JP2018078217A - 薄膜トランジスタ基板 - Google Patents
薄膜トランジスタ基板 Download PDFInfo
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- JP2018078217A JP2018078217A JP2016219881A JP2016219881A JP2018078217A JP 2018078217 A JP2018078217 A JP 2018078217A JP 2016219881 A JP2016219881 A JP 2016219881A JP 2016219881 A JP2016219881 A JP 2016219881A JP 2018078217 A JP2018078217 A JP 2018078217A
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- electrode layer
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- thin film
- film
- Prior art date
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Images
Classifications
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78618—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1218—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition or structure of the substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
- H01L27/1225—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1248—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition or shape of the interlayer dielectric specially adapted to the circuit arrangement
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
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Abstract
Description
まず、本実施の形態に係るTFT基板が用いられる表示装置の一例として、有機EL表示装置の構成について説明する。
図1は、本実施の形態に係る有機EL表示装置10の一部切り欠き斜視図である。図2は、本実施の形態に係る有機EL表示装置10のピクセルバンクの一例を示す斜視図である。
次に、本実施の形態に係るTFT基板20について、図4を用いて説明する。図4は、本実施の形態に係るTFT基板20の構成を示す断面図である。
基板110は、例えば、電気絶縁性を有する材料から構成される基板である。例えば、基板110は、無アルカリガラス、石英ガラス、高耐熱性ガラスなどのガラス材料、又は、ポリエチレン、ポリプロピレン、ポリイミドなどの樹脂材料から構成される基板である。
アンダーコート層115は、基板110上に設けられた無機層の一例である。アンダーコート層115は、基板110の表面(酸化物半導体層140が形成される側の面)に形成されている。アンダーコート層115が設けられることにより、基板110に含まれる不純物(例えば、ナトリウム(Na)及びリン(P)など)、又は、大気中の水分などが酸化物半導体層140に浸入するのを抑制することができる。これにより、酸化物半導体層140の膜質を安定化させて、TFT特性を安定化させることができる。
下部電極層120は、基板110の上方に設けられた第1電極層の一例であり、所定形状で形成されている。本実施の形態において、下部電極層120は、アンダーコート層115上に形成される。
容量絶縁層130は、基板110の上方に形成される。本実施の形態において、容量絶縁層130は、下部電極層120を覆うようにアンダーコート層115上に形成される。具体的には、容量絶縁層130は、アンダーコート層115の全面に亘って形成されている。
酸化物半導体層140は、TFT100のチャネル層である。酸化物半導体層140は、ゲート絶縁層150を挟んでゲート電極層160と対向している。本実施の形態では、酸化物半導体層140は、容量絶縁層130上に所定形状で形成されている。
上部電極層145は、下部電極層120の上方に対向して設けられた第2電極層の一例であり、所定形状で形成されている。本実施の形態では、上部電極層145は、容量絶縁層130上に形成されている。
ゲート絶縁層150は、酸化物半導体層140のチャネル領域141上に設けられている。詳細は後述するが、ゲート絶縁層150は、ゲート電極層160をマスクとして自己整合的に形成される。このため、ゲート絶縁層150とゲート電極層160との平面視形状は略一致する。
