JP6809751B2 - Quality judgment method and quality judgment system for tubular members - Google Patents

Description

The present invention relates to a quality determination method for a tubular member and a quality determination system, which determines the quality based on the degree of blockage inside the pipe.

Conventionally, a technique for determining the airtightness of a member by using a helium leak detector has been known. For example, Patent Document 1 discloses a technique for performing an airtightness test of a semiconductor pressure sensor using a helium leak detector.

Japanese Unexamined Patent Publication No. 6-337232

In the conventional airtightness test method as disclosed in Patent Document 1, it becomes possible to provide a member whose quality is guaranteed in terms of airtightness.
On the other hand, for example, when the member to be inspected is a tubular member, not only airtightness but also that the inside of the tube of the tubular member is not blocked is important for guaranteeing the quality of the tubular member.
However, since the technique disclosed in Patent Document 1 does not have a function of testing the degree of blockage inside the tube of the tubular member, the quality can always be guaranteed when the test target is the tubular member. There was a problem that it could not be said that there was.

The present invention has been made to solve the above problems, and an object of the present invention is to provide a method for determining a tubular member whose quality can be guaranteed by determining the degree of blockage inside the tube of the tubular member. And.

The method for determining the tubular member according to the present invention is to supply the tubular member having both ends housed in the first case and the second case, the pump connected to the second case, and the first case. A quality determination method for determining the quality of a tubular member by means of an air supply valve that controls the atmosphere, a pressure measuring device that measures the pressure in the second case, and a determination control device, wherein the pump is the second. Set after the step of evacuating the case, the step of the air supply valve releasing the air supplied to the first case, and the determination control device determining that the evacuation of the second case is completed. After a lapse of time, if the pressure in the second case measured by the pressure measuring device is equal to or higher than the first threshold value, the tubular member is provided with a step of determining that the tubular member is not blocked.

According to the present invention, it is possible to provide a method for determining a tubular member whose quality can be guaranteed by determining the degree of blockage inside the tube of the tubular member.

It is a figure explaining an example of the structure of the quality determination system of a tubular member in Embodiment 1 of this invention. It is a figure which shows an example of the structure which a pressure guide tube is used in a differential pressure sensor system. 2 is a diagram showing an example of the configuration of the pressure guiding tube shown in FIG. 2, where FIG. 3A is a diagram showing the overall configuration of the pressure guiding tube, and FIG. 3B is a cross-sectional view of a portion shown by A in FIG. 3A. It is a flowchart explaining the operation of the determination of the degree of blockage of a pressure guiding tube among the determinations in the quality determination system of Embodiment 1. It is a flowchart explaining the operation of the helium leak test among the determinations in the quality determination system of Embodiment 1.

Embodiment 1.
FIG. 1 is a diagram illustrating an example of a configuration of a quality determination system for tubular members according to the first embodiment of the present invention.
In the quality determination system of the tubular member as shown in FIG. 1, the inside of the tube of the tubular member is determined to be closed or airtight.
In the first embodiment, the tubular member is a pressure guiding tube 51, which is a thin tube for pressure transmission, which is used for measuring the differential pressure inside the pressure vessel (tank) in, for example, a differential pressure sensor system.

Here, FIG. 2 is a diagram showing an example of a configuration in which the pressure guiding tube 51 is used in the differential pressure sensor system.
As shown in FIG. 2, the pressure guiding tube 51 is welded to the tanks 100a and 100b that hold the high-pressure fluid, and is connected to the pipe.
Then, the pressure guiding tube 51 transmits the pressure for measuring the differential pressure with a predetermined sensor inside the tanks 100a and 100b. A sensor for measuring the differential pressure is provided inside one of the tanks 100a and 100b, for example.

FIG. 3 is a diagram showing an example of the configuration of the pressure guiding tube 51 shown in FIG. 2, FIG. 3A is a diagram showing the overall configuration of the pressure guiding tube 51, and FIG. 3B is a cross section of a portion shown by A in FIG. 3A. It is a figure.
As shown in FIGS. 3A and 3B, washers 200a and 200b are passed through the pressure guiding tube 51 at appropriate positions, and the washers 200a and 200b are joined to the pressure guiding tube 51 by laser welding or the like (for example,). The part indicated by B in FIG. 3B). The washers 200a and 200b are welded all around the pressure guiding tube 51. The pressure guiding tube 51 and the washers 200a and 200b are metal members.

