JP2003035624A - Leak inspection method and apparatus therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a leak inspection method using a flowmeter which shortens a time required for inspecting leaks and can easily and speedily execute the leak inspection even to a container having a large volume and required to have sealing properties. SOLUTION: In the leak inspection method, a predetermined pressure is supplied to an object 14 to be inspected which has voids inside and is required to have predetermined sealing properties, and a gas flowing out of the object 14 or flowing into the object is detected by the flowmeter 20 to judge the presence/absence of the leak of the object 14. The presence/absence of the leak of the object 14 is judged by reducing the volume of the voids 36.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for measuring leaks in various containers having a void inside by using a flow meter, and particularly to a large-capacity sealed container. TECHNICAL FIELD The present invention relates to a method and an apparatus for measuring a leak in a large container that is required to have good performance.

[0002]

Generally, various containers which are used in a sealed state, such as a gas cylinder of a lighter, a gas pipe of a gas water heater, a refrigerant storage container of an air conditioner, etc., have a hermeticity of a certain standard or more. As required, when these products are manufactured, it is necessary to inspect the tightness of the container for leakage of the enclosed contents.

As a method for inspecting a leak of a container which is required to be hermetically closed, the applicant of the present patent application has already proposed an invention for inspecting a leak of a container which is required to be hermetically sealed by using a flow meter. (Japanese Patent Application No. 8-342851). This patent application is an application relating to the improved invention of Japanese Patent Application No. 8-342851.

The above-mentioned Japanese Patent Application No. 8-342851 discloses the basic technical idea of performing a leak test using a flow meter. That is, when a predetermined pressure is supplied from a pressure supply source to a container, which is an object to be inspected and is required to be hermetically closed, and when there is a leak in the object to be inspected, a gap between the inside and the outside of the object to be inspected. Since the movement of gas occurs due to the pressure difference of, the movement of this gas is detected by the flow meter,
It is configured to determine whether or not there is a leak in a container, which is an object to be inspected and is required to be hermetically sealed.

As a result, conventionally, a pressure gauge measures a pressure change within a predetermined time of an object to be inspected pressurized to a constant value to judge the presence / absence of a leak, and when a leak exists, a measurement time is measured. It was decided to calculate the leak value of the inspected object based on the volume value of the inspected object to determine whether or not the leak is an allowable leak in the inspected object. When a leak is judged, it is possible to directly measure the presence or absence of the leak and the leak amount, and a complicated leak value is calculated by a formula established between the pressure change, the volume of the object to be inspected and the measurement time. Whether or not there is a leak can be easily determined without calculating

By the way, the object to be inspected also includes a large-capacity container such as a drum. For such a large-capacity container, the above flow meter can be used to measure the presence or absence of leak and the amount of leak, but if a leak test is actually performed using the flow meter, it will lead to a leak determination. There was a problem that it took a long time to do so and quick inspection could not be performed. The reason is as follows.

Originally, since gas has compressibility and viscosity, holes or cracks are formed in a container which is required to be hermetically sealed, so that hermeticity is required as an inspection object having a leak. Even when a predetermined pressure is supplied from the pressure supply source when performing the leak inspection device for the container, the volume of the inspection object and the size of the leakage amount are relative to each other. If the internal volume of the is large, the leak amount is absorbed by the pressure fluctuation and does not immediately lead to the display of the gas leak amount, and it takes a predetermined time for the flow meter to detect the gas flow. In some cases.

In particular, in the case of an object to be inspected which is composed of a large capacity container, the volume of gas contained in the object to be inspected is large due to the large internal storage volume, and the flow meter is joined to the object to be inspected. In some cases, it takes a very long time to detect the flow of gas due to a leak through the pipeline. This situation becomes more serious as the size of the container to be inspected, which is required to be hermetically sealed, increases.

Further, as described in the specification of Japanese Patent Application No. 8-342851, generally, the environment in which a leak test is performed on a container which is required to be hermetically sealed is close to a manufacturing line in a factory. In many cases, the temperature is higher than the general atmospheric temperature, or the temperature environment is not constant and changes with time. In addition, when the inspection object is manufactured in a factory, the heat-molded inspection object may still be in a high temperature state.

The temperature condition of the object to be inspected and the environmental temperature around the object to be inspected have a great influence on the leak inspection, and it has been required to eliminate such an influence of the temperature itself in the leak test.

Therefore, the technical problems of the inventions of claims 1 and 2 are to reduce the time required for the leak inspection and to easily and quickly perform the leak inspection even for a container which is required to have a large-capacity hermeticity. It is to provide a leak inspection method using a flow meter capable of performing the above.

Further, a technical problem of the invention according to claim 3 is to provide a leak inspection method capable of performing a leak inspection more quickly.

A technical object of the present invention is to provide a leak inspection method capable of effectively reducing the influence of the ambient temperature on the inspection object.

Further, the technical problems of the inventions according to claims 7, 8, 10 and 11 are that the time required for the leak inspection is shortened and the leak inspection of a container having a large capacity and requiring tightness is facilitated. Another object of the present invention is to provide a leak inspection device.

Further, the technical problem of the invention according to claim 9 is that the time required for the leak inspection can be further shortened, and
An object of the present invention is to provide a leak inspection device that easily performs a leak inspection of a container that has a large capacity and is required to be hermetically sealed.

A technical object of the present invention is to provide a leak inspection device capable of effectively reducing the influence of the environmental temperature on the inspection object.

Further, a technical problem of the invention as set forth in claim 13 is to provide a leak inspection apparatus which can more surely reduce the influence of the temperature on the inspection object.

[0018]

In order to solve such a technical problem, in the invention according to claim 1, a predetermined pressure is applied to an object to be inspected which has a void inside and is required to have a predetermined hermeticity. Is a leak inspection method for determining whether or not there is a leak in the inspected object by detecting the gas flowing out of the inspected object or flowing into the inspected object by the flowmeter, and reducing the volume of the void to be inspected. It is characterized by determining whether or not there is a leak.

Therefore, according to the invention of claim 1,
Since the volume of the voids in the inspection object is reduced, when a leak occurs, the flow of gas that can be detected by the flow meter occurs in a short time.

As a result, according to the first aspect of the invention, the time required for the inspection up to the leak determination by the flowmeter is shortened, and in particular, even if the container has a large capacity, the leak inspection can be performed easily and quickly. be able to.

