JP2018013109A5 - - Google Patents

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Publication number
JP2018013109A5
JP2018013109A5 JP2016144519A JP2016144519A JP2018013109A5 JP 2018013109 A5 JP2018013109 A5 JP 2018013109A5 JP 2016144519 A JP2016144519 A JP 2016144519A JP 2016144519 A JP2016144519 A JP 2016144519A JP 2018013109 A5 JP2018013109 A5 JP 2018013109A5
Authority
JP
Japan
Prior art keywords
control device
vacuum pump
casing
valve
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2016144519A
Other languages
English (en)
Japanese (ja)
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JP2018013109A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2016144519A priority Critical patent/JP2018013109A/ja
Priority claimed from JP2016144519A external-priority patent/JP2018013109A/ja
Priority to US15/619,957 priority patent/US20180023719A1/en
Publication of JP2018013109A publication Critical patent/JP2018013109A/ja
Publication of JP2018013109A5 publication Critical patent/JP2018013109A5/ja
Pending legal-status Critical Current

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JP2016144519A 2016-07-22 2016-07-22 排気システムおよび制御装置 Pending JP2018013109A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2016144519A JP2018013109A (ja) 2016-07-22 2016-07-22 排気システムおよび制御装置
US15/619,957 US20180023719A1 (en) 2016-07-22 2017-06-12 Exhaust system and control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016144519A JP2018013109A (ja) 2016-07-22 2016-07-22 排気システムおよび制御装置

Publications (2)

Publication Number Publication Date
JP2018013109A JP2018013109A (ja) 2018-01-25
JP2018013109A5 true JP2018013109A5 (enExample) 2019-01-31

Family

ID=60988376

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016144519A Pending JP2018013109A (ja) 2016-07-22 2016-07-22 排気システムおよび制御装置

Country Status (2)

Country Link
US (1) US20180023719A1 (enExample)
JP (1) JP2018013109A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2575450B (en) 2018-07-09 2022-01-26 Edwards Ltd A variable inlet conductance vacuum pump, vacuum pump arrangement and method
DE102019123563A1 (de) * 2019-09-03 2021-03-04 Vat Holding Ag Vakuumventil für das Be- und/oder Entladen einer Vakuumkammer
DE102023105060A1 (de) * 2023-03-01 2024-09-05 Rapa Automotive Gmbh & Co. Kg Flexibles motor-pumpe-system

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002013532A (ja) * 2000-06-28 2002-01-18 Koyo Seiko Co Ltd 磁気軸受制御装置
US6844273B2 (en) * 2001-02-07 2005-01-18 Tokyo Electron Limited Precleaning method of precleaning a silicon nitride film forming system
JP4335469B2 (ja) * 2001-03-22 2009-09-30 株式会社荏原製作所 真空排気装置のガス循環量調整方法及び装置
US6881579B2 (en) * 2001-07-30 2005-04-19 Agilent Technologies, Inc. Sample processing apparatus and methods
JP4672204B2 (ja) * 2001-08-03 2011-04-20 エドワーズ株式会社 真空ポンプの接続構造及び真空ポンプ
US20120267953A1 (en) * 2011-04-19 2012-10-25 Doyle Kevin A Apparatus and method for controlling and supplying power to electrical devices in high risk environments
JP3172822U (ja) * 2011-10-24 2012-01-12 株式会社島津製作所 真空ポンプ
US9641122B2 (en) * 2012-06-26 2017-05-02 Johnson Controls Technology Company HVAC actuator with automatic end stop recalibration
JP2014147170A (ja) * 2013-01-28 2014-08-14 Shimadzu Corp 真空ポンプ用モータ駆動装置および真空ポンプ
JP2015059464A (ja) * 2013-09-18 2015-03-30 株式会社島津製作所 回転式真空ポンプ
WO2015066159A1 (en) * 2013-11-01 2015-05-07 R&R Mechanical, Inc. Apparatus and method of backflow prevention
JP6459503B2 (ja) * 2014-12-25 2019-01-30 株式会社島津製作所 真空バルブ

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