JP2018073913A5 - - Google Patents
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- Publication number
- JP2018073913A5 JP2018073913A5 JP2016209854A JP2016209854A JP2018073913A5 JP 2018073913 A5 JP2018073913 A5 JP 2018073913A5 JP 2016209854 A JP2016209854 A JP 2016209854A JP 2016209854 A JP2016209854 A JP 2016209854A JP 2018073913 A5 JP2018073913 A5 JP 2018073913A5
- Authority
- JP
- Japan
- Prior art keywords
- magnetoresistive element
- ferromagnetic layer
- layer
- area
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005294 ferromagnetic effect Effects 0.000 claims description 85
- 230000005291 magnetic effect Effects 0.000 claims description 29
- 230000005415 magnetization Effects 0.000 claims description 27
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- 239000000696 magnetic material Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 claims 3
- 230000005290 antiferromagnetic effect Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016209854A JP2018073913A (ja) | 2016-10-26 | 2016-10-26 | 磁気センサおよびその製造方法 |
| PCT/JP2017/037844 WO2018079404A1 (ja) | 2016-10-26 | 2017-10-19 | 磁気センサおよびその製造方法 |
| US16/386,428 US10901049B2 (en) | 2016-10-26 | 2019-04-17 | Magnetic sensor and method for manufacturing said magnetic sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016209854A JP2018073913A (ja) | 2016-10-26 | 2016-10-26 | 磁気センサおよびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2018073913A JP2018073913A (ja) | 2018-05-10 |
| JP2018073913A5 true JP2018073913A5 (cg-RX-API-DMAC7.html) | 2019-02-14 |
Family
ID=62024984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016209854A Pending JP2018073913A (ja) | 2016-10-26 | 2016-10-26 | 磁気センサおよびその製造方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US10901049B2 (cg-RX-API-DMAC7.html) |
| JP (1) | JP2018073913A (cg-RX-API-DMAC7.html) |
| WO (1) | WO2018079404A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7023637B2 (ja) * | 2017-08-08 | 2022-02-22 | 株式会社日立ハイテク | 磁気トンネル接合素子の製造方法 |
| US10794968B2 (en) * | 2017-08-24 | 2020-10-06 | Everspin Technologies, Inc. | Magnetic field sensor and method of manufacture |
| US11493573B2 (en) | 2019-08-27 | 2022-11-08 | Western Digital Technologies, Inc. | Magnetic sensor with dual TMR films and the method of making the same |
| US11428758B2 (en) * | 2019-08-27 | 2022-08-30 | Western Digital Technologies, Inc. | High sensitivity TMR magnetic sensor |
| JP7136137B2 (ja) * | 2020-01-29 | 2022-09-13 | Tdk株式会社 | 磁気センサ、磁気検出装置及び磁気検出システム |
| JP2022109020A (ja) * | 2021-01-14 | 2022-07-27 | 大銀微系統股▲分▼有限公司 | 位置検出機構 |
| JP7746233B2 (ja) * | 2022-08-09 | 2025-09-30 | 株式会社東芝 | 磁気センサ及び検査装置 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100334837B1 (ko) | 1998-07-21 | 2002-05-04 | 가타오카 마사타카 | 스핀밸브형 박막소자 및 그 제조 방법 |
| JP3623418B2 (ja) * | 1999-12-06 | 2005-02-23 | アルプス電気株式会社 | スピンバルブ型磁気抵抗効果素子及びそれを備えた薄膜磁気へッドとそれらの製造方法 |
| JP3969002B2 (ja) * | 2001-02-22 | 2007-08-29 | ヤマハ株式会社 | 磁気センサ |
| US7023670B2 (en) | 2001-11-19 | 2006-04-04 | Alps Electric Co., Ltd. | Magnetic sensing element with in-stack biasing using ferromagnetic sublayers |
| JP2003338644A (ja) * | 2001-11-19 | 2003-11-28 | Alps Electric Co Ltd | 磁気検出素子及びその製造方法 |
| US6956766B2 (en) * | 2002-11-26 | 2005-10-18 | Kabushiki Kaisha Toshiba | Magnetic cell and magnetic memory |
| JP4673274B2 (ja) | 2006-09-11 | 2011-04-20 | ヒタチグローバルストレージテクノロジーズネザーランドビーブイ | 外部ストレス耐性の高い磁気抵抗効果型ヘッド |
| WO2011111493A1 (ja) * | 2010-03-12 | 2011-09-15 | アルプス・グリーンデバイス株式会社 | 電流センサ |
| JP5343936B2 (ja) | 2010-07-06 | 2013-11-13 | 株式会社デンソー | 磁気センサ装置 |
| JP5447616B2 (ja) * | 2012-08-07 | 2014-03-19 | Ｔｄｋ株式会社 | 磁気センサの製造方法 |
| WO2015033464A1 (ja) * | 2013-09-09 | 2015-03-12 | 株式会社日立製作所 | 磁気センサ素子 |
-
2016
- 2016-10-26 JP JP2016209854A patent/JP2018073913A/ja active Pending
-
2017
- 2017-10-19 WO PCT/JP2017/037844 patent/WO2018079404A1/ja not_active Ceased
-
2019
- 2019-04-17 US US16/386,428 patent/US10901049B2/en active Active