空氣進行壓縮並轉換成壓縮空氣,使所述壓縮空氣具有所述第二壓力值。所述第二乾燥機42能用來過濾所述第二壓縮機41所抽取的氣體之濕氣(如:將所述壓縮空氣的溼度降低至35%以下),所述第二存氣槽43用來存放經由所述第二乾燥機42過濾濕氣之後的氣體且其具備有所述第二壓力值,而所述冷凝器44則是用以使自所述第二供氣裝置4輸出至所述標準腔室1與所述測試腔室2的所述第二氣體G2維持在所述第二溫度值。 Furthermore, the second compressor 41 is used to extract gas from the external environment and pressurize it (for example: the gas temperature of the external environment is 25 degrees Celsius and the pressure is 14.7 psi); for example, The second compressor 41 is used to compress air and convert it into compressed air, so that the compressed air has the second pressure value. The second dryer 42 can be used to filter the moisture of the gas extracted by the second compressor 41 (for example, reduce the humidity of the compressed air to below 35%). The second air storage tank 43 It is used to store the gas that has been filtered by the second dryer 42 and has the second pressure value, and the condenser 44 is used to output the gas from the second air supply device 4 to The second gas G2 in the standard chamber 1 and the test chamber 2 is maintained at the second temperature value.

需額外說明的是,所述加熱器34與所述冷凝器44於本實施例中皆可稱為溫度控制器。再者,所述標準腔室1與所述測試腔室2相較於所述第一供氣裝置3與所述第二供氣裝置4之間的氣體輸送與切換方式於本實施例中是由兩個所述第五控制閥5來實現,但本發明不受限於此。進一步地說,所述標準腔室1與所述測試腔室2各自連接於一個所述第五控制閥5,而所述第一供氣裝置3與所述第二供氣裝置4則各自連接於兩個所述第五控制閥5,以使所述標準腔室1與所述測試腔室2各自能通過相連接的所述第五控制閥5而與所述第一供氣裝置3或所述第二供氣裝置4連通或斷開。 It should be noted that both the heater 34 and the condenser 44 can be called a temperature controller in this embodiment. Furthermore, compared with the gas transportation and switching method between the standard chamber 1 and the test chamber 2 and the first gas supply device 3 and the second gas supply device 4 in this embodiment, It is realized by two fifth control valves 5, but the present invention is not limited thereto. Furthermore, the standard chamber 1 and the test chamber 2 are each connected to one of the fifth control valves 5, and the first air supply device 3 and the second air supply device 4 are respectively connected. to the two fifth control valves 5, so that the standard chamber 1 and the test chamber 2 can each communicate with the first gas supply device 3 or The second air supply device 4 is connected or disconnected.

所述互通裝置6連接於所述標準腔室1、所述標準件S的所述內部空間S0、所述測試腔室2、及所述待測件T的所述內部空間T0。於本實施例中,所述互通裝置6是連接於所述標準件S的所述進氣接頭S3而與所述內部空間S0相連通,並且所述互通裝置6連接於所述待測件T的所述進氣接頭T3而與所述內部空間T0相連通。 The interconnection device 6 is connected to the standard chamber 1, the internal space S0 of the standard part S, the test chamber 2, and the internal space T0 of the part under test T. In this embodiment, the intercommunication device 6 is connected to the air inlet joint S3 of the standard component S to communicate with the internal space S0, and the intercommunication device 6 is connected to the component under test T. The air inlet joint T3 is connected with the internal space T0.

所述壓力洩漏檢測設備100還包含有一溫度偵測器64、與一壓力偵測器65。其中,所述溫度偵測器64能用以偵測所述標準腔室1與所述測試腔室2的溫度值,並且所述壓力偵測器65能用以偵測所述標準腔室1與所述測試腔室2的壓力值。 The pressure leakage detection device 100 further includes a temperature detector 64 and a pressure detector 65 . The temperature detector 64 can be used to detect the temperature values of the standard chamber 1 and the test chamber 2 , and the pressure detector 65 can be used to detect the standard chamber 1 and the pressure value of the test chamber 2.