ゲート電極層160は、ゲート絶縁層150上に設けられている。具体的には、ゲート電極層160は、チャネル領域141の直上方向に位置している。本実施の形態では、ゲート電極層160の端面は、ゲート絶縁層150の端面と略面一であり、上面視において、ゲート電極層160の輪郭線とゲート絶縁層150の輪郭線とは略一致している。
層間絶縁層170は、水素の透過を抑制するために設けられた絶縁層である。図4に示すように、層間絶縁層170は、下部酸化アルミニウム層171と、中間絶縁層172と、上部酸化アルミニウム層173との3層構造の積層膜である。層間絶縁層170の上層部及び下層部に、酸化アルミニウム層が設けられていることで、水素ブロック機能を高めることができる。
下部酸化アルミニウム層171は、水素の透過を抑制する水素抑制層(水素ブロック層)の一例である。下部酸化アルミニウム層171は、中間絶縁層172に含まれる水素がチャネル領域141に供給されるのを抑制する。また、下部酸化アルミニウム層171は、アンダーコート層115又は容量絶縁層130に含まれる水素が中間絶縁層172に供給されるのを抑制する。
中間絶縁層172は、下部酸化アルミニウム層171を覆うように設けられている。具体的には、中間絶縁層172は、TFT100及び容量部101が形成されている素子領域の全面を覆うように形成されている。中間絶縁層172の膜厚は、特に限定されないが、例えば、200nmである。
上部酸化アルミニウム層173は、水素の透過を抑制する水素抑制層(水素ブロック層)の一例である。上部酸化アルミニウム層173は、平坦化層180に含まれる水素が中間絶縁層172に供給されるのを抑制する。
平坦化層180は、層間絶縁層170上に形成される。平坦化層180は、例えば、ポリイミドなどの有機材料を用いて形成されている。なお、平坦化層180は、有機材料に限らず、酸化シリコン(SiOx)、窒化シリコン(SiNx)、酸窒化シリコン(SiONx)又は酸化アルミニウム(AlOx)などの無機材料を用いて形成されていてもよい。平坦化層180は、単層膜でもよく、積層膜でもよい。
ソース電極層190s及びドレイン電極層190dは、平坦化層180上に所定形状で形成されている。ソース電極層190s及びドレイン電極層190dの各々は、酸化物半導体層140と電気的に接続されている。
続いて、本実施の形態に係るTFT基板20の製造方法について、図6A〜図6Dを用いて説明する。
続いて、本実施の形態に係るTFT基板20の作用効果について、本実施の形態の技術に至った経緯も含めて説明する。
以下では、本実施の形態に係るTFT基板の変形例について説明する。
以上、本発明に係るTFT基板について、上記の実施の形態及びその変形例に基づいて説明したが、本発明は、上記の実施の形態に限定されるものではない。
20 TFT基板
21 バンク
30 画素
30B、30G、30R サブ画素
31 画素回路
32、33、100 薄膜トランジスタ(TFT)
32d、33d ドレイン電極
32g、33g ゲート電極
32s、33s ソース電極
34 キャパシタ
40 有機EL素子
41 陽極
42 EL層
43 陰極
50 ゲート配線
60 ソース配線
70 電源配線
101、101x、201 容量部
110 基板
115 アンダーコート層
120 下部電極層
121 引出部
130 容量絶縁層
131、131x 表層部分
140、140a、145a 酸化物半導体層
141 チャネル領域
142 ソース領域
143 ドレイン領域
145、145x、245 上部電極層
146、146x 酸化物半導体材料
150 ゲート絶縁層
150a ゲート絶縁膜
160 ゲート電極層
160a ゲート電極膜
170 層間絶縁層
171 下部酸化アルミニウム層
172 中間絶縁層
173 上部酸化アルミニウム層
180 平坦化層
181 開口部
190d ドレイン電極層
190s ソース電極層
Claims (5)
- 基板と、
前記基板の上方に設けられた薄膜トランジスタと、
前記基板の上方に設けられ、前記薄膜トランジスタと電気的に接続された容量部とを備え、
前記容量部は、
前記基板の上方に設けられた、導電性材料を主成分として含む第1電極層と、
前記第1電極層の上方に対向して設けられた、導電化された酸化物半導体材料を主成分として含む第2電極層と、
前記第1電極層及び前記第2電極層間に設けられた絶縁層とを備え、
前記第1電極層には、平面視における外周の少なくとも一部から外方に引き出された引出部が設けられ、
前記第2電極層は、平面視において、前記引出部を除いて前記第1電極層を覆っている
薄膜トランジスタ基板。 - 前記薄膜トランジスタ基板は、さらに、前記第2電極層上に設けられた酸化アルミニウム層を備える
請求項1に記載の薄膜トランジスタ基板。 - 前記導電性材料は、チタン又はアルミニウムである
請求項1又は2に記載の薄膜トランジスタ基板。 - 前記第2電極層の平面視形状と、前記第1電極層の平面視形状とが一致している
請求項1〜3のいずれか1項に記載の薄膜トランジスタ基板。 - 前記第2電極層の平面視形状は、前記第1電極層の平面視形状に所定幅のマージンを加えた形状である
請求項1〜3のいずれか1項に記載の薄膜トランジスタ基板。
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