According to the second aspect of the present invention, a predetermined pressure is supplied to the inspection object which has a void inside and is required to have a predetermined hermeticity, and flows out from or into the inspection object. This is a leak inspection method that detects leaks of the inspected object by detecting the gas to be inspected by a flow meter, and forms a void with a volume smaller than the volume of the inspected object when the inspected object is stored. The object to be inspected is housed in an inspection container having a possible volume, and an object to be inspected is formed by forming a pressure difference between the space inside the object to be inspected and the space between the object to be inspected and the inspection container. It is characterized by determining the leak of.

Therefore, according to the invention of claim 2,
When performing a leak inspection, prepare an inspection container with a volume that can form a void having a volume smaller than the volume of the inspection object when the inspection object is stored, and perform the inspection. The inspection object is stored in a container, and a leak is detected by forming a pressure difference between a space inside the inspection object and a space between the inspection object and the inspection container.

Therefore, according to the invention of claim 2,
When there is a hole, crack, etc. in the inspected object because a pressure difference is formed between the void inside the inspected object and the void formed between the inspected object and the inspection container. Has
From the higher pressure side to the lower pressure side, gas movement occurs from the inspection object to the void or from the void into the inspection object, and the flow meter detects the flow of the movement of gas. When such gas movement occurs, it is revealed that a leak exists.

As a result, according to the second aspect of the invention, the volume of the space between the inspection object and the inspection container, which is the inspection object, is smaller than the internal volume of the inspection object. Compared to the case where leak pressure is supplied by supplying pressure to the object itself, the flow meter can easily detect the movement of gas that occurs when there is a leak in the object to be inspected. it can.

According to the third aspect of the present invention, a predetermined pressure is supplied to the inspection object which has a void inside and is required to have a predetermined airtightness, and flows out from or into the inspection object. Is a leak inspection method for determining whether or not there is a leak of an inspected object by detecting a gas to be inspected by a flow meter, and a predetermined pressure or more is applied to the inspected object after a predetermined pressure is supplied to the inspected object. The pressure is instantaneously supplied to judge whether or not there is a leak in the container to be inspected.

Therefore, in the invention according to claim 3,
When a pressure larger than the predetermined pressure is instantaneously applied after the predetermined pressure is supplied to the inspection object,
When the object to be inspected has no holes or cracks, the gas flows backward toward the pressure supply source due to the pressure reaction. Further, when the inspection object has a hole, a crack, or the like, the pressure reaction is small and the degree of backflow is small. Also, if there are large holes, cracks, etc. in the inspection object,
The pressure escapes to the outside of the object to be inspected from the hole or the like, and there is almost no backflow. The flow meter detects a gas flow that flows backward toward the pressure supply source as a negative flow rate when the pressure supply direction is a positive direction.

Since there is a constant law as described above between the flow rate in the negative direction and the actual leak value, in the invention according to claim 3, the entire actual leak amount is constant. The leak can be inspected quickly without the need for time-consuming measurement.

According to the fourth aspect of the present invention, a predetermined pressure is supplied to the inspection object which has a void inside and is required to have a predetermined hermeticity, and flows out from or into the inspection object. A leak inspection method for detecting the presence of a leak in an object to be inspected by detecting the gas to be inspected with a flow meter, wherein the predetermined pressure supplied to the object to be inspected is a negative pressure.

The term "negative pressure" as used herein means a pressure equal to or lower than atmospheric pressure, and the term "negative pressure" will be used with the same meaning hereinafter.

Therefore, according to the invention of claim 4,
Since the negative pressure is supplied to the inspection object, the influence of the ambient temperature on the inspection object is reduced due to the heat insulation effect, and the leak inspection can be performed in which the influence of the ambient environment on the temperature is small.

According to a fifth aspect of the present invention, the object to be inspected is arranged in an inspection container, and negative pressure is also supplied into the object to be inspected.

Therefore, according to the invention of claim 5,
The object to be inspected is arranged in an inspection container, a negative pressure is supplied into the object to be inspected, and a negative pressure is also supplied to a gap between the inspection container and the object to be inspected. Since there is a pressure difference between the inside of the object and the gap between the inspection container and the inspection object, if there is a leak in the inspection object, the pressure difference is generated between the inspection object and the inspection container. The flow meter will detect the movement of the gas.

As a result, in the invention described in claim 5, in addition to the effect of the invention described in claim 4, due to the greater heat insulating effect by the negative pressure, the influence of the temperature of the surrounding environment on the object to be inspected. Can be reduced.

The invention described in claim 6 is characterized in that the pressure supplied to the object to be inspected is a vacuum.

The term "vacuum" as used herein refers to a state of being highly depressurized, and the following "vacuum" has the same meaning.

Therefore, according to the invention of claim 6,
In addition to the effects of the invention described in claims 4 to 5, it is possible to further surely reduce the influence of the temperature of the surrounding environment on the inspection object.

According to a seventh aspect of the present invention, a pressure supply source provided at one end of a pipe forming a gas flow passage,
A shutoff valve provided on the downstream side of the pressure supply source and capable of shutting off the pressure supply to the object to be inspected, and a flow meter provided on the downstream side of the shutoff valve are provided, and a predetermined gap is provided. A leak inspection device that supplies a predetermined pressure to an inspected object that is required to be hermetically sealed, and detects a gas flowing out of the inspected object or flowing into the inspected object by a flow meter to determine a leak of the inspected object. In the inspection object, an insertion member that can reduce the volume of the void inside the inspection object and that forms a predetermined gap between the inspection object inner wall surface portion and the pipe line is formed. The other end is arranged in the void.

Therefore, according to the invention of claim 7,
Since the insertion member in which a predetermined gap is formed between the inspected object and the inner wall surface of the inspected object is arranged, the volume of the void inside the inspected object is reduced by the insertion member, As a result, the internal volume of the object to be inspected for the leak inspection is smaller than the original internal volume.

Since the other end of the pipe is disposed in the space formed between the object to be inspected and the insertion member, when a leak occurs in the object to be inspected, this pipe is Gas flows through the passage, and the flow meter senses this flow.

As a result, in the invention according to the seventh aspect, even if a leak occurs, the volume of the object to be inspected, which is the basis for judging the leak amount, is reduced by the insertion member. Therefore, as a result, the total amount of gas to be detected is also reduced, and the flow of gas due to leakage is likely to occur accordingly. Therefore, even if the object to be inspected is a container that is required to have a large-capacity hermeticity, the time required for the flow meter to detect the flow of the gas can be shortened, and the leak inspection time can be greatly shortened.