In the quality determination system for the tubular member according to the first embodiment, the pressure guiding tube 51 as shown in FIGS. 2 and 3 is not blocked, or the pressure guiding tube 51 and the washers 200a and 200b are airtight, that is, the pressure guiding tube. It is determined that no leak has occurred in the welded portion between the 51 and the washers 200a and 200b. If the pressure guiding tube 51 is blocked, the pressure in the pressure guiding tube 51 cannot be measured, and as a result, the differential pressure between the tanks 100a and 100b cannot be measured correctly. Further, even if a leak occurs in the welded portion of the washers 200a and 200b, the pressure cannot be measured correctly.

As described above, in the first embodiment, the tubular member is a pressure guiding tube 51 as shown in FIGS. 2 and 3, and the inside of the pressure guiding tube 51 is closed, or the pressure guiding tube 51 and washers 200a and 200b are used. The airtightness with the welded portion of the above is determined, but this is only an example, and any tubular member having a pipe inside may be used.

Returning to the description of FIG.
As shown in FIG. 1, the quality determination system of the first embodiment includes a determination control device 1, a helium leak detector 2, a jig 3, a pump 4, an air supply valve 61a, a helium supply source 7, and an MCF (Mass Flow Controller). ) 71, helium supply valves 62a and 62b, and display device 8.
The determination control device 1 is connected to the helium leak detector 2, the air supply valve 61a, the pump 4, the helium supply source 7, the MCF71, and the helium supply valves 62a and 62b via a network.

Further, the determination control device 1 is connected to the display device 8 via a network.
Note that this is only an example, and the determination control device 1 is directly connected to the helium leak detector 2, the air supply valve 61a, the pump 4, the helium supply source 7, the MCF71, and the helium supply valves 62a and 62b. It may be. Further, the determination control device 1 may be directly connected to the display device 8, or the determination control device 1 may include the display device 8.

The jig 3 seals the first case 31a and the second case in which both ends of the pressure guiding tube 51 are housed in the room, and the parts of the pressure guiding tube 51 not housed in the first case 31a and the second case, respectively. It is composed of the third case 32.
The first case 31a, the second case 31b, and the third case 32 are independent. The first case 31a and the second case 31b may be the tanks 100a and 100b described with reference to FIG.

In the pressure guiding tube 51, at least the welded portions of the washers 200a and 200b are housed in the first case 31a and the second case 31b, and the first case 31a and the second case 31b and the washers 200a and 200b are sealed, respectively. Weld.
Further, as described above, both ends of the pressure guiding tube 51 are housed in the chambers of the first case 31a and the second case 31b, respectively, and the air flowing inside the pressure guiding tube 51 is discharged from the end of the pressure guiding tube 51. It is open to the first case 31a and the second case 31b.

In the third case 32, the portion of the pressure guiding tube 51 that is not housed in the first case 31a and the second case 31b is sealed, and a helium leak test is performed on the welded portion between the pressure guiding tube 51 and the washers 200a and 200b. Occasionally, the helium gas filled in the third case 32 is installed so as not to leak out of the case. Details of the helium leak test will be described later.
In FIG. 1, the third case 32 covers the first case 31a and the second case 31b, and the first case 31a, the second case 31b, and the third case 32 are used. The image is such that the pressure guiding tube 51 is sealed, but the present invention is not limited to this, and for example, the third case 32 stores the pressure guiding tube 51 together with the first case 31a and the second case 31b in the case. You may do so. In the third case 32, the portion of the pressure guiding tube 51 that is not housed in the first case 31a and the second case 31b is sealed, and the helium gas filled in the third case 32 is the third case. It suffices if it does not leak to the outside of 32.
In the first embodiment, the first case 31a and the second case 31b are also referred to as a vacuum chamber, and the third case 32 is also referred to as a helium filling chamber.

