JP2018025398A - 電磁誘導式位置検出器 - Google Patents

電磁誘導式位置検出器 Download PDF

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Publication number
JP2018025398A
JP2018025398A JP2016155405A JP2016155405A JP2018025398A JP 2018025398 A JP2018025398 A JP 2018025398A JP 2016155405 A JP2016155405 A JP 2016155405A JP 2016155405 A JP2016155405 A JP 2016155405A JP 2018025398 A JP2018025398 A JP 2018025398A
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Japan
Prior art keywords
detection
gap
signal
circuit
excitation
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Pending
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JP2016155405A
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English (en)
Japanese (ja)
Inventor
竹内　克佳
Katsuyoshi Takeuchi
克佳 竹内
石井　浩
Hiroshi Ishii
浩 石井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Machine Tool Co Ltd
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Mitsubishi Heavy Industries Machine Tool Co Ltd
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Application filed by Mitsubishi Heavy Industries Machine Tool Co Ltd filed Critical Mitsubishi Heavy Industries Machine Tool Co Ltd
Priority to JP2016155405A priority Critical patent/JP2018025398A/ja
Priority to CN201710666102.0A priority patent/CN107702733B/zh
Priority to TW106126689A priority patent/TWI639816B/zh
Publication of JP2018025398A publication Critical patent/JP2018025398A/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
    • G01D5/2066—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by movement of a single coil with respect to a single other coil

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP2016155405A 2016-08-08 2016-08-08 電磁誘導式位置検出器 Pending JP2018025398A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2016155405A JP2018025398A (ja) 2016-08-08 2016-08-08 電磁誘導式位置検出器
CN201710666102.0A CN107702733B (zh) 2016-08-08 2017-08-07 电磁感应式位置检测器
TW106126689A TWI639816B (zh) 2016-08-08 2017-08-08 Electromagnetically induced position detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016155405A JP2018025398A (ja) 2016-08-08 2016-08-08 電磁誘導式位置検出器

Publications (1)

Publication Number Publication Date
JP2018025398A true JP2018025398A (ja) 2018-02-15

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ID=61170660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016155405A Pending JP2018025398A (ja) 2016-08-08 2016-08-08 電磁誘導式位置検出器

Country Status (3)

Country Link
JP (1) JP2018025398A (zh)
CN (1) CN107702733B (zh)
TW (1) TWI639816B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021162498A (ja) * 2020-04-01 2021-10-11 東芝三菱電機産業システム株式会社 回転子電気的振れ測定装置の信号処理装置、回転子電気的振れ測定装置および回転子電気的振れ測定方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5998990A (en) * 1997-08-25 1999-12-07 Mitutoyo Corporation Pitch-compensated induced current position transducer
JP5270277B2 (ja) * 2008-09-16 2013-08-21 愛三工業株式会社 位置センサ
JP5249278B2 (ja) * 2010-04-19 2013-07-31 愛三工業株式会社 位置センサ
JP6057680B2 (ja) * 2012-11-20 2017-01-11 三菱重工工作機械株式会社 電磁誘導式位置検出器の検出位置補正方法
GB2517152A (en) * 2013-08-12 2015-02-18 Gde Technology Ltd Position sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021162498A (ja) * 2020-04-01 2021-10-11 東芝三菱電機産業システム株式会社 回転子電気的振れ測定装置の信号処理装置、回転子電気的振れ測定装置および回転子電気的振れ測定方法
JP7228540B2 (ja) 2020-04-01 2023-02-24 東芝三菱電機産業システム株式会社 回転子電気的振れ測定装置の信号処理装置、回転子電気的振れ測定装置および回転子電気的振れ測定方法

Also Published As

Publication number Publication date
TWI639816B (zh) 2018-11-01
CN107702733B (zh) 2020-03-06
CN107702733A (zh) 2018-02-16
TW201809604A (zh) 2018-03-16

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