According to an eighth aspect of the present invention, a pressure supply source provided at one end of a pipe forming a gas passage,
A shutoff valve provided on the downstream side of the pressure supply source and capable of shutting off the pressure supply to the object to be inspected, and a flow meter provided on the downstream side of the shutoff valve are provided, and a predetermined gap is provided. A leak inspection device that supplies a predetermined pressure to an inspected object that is required to be hermetically sealed, and detects a gas flowing out of the inspected object or flowing into the inspected object by a flow meter to determine a leak of the inspected object. Between the insertion member capable of reducing the volume of the void inside the inspection object and forming a predetermined gap between the inspection object inner wall surface portion and the insertion member capable of sealing the inspection object And a lid capable of forming a gap, wherein a predetermined gap is provided between the inner wall surface of the object to be inspected and a gap between the insertion member and a predetermined pressure to perform a leak test. To do.

Therefore, according to the invention of claim 8,
By inserting the insertion member into the inspection object to form a predetermined gap between the insertion member and the inner wall surface of the inspection object, and by sealingly mounting the lid on the inspection object, the space between the insertion member and the inspection member is increased. A space is formed in the space, and a predetermined pressure is supplied to the space formed between the inner wall surface of the inspection object and the space between the lid and the insertion member. As a result, when there are holes or cracks in the inspection object, gas flows out of the inspection object through the holes or cracks.

As a result, in the invention described in claim 8, as in the case of the invention described in claim 7, even when a leak occurs in the inspection object, it is a basis for determining the leak amount. Since the inspected volume itself is reduced by the insertion member, as a result, the total amount of gas to be detected is also reduced, and accordingly, gas flow due to leakage easily occurs. Therefore, even if the object to be inspected is a container that is required to have a large-capacity hermeticity, the time required for the flow meter to detect the flow of the gas can be shortened, and the leak inspection time can be greatly shortened.

According to the ninth aspect of the present invention, a pressurizing section capable of instantaneously supplying a pressure greater than the pressure supplied from the pressure supply source to the object to be inspected is provided on the downstream side of the flow meter. It is characterized by having.

Therefore, according to the invention of claim 9,
When a pressure larger than the predetermined pressure is instantaneously applied after the predetermined pressure is supplied to the inspection object,
When the object to be inspected has no holes or cracks, the gas flows backward toward the pressure supply source due to the pressure reaction. Further, when the inspection object has a hole, a crack, or the like, the pressure reaction is small and the degree of backflow is small. Also, if there are large holes, cracks, etc. in the inspection object,
The pressure escapes to the outside of the object to be inspected from the hole or the like, and there is almost no backflow. In this case, the flow meter detects the flow of the gas flowing backward in the direction of the pressure supply source as the flow rate in the negative direction when the pressure supply direction is the flow rate in the positive direction.

Since there is a constant law between the flow rate in the negative direction and the actual leak value, in the invention according to claim 9, the entire actual leak amount is taken for a fixed time. The leak can be quickly inspected without measurement.

According to a tenth aspect of the present invention, a pressure supply source is provided at one end of a pipe forming a gas flow path, and a pressure supply source is provided downstream of the pressure supply source, and the pressure is applied to an object to be inspected. A shutoff valve capable of shutting off the pressure supply and a flowmeter provided on the downstream side of the shutoff valve are provided, and a predetermined pressure is supplied to an object to be inspected that has a gap inside and a predetermined hermeticity is required. Then, a leak inspection device for determining a leak of the inspected object by detecting a gas flowing out from the inspected object or flowing into the inspected object, wherein the inspected object is stored in an inspection container,
The other end of the pipe line penetrates through the inspection container and is arranged in a space between the inspection object and the inspection container, the void having a volume smaller than the internal volume of the inspection object. And

Therefore, in the invention according to claim 10, since the object to be inspected is arranged in the inspection container and a predetermined pressure is also supplied into the inspection container, the object to be inspected leaks. When there is, the flow meter detects the movement of the gas between the inspection object and the inspection container via the external wall of the inspection object.

As a result, in the invention according to the tenth aspect, the gas flow is measured by the flow meter through the gap between the inspection object and the inspection container, which has a volume smaller than the volume in the inspection object. Since the leak inspection is performed by detecting the flow, the leak inspection can be performed more quickly than when the leak inspection is performed by pressurizing the inspection object itself.

According to an eleventh aspect of the present invention, the first other end of the pipeline is disposed inside the object to be inspected, and the second other end of the pipeline is connected to the inspection container and the container. It is arranged in a void having a volume smaller than the volume of the inspected object formed between the inspected object and the pressure difference between the void in the inspected object and the void. Pressure is supplied from a conduit, and the flow meter is configured to detect the flow of gas via the second other end of the conduit.

Therefore, in the invention according to the eleventh aspect, when there is a hole or a crack in the inspection object, the void inside the inspection object and the inspection container through the wall of the inspection object. There is a flow of gas between the air gap and the object to be inspected, and the flow meter detects this flow of gas via the second other end.

As a result, in the invention according to the eleventh aspect, the second other end portion of the pipeline is opened in the gap between the inspection container and the inspection object, and the inspection container and the inspection object. Since the gap between the object and the object is formed smaller than the volume inside the object to be inspected, the gas flow is measured more quickly than when measuring the gas flow in the object to be inspected and performing a leak test. Measurement can be performed, and leak inspection can be performed in a short time.

According to the twelfth aspect of the invention, a negative pressure is supplied to either the inside of the inspection object or the gap between the inspection container and the inspection object.

Therefore, in the twelfth aspect of the present invention, negative pressure is supplied to the inspection object housed in the inspection container or between the inspection container and the inspection object. Therefore, when there are holes or cracks in the inspected object, gas is generated between the void inside the inspected object and the void between the inspection container and the inspected object through the wall of the inspected object. Flow, and the flow meter detects this gas flow.

As a result, in the invention described in claim 12, since the negative pressure is supplied to the inspection object or the space between the inspection container and the inspection object, the outside temperature is caused by the adiabatic effect. It is possible to reduce the influence on the object to be inspected, and to perform an accurate leak inspection.

In the thirteenth aspect of the invention, a vacuum is supplied to the inside of the inspection object and the gap between the inspection container and the inspection object.

Therefore, according to the thirteenth aspect of the present invention, since a vacuum is supplied to the inspection object and the space between the inspection container and the inspection object, a greater heat insulating effect can be obtained. Therefore, it is possible to reduce the influence of the external environmental temperature on the inspection object.

[0058]

BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described in detail below based on the embodiments shown in the accompanying drawings.