所述互通裝置6包含有依序相連且相互搭配使用的一第二控制 閥61、一第三控制閥62及一第四控制閥63。進一步地說,所述第二控制閥61具有一連通位置611與一斷開位置612。其中,如圖1所示,當所述第二控制閥61位於所述連通位置611時,所述標準腔室1與所述測試腔室2彼此連通;如圖9所示,當所述第二控制閥61位於所述斷開位置612時,所述標準腔室1與所述測試腔室2彼此隔絕。 The interoperability device 6 includes a second control unit that is connected in sequence and used in conjunction with each other. valve 61, a third control valve 62 and a fourth control valve 63. Furthermore, the second control valve 61 has a connecting position 611 and a disconnecting position 612. As shown in Figure 1, when the second control valve 61 is located at the communication position 611, the standard chamber 1 and the test chamber 2 are connected to each other; as shown in Figure 9, when the second control valve 61 is located at the communication position 611, When the two control valves 61 are in the disconnected position 612, the standard chamber 1 and the test chamber 2 are isolated from each other.

再者,所述第三控制閥62具有一排氣位置621、一斷開位置622、及一連通位置623。其中,如圖1所示,當所述第三控制閥62處於所述排氣位置621時,所述第三控制閥62能用以供與其相連的空間或腔室連通至外部環境;如圖9所示,當所述第三控制閥62處於所述斷開位置622時,分別連接於所述第二控制閥61與所述第四控制閥63的空間或腔室彼此隔絕;如圖5所示,當所述第三控制閥62處於所述連通位置623時,分別連接於所述第二控制閥61與所述第四控制閥63的空間或腔室彼此連通。 Furthermore, the third control valve 62 has an exhaust position 621 , a disconnection position 622 , and a communication position 623 . Wherein, as shown in Figure 1, when the third control valve 62 is in the exhaust position 621, the third control valve 62 can be used to connect the space or chamber connected thereto to the external environment; as shown in Figure 9, when the third control valve 62 is in the disconnected position 622, the spaces or chambers respectively connected to the second control valve 61 and the fourth control valve 63 are isolated from each other; Figure 5 As shown, when the third control valve 62 is in the communication position 623, the spaces or chambers respectively connected to the second control valve 61 and the fourth control valve 63 are connected to each other.

需額外說明的是,所述第二控制閥61與所述第三控制閥62於本實施例中能共同稱之為一控制閥組60,並且所述互通裝置6能通過其構件的切換(如:所述第二控制閥61位於所述連通位置611、及所述第三控制閥62處於所述排氣位置621),以使所述第三控制閥62連接於所述標準腔室1與所述測試腔室2,用以對所述標準腔室1與所述測試腔室2進行排氣。 It should be noted that the second control valve 61 and the third control valve 62 can be collectively referred to as a control valve group 60 in this embodiment, and the interconnection device 6 can be switched by its components ( For example: the second control valve 61 is located at the communication position 611 and the third control valve 62 is at the exhaust position 621), so that the third control valve 62 is connected to the standard chamber 1 and the test chamber 2, for exhausting the standard chamber 1 and the test chamber 2.

此外,所述第四控制閥63具有一連通位置631與一斷開位置632。其中,如圖1所示,當所述第四控制閥63位於所述連通位置631時,所述內部空間S0與所述內部空間T0彼此連通;如圖9所示,當所述第四控制閥63位於所述斷開位置632時,所述內部空間S0與所述內部空間T0彼此隔絕。 In addition, the fourth control valve 63 has a connecting position 631 and a disconnecting position 632 . Wherein, as shown in Figure 1, when the fourth control valve 63 is located at the communication position 631, the internal space S0 and the internal space T0 are connected to each other; as shown in Figure 9, when the fourth control valve 63 is located at the communication position 631, When the valve 63 is in the off position 632, the internal space S0 and the internal space T0 are isolated from each other.

也就是說,所述互通裝置6能通過其構件的切換(如:所述第二控制閥61位於所述連通位置611、所述第三控制閥62處於所述連通位置623、及所述第四控制閥63位於所述連通位置631),而使所述第四控制閥63連接所 述標準件S的所述內部空間S0及所述待測件T的所述內部空間T0,所述第四控制閥63通過所述第三控制閥62和第二控制閥61而用以將所述第一氣體G1通入所述內部空間S0及所述內部空間T0。 That is to say, the intercommunication device 6 can be switched through its components (for example: the second control valve 61 is in the communication position 611, the third control valve 62 is in the communication position 623, and the third control valve 62 is in the communication position 623, The fourth control valve 63 is located at the communication position 631), so that the fourth control valve 63 connects all The internal space S0 of the standard part S and the internal space T0 of the part to be tested T are used to control the fourth control valve 63 through the third control valve 62 and the second control valve 61 . The first gas G1 flows into the internal space S0 and the internal space T0.