The helium filling chamber is filled with helium gas during the helium leak test. The helium leak test will be described later.

The air supply valve 61a opens or closes the air discharged from an exhaust device (not shown) such as a muffler and supplied to the first case 31a based on the control from the valve open / close control unit 11 of the determination control device 1. The exhaust device and the first case 31a are connected by, for example, a pipe, and the air supply valve 61a is installed in the pipe.
The pump 4 evacuates the second case 31b based on the control from the circuit control unit 14 of the determination control device 1. The pump 4 and the second case 31b are connected by, for example, a pipe. The pump 4 may be provided in the helium leak detector 2.

The helium leak detector 2 leaks the gas filled in the helium filling chamber into the second case 31b through the joint portion between the pressure guiding tube 51 and the washers 200a and 200b by the analyzer tube (not shown). Detect the amount of leakage. The helium leak detector 2 and the second case 31b are connected by, for example, a pipe.
The helium leak detector 2 notifies the leak determination control unit 13 of the determination control device 1 of the information on the detected leakage amount of helium gas.
Further, the helium leak detector 2 measures the pressure in the second case 31b. The helium leak detector 2 notifies the blockage determination control unit 12 of the determination control device 1 of the measured pressure information.

The helium leak detector 2 may be a generally known helium leak detector. Further, in the first embodiment, the helium leak test is performed by the internal vacuum blowing method using the helium leak detector 2.

The determination control device 1 controls each unit constituting the quality determination system.
The determination control device 1 includes a valve open / close control unit 11, a blockage determination control unit 12, a leak determination control unit 13, a circuit control unit 14, and a display control unit 15. Each part of the determination control device 1 is controlled by a program process using a CPU based on software.
The valve opening / closing control unit 11 controls the opening / closing of the valve. Specifically, for example, the valve open / close control unit 11 opens or closes the air supplied to the first case 31a with respect to the air supply valve 61a. Further, for example, the valve open / close control unit 11 opens or closes the helium gas from the helium supply source 7 to the helium supply valves 62a and 62b.

The blockage determination control unit 12 determines whether or not the pressure guiding tube 51 is blocked depending on whether or not the pressure of the second case 31b measured by the helium leak detector 2 is equal to or higher than a preset threshold value (first threshold value). judge.

The leak determination control unit 13 determines whether the amount of helium gas leaked in the second case 31b detected by the helium leak detector 2 is equal to or less than a predetermined threshold value (second threshold value), and the pressure guiding tube 51 and the washer. Detects leakage of welded parts with 200a and 200b.

The circuit control unit 14 controls the operation of the pump 4. Further, the circuit control unit 14 controls the operation of the helium supply source 7 and the MCF 71.

The display control unit 15 causes the display device 8 to display the blockage determination result of the pressure guiding tube 51 by the blockage determination control unit 12 or the leak detection result by the leak determination control unit 13.

The display device 8 is a display or the like, and displays the determination result of the blockage determination of the pressure guiding tube 51 or the determination result of the leakage determination by the helium leak test.

The helium supply source 7 supplies helium gas to be sprayed on the helium filling chamber under the control of the circuit control unit 14.
The MCF 71 controls the flow rate of the helium gas supplied from the helium supply source 7 based on the control of the circuit control unit 14.

4 and 5 show the determination of the degree of blockage of the pressure guiding tube 51 in the quality determination system of the first embodiment, or the determination of leakage of the welded portion between the pressure guiding tube 51 and the washers 200a and 200b, that is, a helium leak test. It is a flowchart for demonstrating the operation of.
In the quality determination system, first, the degree of blockage of the pressure guiding tube 51 is determined, and a helium leak test is performed on the pressure guiding tube 51 determined to be unblocked.
FIG. 4 is a flowchart illustrating the operation of determining the degree of blockage of the pressure guiding tube 51 among the determinations in the quality determination system of the first embodiment, and FIG. 5 is a determination in the quality determination system of the first embodiment. It is a flowchart explaining the operation of the helium leak test.

First, the operation of determining the degree of blockage of the pressure guiding tube 51 will be described with reference to FIG.
The circuit control unit 14 operates the pump 4 and starts evacuation of the second case 31b (step ST401).