As shown in FIG. 1, the leak inspection apparatus 10 according to the present embodiment has a pressure supply source 12 provided at one end of a conduit 11 which constitutes a gas flow path, and this pressure supply source 12. Of the pressure adjusting valve 13 provided on the downstream side of the pressure adjusting valve 13 for adjusting the pressure supplied to the inspection object 14 to a predetermined pressure, and the pressure adjusting valve 13 provided on the downstream side of the pressure adjustment valve 13 for supplying the pressure to the inspection object 14. It has a first shutoff valve 15 capable of shutting off, and a second shutoff valve 16 provided downstream of the first shutoff valve 15 and capable of shutting off pressure supply to the inspection object 14. In the present embodiment, the object to be inspected 14 is, for example, a large-capacity container such as a drum, and is configured to inspect the large-capacity container for leakage.

Leak inspection device 10 according to the present embodiment
1, as shown in FIG.
4 and a bypass line 19 that bypasses the second shutoff valve 16 and connects the upstream side 17 and the downstream side 18 of the second shutoff valve 16 to each other. A flow meter 20 is arranged in the path 19, and in the present embodiment, the flow meter 20 is a mass flow meter,
It is configured so that the flow rate of gas in the bypass conduit 19 can be directly measured.

In the present embodiment, the conduit 11
A third shut-off valve 43 is provided on the downstream side of a connection portion 93 between the downstream side pipeline 35 and the inspection pipeline 28, and a predetermined pressure supplied to the inspection object 14 at the end of the leak inspection. Is discharged to the atmosphere and can be returned to the initial state.

Further, in the present embodiment, the insertion member 21 capable of reducing the internal volume of the container is arranged and fixed inside the large-capacity container which is the object 14 to be inspected. The cross-sectional shape of this insertion member 21 is the same as the cross-sectional shape of the large-capacity container, and in the present embodiment, it has a cylindrical shape having an outer diameter smaller than the inner diameter of the large-capacity container. A flange portion 90 is formed on the periphery of the upper end portion. A packing 91 having an appropriate configuration is provided on the back surface side of the flange portion 90 so that when it is inserted into the inspection object 14, the opening upper end portion of the inspection object 14 can be hermetically pressed. It is configured.

At the time of leak inspection, the insertion member 21
A fixing member 25 including a fixing rod 23 and screws 24, 24 for fastening the fixing rod 23.
Is fixed to the substrate 22.

Therefore, the insertion member 21 is attached to the inspection object 14
When it is inserted and arranged in the large-capacity container as shown in FIG. 1, a gap 33 is formed at a predetermined interval between the inner surface 31 of the large-capacity container as the inspection object 14 and the outer surface 32 of the insertion member 21. Is configured.

On the bottom surface 26 of the insertion member 21, there is formed a hole 29 through which the tip portion 27 of the inspection conduit 28 constituting the conduit 11 is inserted, and the tip portion 27 of the inspection conduit 28 is opened. Is hermetically inserted and fixed in the hole 29, and the tip opening 30 of the inspection conduit 28 is arranged in the gap 33.

The procedure for performing the leak inspection of the inspection object 14 using the leak inspection apparatus 10 according to this embodiment will be described below.

First, as described above, for example, the lid is removed and a large-capacity container which is opened is placed on the substrate 22 as described above, and the insertion member 21 is inserted into the large-capacity container through the opening 36. Insert and place in an airtight state. In this case, a gap 33 having a predetermined width is formed between the inner side surface 31 of the large-capacity container and the outer side surface 32 of the insertion member 21 in a state where the outside of the inspection object 14 and the outside of the insertion member 21 are airtight. It

After that, the inspection pipe line 2 forming the pipe line 11
The tip end portion 27 of No. 8 is inserted in the hole portion 29 formed in the bottom surface portion 26 of the insertion member 21 in an airtight state, and the tip end opening portion 30 is arranged in the gap 33.

Next, with the second shutoff valve 16 open, the first shutoff valve 15 is opened and a predetermined pressure from the pressure supply source 12 is inspected via the second shutoff valve 16. Thing 1
4 is supplied to the pipe line 11 and then the second shutoff valve 16 is closed. As a result, the leak inspection circuit 3 is provided by the downstream side pipe line 35 of the second shutoff valve 16 and the bypass line 19.
9 is formed.

Therefore, since the space 33 between the object 14 to be inspected and the insertion member 21 is also pressurized by the supply of the pressure from the pressure supply source 12, the object 14 to be inspected has a large capacity. When a hole or a crack is formed in the container on the bottom surface portion 37 or the side surface portion 38 of the large capacity container,
The air in the void 33 flows out of the inspection object 14 from cracks or the like.

As a result, a gas flow moving in the direction of arrow A in FIG. 1 is generated in the leak inspection circuit 39, and the mass flowmeter 20 provided in the bypass conduit 19 detects this gas flow. Then, a predetermined leak flow rate is measured.

As a result, the leak amount of the inspected object 14 in a certain period of time is known, and therefore it is easily inspected whether or not the leak amount is an allowable amount for the large volume container of the inspected object 14. be able to.

In this case, in the leak 10 according to the embodiment, when a large-capacity container is directly inspected for leak, a predetermined time is required due to the compressibility and viscosity of the gas. Since the insertion member 21 is inserted into the inspection object 14 and the leakage inspection is performed by the void 33 having a volume smaller than the original internal volume of the large-capacity container which is the inspection object 14, it becomes a basis of the leakage inspection. , Inspection object 14
The volume of the gas contained therein can be reduced, and as a result, the time required for the leak inspection can be shortened, and particularly, for example, even in a container that requires a large-capacity hermeticity such as a drum can, The time required for the leak inspection can be shortened.

FIG. 2 shows another embodiment of the leak inspection apparatus according to the present invention.

The leak inspection apparatus 40 according to the present embodiment is provided with the pressurizing device 41 capable of instantaneously supplying the pressure of the pressure supply source 12 or higher to the inspection object 14.

This pressurizing device 41 has the pressurizing conduit 4 at the connecting portion 94 between the downstream conduit 35 and the bypass conduit 19.
2 is connected to the main pipeline 34 via a fourth shutoff valve 92 that controls the pressure supply from the pressurizing device 41 to the inspection object 14. Further, a third shutoff valve 43 is provided at the end of the main conduit 34 opposite to the pressure supply source 12.

The configuration other than the above is the same as that of the leak inspection apparatus 10 according to the above embodiment. The same members as those of the leak inspection apparatus 10 according to the first embodiment are designated by the same reference numerals, and the description thereof will be omitted.

