JP2018041924A - 容器収納設備 - Google Patents
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- 238000003860 storage Methods 0.000 claims description 345
- 238000009423 ventilation Methods 0.000 claims description 28
- 230000032258 transport Effects 0.000 abstract description 35
- 239000007789 gas Substances 0.000 description 117
- 238000004519 manufacturing process Methods 0.000 description 20
- 238000010586 diagram Methods 0.000 description 14
- 238000000034 method Methods 0.000 description 5
- 239000000047 product Substances 0.000 description 3
- 238000000746 purification Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000013067 intermediate product Substances 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 101100023111 Schizosaccharomyces pombe (strain 972 / ATCC 24843) mfc1 gene Proteins 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
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Abstract
【解決手段】容器収納設備は、複数の収納部を収納部群(G)として有する収納棚(2)と、各収納部に対して分岐型の供給配管(35)を介して浄化気体を供給する気体供給装置(3)と、収納部に対して容器(7)を搬送する搬送装置と、搬送装置の動作を制御する制御部とを備える。制御部は、収納部に複数の容器(7)を収納するにあたり、同じ種別に属する容器(7)どうしを同じ収納部群(G)に属する収納部に搬送するように搬送装置の動作を制御する。
【選択図】図10
Description
複数の収納部を複数の収納部群に区分された状態で有する収納棚と、
それぞれの前記収納部に対して、前記収納部群毎に浄化気体を供給する気体供給装置と、
前記収納部に対して容器を搬送する搬送装置と、
前記搬送装置の動作を制御する制御部と、を備え、
前記容器が、その内部を前記浄化気体が流通する際の通気抵抗の大きさに応じて複数種別に区別されており、
前記制御部は、前記収納部に複数の前記容器を収納するにあたり、同じ種別に属する前記容器どうしを同じ前記収納部群に属する前記収納部に搬送するように前記搬送装置の動作を制御する。
前記制御部は、前記収納部に前記容器を収納するにあたり、当該容器と同じ種別に属する前記容器が収納されていない場合には、全ての前記収納部に前記容器が収納されていない空の前記収納部群に属するいずれかの前記収納部に当該容器を搬送するように前記搬送装置の動作を制御するとともに、その搬送先の前記収納部が属する前記収納部群を、当該容器と同じ種別に属する他の前記容器の収納先に設定することが好ましい。
前記気体供給装置は、前記浄化気体の流量を調整する流量調整部を前記収納部群毎に1つずつ含み、
前記収納部群毎の前記流量調整部は、当該収納部群に属する前記収納部に収納された前記容器の種別に応じて前記浄化気体の流量を調整することが好ましい。
前記気体供給装置は、それぞれの前記収納部に対して、前記収納部群毎に、複数の分岐管を有する供給配管を介して気体供給源から前記浄化気体を供給し、
前記収納部群は、基準個数の前記収納部が属する通常収納部群と、前記基準個数よりも少ない個数の前記収納部が属する特別収納部群と、を含み、
前記制御部は、前記通気抵抗が予め定められた基準抵抗値以上の前記容器を、前記特別収納部群に属する前記収納部に搬送するように前記搬送装置の動作を制御することが好ましい。
容器収納設備の第1実施形態について、図面を参照して説明する。本実施形態の容器収納設備1は、物品収納設備の一種であり、物品としての容器7を収容する。この容器収納設備1は、例えば工業製品の製造プロセスにおいて、工程待ち等の間に原料や中間製品等を一時的に保管したり、完成品を保管したりするために用いられる。
容器収納設備の第2実施形態について、図面を参照して説明する。本実施形態の容器収納設備1は、収納棚2の具体的構成が上記の第1実施形態とは異なっている。また、それに伴い、浄化気体の流量均一化のための物品収納制御の具体的処理内容も、上記の第1実施形態とは一部異なっている。以下、本実施形態に係る容器収納設備1について、主に第1実施形態との相違点について説明する。なお、特に明記しない点に関しては、第1実施形態と同様であり、同一の符号を付して詳細な説明は省略する。