所述差壓感測器8連接所述標準件S的所述內部空間S0及所述待測件T的所述內部空間T0,用以量測所述內部空間S0及所述內部空間T0之間的一壓力差值。再者,所述第一控制閥7連接於外部環境、並連接所述標準件S的所述內部空間S0及所述待測件T所述內部空間T0,用以對所述內部空間S0與所述內部空間T0進行排氣。 The differential pressure sensor 8 is connected to the internal space S0 of the standard component S and the internal space T0 of the component under test T, and is used to measure the internal space S0 and the internal space T0. a pressure difference between them. Furthermore, the first control valve 7 is connected to the external environment, and is connected to the internal space S0 of the standard part S and the internal space T0 of the part to be tested T, for connecting the internal space S0 and The internal space T0 is exhausted.

於本實施例中,所述差壓感測器8與所述第一控制閥7的一端連接於所述待測件T的所述測壓接頭T4,並且所述差壓感測器8與所述第一控制閥7的另一端連接於所述標準件S的所述測壓接頭S4。據此,如圖1所示,當所述第一控制閥7開啟時,所述內部空間S0與所述內部空間T0能通過所述第一控制閥7朝向外部環境進行排氣。如圖9所示,當所述第一控制閥7關閉時,所述內部空間S0與所述內部空間T0無法向外排氣,以利於所述差壓感測器8能進行所述壓力差值的量測。 In this embodiment, one end of the differential pressure sensor 8 and the first control valve 7 is connected to the pressure measuring joint T4 of the device under test T, and the differential pressure sensor 8 and The other end of the first control valve 7 is connected to the pressure measuring joint S4 of the standard component S. Accordingly, as shown in FIG. 1 , when the first control valve 7 is opened, the internal space S0 and the internal space T0 can be exhausted toward the external environment through the first control valve 7 . As shown in Figure 9, when the first control valve 7 is closed, the internal space S0 and the internal space T0 cannot be exhausted to the outside, so that the differential pressure sensor 8 can detect the pressure difference. Measurement of value.

綜上所述,以上為所述壓力洩漏檢測設備100於本實施例中的架構說明,以下接著介紹所述壓力洩漏檢測設備100的其中一種可行的運作方式,其依序包含有步驟S110~步驟S140,但本發明不受限於此。需先說明的是,本實施例中的任何數值僅為便於說明解釋之用,因而在實際應用時,該些數值皆可依據需求而加以調整變化。 To sum up, the above is the structural description of the pressure leakage detection device 100 in this embodiment. Next, one of the possible operating methods of the pressure leakage detection device 100 will be introduced, which sequentially includes step S110 to step S110 . S140, but the present invention is not limited to this. It should be noted that any numerical value in this embodiment is only for convenience of explanation. Therefore, in actual application, these numerical values can be adjusted and changed according to requirements.

步驟S110:如圖1所示,其為所述壓力洩漏檢測設備100的初始配狀態。其中,所述標準腔室1與所述測試腔室2各自被相對應的所述第五控制閥5斷開其與所述第一供氣裝置3與所述第二供氣裝置4之間的連通;於所述互通裝置6之中,所述第二控制閥61位於所述連通位置611及所述第三控制閥 62處於所述排氣位置621,以使所述標準腔室1與所述測試腔室2連通於外部環境;所述第一控制閥7開啟並且所述第四控制閥63位於所述連通位置631,以使所述內部空間S0與所述內部空間T0能夠連通於外部環境。 Step S110: As shown in Figure 1, it is the initial configuration state of the pressure leakage detection device 100. Wherein, the standard chamber 1 and the test chamber 2 are each disconnected from the first air supply device 3 and the second air supply device 4 by the corresponding fifth control valve 5 in the communication device 6, the second control valve 61 is located at the communication position 611 and the third control valve 62 is in the exhaust position 621 so that the standard chamber 1 and the test chamber 2 are connected to the external environment; the first control valve 7 is opened and the fourth control valve 63 is in the communication position 631, so that the internal space S0 and the internal space T0 can be connected to the external environment.

步驟S120:如圖5所示,所述標準腔室1與所述測試腔室2各自被相對應的所述第五控制閥5切換至僅連通於所述第一供氣裝置3,以使所述第一供氣裝置3能朝所述標準腔室1與所述測試腔室2通入所述第一氣體G1。 Step S120: As shown in Figure 5, the standard chamber 1 and the test chamber 2 are each switched by the corresponding fifth control valve 5 to only communicate with the first air supply device 3, so that The first gas supply device 3 can pass the first gas G1 to the standard chamber 1 and the test chamber 2 .