When performing the leak inspection by the leak inspection apparatus 40 according to the present embodiment, a predetermined pressure from the pressure supply source 12 is supplied to the large-capacity container which is the inspection object 14 through the main pipe line 34. Then, by closing the second shutoff valve 16, the leak inspection circuit 39 is formed by the downstream side pipe line 35 of the second shutoff valve 16 and the bypass line 19, and then the pressurizing device 41 is operated. , Fourth shutoff valve 92
Is opened, and a pressure larger than the pressure supplied by the pressure supply source 12 is instantaneously applied to the inspection object 14
Supply to.

In this case, when there is no hole or crack in the inspection object 14, the gas momentarily flows in the leak inspection circuit 39 in the direction of arrow B due to the pressure reaction. When the pressure supply direction is a positive direction, the flow rate of the gas flowing backward to the pressure supply source 12 is a negative flow rate and the flow meter 20
Detects. Therefore, when the flow meter 20 detects a negative flow rate in the leak inspection, the inspection object 14 has no leak.

When the inspection object 14 has small holes, cracks or the like, the pressure reaction when the pressure is supplied from the pressurizing device 41 is small, and therefore the flow meter 20 measures. However, the degree of gas flow in the B direction decreases.

Further, when the inspection object 14 has a large hole, crack or the like, the pressure supplied from the pressurizing device 41 escapes from the hole 14 to the outside of the inspection object 14, and B The flow of gas in the direction almost disappears, and the flow of gas in the direction A is detected by the flow meter 20 as a positive flow rate.

Therefore, from the measurement result of the flow rate of the flow meter 20 as described above, it is possible to inspect whether or not there is a leak in the inspection object 14 and whether or not the leak is an allowable leak.

For example, such a backflow of gas in the direction of arrow B is not limited to the case where the pressurizing device 41 is separately provided as in the present embodiment, and for example, the second shutoff valve 1
6 is formed by a lift-up valve,
It also occurs when a predetermined pressure from the pressure supply source 12 is supplied to the inspection object 14 through the main pipe line 34, and then the second shutoff valve 16 is closed to form the leak inspection circuit 39. To do.

That is, in the case of such a lift-up valve, since the valve body is configured to enter the pipeline when the valve is closed, the main pipeline 3 is closed by closing the valve.
The pressure in 4 rises, with the same result as supplying a predetermined pressure to the leak checking circuit 39.

FIG. 3 is a graph showing the flow rate of gas when the lift-up valve is used as the second shutoff valve 16 in the leak inspection apparatus 10 according to the above embodiment, with the passage of time.

In this case, as can be seen from the graph shown in FIG. 3, the flow rate of the gas becomes maximum at the time (a) when the first shutoff valve 15 and the second shutoff valve 16 are opened, and thereafter, in the space 33. When the pressure reaches the pressure set by the pressure adjusting valve 13, the flow substantially stops at the time point (b) in the state where the second cutoff valve 16 is opened. After that, at the time (c) when the second shut-off valve 16 composed of the lift-up valve is closed, the object 14 to be inspected is pressurized via the leak inspection circuit 39 due to the above-mentioned circumstances. The reverse flow of gas in the direction of arrow B shown in FIG.

Thereafter, after a lapse of a certain time, the backflow is stopped and the flow rate returns to 0 (d), and since a leak has occurred in the inspection object 14, the gas in the direction of arrow A shown in FIG. (E).

Further, Table 1 shows a case where the leak inspection device 60 shown in FIG. 5 is used to perform a leak inspection of a container to be inspected having a capacity of 3500 cc between the inspection container 65 and the object to be inspected. Shows the data in. In this case, the pressure difference between the inspection object 14 and the inspection container 65 is 0.02 MPa.

[0089]

[Table 1] As is clear from Table 1 above, between the "inspection object leak value" indicating the actual leakage value of the inspection object and the "reversal flow rate" which is the negative flow rate generated at the momentary pressurization. As a result of the test, it is known that there is a certain law in the "reverse flow rate", and "the time until the actual leak is measured" and "(c) ~ ( It can be seen that the leakage can be judged in a very short time without waiting for a predetermined time until the actual leakage is measured.

When the second shutoff valve 16 is a ball-type valve, pressure fluctuations in the leak inspection circuit do not occur, and it has been found from experiments that the reversal flow rate is zero. . This is shown in Table 2.

[0091]

[Table 2] In addition, in the present embodiment, the case where the separately provided pressurizing means 41 is connected to the main pipe line 34 and the pressure is instantaneously supplied to the device 14 to be inspected has been described. The configuration is not limited, and it is sufficient that the device under test 14 can be instantaneously supplied with a predetermined pressure. As described above,
The shutoff valve may be a lift-up valve.

FIG. 4 shows another embodiment of the leak inspection device according to the present invention. In the leak inspection apparatus 100 according to the present embodiment, the volume of the void inside the inspected object 14 can be reduced and a predetermined void 96 is formed between the inspected object 14 and the inner wall surface portion 95. Insert member 97
And the insertion member 97 can seal the inspection object 14 and
And a lid 98 capable of forming a gap 96 between them and a predetermined pressure between the predetermined gap 96 between the inner wall surface portion 95 of the object to be inspected and the gap 99 between the insertion member. Is configured to perform a leak test. Other configurations are the same as those of the leak inspection apparatus 10 according to the embodiment shown in FIG.

Therefore, in the leak inspection apparatus 100 according to the present embodiment, the insertion member 9 is inserted in the inspection object 14.
7 is inserted to form a predetermined gap 96 with the inner wall surface portion 95 of the inspection object 14, and a lid 98 is hermetically attached to the inspection object 14 so that the space between the inspection member 14 and the insertion member 97 is increased. A void 99 is formed in the inner wall surface 95 of the inspection object 14
A predetermined pressure is supplied to a predetermined gap 96 formed between the cover member 98 and the insertion member 97.
As a result, when there are holes or cracks in the inspection object, gas flows out of the inspection object through the holes or cracks.

As a result, in the present embodiment, even if a leak occurs in the object 14 to be inspected, the volume to be inspected, which is the basis for determining the amount of leakage, is reduced by the insertion member 97. As a result, the total amount of gas to be detected also decreases, and the flow meter 20 detects the relative flow of gas in the leak inspection circuit 39 due to the leakage from the inspection object. It's easy to do.

Therefore, even if the object to be inspected 14 is a container which is required to have a large volume of hermeticity, the flow meter 2 measures the flow of the gas.
The time until 0 is detected can be shortened, and the leak inspection time can be greatly shortened.

Further, it is not necessary to provide the fixing member 25 for fixing the inspection object 14 to the substrate 22 as shown in FIG. 1, and the insertion member 97 is appropriately inserted into the inspection object 14 in the leak inspection. At the same time, it is only necessary to cover the inspection object 14 with the lid 98, and the leak inspection can be performed quickly.

