JP2017521655A5 - - Google Patents

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Publication number
JP2017521655A5
JP2017521655A5 JP2016575527A JP2016575527A JP2017521655A5 JP 2017521655 A5 JP2017521655 A5 JP 2017521655A5 JP 2016575527 A JP2016575527 A JP 2016575527A JP 2016575527 A JP2016575527 A JP 2016575527A JP 2017521655 A5 JP2017521655 A5 JP 2017521655A5
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JP
Japan
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region
tip
cantilever
measurement
probe microscope
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JP2016575527A
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Japanese (ja)
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JP2017521655A (ja
JP6630684B2 (ja
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Priority claimed from DE102014212311.9A external-priority patent/DE102014212311A1/de
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JP2016575527A 2014-06-26 2015-06-15 高アスペクト比を有する面を検査するための走査プローブ顕微鏡及び方法 Active JP6630684B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102014212311.9 2014-06-26
DE102014212311.9A DE102014212311A1 (de) 2014-06-26 2014-06-26 Rastersondenmikroskop und Verfahren zum Untersuchen einer Oberfläche mit großem Aspektverhältnis
PCT/EP2015/063291 WO2015197398A1 (de) 2014-06-26 2015-06-15 Rastersondenmikroskop und verfahren zum untersuchen einer oberfläche mit grossem aspektverhältnis

Publications (3)

Publication Number Publication Date
JP2017521655A JP2017521655A (ja) 2017-08-03
JP2017521655A5 true JP2017521655A5 (https=) 2018-10-18
JP6630684B2 JP6630684B2 (ja) 2020-01-15

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JP2016575527A Active JP6630684B2 (ja) 2014-06-26 2015-06-15 高アスペクト比を有する面を検査するための走査プローブ顕微鏡及び方法

Country Status (4)

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US (1) US10119990B2 (https=)
JP (1) JP6630684B2 (https=)
DE (1) DE102014212311A1 (https=)
WO (1) WO2015197398A1 (https=)

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Publication number Priority date Publication date Assignee Title
DE102016214658B4 (de) * 2016-08-08 2020-10-08 Carl Zeiss Smt Gmbh Rastersondenmikroskop und Verfahren zum Untersuchen einer Probenoberfläche
DE102017202455B4 (de) 2017-02-15 2021-05-27 Nano Analytik Gmbh MEMS- oder NEMS-basierter Sensor und Verfahren zum Betrieb eines solchen
GB201705613D0 (en) 2017-04-07 2017-05-24 Infinitesima Ltd Scanning probe system
KR102757231B1 (ko) 2017-07-21 2025-01-21 칼 짜이스 에스엠티 게엠베하 포토리소그래피 마스크의 과잉 재료의 폐기를 위한 방법 및 장치
JP7048964B2 (ja) * 2018-03-26 2022-04-06 株式会社日立ハイテクサイエンス 走査型プローブ顕微鏡及びその走査方法
EP3591410A1 (en) * 2018-07-06 2020-01-08 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Probe chip, scan head, scanning probe microscopy device and use of a probe chip
AT522624A1 (de) * 2019-05-17 2020-12-15 Univ Wien Tech Cantilever für ein rasterkraftmikroskop
US11002759B2 (en) * 2019-09-10 2021-05-11 The United States Of America As Represented By The Secretary Of The Army High-sensitivity, low thermal deflection, stress-matched atomic force microscopy and scanning thermal microscopy probes
US11169176B2 (en) * 2020-03-05 2021-11-09 Jerusalem College of Technology (JCT), Lev Academic Center Photodetector for scanning probe microscope
CN112098680B (zh) * 2020-09-16 2023-11-14 中国科学院深圳先进技术研究院 原子力显微测试系统及其样品台
WO2025013582A1 (ja) * 2023-07-12 2025-01-16 株式会社島津製作所 走査型プローブ顕微鏡

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JPH04161807A (ja) * 1990-10-26 1992-06-05 Olympus Optical Co Ltd 走査型プローブ顕微鏡
US5347854A (en) * 1992-09-22 1994-09-20 International Business Machines Corporation Two dimensional profiling with a contact force atomic force microscope
JPH0894651A (ja) 1994-09-20 1996-04-12 Olympus Optical Co Ltd 集積型ｓｐｍセンサー及び測定方法
JPH09267278A (ja) * 1996-04-01 1997-10-14 Denso Corp マイクロマニピュレータおよび圧電アクチュエータ製造方法
US20060156798A1 (en) * 2003-12-22 2006-07-20 Vladimir Mancevski Carbon nanotube excitation system
JP3892198B2 (ja) * 2000-02-17 2007-03-14 エスアイアイ・ナノテクノロジー株式会社 マイクロプローブおよび試料表面測定装置
JP3785018B2 (ja) 2000-03-13 2006-06-14 エスアイアイ・ナノテクノロジー株式会社 マイクロプローブおよびそれを用いた走査型プローブ装置
US6441371B1 (en) * 2000-04-03 2002-08-27 Korea Institute Of Science And Technology Scanning probe microscope
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JP2005037205A (ja) * 2003-07-18 2005-02-10 Hitachi Kenki Fine Tech Co Ltd 走査型プローブ顕微鏡およびその計測方法
JP2005331509A (ja) * 2004-04-19 2005-12-02 Japan Science & Technology Agency 固有振動可変型のカンチレバーによる測定対象物の計測方法および装置
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