JP2017537481A - 電流ブロック層を有する量子カスケードレーザ - Google Patents
電流ブロック層を有する量子カスケードレーザ Download PDFInfo
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Abstract
Description
この実施形態は、3.3μmで発光する埋め込み型ヘテロ構造QCLである。
実施形態Bは、3.3μmで発光する別の埋め込み型ヘテロ構造QCLである。その全体の寸法は、実施形態Aの寸法と同様である。
この実施形態は、第3の埋め込み型ヘテロ構造QCLであり、電子漏れを低減するための高い動作電界を伴う、4.3μmの波長で発光する構造である。
Claims (12)
- 基板(15;25)と、活性領域(12;22)と、クラッド(11;21)と、前記活性領域(12;22)への電流注入を提供する少なくとも2つの電極(13,16;23,26)と、埋め込み型ヘテロ構造導波路(14a〜14c;24a,24b)と、を有する、特に中赤外線領域の波長で発光する半導体量子カスケードレーザであって、
前記ヘテロ構造導波路は、第1のIII−V族半導体化合物の少なくとも1つのバリア層(14c;24c)と、少なくとも1つの第2のIII−V族半導体化合物の複数の層(14a,14b;24a,24b)と、の積層体を含んでいる、
ことを特徴とする半導体量子カスケードレーザ。 - 少なくとも1つの第2の半導体化合物の複数の埋め込み層(14a,14b;24a,24b)と交互に配置されている複数のバリア層(14c;24c)が設けられている、
請求項1記載の量子カスケードレーザ。 - 前記バリア層(14c;24c)の少なくとも1つの層は、AlAs、InAlAs、InGaAs、InGaAsPまたはInGaSbのグループのうちの1つの化合物より成る、
請求項1または2記載の量子カスケードレーザ。 - 前記埋め込み層の少なくとも1つの層(14a;24a)は、第1のIII−V族半導体化合物を含み、
前記埋め込み層の少なくとも1つの別の層(14b;24b)は、第2の、異なるIII−V族半導体化合物を含む、
請求項1から3までのいずれか1項記載の量子カスケードレーザ。 - 前記埋め込み層(14a,14b;24a,24b)の前記第1の半導体化合物は、真性化合物、特にi:InPであり、
前記第2の化合物は、ドープされた化合物、特にFeドープされた化合物、とりわけFeドープされたInPである、
請求項4記載の量子カスケードレーザ。 - 前記埋め込み層の少なくとも1つの層(24a)は、真性化合物、特にi:InPと、第2のドープされた化合物、特にFeドープされた化合物、とりわけFeドープされたInPと、の両方を含む、
請求項4記載の量子カスケードレーザ。 - 前記埋め込み層(14a,14b;24a,24b)の前記第1の半導体化合物と前記第2の化合物との両方が、ドープされた化合物、特にFeドープされた化合物、とりわけFeドープされたInPである、
請求項4記載の量子カスケードレーザ。 - 有利には6である第1の数のバリア層(14c;24c)と、有利には6である第2の数の埋め込み層(14a,14b;24a,24b)と、の埋め込み型ヘテロ構造導波路を含んでおり、前記バリア層は、前記埋め込み層と交互に積層されている、
請求項1から7までのいずれか1項記載の量子カスケードレーザ。 - 各バリア層(14c;24c)は、5nm〜200nm、有利には約50nmの厚さであり、
前記埋め込み層は、約50nm〜約3μm、有利には600nmの厚さである、
請求項8記載の量子カスケードレーザ。
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PCT/IB2014/002666 WO2016087888A1 (en) | 2014-12-03 | 2014-12-03 | Quantum cascade laser with current blocking layers |
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US (1) | US10374393B2 (ja) |
EP (1) | EP3227977B1 (ja) |
JP (1) | JP2017537481A (ja) |
KR (1) | KR101984163B1 (ja) |
CN (1) | CN107251346B (ja) |
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JP2021028971A (ja) * | 2019-08-09 | 2021-02-25 | 日本ルメンタム株式会社 | 埋め込み型半導体光素子 |
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JP2018088456A (ja) * | 2016-11-28 | 2018-06-07 | 住友電気工業株式会社 | 量子カスケード半導体レーザ |
US10355453B2 (en) | 2017-11-08 | 2019-07-16 | International Business Machines Corporation | Electro-optical device with lateral electron blocking layer |
CN110176507B (zh) * | 2019-05-31 | 2020-08-14 | 厦门市三安集成电路有限公司 | 一种台面pin的钝化结构和光电二极管及其制备方法 |
US11462886B2 (en) * | 2019-08-09 | 2022-10-04 | Lumentum Japan, Inc. | Buried-type semiconductor optical device |
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US20170373473A1 (en) | 2017-12-28 |
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CN107251346B (zh) | 2020-08-28 |
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CA2968925C (en) | 2020-11-17 |
KR20170090481A (ko) | 2017-08-07 |
WO2016087888A1 (en) | 2016-06-09 |
CA2968925A1 (en) | 2016-06-09 |
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US10374393B2 (en) | 2019-08-06 |
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