FIG. 5 shows a fourth embodiment of the leak inspection apparatus according to the present invention. The leak inspection apparatus 60 according to the present embodiment has the same basic configuration as the leak inspection apparatus 10 according to the first embodiment, but in the present embodiment, the main pipe line 63 A vacuum pump 62 is provided as a pressure supply source at the base end, and a vacuum accumulator tank 64 is provided in the main pipeline 63. A vacuum is applied to the inspected object 14 from the vacuum pump 62 and the vacuum accumulator tank 64. Is configured to be supplied. The vacuum accumulator tank 64 is used to stabilize the pressure supply to the inspection object 14.

Further, the inspection container 65 is formed to have a larger capacity than the inspection object 14, and the inspection object 14 is hermetically disposed inside the inspection container 65, and a predetermined space is provided between the inspection container 65 and the inspection object 14. Spaced voids 68 are formed so that the leading end 66 of the main conduit penetrates the inspection container 65, and the open end 67 of the leading end 66 is disposed in the void 68. The inspection container 65 has a volume capable of forming a void 68 having a smaller volume than the volume of the void 109 in the inspection object 14 around the inspection object 14 when the inspection object 14 is stored.

As a result, in the leak inspection device 60 according to the present embodiment, the inspection object 14 and the inspection container 65 are provided.
Since the flowmeter 20 detects the flow of gas through the void 68 having a volume smaller than the volume of the void 109 in the inspected object 14 between the inspected object 14 and the inspected object 14, The leak inspection can be performed more quickly than when the leak inspection is performed by applying pressure to itself.

Therefore, in the present embodiment, the vacuum is supplied from the vacuum pump 62 to the object 14 to be inspected through the main pipe 63, and the vacuum accumulator tank is provided as necessary for pressure stabilization. A vacuum is also supplied from 64. Other configurations are substantially the same as those of the leak inspection devices 10 and 40 according to the first embodiment and the second embodiment, except that the pressure regulating valve is not provided.

Therefore, when performing the leak inspection using the leak inspection apparatus 60 according to the present embodiment, the container 14 to be inspected is housed in the inspection container 65, and the open end of the tip portion 66 of the main pipeline 63 is opened. The part 67 is arranged in the space 68 between the inspection object 14 and the inspection container 65.

Then, with the second shutoff valve 16 open, the first shutoff valve 15 is opened to supply the vacuum from the vacuum pump 62 to the pipeline to the second shutoff valve 16, and thereafter, After opening the second shutoff valve 16, the first shutoff valve 15
Is closed to supply a vacuum of a predetermined pressure to the space 68 between the inspection container 65 and the inspection object 14, and then the second shutoff valve 1
Close 6 As a result, the leak inspection circuit 39 is provided by the downstream pipe 35 and the bypass pipe 19 of the second shutoff valve 16.
Is formed.

In this case, the inside of the inspection object 14 is at atmospheric pressure, and the vacuum is supplied to the space 68 between the inspection container 65 and the inspection object 14. If holes or cracks were formed,
Gas flow from the object 14 to be inspected in the direction of the arrow indicated by the broken line 106 to the gap 68 causes the leak inspection circuit 39.
At, a gas flow in the direction of arrow B occurs. The presence or absence of leak and the leak amount are measured by the flow meter 20 detecting this flow of gas as a negative flow rate.

As a result, in the leak inspection apparatus 60 according to the present embodiment, the inspection object 14 and the inspection container 65 are provided.
Since the flowmeter 20 detects the flow of gas through the gap 68 having a volume smaller than the volume inside the inspected object 14 between the inspected object 14 and the inspected object 14 itself. The leak inspection can be performed more quickly than in the case where the leak inspection is performed by applying pressure.

Further, in the leak inspection apparatus 60 according to the present embodiment, since the vacuum is supplied to the space 68 in the inspection container 65, the inspection object is inspected by the heat insulation effect of the vacuum. The influence of the temperature from the surroundings on 14 is reduced, and it is possible to perform a leak inspection with little influence of the temperature due to the surrounding environment.

Further, in the above-described embodiment, a vacuum is supplied to the space 68 of the inspection container 65, and air is introduced from the inspection container 65 to inspect the inspection object 14 for leaks. Although the case has been described as an example, the present invention is not limited to the above-described embodiment, and may be configured to supply a predetermined positive pressure to the void 68 of the inspection container 65, and is not limited to the above-described embodiment.

FIG. 6 shows a fourth embodiment of the leak inspection device according to the present invention.

Leak inspection device 70 according to the present embodiment
The basic configuration of the leak inspection device is similar to that of the leak inspection device 60 in the third embodiment, but in the present embodiment, the tip end of the main conduit 63 is branched into two. The first tip 71 is joined to the inspection container 65 in an airtight state, the tip opening 72 is disposed in the space 68 between the inspection object 14, and the second tip 73 is the inspection container 65. Is joined to the object 14 to be inspected, and the front end opening 74 is arranged in the void 110 of the object 14 to be inspected. Further, a pressure gauge 78 is attached to the inspection container 65, and is configured to be able to measure the atmospheric pressure in the gap 68.

A branch pipe line 101 open to the atmosphere is provided at the first tip 71, and a fifth shutoff valve 103 is arranged in the branch pipe line 101. On the other hand, the second tip portion 73 is similarly provided with a branch pipe line 102 that is open to the atmosphere, and a sixth shut-off valve 104 is arranged in the branch pipe line 102. A pressure gauge 105 is provided at 102 and is configured to measure the pressure inside the inspection object 14.

Further, the first shutoff valve 1 is provided in the main pipe 63.
5. The second shutoff valve 16 is provided, and the third shutoff valve 75 is arranged in the leak inspection circuit 39 downstream of the joint 77 between the bypass line 19 and the main line 63. Further, the branch pipe line 101 is provided at the first tip portion 71.
A fourth shutoff valve 76 is provided upstream of the joining portion 111 of the above, and a seventh shutoff valve is provided at the second tip portion 73 upstream of the joining portion 112 of the branch conduit 102. A valve 108 is provided.

The leak inspection device 70 configured as described above.
When the leak inspection of the inspection object 14 is performed by using the inspection device 14, the inspection device 14 is housed in the inspection container 65 and the second tip portion is used, as in the case of the leakage inspection device 60 according to the above-described embodiment. The upper surface portion 69 of the inspection container 65 is penetrated in an airtight manner to join the device 73 to the device 14 to be inspected, and the open end 74 is arranged in the space 110 in the device 14 to be inspected. In this case, the fifth shutoff valve 103 and the sixth shutoff valve 104 arranged in the branch pipeline 101 and the branch pipeline 102 are closed in advance.

