JP2018013109A - 排気システムおよび制御装置 - Google Patents

排気システムおよび制御装置 Download PDF

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Publication number
JP2018013109A
JP2018013109A JP2016144519A JP2016144519A JP2018013109A JP 2018013109 A JP2018013109 A JP 2018013109A JP 2016144519 A JP2016144519 A JP 2016144519A JP 2016144519 A JP2016144519 A JP 2016144519A JP 2018013109 A JP2018013109 A JP 2018013109A
Authority
JP
Japan
Prior art keywords
control device
unit
valve
pump
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2016144519A
Other languages
English (en)
Japanese (ja)
Other versions
JP2018013109A5 (enExample
Inventor
中村　雅哉
Masaya Nakamura
雅哉 中村
聖典 廣田
Kiyonori Hirota
聖典 廣田
小崎　純一郎
Junichiro Ozaki
純一郎 小崎
伸幸 平田
Nobuyuki Hirata
伸幸 平田
敦夫 中谷
Atsuo Nakatani
敦夫 中谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP2016144519A priority Critical patent/JP2018013109A/ja
Priority to US15/619,957 priority patent/US20180023719A1/en
Publication of JP2018013109A publication Critical patent/JP2018013109A/ja
Publication of JP2018013109A5 publication Critical patent/JP2018013109A5/ja
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • F16K31/041—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor for rotating valves
    • F16K31/042—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor for rotating valves with electric means, e.g. for controlling the motor or a clutch between the valve and the motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F16K37/0025—Electrical or magnetic means
    • F16K37/0041—Electrical or magnetic means for measuring valve parameters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0254—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor being operated by particular means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
    • F16K3/06—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • F16K31/041—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor for rotating valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP2016144519A 2016-07-22 2016-07-22 排気システムおよび制御装置 Pending JP2018013109A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2016144519A JP2018013109A (ja) 2016-07-22 2016-07-22 排気システムおよび制御装置
US15/619,957 US20180023719A1 (en) 2016-07-22 2017-06-12 Exhaust system and control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016144519A JP2018013109A (ja) 2016-07-22 2016-07-22 排気システムおよび制御装置

Publications (2)

Publication Number Publication Date
JP2018013109A true JP2018013109A (ja) 2018-01-25
JP2018013109A5 JP2018013109A5 (enExample) 2019-01-31

Family

ID=60988376

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016144519A Pending JP2018013109A (ja) 2016-07-22 2016-07-22 排気システムおよび制御装置

Country Status (2)

Country Link
US (1) US20180023719A1 (enExample)
JP (1) JP2018013109A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2575450B (en) 2018-07-09 2022-01-26 Edwards Ltd A variable inlet conductance vacuum pump, vacuum pump arrangement and method
DE102019123563A1 (de) * 2019-09-03 2021-03-04 Vat Holding Ag Vakuumventil für das Be- und/oder Entladen einer Vakuumkammer
DE102023105060A1 (de) * 2023-03-01 2024-09-05 Rapa Automotive Gmbh & Co. Kg Flexibles motor-pumpe-system

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003049771A (ja) * 2001-08-03 2003-02-21 Boc Edwards Technologies Ltd 真空ポンプの接続構造及び真空ポンプ
JP3172822U (ja) * 2011-10-24 2012-01-12 株式会社島津製作所 真空ポンプ
JP2014147170A (ja) * 2013-01-28 2014-08-14 Shimadzu Corp 真空ポンプ用モータ駆動装置および真空ポンプ
JP2015059464A (ja) * 2013-09-18 2015-03-30 株式会社島津製作所 回転式真空ポンプ
JP2016121751A (ja) * 2014-12-25 2016-07-07 株式会社島津製作所 真空バルブ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002013532A (ja) * 2000-06-28 2002-01-18 Koyo Seiko Co Ltd 磁気軸受制御装置
US6844273B2 (en) * 2001-02-07 2005-01-18 Tokyo Electron Limited Precleaning method of precleaning a silicon nitride film forming system
JP4335469B2 (ja) * 2001-03-22 2009-09-30 株式会社荏原製作所 真空排気装置のガス循環量調整方法及び装置
US6881579B2 (en) * 2001-07-30 2005-04-19 Agilent Technologies, Inc. Sample processing apparatus and methods
US20120267953A1 (en) * 2011-04-19 2012-10-25 Doyle Kevin A Apparatus and method for controlling and supplying power to electrical devices in high risk environments
US9641122B2 (en) * 2012-06-26 2017-05-02 Johnson Controls Technology Company HVAC actuator with automatic end stop recalibration
WO2015066159A1 (en) * 2013-11-01 2015-05-07 R&R Mechanical, Inc. Apparatus and method of backflow prevention

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003049771A (ja) * 2001-08-03 2003-02-21 Boc Edwards Technologies Ltd 真空ポンプの接続構造及び真空ポンプ
JP3172822U (ja) * 2011-10-24 2012-01-12 株式会社島津製作所 真空ポンプ
JP2014147170A (ja) * 2013-01-28 2014-08-14 Shimadzu Corp 真空ポンプ用モータ駆動装置および真空ポンプ
JP2015059464A (ja) * 2013-09-18 2015-03-30 株式会社島津製作所 回転式真空ポンプ
JP2016121751A (ja) * 2014-12-25 2016-07-07 株式会社島津製作所 真空バルブ

Also Published As

Publication number Publication date
US20180023719A1 (en) 2018-01-25

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