(1)上記の各実施形態では、それぞれの収納部群Gに容器7を収納するにあたり、供給配管35の端部領域Reに対応付けられた収納部Sに対して優先的に、かつ、接続領域Rcに対応付けられた収納部Sに対して劣後的に容器7を搬送する構成を例として説明した。しかし、そのような構成に限定されることなく、例えば図13に示すように、供給配管35の各領域とは無関係に、搬送先の収納部群Gに属するいずれかの収納部Sに対してランダムに容器7を搬送しても良い。
2 収納棚
3 気体供給装置
4 搬送装置
5 制御部
7 容器
31 気体供給源
33 流量調整部
35 供給配管
35B 分岐管
S 収納部
G 収納部群
Gn 通常収納部群
Gs 特別収納部群
Claims (4)
- 複数の収納部を複数の収納部群に区分された状態で有する収納棚と、
それぞれの前記収納部に対して、前記収納部群毎に浄化気体を供給する気体供給装置と、
前記収納部に対して容器を搬送する搬送装置と、
前記搬送装置の動作を制御する制御部と、を備え、
前記容器が、その内部を前記浄化気体が流通する際の通気抵抗の大きさに応じて複数種別に区別されており、
前記制御部は、前記収納部に複数の前記容器を収納するにあたり、同じ種別に属する前記容器どうしを同じ前記収納部群に属する前記収納部に搬送するように前記搬送装置の動作を制御する容器収納設備。 - 前記制御部は、前記収納部に前記容器を収納するにあたり、当該容器と同じ種別に属する前記容器が収納されていない場合には、全ての前記収納部に前記容器が収納されていない空の前記収納部群に属するいずれかの前記収納部に当該容器を搬送するように前記搬送装置の動作を制御するとともに、その搬送先の前記収納部が属する前記収納部群を、当該容器と同じ種別に属する他の前記容器の収納先に設定する請求項1に記載の容器収納設備。
- 前記気体供給装置は、前記浄化気体の流量を調整する流量調整部を前記収納部群毎に1つずつ含み、
前記収納部群毎の前記流量調整部は、当該収納部群に属する前記収納部に収納された前記容器の種別に応じて前記浄化気体の流量を調整する請求項1又は2に記載の容器収納設備。 - 前記気体供給装置は、それぞれの前記収納部に対して、前記収納部群毎に、複数の分岐管を有する供給配管を介して気体供給源から前記浄化気体を供給し、
前記収納部群は、基準個数の前記収納部が属する通常収納部群と、前記基準個数よりも少ない個数の前記収納部が属する特別収納部群と、を含み、
前記制御部は、前記通気抵抗が予め定められた基準抵抗値以上の前記容器を、前記特別収納部群に属する前記収納部に搬送するように前記搬送装置の動作を制御する請求項1から3のいずれか一項に記載の容器収納設備。
Priority Applications (5)
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JP2016176977A JP6572854B2 (ja) | 2016-09-09 | 2016-09-09 | 容器収納設備 |
KR1020170113818A KR102311744B1 (ko) | 2016-09-09 | 2017-09-06 | 용기 수납 설비 |
US15/698,096 US10373851B2 (en) | 2016-09-09 | 2017-09-07 | Container storage facility |
CN201710805517.1A CN107808845B (zh) | 2016-09-09 | 2017-09-08 | 容器收纳设备 |
TW106130775A TWI726149B (zh) | 2016-09-09 | 2017-09-08 | 容器收納設備 |
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SG11201610075XA (en) * | 2014-06-16 | 2017-01-27 | Murata Machinery Ltd | Purge device, purge system, purge method, and control method in purge system |
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CN107808845B (zh) | 2023-06-20 |
JP6572854B2 (ja) | 2019-09-11 |
KR20180028947A (ko) | 2018-03-19 |
US10373851B2 (en) | 2019-08-06 |
TWI726149B (zh) | 2021-05-01 |
US20180076073A1 (en) | 2018-03-15 |
CN107808845A (zh) | 2018-03-16 |
KR102311744B1 (ko) | 2021-10-08 |
TW201816921A (zh) | 2018-05-01 |
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