Thereafter, the first shutoff valve 15, the second shutoff valve 16, the third shutoff valve 75 and the fourth shutoff valve 76 are opened, and the seventh shutoff valve 108 of the second tip portion 73 is opened. With the pump closed, apply vacuum from the vacuum pump 62 to the main conduit 63.
Then, the vacuum is supplied through the first tip 71 into the space 68 between the inspection container 65 and the DUT 14. And
The pressure gauge 78 confirms that the atmospheric pressure in the void 68 in the inspection container 65 is a vacuum of a constant atmospheric pressure. The fourth shutoff valve 76 is closed.

Thereafter, the seventh shut-off valve 108 arranged at the second tip portion 73 is opened, and a vacuum having a pressure lower than the vacuum in the gap 68 measured by the pressure gauge 78 is applied to the vacuum accumulator tank 64. To main pipeline 63 and main pipeline 6
It is supplied into the device 14 to be inspected through the second distal end portion 73 of No. Therefore, a vacuum that is more decompressed than the inspection container 65 is supplied into the device 14 to be inspected. The negative pressure supplied to the device to be inspected 14 is measured by the pressure gauge 81 attached to the vacuum accumulator tank 64 and the vacuum pump 105 provided at the second tip portion 73, and the device to be inspected 1 is inspected.
4 and the pressure difference between the space 68 in the inspection container 65,
Then, the seventh shutoff valve 108 is closed and the fourth shutoff valve 76 of the first tip portion 71 is opened.

In this case, even if the fourth shutoff valve 76 and the seventh shutoff valve 108 are opened at the same time, and then the fourth shutoff valve 76 is closed when the atmospheric pressure of the vacuum reaches a predetermined value. Good. Thus, at the same time, the fourth shutoff valve 76 and the seventh shutoff valve
When the shutoff valve 108 is opened to supply the vacuum to both the inspection object 14 and the inspection container 65 at the same time, even when the inspection object 14 has a thin wall thickness, for example. Therefore, the leak inspection can be performed without deforming the shape of the inspection object 14 under pressure.

By closing the seventh shut-off valve 108 and opening the fourth shut-off valve 76, a leak inspection circuit 39 from the first tip 71 through the bypass line 19 to the flowmeter 20.
Is formed.

Therefore, when a hole or a crack is formed in the object 14 to be inspected, the gas flows from the void 68 into the object 14 to be inspected, and in the leak inspection circuit 39, an arrow is drawn. Gas flow in the A direction occurs. The flow meter 20 detects the flow rate of the gas as a positive flow rate to measure the presence / absence of leak and the leak amount.

Therefore, in the leak inspection apparatus 70 according to the present embodiment, the space 68 between the inspection object 14 and the inspection container 65, which has a volume smaller than the internal volume of the inspection object 14, is formed. Since the flow meter 20 detects the flow of gas via the flowmeter 20 to perform the leak inspection, the leak inspection is performed by applying pressure to the inspection object 14 itself as in the other embodiments. The leak inspection can be performed quickly.

In the leak inspection apparatus 70 according to the present embodiment, the vacuum is supplied to the inspection object 14 and the inspection container 65. Therefore, the embodiment shown in FIG. Compared to the case of the leak inspection device 60 according to the embodiment, the heat insulation effect of the vacuum is further increased, the influence of the temperature from the surroundings on the inspection object 14 is more reliably reduced, and the influence of the temperature due to the surrounding environment is further reduced. A small amount of leak inspection can be performed.

Further, in the fourth embodiment,
The case where the vacuum is supplied to the device under test 14 and the vacuum reduced in pressure than the test container 65 is supplied to the device 14 to be inspected has been described as an example. The pressure may be lower than that of the inspection device 14, and is not limited to the above-mentioned embodiment.

Further, in each of the above-described embodiments, the case where the mass flowmeter is used as the flowmeter has been described as an example, but the present invention is not limited to each of the above-described embodiments and other types of flowmeters may be used. May be.

[0121]

According to the inventions of claims 1 and 2,
It is possible to provide a leak inspection method using a flow meter that can shorten the time required for the leak inspection and can easily and quickly perform the leak inspection even in a container that requires a large-capacity hermeticity.

Further, according to the invention described in claim 3, it is possible to provide a leak inspection method capable of performing a leak inspection more quickly.

Further, in the inventions according to claims 4 to 6, it is possible to provide a leak inspection method capable of effectively reducing the influence of the environmental temperature on the inspection object.

Further, in the inventions according to claims 7, 8, 10 and 11, the time required for the leak inspection is shortened, and the leak inspection of a container having a large capacity and requiring tightness is facilitated. It is possible to provide a leak inspection device.

Further, according to the invention of claim 9, the time required for the leak inspection can be further shortened, and the leak inspection device for easily carrying out the leak inspection of the container having a large capacity and required to be hermetically sealed. Can be provided.

Further, in the invention of claim 12,
It is possible to provide a leak inspection device capable of effectively reducing the influence of the environmental temperature on the inspection object.

According to the invention of claim 13,
It is possible to provide a leak inspection device that can more reliably reduce the influence of temperature on the inspection object.

[Brief description of drawings]

FIG. 1 is a conceptual diagram showing a first embodiment of a leak inspection apparatus according to the present invention.

FIG. 2 is a conceptual diagram showing a second embodiment of a leak inspection device according to the present invention.

FIG. 3 is a leak inspection device corresponding to the first embodiment of the leak inspection device according to the present invention, in which a leak inspection is performed using a leak inspection device using a lift-up valve as a shutoff valve. 3 is a graph showing the flow state of gas in FIG.

FIG. 4 is a diagram showing another embodiment of the insertion member, which is one embodiment of the leak inspection apparatus according to the present invention.

FIG. 5 is a conceptual diagram showing a third embodiment of a leak inspection device according to the present invention.

FIG. 6 is a conceptual diagram showing a fourth embodiment of a leak inspection device according to the present invention.