再者,所述第二控制閥61位於所述連通位置611、所述第三控制閥62處於所述連通位置623、及所述第四控制閥63位於所述連通位置631,而所述第一控制閥7開啟,以使所述第一氣體G1能經由所述標準腔室1與所述測試腔室2而通入所述內部空間S0與所述內部空間T0,並且使得存在於所述初始配置狀態下的所述壓力洩漏檢測設備100內部的氣體將經由所述第一控制閥7而排出至外部環境。 Furthermore, the second control valve 61 is located at the communication position 611, the third control valve 62 is at the communication position 623, and the fourth control valve 63 is located at the communication position 631, and the third control valve 62 is located at the communication position 623. A control valve 7 is opened, so that the first gas G1 can pass into the internal space S0 and the internal space T0 through the standard chamber 1 and the test chamber 2, and allow it to exist in the The gas inside the pressure leakage detection device 100 in the initial configuration state will be discharged to the external environment through the first control valve 7 .

接著,如圖6所示,當所述溫度偵測器64測得所述標準腔室1與所述測試腔室2具有所述第一溫度值時,所述第一控制閥7被關閉,以使所述標準腔室1、所述內部空間S0、所述測試腔室2、及所述內部空間T0能夠與外部環境隔絕,據以僅充填有所述第一氣體G1而具有所述第一溫度值和所述第一壓力值。 Then, as shown in Figure 6, when the temperature detector 64 detects that the standard chamber 1 and the test chamber 2 have the first temperature value, the first control valve 7 is closed, So that the standard chamber 1, the internal space S0, the test chamber 2, and the internal space T0 can be isolated from the external environment, so that they are only filled with the first gas G1 and have the third gas G1. a temperature value and the first pressure value.

也就是說,所述第一供氣裝置3能通過所述互通裝置6而對所述標準腔室1、所述標準件S的所述內部空間S0、所述測試腔室2、及所述待測件T的所述內部空間T0通入所述第一氣體G1,以使所述標準腔室1、所述標準件S的所述內部空間S0、所述測試腔室2、及所述待測件T的所述內部空間T0具有所述第一溫度值和所述第一壓力值。 That is to say, the first air supply device 3 can supply the standard chamber 1, the internal space S0 of the standard part S, the test chamber 2, and the The first gas G1 is introduced into the internal space T0 of the part to be tested T, so that the standard chamber 1, the internal space S0 of the standard part S, the test chamber 2, and the The internal space T0 of the object under test T has the first temperature value and the first pressure value.

於本實施例的步驟S120之中,所述標準腔室1、所述標準件S的所述內部空間S0、所述測試腔室2、及所述待測件T的所述內部空間T0是自一 初始溫度值(如:攝氏25度)上升所述第一溫度值(如:攝氏52度)、並由一初始壓力值(如:14.73psi)上升至所述第一壓力值(如:15.93psi)。 In step S120 of this embodiment, the standard chamber 1, the internal space S0 of the standard component S, the test chamber 2, and the internal space T0 of the component to be tested T are since one The initial temperature value (such as: 25 degrees Celsius) increases to the first temperature value (such as: 52 degrees Celsius), and rises from an initial pressure value (such as: 14.73 psi) to the first pressure value (such as: 15.93 psi) ).

步驟S130:如圖7所示,所述標準腔室1與所述測試腔室2各自被相對應的所述第五控制閥5切換至僅連通於所述第二供氣裝置4,以使所述第二供氣裝置4能朝所述標準腔室1與所述測試腔室2通入所述第二氣體G2。再者,所述第二控制閥61位於所述連通位置611、所述第三控制閥62處於所述排氣位置621、及所述第四控制閥63位於所述連通位置631,而所述第一控制閥7被關閉,以使所述標準腔室1與所述測試腔室2內的所述第一氣體G1能被排出至外部環境,而所述內部空間S0與所述內部空間T0內保有所述第一氣體G1。 Step S130: As shown in Figure 7, the standard chamber 1 and the test chamber 2 are each switched by the corresponding fifth control valve 5 to only communicate with the second air supply device 4, so that The second gas supply device 4 can pass the second gas G2 into the standard chamber 1 and the test chamber 2 . Furthermore, the second control valve 61 is located at the communication position 611, the third control valve 62 is at the exhaust position 621, and the fourth control valve 63 is located at the communication position 631, and the The first control valve 7 is closed so that the first gas G1 in the standard chamber 1 and the test chamber 2 can be discharged to the external environment, and the internal space S0 and the internal space T0 The first gas G1 is retained inside.

