JP2018024948A5 - - Google Patents
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- Publication number
- JP2018024948A5 JP2018024948A5 JP2017219572A JP2017219572A JP2018024948A5 JP 2018024948 A5 JP2018024948 A5 JP 2018024948A5 JP 2017219572 A JP2017219572 A JP 2017219572A JP 2017219572 A JP2017219572 A JP 2017219572A JP 2018024948 A5 JP2018024948 A5 JP 2018024948A5
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- vapor deposition
- processing furnace
- vacuum
- deposition apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims description 49
- 238000007740 vapor deposition Methods 0.000 claims description 46
- 230000008016 vaporization Effects 0.000 claims description 33
- 239000000463 material Substances 0.000 claims description 23
- 238000009834 vaporization Methods 0.000 claims description 22
- 238000000151 deposition Methods 0.000 claims description 10
- 230000008021 deposition Effects 0.000 claims description 10
- 230000001737 promoting effect Effects 0.000 claims description 9
- 238000001771 vacuum deposition Methods 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 6
- 238000007738 vacuum evaporation Methods 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 17
- 238000005019 vapor deposition process Methods 0.000 description 8
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 239000011888 foil Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017219572A JP2018024948A (ja) | 2017-11-15 | 2017-11-15 | 真空蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017219572A JP2018024948A (ja) | 2017-11-15 | 2017-11-15 | 真空蒸着装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014146558A Division JP6252862B2 (ja) | 2014-07-17 | 2014-07-17 | 真空蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2018024948A JP2018024948A (ja) | 2018-02-15 |
| JP2018024948A5 true JP2018024948A5 (enExample) | 2018-03-29 |
Family
ID=61195186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017219572A Pending JP2018024948A (ja) | 2017-11-15 | 2017-11-15 | 真空蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2018024948A (enExample) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01123069A (ja) * | 1987-11-04 | 1989-05-16 | Nippon Kentetsu Co Ltd | 薄膜蒸着装置 |
| JP5095677B2 (ja) * | 2009-06-01 | 2012-12-12 | 株式会社 後島精工 | イオンプレーティング装置 |
| WO2011009573A1 (en) * | 2009-07-22 | 2011-01-27 | Oerlikon Trading Ag, Trübach | Method for producing coatings with a single composite target |
| JP2013209698A (ja) * | 2012-03-30 | 2013-10-10 | Hitachi High-Technologies Corp | 蒸着装置 |
-
2017
- 2017-11-15 JP JP2017219572A patent/JP2018024948A/ja active Pending
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