The valve open / close control unit 11 causes the air supply valve 61a to open the air supplied to the first case 31a (step ST402).
The valve opening / closing control unit 11 may be in a state in which the air supplied to the first case 31a is opened to the air supply valve 61a in step ST401, and in step ST401, the air supply valve 61a may be opened. On the other hand, the atmosphere supplied to the first case 31a may be kept closed and opened in step ST402.

In the steps ST401 and 402, the large displacement of the pump 4 lowers the degree of vacuum in the second case 31b. The degree of vacuum at this time may be, for example, about 1000 Pa level based on the rough drawing of the helium leak detector 2 at the time of the helium leak test. When the standard vacuum degree is reached, the process proceeds to step ST403. Specifically, for example, the blockage determination control unit 12 acquires the vacuum degree information from the helium leak detector 2 and determines whether or not the standard vacuum degree has been reached. When the standard vacuum degree is reached, the vacuum is drawn. It is determined that the process is completed, and the process of step ST403 is executed.
Since the washers 200a and 200b and the vacuum chamber are sealed, the atmosphere in the vacuum chamber does not communicate with the helium filling chamber.

When the blockage determination control unit 12 determines that the second case 31b has reached the standard degree of evacuation and the evacuation is completed, the blockage determination control unit 12 waits until a certain time elapses after the evacuation is completed (in step ST403, "NO" If). The fixed time is set in advance by the user, for example, 10 seconds.

When it is determined that a certain time has elapsed after the completion of evacuation (in the case of "YES" in step ST403), the blockage determination control unit 12 acquires the pressure of the second case 31b from the helium leak detector 2 and obtains the pressure. Determines whether or not it is equal to or greater than a preset first threshold value (step ST404). The first threshold value to be determined in step ST404 is appropriately set by the user in advance, for example, 200 Pa.
Since the helium leak detector 2 has a pressure measuring function, in the first embodiment, the pressure of the second case 31b is measured by using the pressure measuring function of the helium leak detector 2. , The pressure measurement method is not limited to this. For example, a pressure measuring device other than the helium leak detector 2 measures the pressure of the second case 31b, and the blockage determination control unit 12 acquires the pressure measured by the pressure measuring device and determines whether or not it is equal to or higher than the first threshold value. May be determined.

In step ST404, when the pressure is not equal to or higher than the preset first threshold value (when “NO” in step ST404), the blockage determination control unit 12 determines that the pressure guiding tube 51 is blocked, and the blockage determination control unit 12 determines that the pressure is blocked. The determination result is output to the display control unit 15 (step ST407).

When the inside of the pressure guiding pipe 51 is blocked, the air supplied to the first case 31a by opening the flow path of the atmosphere discharged from the exhaust device by the air supply valve 61a passes through the inside of the pressure guiding pipe 51. After a certain period of time, the pressure in the second case 31b drops. The blockage determination control unit 12 determines the pressure drop in the second case 31b after a lapse of a certain period of time, and detects the blockage of the pressure guiding tube 51.
As described above, the blockage determination control unit 12 detects the blockage of the pressure guiding tube 51 depending on whether the pressure in the second case 31b is equal to or higher than the preset first threshold value, so that the pressure guiding tube 51 is completely blocked. It is possible to quantitatively determine the degree of blockage instead of determining other than that.
The blockage determination control unit 12 outputs the determination result to the display control unit 15.

The display control unit 15 causes the display device 8 to display information indicating that the pressure guiding tube 51 is blocked (step ST408), and ends the process.
The information that the display control unit 15 displays on the display device 8 indicating that the pressure guiding tube 51 is blocked is, for example, a message such as "NG" or "blocked". It should be noted that this is only an example, and it is sufficient that the user can check the display device 8 and know that the pressure guiding tube 51 is determined to be blocked.

The pressure guiding tube 51, which is determined to have a blockage in the tube, is a rejected product, that is, a pressure guiding tube 51 whose quality is not guaranteed, and therefore cannot proceed to the subsequent helium leak test.