接著,如圖8所示,當所述溫度偵測器64測得所述標準腔室1與所述測試腔室2具有所述第二溫度值時,所述第三控制閥62切換至所述斷開位置622,並且所述標準腔室1與所述測試腔室2持續被所述第二供氣裝置4通入所述第二氣體G2,直至所述標準腔室1與所述測試腔室2具有所述第二壓力值。 Then, as shown in FIG. 8 , when the temperature detector 64 detects that the standard chamber 1 and the test chamber 2 have the second temperature value, the third control valve 62 switches to the The disconnection position 622 is reached, and the second gas supply device 4 continues to pass the second gas G2 into the standard chamber 1 and the test chamber 2 until the standard chamber 1 and the test chamber 2 are connected to each other. Chamber 2 has said second pressure value.

也就是說,當所述標準腔室1、所述標準件S的所述內部空間S0、所述測試腔室2、及所述待測件T的所述內部空間T0具有所述第一溫度值和所述第一壓力值時,所述第二供氣裝置4對所述標準腔室1和所述測試腔室2通入所述第二氣體G2,以使所述標準腔室1及所述測試腔室2具有所述第二溫度值及所述第二壓力值。 That is to say, when the standard chamber 1, the internal space S0 of the standard component S, the test chamber 2, and the internal space T0 of the component under test T have the first temperature When the value is equal to the first pressure value, the second gas supply device 4 supplies the second gas G2 to the standard chamber 1 and the test chamber 2, so that the standard chamber 1 and the test chamber 2 The test chamber 2 has the second temperature value and the second pressure value.

於本實施例的步驟S130之中,所述標準腔室1與所述測試腔室2自所述第一溫度值(如:攝氏52度)下降所述第二溫度值(如:攝氏25度)、並由所述第一壓力值(如:15.93psi)上升至所述第二壓力值(如:17.35psi);所述內部空間S0及所述內部空間T0相互連通且內部充填有所述第一氣體G1,其理應保持在所述第一溫度值(如:攝氏52度)與所述第一壓力值(如:15.93psi)。 In step S130 of this embodiment, the standard chamber 1 and the test chamber 2 decrease from the first temperature value (such as 52 degrees Celsius) to the second temperature value (such as 25 degrees Celsius). ), and rises from the first pressure value (such as: 15.93psi) to the second pressure value (such as: 17.35psi); the internal space S0 and the internal space T0 are connected with each other and are filled with the The first gas G1 should be maintained at the first temperature value (for example: 52 degrees Celsius) and the first pressure value (for example: 15.93 psi).

步驟S140:如圖9所示,所述標準腔室1與所述測試腔室2各自被相對應的所述第五控制閥5斷開其與所述第一供氣裝置3與所述第二供氣裝置4之間的連通。再者,所述第二控制閥61位於所述斷開位置612、所述第三控制閥62處於所述斷開位置622、及所述第四控制閥63位於所述斷開位置632,而所述第一控制閥7被關閉,以使所述標準腔室1、所述內部空間S0、所述測試腔室2、及所述內部空間T0各自獨立且未彼此連通,進而通過所述差壓感測器8量測所述內部空間S0及所述內部空間T0之間的所述壓力差值。 Step S140: As shown in Figure 9, the standard chamber 1 and the test chamber 2 are each disconnected from the first air supply device 3 and the third gas supply device 3 by the corresponding fifth control valve 5. The communication between the two air supply devices 4. Furthermore, the second control valve 61 is located at the off position 612, the third control valve 62 is at the off position 622, and the fourth control valve 63 is at the off position 632, and The first control valve 7 is closed, so that the standard chamber 1, the internal space S0, the test chamber 2, and the internal space T0 are independent and not connected to each other, and then through the difference The pressure sensor 8 measures the pressure difference between the internal space S0 and the internal space T0.

也就是說,當所述標準腔室1及所述測試腔室2具有所述第二溫度值和所述第二壓力值時,所述差壓感測器8量測所述壓力差值。其中,所述差壓感測器8測得的所述壓力差值愈趨近於零,則所述待測件T的所述內部空間T0與所述測試腔室2之間的隔絕效果愈佳,此代表所述待測件T的壓力洩漏程度愈低。 That is to say, when the standard chamber 1 and the test chamber 2 have the second temperature value and the second pressure value, the differential pressure sensor 8 measures the pressure difference. The closer the pressure difference measured by the differential pressure sensor 8 approaches zero, the greater the isolation effect between the internal space T0 of the object under test T and the test chamber 2 . The better, this means that the degree of pressure leakage of the piece under test T is lower.

