JP2017536049A5 - - Google Patents

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Publication number
JP2017536049A5
JP2017536049A5 JP2017527692A JP2017527692A JP2017536049A5 JP 2017536049 A5 JP2017536049 A5 JP 2017536049A5 JP 2017527692 A JP2017527692 A JP 2017527692A JP 2017527692 A JP2017527692 A JP 2017527692A JP 2017536049 A5 JP2017536049 A5 JP 2017536049A5
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JP
Japan
Prior art keywords
conductive layer
thermal conductive
acoustic
low thermal
active area
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JP2017527692A
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English (en)
Japanese (ja)
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JP2017536049A (ja
JP6668347B2 (ja
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Priority claimed from DE102014117238.8A external-priority patent/DE102014117238B4/de
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Publication of JP2017536049A5 publication Critical patent/JP2017536049A5/ja
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Publication of JP6668347B2 publication Critical patent/JP6668347B2/ja
Expired - Fee Related legal-status Critical Current
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JP2017527692A 2014-11-25 2015-11-10 自己発熱が低減されたｂａｗ共振器、共振器を備える高周波フィルタ、高周波フィルタを備えるデュプレクサ、及びその製造方法 Expired - Fee Related JP6668347B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102014117238.8 2014-11-25
DE102014117238.8A DE102014117238B4 (de) 2014-11-25 2014-11-25 BAW-Resonator mit verringerter Eigenerwärmung, HF-Filter mit BAW-Resonator, Duplexer mit HF-Filter und Verfahren zur Herstellung
PCT/EP2015/076197 WO2016083121A1 (de) 2014-11-25 2015-11-10 Baw-resonator mit verringerter eigenerwärmung, hf-filter mit baw-resonator, duplexer mit hf-filter und verfahren zur herstellung

Publications (3)

Publication Number Publication Date
JP2017536049A JP2017536049A (ja) 2017-11-30
JP2017536049A5 true JP2017536049A5 (https=) 2019-07-18
JP6668347B2 JP6668347B2 (ja) 2020-03-18

Family

ID=54478045

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017527692A Expired - Fee Related JP6668347B2 (ja) 2014-11-25 2015-11-10 自己発熱が低減されたｂａｗ共振器、共振器を備える高周波フィルタ、高周波フィルタを備えるデュプレクサ、及びその製造方法

Country Status (6)

Country Link
US (1) US10298202B2 (https=)
EP (1) EP3224946A1 (https=)
JP (1) JP6668347B2 (https=)
CN (1) CN107005220B (https=)
DE (1) DE102014117238B4 (https=)
WO (1) WO2016083121A1 (https=)

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DE102016111061B4 (de) * 2016-06-16 2018-06-28 Snaptrack, Inc. Akustischer Volumenwellenresonator mit reduzierten Verlusten, HF-Filter mit solchen Resonatoren und Verfahren zur Herstellung solcher Resonatoren
DE102017129160B3 (de) 2017-12-07 2019-01-31 RF360 Europe GmbH Elektroakustisches Resonatorbauelement und Verfahren zu dessen Herstellung
CN111342797B (zh) * 2018-12-18 2025-10-17 天津大学 压电滤波器及具有其的电子设备
DE102018132890B4 (de) * 2018-12-19 2020-08-06 RF360 Europe GmbH Mikroakustische Vorrichtung und Herstellungsverfahren
CN111384907B (zh) * 2018-12-29 2023-07-18 开元通信技术（厦门）有限公司 体声波谐振器及其制作方法、滤波器、双工器
CN111010114B (zh) * 2019-08-09 2023-10-27 天津大学 带吸热与散热结构的体声波谐振器、滤波器和电子设备
US11362638B2 (en) * 2020-08-19 2022-06-14 RF360 Europe GmbH Bulk acoustic wave resonator with a heatsink region and electrical insulator region
EP4200981A1 (en) * 2020-09-14 2023-06-28 Huawei Technologies Co., Ltd. Solidly mounted bulk acoustic wave resonator with frequency tuning by mass loading in acoustic reflector and method of manufacturing thereof
EP4503435A4 (en) 2022-03-31 2026-04-01 Nitto Denko Corp VOLUME ELASTIC WAVE FILTER DEVICE

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DE10252828B4 (de) * 2002-11-13 2018-07-05 Epcos Ag Mit akustischen Wellen arbeitendes Bauelement und Verfahren zur Herstellung eines Bauelements
JP3889351B2 (ja) * 2002-12-11 2007-03-07 Ｔｄｋ株式会社 デュプレクサ
JP4624659B2 (ja) * 2003-09-30 2011-02-02 パナソニック株式会社 超音波探触子
US6992400B2 (en) 2004-01-30 2006-01-31 Nokia Corporation Encapsulated electronics device with improved heat dissipation
JP4697517B2 (ja) * 2004-12-16 2011-06-08 株式会社村田製作所 圧電薄膜共振子およびその製造方法
US7378781B2 (en) * 2005-09-07 2008-05-27 Nokia Corporation Acoustic wave resonator with integrated temperature control for oscillator purposes
JP4835238B2 (ja) * 2006-04-06 2011-12-14 ソニー株式会社 共振器、共振器の製造方法および通信装置
JP4975377B2 (ja) * 2006-06-06 2012-07-11 太陽誘電株式会社 弾性境界波素子、共振器およびフィルタ
US7463118B2 (en) * 2006-06-09 2008-12-09 Texas Instruments Incorporated Piezoelectric resonator with an efficient all-dielectric Bragg reflector
JP2008035358A (ja) * 2006-07-31 2008-02-14 Hitachi Media Electoronics Co Ltd 薄膜圧電バルク波共振器及びそれを用いた高周波フィルタ
JP4895323B2 (ja) * 2006-10-27 2012-03-14 宇部興産株式会社 薄膜圧電共振器
WO2008090651A1 (ja) * 2007-01-24 2008-07-31 Murata Manufacturing Co., Ltd. 圧電共振子及び圧電フィルタ
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US9118300B2 (en) * 2013-01-15 2015-08-25 Phonon Corporation SAW device with heat efficient temperature controller
DE102014112372B3 (de) * 2014-08-28 2016-02-25 Epcos Ag Filterchip und Verfahren zur Herstellung eines Filterchips

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