[Explanation of symbols]

10 Leak inspection device 11 pipelines 12 Pressure supply source 13 Pressure control valve 14 Inspected 15 First shutoff valve 16 Second shutoff valve 17 upstream 18 Downstream 19 Bypass pipeline 20 Flowmeter 21 Insert member 22 Substrate 23 Fixing rod 24 screws 25 Fixed member 26 Bottom 27 Tip 28 Inspection line 29 holes 30 Tip opening 31 Inside 32 outer surface 33 void 34 Main pipeline 35 Downstream pipeline 36 openings 37 Bottom 38 Sides 39 Leak inspection circuit 40 Leak inspection device 41 Pressurizing device 42 Pressurizing line 43 Third shutoff valve 60 Leak inspection device 62 vacuum pump 63 main pipeline 64 vacuum accumulator tank 65 inspection container 66 Tip 67 Open end 68 Void 69 Upper surface 70 Leak inspection device 71 First Tip 72 Tip opening 73 Second tip 74 Open end 75 Third shutoff valve 76 Fourth shutoff valve 77 Joint 78 Pressure gauge 79 Pressure control valve 80 Pressure regulating valve 81 pressure gauge 90 Flange 91 packing 92 Fourth shutoff valve 93 Connection site 94 Connection part 95 Inner wall surface 96 void 97 Insert member 98 lid 99 void 100 Leak inspection device 101 branch pipe 102 Branch line 103 Fifth shutoff valve 104 6th shutoff valve 105 pressure gauge 106 arrow 107 arrow 108 Seventh shutoff valve 109 void 110 void 111 Joint site 112 junction

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Komitsu Muro             2-19-3 Higashi-Ueno, Taito-ku, Tokyo 2nd             Yoshizawa Building 4F Gas Mix Industry Co., Ltd.             Within F term (reference) 2G067 AA44 BB03 BB04 DD03 DD04

Claims (13)

[Claims] 1. A predetermined pressure is supplied to an object to be inspected, which has a void inside and is required to have a predetermined hermeticity, and a gas flowing out of or flowing into the object to be inspected is detected by a flow meter. What is claimed is: 1. A leak inspection method for determining a leak of an inspection object, comprising reducing the volume of a void of the inspection object to determine the leakage of the inspection object. 2. A predetermined pressure is supplied to an object to be inspected, which has a void inside and is required to have a predetermined hermeticity, and a gas flowing out from the object to be inspected or flowing into the object to be inspected is detected by a flow meter. A leak inspection method for determining a leak of an inspection object, the inspection container having a volume capable of forming a void having a volume smaller than that of the inspection object when the inspection object is stored. The object to be inspected is housed in, and the leakage of the object to be inspected is determined by forming a pressure difference between the void inside the object to be inspected and the void between the object to be inspected and the inspection container. Leak inspection method. 3. A predetermined pressure is supplied to an object to be inspected, which has a void inside and is required to have a predetermined hermeticity, and a gas flowing out from the object to be inspected or flowing into the object to be inspected is detected by a flow meter. A leak inspection method for determining a leak of an inspection object, wherein after a predetermined pressure is supplied to the inspection object, a large pressure higher than the predetermined pressure is instantaneously supplied to the inspection object. The leak inspection method according to claim 1 or 2, wherein the leak is determined. 4. A predetermined pressure is supplied to an object to be inspected which has a void inside and is required to have a predetermined hermeticity, and a gas flowing out from the object to be inspected or flowing into the object to be inspected is detected by a flow meter. 3. The leak inspection method according to claim 1, wherein the predetermined pressure supplied to the object to be inspected is a negative pressure. 5. The inspection object is placed in an inspection container,
5. The leak inspection method according to claim 4, wherein negative pressure is also supplied into the inspection container. 6. The leak inspection method according to claim 4, wherein the pressure supplied to the inspection object is a vacuum. 7. A pressure supply source provided at one end of a pipe forming a gas flow path, and a shutoff valve provided downstream of the pressure supply source and capable of shutting off pressure supply to an object to be inspected. And a flowmeter provided on the downstream side of the shutoff valve, which supplies a predetermined pressure to the inspection object that has a void inside and is required to have a predetermined airtightness so as to flow out or out of the inspection object. A leak inspection apparatus for determining a leak of an inspected object by detecting a gas flowing into an inspected object with a flow meter, wherein the inspected object can reduce the volume of voids inside the inspected object, A leak inspection apparatus characterized in that an insertion member having a predetermined gap formed with an inner wall surface of an object to be inspected is arranged, and the other end of the pipe is arranged in the gap. 8. A pressure supply source provided at one end of a pipe forming a gas flow path, and a shutoff valve provided downstream of the pressure supply source and capable of shutting off pressure supply to an object to be inspected. And a flowmeter provided on the downstream side of the shutoff valve, which supplies a predetermined pressure to the inspection object that has a void inside and is required to have a predetermined airtightness so as to flow out or out of the inspection object. A leak inspection device for detecting a gas flowing into an inspection object by a flow meter to determine leakage of the inspection object, capable of reducing the volume of voids inside the inspection object, and at the same time with the inner wall surface of the inspection object. A predetermined gap is provided between the insertion member in which a predetermined gap is formed and a lid which can seal the inspection object and can form a gap between the insertion member and the inside wall surface of the inspection object. When,
The leak inspection apparatus according to claim 7, wherein a predetermined pressure is supplied to a gap between the insertion member and the insertion member to perform a leak inspection. 9. A pressurizing unit capable of instantaneously supplying a pressure greater than the pressure supplied from the pressure supply source to the object to be inspected is provided on the downstream side of the flowmeter. The leak inspection apparatus according to claim 7. 10. A pressure supply source provided at one end of a pipeline forming a gas flow path, and a shutoff valve provided downstream of the pressure supply source and capable of shutting off pressure supply to an object to be inspected. When,
A flow meter provided on the downstream side of the shutoff valve, which has a void inside and supplies a predetermined pressure to the inspection object that requires a predetermined airtightness, and flows out from the inspection object or the inspection object. A leak inspecting apparatus for detecting a leak of an inspected object by detecting a gas flowing into the inspected object, wherein the inspected object is housed in an inspecting container, and the other end of the pipeline is the inspecting container. A leak inspection device, which is disposed between the inspection object and the inspection container in a space having a volume smaller than the internal volume of the inspection object. 11. The first other end of the conduit is disposed inside the inspection object, and the second other end of the conduit is formed between the inspection container and the inspection object. Is disposed in a void having a volume smaller than the volume of the object to be inspected, and pressure is supplied from the pipe line so that a pressure difference is formed between the void in the object to be inspected and the void. 10. The leak inspection apparatus according to claim 9, wherein the flow meter is configured to detect the flow of gas through the second other end of the pipe line. 12. The leak inspection apparatus according to claim 10, wherein a negative pressure is supplied to either the inside of the inspection object or the gap between the inspection container and the inspection object. 13. The leak inspection apparatus according to claim 10, wherein a vacuum is supplied to the space inside the inspection object and between the inspection container and the inspection object.