On the other hand, in step ST404, when the pressure is equal to or higher than the preset first threshold value (when “YES” in step ST404), the blockage determination control unit 12 determines that there is no blockage in the pressure guiding tube 51. , The determination result is output to the display control unit 15 (step ST405). When the inside of the pressure guiding pipe 51 is not blocked, the air supplied to the first case 31a by opening the air flow path discharged from the exhaust device by the air supply valve 61a passes through the inside of the pressure guiding pipe 51. Therefore, the pressure in the second case 31b is maintained at a constant level even after a lapse of a certain period of time.
The blockage determination control unit 12 outputs the determination result to the display control unit 15.

The display control unit 15 causes the display device 8 to display information indicating that the pressure guiding tube 51 is not blocked (step ST406), and ends the process.
The information that the display control unit 15 displays on the display device 8 that the pressure guiding tube 51 is not blocked is, for example, a message such as "OK" or "not blocked". It should be noted that this is only an example, and it is sufficient that the user can check the display device 8 and know that the pressure guiding tube 51 is not blocked.

Since the pressure guiding tube 51 judged to have no blockage in the tube is a passing product, that is, a pressure guiding tube 51 whose quality is guaranteed, the process proceeds to the subsequent helium leak test.

As a method of inspecting the degree of blockage inside the pipe of a general tubular member, for example, there is GO-STOP confirmation by using a gauge rod. In the GO-STOP confirmation, the degree of blockage is inspected depending on whether or not the gauge rod passes through the pipe.
However, in the GO-STOP confirmation, it is difficult to prepare a gauge rod, especially for a thin tube having an inner diameter of φ1.0 mm or less. It is also difficult to create a gauge bar when the pipe is bent. Further, in the GO-STOP confirmation by the gauge rod, the degree of blockage can be confirmed only by whether it is OK or NG, that is, whether or not the gauge rod passes, and the degree of blockage cannot be quantitatively determined. ..
Further, as another method for inspecting the degree of blockage inside the pipe of a general tubular member, for example, visual inspection can be mentioned. However, even in the visual inspection, it is difficult to inspect a thin tube or a bent tube. In addition, it is difficult to quantitatively judge the degree of blockage.
Therefore, as a result, the working time becomes long in order to guarantee the quality regarding the closing of the tubular member.

On the other hand, according to the quality determination method of the degree of blockage of the pressure guiding tube 51 in the determination system of the first embodiment, as described above, the pressure drop after a certain period of time is quantitatively determined by passing the air through the tube of the pressure guiding tube 51. Since the degree of blockage of the pressure guiding tube 51 is determined, it is not necessary to create a tool for inspection such as a gauge rod. Moreover, even if the pipe is bent, the degree of blockage can be confirmed. In addition, the degree of blockage can be quantitatively determined.

Next, the operation of the leak test will be described with reference to FIG.
As a result of the determination of the degree of blockage described with reference to FIG. 4, when it is determined that the inside of the pressure guiding tube 51 is not blocked, the valve open / close control unit 11 moves to the first case 31a with respect to the air supply valve 61a. The supplied atmosphere is closed (step ST501).
Specifically, the blockage determination control unit 12 outputs a determination result indicating that the blockage determination result has passed to the valve open / close control unit 11, and the valve open / close control unit 11 receives the determination result. With respect to the air supply valve 61a, the air flow path discharged from the exhaust device and supplied to the first case 31a is closed.

In step ST501, when the valve open / close control unit 11 closes the air supplied to the first case 31a with respect to the air supply valve 61a, the circuit control unit 14 operates the pump 4 to operate the pump 4 and the second case 31b. (Step ST502).
In this step ST502, further evacuation is performed up to the level of evacuation of the helium leak detector 2 during the helium leak test.
Since it has been confirmed that the pressure guiding tube 51 is not blocked, the first case 31a is also evacuated by evacuating the second case 31b.

When the second case 31b is in a vacuum state, the leak determination control unit 13 controls the helium supply valves 62b, 62c, and MCF71 to blow the helium gas from the helium supply source 7 into the helium filling chamber (step ST503). As described above, by evacuating the second case 31b, the first case 31a is also evacuated. Therefore, when the second case 31b is in a vacuum state, the first case 31a is also evacuated. Become in a state. The vacuum state here means a vacuum state sufficient to carry out a leak test. The leak determination control unit 13 may determine whether or not the second case 31b is in a vacuum state by, for example, acquiring information on the degree of vacuum from the helium leak detector 2 and determining whether or not the degree of vacuum has reached a reference level. ..