[本發明實施例的技術效果] [Technical effects of the embodiments of the present invention]

綜上所述,本發明實施例所公開的壓力洩漏檢測設備,其屬於非破壞檢測(nondestructive testing,NDT),並且通過所述第一供氣裝置、所述第二供氣裝置、及所述互通裝置的配合來模擬具有溫度要求與壓力要求的不同環境條件,據以使得所述待測件能與所述標準件進行壓力比對測試,並有效地降低所述待測件所需的測試時間。 To sum up, the pressure leakage detection equipment disclosed in the embodiment of the present invention belongs to nondestructive testing (NDT), and through the first air supply device, the second air supply device, and the The cooperation of the interconnection device simulates different environmental conditions with temperature requirements and pressure requirements, so that the component under test can be tested for pressure comparison with the standard component, and the testing required for the component under test can be effectively reduced. time.

以上所公開的內容僅為本發明的優選可行實施例,並非因此侷限本發明的專利範圍,所以凡是運用本發明說明書及圖式內容所做的等效技術變化,均包含於本發明的專利範圍內。 The contents disclosed above are only preferred and feasible embodiments of the present invention, and do not limit the patent scope of the present invention. Therefore, all equivalent technical changes made by using the description and drawings of the present invention are included in the patent scope of the present invention. within.

100:壓力洩漏檢測設備 100: Pressure leak detection equipment

1:標準腔室 1: Standard chamber

2:測試腔室 2: Test chamber

3:第一供氣裝置 3: First air supply device

4:第二供氣裝置 4: Second air supply device

5:第五控制閥 5:Fifth control valve

6:互通裝置 6: Interoperability device

60:控制閥組 60: Control valve group

61:第二控制閥 61: Second control valve

611:連通位置 611: Connected location

612:斷開位置 612: Disconnect position

62:第三控制閥 62:Third control valve

621:排氣位置 621:Exhaust position

622:斷開位置 622: Disconnect position

623:連通位置 623: Connected location

63:第四控制閥 63:Fourth control valve

631:連通位置 631: Connected location

632:斷開位置 632: Disconnect position

64:溫度偵測器 64: Temperature detector

65:壓力偵測器 65: Pressure detector

7:第一控制閥 7: First control valve

8:差壓感測器 8: Differential pressure sensor

S:標準件 S: standard parts

S0:內部空間 S0: internal space

T:待測件 T: piece to be tested

T0:內部空間 T0: internal space

G1:第一氣體 G1: first gas

G2:第二氣體 G2: second gas

S110:步驟 S110: Steps

Claims (11)

