JP2018022813A - プローバ - Google Patents

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Publication number
JP2018022813A
JP2018022813A JP2016154213A JP2016154213A JP2018022813A JP 2018022813 A JP2018022813 A JP 2018022813A JP 2016154213 A JP2016154213 A JP 2016154213A JP 2016154213 A JP2016154213 A JP 2016154213A JP 2018022813 A JP2018022813 A JP 2018022813A
Authority
JP
Japan
Prior art keywords
test head
pogo frame
probe card
unit
pogo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2016154213A
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English (en)
Japanese (ja)
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JP2018022813A5 (enExample
Inventor
拓郎 田邨
Takuo Tamura
拓郎 田邨
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
Original Assignee
Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Priority to JP2016154213A priority Critical patent/JP2018022813A/ja
Publication of JP2018022813A publication Critical patent/JP2018022813A/ja
Publication of JP2018022813A5 publication Critical patent/JP2018022813A5/ja
Pending legal-status Critical Current

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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2016154213A 2016-08-05 2016-08-05 プローバ Pending JP2018022813A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016154213A JP2018022813A (ja) 2016-08-05 2016-08-05 プローバ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016154213A JP2018022813A (ja) 2016-08-05 2016-08-05 プローバ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2020024517A Division JP2020074496A (ja) 2020-02-17 2020-02-17 プローバ

Publications (2)

Publication Number Publication Date
JP2018022813A true JP2018022813A (ja) 2018-02-08
JP2018022813A5 JP2018022813A5 (enExample) 2019-06-20

Family

ID=61164587

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016154213A Pending JP2018022813A (ja) 2016-08-05 2016-08-05 プローバ

Country Status (1)

Country Link
JP (1) JP2018022813A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021082695A (ja) * 2019-11-19 2021-05-27 株式会社東京精密 プローバの組立方法及びティーチング治具
KR20210111681A (ko) * 2020-03-03 2021-09-13 도쿄엘렉트론가부시키가이샤 검사 장치

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009200271A (ja) * 2008-02-22 2009-09-03 Tokyo Electron Ltd プローブ装置、プロービング方法及び記憶媒体
JP2010157550A (ja) * 2008-12-26 2010-07-15 Toshiba Corp ウエハテストシステム
JP2015088555A (ja) * 2013-10-29 2015-05-07 東京エレクトロン株式会社 ウエハ検査装置の整備用台車及びウエハ検査装置の整備方法
JP2015130422A (ja) * 2014-01-08 2015-07-16 東京エレクトロン株式会社 基板検査装置及びプローブカード搬送方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009200271A (ja) * 2008-02-22 2009-09-03 Tokyo Electron Ltd プローブ装置、プロービング方法及び記憶媒体
JP2010157550A (ja) * 2008-12-26 2010-07-15 Toshiba Corp ウエハテストシステム
JP2015088555A (ja) * 2013-10-29 2015-05-07 東京エレクトロン株式会社 ウエハ検査装置の整備用台車及びウエハ検査装置の整備方法
JP2015130422A (ja) * 2014-01-08 2015-07-16 東京エレクトロン株式会社 基板検査装置及びプローブカード搬送方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021082695A (ja) * 2019-11-19 2021-05-27 株式会社東京精密 プローバの組立方法及びティーチング治具
KR20210111681A (ko) * 2020-03-03 2021-09-13 도쿄엘렉트론가부시키가이샤 검사 장치
US11486924B2 (en) 2020-03-03 2022-11-01 Tokyo Electron Limited Inspection apparatus
KR102535047B1 (ko) * 2020-03-03 2023-05-26 도쿄엘렉트론가부시키가이샤 검사 장치

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