The helium leak detector 2 leaks the gas filled in the helium filling chamber into the second case 31b through the joint portion between the pressure guiding tube 51 and the washers 200a and 200b by the analyzer tube (not shown). The amount of leakage is detected (step ST504). Since the vacuum chamber and the washers 200a and 200b are sealed, the helium gas leaking into the vacuum chamber is detected by the helium leak detector 2 via the pressure guiding tube 51 without flowing out to the helium filling chamber. That is, the helium gas leaking from the washer 200a to the first case 31a flows out to the second case 31b through the pressure guiding tube 51 without flowing out to the helium filling chamber, and is detected by the helium leak detector 2. become.
The helium leak detector 2 notifies the leak determination control unit 13 of the detected leak amount of helium gas.

The leak determination control unit 13 determines whether or not the amount of helium gas leak is equal to or greater than a preset second threshold value (step ST505). The second threshold value determined in step ST505 is, for example, set by the user as appropriate in advance.

In step ST505, when the amount of helium gas leaking is equal to or greater than a preset second threshold value (when “YES” in step ST505), the leak determination control unit 13 connects the pressure guiding tube 51 and the washers 200a and 200b. It is determined that a leak has occurred in the welded portion (step ST508).
The leak determination control unit 13 outputs a determination result indicating that a leak has occurred to the display control unit 15.

The display control unit 15 causes the display device 8 to display information indicating that a leak has occurred in the welded portion between the pressure guiding tube 51 and the washers 200a and 200b (step ST509), and ends the process.
The information that the display control unit 15 displays on the display device 8 to the effect that a leak has occurred is, for example, a message such as "NG" or "leakage". It should be noted that this is only an example, and if the user confirms the display device 8 and finds out that a leak has occurred in the welded portion between the pressure guiding tube 51 and the washers 200a and 200b. Good.

In step ST505, when the amount of helium gas leakage is not equal to or higher than the preset second threshold value (when “NO” in step ST505), the leak determination control unit 13 connects the pressure guiding tube 51 and the washer 200a and 200b. It is determined that there is no leakage in the welded portion (step ST506).
The leak determination control unit 13 outputs a determination result indicating that no leak has occurred to the display control unit 15.

The display control unit 15 causes the display device 8 to display information indicating that no leakage has occurred in the welded portion between the pressure guiding tube 51 and the washers 200a and 200b (step ST507), and ends the process.
The information that the display control unit 15 displays on the display device 8 to the effect that no leakage has occurred is, for example, a message such as "OK" or "no leakage". It should be noted that this is only an example, and if the user confirms the display device 8 and finds that there is no leakage in the welded portion between the pressure guiding tube 51 and the washers 200a and 200b. Good.

The operation of the helium leak test of FIG. 5 as described above is the same as the operation of the conventionally known helium leak test using the helium leak detector.
However, in the first embodiment, it is not necessary to open the analysis tube or the like of the helium leak detector 2 to the atmosphere before entering the helium leak test. This is because the degree of blockage in the pressure guiding tube 51 is determined before the helium leak test, and at this time, evacuation is performed (step ST401 in FIG. 4). As a result, the working time required for the helium leak test can be shortened.

As described above, in the quality determination system of the first embodiment, the determination of the degree of blockage of the pressure guiding tube 51 and the determination of leakage of the welded portion between the pressure guiding tube 51 and the washers 200a and 200b can be performed together. it can. Since the above two inspections can be performed, it leads to improvement of work efficiency and simplification of equipment. In particular, by diverting the pressure measurement function of the helium leak detector 2 and determining the degree of blockage of the pressure guiding tube 51 based on the pressure measured by the helium leak detector 2, work efficiency is further improved and equipment is simplified. Leads to.

