JP2018022813A5 - - Google Patents

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Publication number
JP2018022813A5
JP2018022813A5 JP2016154213A JP2016154213A JP2018022813A5 JP 2018022813 A5 JP2018022813 A5 JP 2018022813A5 JP 2016154213 A JP2016154213 A JP 2016154213A JP 2016154213 A JP2016154213 A JP 2016154213A JP 2018022813 A5 JP2018022813 A5 JP 2018022813A5
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JP
Japan
Prior art keywords
conveyance
target device
maintenance
maintenance target
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2016154213A
Other languages
English (en)
Japanese (ja)
Other versions
JP2018022813A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2016154213A priority Critical patent/JP2018022813A/ja
Priority claimed from JP2016154213A external-priority patent/JP2018022813A/ja
Publication of JP2018022813A publication Critical patent/JP2018022813A/ja
Publication of JP2018022813A5 publication Critical patent/JP2018022813A5/ja
Pending legal-status Critical Current

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JP2016154213A 2016-08-05 2016-08-05 プローバ Pending JP2018022813A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016154213A JP2018022813A (ja) 2016-08-05 2016-08-05 プローバ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016154213A JP2018022813A (ja) 2016-08-05 2016-08-05 プローバ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2020024517A Division JP2020074496A (ja) 2020-02-17 2020-02-17 プローバ

Publications (2)

Publication Number Publication Date
JP2018022813A JP2018022813A (ja) 2018-02-08
JP2018022813A5 true JP2018022813A5 (enExample) 2019-06-20

Family

ID=61164587

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016154213A Pending JP2018022813A (ja) 2016-08-05 2016-08-05 プローバ

Country Status (1)

Country Link
JP (1) JP2018022813A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7361258B2 (ja) * 2019-11-19 2023-10-16 株式会社東京精密 プローバの組立方法及びティーチング治具
JP7390934B2 (ja) * 2020-03-03 2023-12-04 東京エレクトロン株式会社 検査装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5088167B2 (ja) * 2008-02-22 2012-12-05 東京エレクトロン株式会社 プローブ装置、プロービング方法及び記憶媒体
JP2010157550A (ja) * 2008-12-26 2010-07-15 Toshiba Corp ウエハテストシステム
JP6267928B2 (ja) * 2013-10-29 2018-01-24 東京エレクトロン株式会社 ウエハ検査装置の整備用台車及びウエハ検査装置の整備方法
JP6271257B2 (ja) * 2014-01-08 2018-01-31 東京エレクトロン株式会社 基板検査装置及びプローブカード搬送方法

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