一種壓力洩漏檢測設備,其包括:一標準腔室,用以供一標準件設置;一測試腔室,用以供一待測件設置;一第一供氣裝置,其連接所述標準腔室及所述測試腔室,用以通入一第一氣體至所述標準腔室及所述測試腔室,所述第一氣體具有一第一溫度值與一第一壓力值;一第二供氣裝置,其連接所述標準腔室與所述測試腔室,用以通入一第二氣體至所述標準腔室及所述測試腔室,所述第二氣體具有一第二溫度值與一第二壓力值,所述第一溫度值不同於所述第二溫度值,所述第一壓力值不同於所述第二壓力值;一互通裝置,其連接於所述標準腔室、所述標準件的一內部空間、所述測試腔室、及所述待測件的一內部空間;以及一差壓感測器,其連接所述標準件的所述內部空間及所述待測件的所述內部空間,用以量測所述標準件的所述內部空間及所述待測件的所述內部空間之間的一壓力差值;其中,所述第一供氣裝置能通過所述互通裝置而對所述標準腔室、所述標準件的所述內部空間、所述測試腔室、及所述待測件的所述內部空間通入所述第一氣體,使所述標準腔室、所述標準件的所述內部空間、所述測試腔室、及所述待測件的所述內部空間具有所述第一溫度值和所述第一壓力值;其中,當所述標準腔室、所述標準件的所述內部空間、所述測試腔室、及所述待測件的所述內部空間具有所述第一溫度值和所述第一壓力值時,所述第二供氣裝置對所述標準腔室和所述測試腔室通入所述第二氣體,以使所述標準腔 室及所述測試腔室具有所述第二溫度值及所述第二壓力值;其中,當所述標準腔室及所述測試腔室具有所述第二溫度值和所述第二壓力值時,所述差壓感測器量測所述壓力差值。 A pressure leak detection equipment, which includes: a standard chamber for setting a standard part; a test chamber for setting a component to be tested; a first air supply device connected to the standard chamber And the test chamber is used to pass a first gas into the standard chamber and the test chamber, the first gas has a first temperature value and a first pressure value; a second supply gas device, which connects the standard chamber and the test chamber, and is used to pass a second gas to the standard chamber and the test chamber, the second gas has a second temperature value and a second pressure value, the first temperature value is different from the second temperature value, the first pressure value is different from the second pressure value; an interconnection device connected to the standard chamber, all An internal space of the standard part, the test chamber, and an internal space of the part under test; and a differential pressure sensor connecting the internal space of the standard part and the part under test The internal space is used to measure a pressure difference between the internal space of the standard part and the internal space of the part to be tested; wherein the first air supply device can pass through The intercommunication device supplies the first gas to the standard chamber, the internal space of the standard part, the test chamber, and the internal space of the part to be tested, so that the standard The chamber, the internal space of the standard part, the test chamber, and the internal space of the part to be tested have the first temperature value and the first pressure value; wherein, when the When the standard chamber, the internal space of the standard part, the test chamber, and the internal space of the part to be tested have the first temperature value and the first pressure value, the third Two gas supply devices pass the second gas into the standard chamber and the test chamber, so that the standard chamber The chamber and the test chamber have the second temperature value and the second pressure value; wherein, when the standard chamber and the test chamber have the second temperature value and the second pressure value When, the differential pressure sensor measures the pressure difference. 如請求項1所述的壓力洩漏檢測設備,其中,所述壓力洩漏檢測設備包含有一第一控制閥,並且所述第一控制閥連接所述標準件的所述內部空間及所述待測件的所述內部空間;其中,當所述第一控制閥開啟時,所述標準件的所述內部空間及所述待測件的所述內部空間能通過所述第一控制閥進行排氣。 The pressure leakage detection device according to claim 1, wherein the pressure leakage detection device includes a first control valve, and the first control valve connects the internal space of the standard part and the part to be tested. The internal space; wherein, when the first control valve is opened, the internal space of the standard part and the internal space of the part to be tested can be exhausted through the first control valve. 如請求項1所述的壓力洩漏檢測設備,其中,所述互通裝置包括一第二控制閥,所述第二控制閥連接所述標準腔室和所述測試腔室,用以連通或斷開所述標準腔室和所述測試腔室。 The pressure leak detection equipment according to claim 1, wherein the communication device includes a second control valve, the second control valve connects the standard chamber and the test chamber to connect or disconnect the standard chamber and the test chamber. 如請求項3所述的壓力洩漏檢測設備,其中,所述互通裝置包含有一第三控制閥,並且所述第三控制閥通過所述第二控制閥連接於所述標準腔室與所述測試腔室;當所述第二控制閥位於連通位置且所述第三控制閥於排氣位置時,所述標準腔室與所述測試腔室能通過所述第三控制閥進行排氣。 The pressure leak detection equipment of claim 3, wherein the communication device includes a third control valve, and the third control valve is connected to the standard chamber and the test through the second control valve. Chamber; when the second control valve is in the communication position and the third control valve is in the exhaust position, the standard chamber and the test chamber can be exhausted through the third control valve. 如請求項4所述的壓力洩漏檢測設備,其中,所述互通裝置包含有一第四控制閥,並且所述第四控制閥通過所述第二控制閥和所述第三控制閥連接所述標準腔室和所述測試腔室;當所述第二控制閥、所述第三控制閥、和所述第四控制閥皆 位於連通位置時,所述第四控制閥能通過所述第二控制閥和所述第三控制閥而用以將所述第一氣體通入所述標準件的所述內部空間及所述待測件的所述內部空間。 