As described above, according to the first embodiment, the tubular member (pressure guiding tube 51) whose both ends are housed in the first case 31a and the second case 31b, and the pump connected to the second case. 4. The quality of the tubular member is determined by the air supply valve 61a that controls the air supplied to the first case 31a, the pressure measuring device that measures the pressure in the second case 31b, and the determination control device 1. A quality determination method for determining that the pump 4 evacuates the second case 31b and the air supply valve 61a releases the air supplied to the first case 31a. If the pressure in the second case 31b measured by the pressure measuring device is equal to or higher than the first threshold value after the set time elapses after the device 1 determines that the evacuation of the second case 31b is completed, the tubular member Since the step of determining that there is no blockage is provided, no tool for inspection is required, and even if the inside of the tube of the tubular member is thin or the tubular member is bent, the inside of the tube of the tubular member is provided. It is possible to confirm the degree of blockage and provide a tubular member whose quality is guaranteed. In addition, the degree of blockage inside the tube of the tubular member can be quantitatively determined.

Further, according to the first embodiment, in the method for determining the quality of the tubular member, the pressure measuring device is the helium leak detector 2, and the portion of the tubular member that is not housed in the first case 31a and the second case 31b. A third case 32 is further provided, and when the determination control device 1 determines that the tubular member is not blocked, the air supply valve 61a closes the air supplied to the first case 31a. Then, the pump 4 performs a step of vacuuming the second case 31b, and the determination control device 1 performs a helium leak test of the helium gas filled in the third case 32 on the helium leak detector 2. Since the step of determining the leakage of the welded portion of the tubular member is further provided, the determination of the degree of blockage of the tubular member and the determination of the leakage of the welded portion of the tubular member can be performed at the same time. Since the two inspections can be performed together, it leads to improvement of work efficiency and simplification of equipment.
Further, since it is not necessary to open the analysis tube of the helium leak detector 2 to the atmosphere after determining the degree of blockage of the tubular member and before entering the helium leak test, the working time required for the helium leak test can be shortened.

In the present invention, within the scope of the invention, it is possible to modify any component of the embodiment or omit any component of the embodiment.

1 Judgment control device 2 Helium leak detector 3 Jig 4 Pump 7 Helium supply source 8 Display device 11 Valve open / close control unit 12 Blockage judgment control unit 13 Leak judgment control unit 14 Circuit control unit 15 Display control unit 31a First case 31b First Case 32 Third case 51 Pressure guiding tube 61a Air supply valve 62a, 62b Helium supply valve 71 MCF
100a, 100b tank 200 washer

Claims (3)

A tubular member whose both ends are housed in the first case and the second case, a pump connected to the second case, and an air supply valve for controlling the air supplied to the first case. A quality determination method for determining the quality of the tubular member by a pressure measuring device for measuring the pressure in the second case and a determination control device.
The step in which the pump evacuates the second case,
A step in which the air supply valve opens the air supplied to the first case,
If the pressure in the second case measured by the pressure measuring device is equal to or higher than the first threshold value after a set time elapses after the determination control device determines that the vacuuming of the second case is completed. , A method for determining the quality of a tubular member, comprising a step of determining that the tubular member is not blocked. The pressure measuring device was used as a helium leak detector.
Further comprising a third case for sealing a portion of the tubular member that is not housed in the first case and the second case.
When the determination control device determines that the tubular member is not blocked,
A step in which the air supply valve closes the air supplied to the first case.
The step in which the pump evacuates the second case,
The determination control device further includes a step of causing the helium leak detector to perform a helium leak test of the helium gas filled in the third case and determining leakage of a welded portion of the tubular member. The method for determining the quality of a tubular member according to claim 1. A tubular member whose both ends are housed in the first case and the second case, a pump connected to the second case, and an air supply valve for controlling the air supplied to the first case. A quality determination system for a tubular member including a pressure measuring device for measuring the pressure in the second case and a determination control device.
The pump evacuates the second case and
The air supply valve opens the air supplied to the first case.
When the pressure in the second case measured by the pressure measuring device is equal to or higher than the first threshold value after a set time has elapsed after the determination control device determines that the evacuation of the second case is completed. For example, a quality determination system for a tubular member, which determines that the tubular member is not blocked.

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