The pressure leakage detection device of claim 4, wherein the communication device includes a fourth control valve, and the fourth control valve is connected to the standard through the second control valve and the third control valve. chamber and the test chamber; when the second control valve, the third control valve, and the fourth control valve all When in the communication position, the fourth control valve can pass the first gas into the internal space of the standard part and the to-be-received component through the second control valve and the third control valve. The internal space of the test piece. 如請求項1所述的壓力洩漏檢測設備,其中,所述壓力洩漏檢測設備還包含有一溫度偵測器與一壓力偵測器,所述溫度偵測器用以偵測所述標準腔室與所述測試腔室的溫度值,所述壓力偵測器用以偵測所述標準腔室與所述測試腔室的壓力值。 The pressure leakage detection device of claim 1, wherein the pressure leakage detection device further includes a temperature detector and a pressure detector, and the temperature detector is used to detect the difference between the standard chamber and the The temperature value of the test chamber, the pressure detector is used to detect the pressure values of the standard chamber and the test chamber. 如請求項1所述的壓力洩漏檢測設備,其中,所述壓力洩漏檢測設備進一步包含有兩個第五控制閥,所述第一供氣裝置通過兩個所述第五控制閥分別連接所述標準腔室和所述測試腔室,所述第二供氣裝置通過兩個所述第五控制閥分別連接所述標準腔室與所述測試腔室,兩個所述第五控制閥用以連通或斷開所述第一氣體和所述第二氣體。 The pressure leakage detection device according to claim 1, wherein the pressure leakage detection device further includes two fifth control valves, and the first air supply device is connected to the first air supply device through the two fifth control valves respectively. The standard chamber and the test chamber, the second air supply device connects the standard chamber and the test chamber respectively through two fifth control valves, and the two fifth control valves are used to Connect or disconnect the first gas and the second gas. 如請求項1所述的壓力洩漏檢測設備,其中,所述第一供氣裝置或所述第二供氣裝置包含有:一壓縮機,用以將一空氣進行壓縮並轉換成一壓縮空氣,使所述壓縮空氣具有所述第一壓力值或所述第二壓力值;一乾燥機,連接於所述壓縮機,用以將所述壓縮空氣進行乾燥;一存氣槽,連接於所述乾燥機,用以儲存所述壓縮空氣;及一溫度控制器,連接於所述存氣槽,用以將所述壓縮空氣控制在所述第一溫度值或所述第二溫度值,以產生所述第一氣體或所述第二氣體。 The pressure leak detection equipment of claim 1, wherein the first air supply device or the second air supply device includes: a compressor for compressing air and converting it into compressed air, so that The compressed air has the first pressure value or the second pressure value; a dryer connected to the compressor to dry the compressed air; an air storage tank connected to the dryer a machine to store the compressed air; and a temperature controller connected to the air storage tank to control the compressed air at the first temperature value or the second temperature value to produce the desired the first gas or the second gas. 如請求項1所述的壓力洩漏檢測設備,其中,當所述第一供 氣裝置通過所述互通裝置而對所述標準腔室、所述標準件的所述內部空間、所述測試腔室、及所述待測件的所述內部空間通入所述第一氣體時,使所述標準腔室、所述標準件的所述內部空間、所述測試腔室、及所述待測件的所述內部空間自一初始溫度值上升所述第一溫度值、並由一初始壓力值上升至所述第一壓力值。 The pressure leakage detection device according to claim 1, wherein when the first supply When the gas device passes the first gas into the standard chamber, the internal space of the standard part, the test chamber, and the internal space of the part to be tested through the communication device , causing the standard chamber, the internal space of the standard component, the test chamber, and the internal space of the component to be tested to rise from an initial temperature value to the first temperature value, and by An initial pressure value rises to the first pressure value. 如請求項1所述的壓力洩漏檢測設備,其中,所述待測件包含有:一本體,形成所述內部空間,並且所述本體具有連通於所述內部空間的一開孔;一密封蓋板,其封閉所述開孔;一進氣接頭,裝設於所述密封蓋板,並且所述進氣接頭連接所述內部空間與所述互通裝置,所述第一氣體透過所述進氣接頭進入所述內部空間;及一測壓接頭,裝設於所述密封蓋板,並且所述測壓接頭連接所述內部空間與所述差壓感測器,所述差壓感測器通過所述測壓接頭以量測所述壓力差值。 The pressure leakage detection device according to claim 1, wherein the object to be tested includes: a body forming the internal space, and the body has an opening connected to the internal space; a sealing cover A plate that closes the opening; an air inlet joint installed on the sealing cover plate, and the air inlet joint connects the internal space and the interconnection device, and the first gas passes through the air inlet The joint enters the internal space; and a pressure measuring joint is installed on the sealing cover, and the pressure measuring joint connects the internal space and the differential pressure sensor, and the differential pressure sensor passes The pressure measuring joint is used to measure the pressure difference. 如請求項1所述的壓力洩漏檢測設備,其中所述第一溫度值高於所述第二溫度值,所述第一壓力值低於所述第二壓力值。The pressure leakage detection device of claim 1, wherein the first temperature value is higher than the second temperature value, and the first pressure value is lower than the second pressure value.
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Citations (6)

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CN109556809A (en) * 2019-01-14 2019-04-02 中国工程物理研究院机械制造工艺研究所 A kind of indestructive leakage-check method and device based on differential pressure principle

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6182501B1 (en) * 1997-10-21 2001-02-06 Cosmo Instruments, Co., Ltd. Leak test method and apparatus
TW201237385A (en) * 2010-12-14 2012-09-16 Aim Tech Co Ltd Differential pressure measuring method and device
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