DE102014212311A1 - Rastersondenmikroskop und Verfahren zum Untersuchen einer Oberfläche mit großem Aspektverhältnis - Google Patents
Rastersondenmikroskop und Verfahren zum Untersuchen einer Oberfläche mit großem Aspektverhältnis Download PDFInfo
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- DE102014212311A1 DE102014212311A1 DE102014212311.9A DE102014212311A DE102014212311A1 DE 102014212311 A1 DE102014212311 A1 DE 102014212311A1 DE 102014212311 A DE102014212311 A DE 102014212311A DE 102014212311 A1 DE102014212311 A1 DE 102014212311A1
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- measuring tip
- cantilever
- twisting
- probe microscope
- scanning probe
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Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
- G01Q10/045—Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
- G01Q10/06—Circuits or algorithms therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
- G01Q10/06—Circuits or algorithms therefor
- G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/08—Probe characteristics
- G01Q70/14—Particular materials
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Micromachines (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102014212311.9A DE102014212311A1 (de) | 2014-06-26 | 2014-06-26 | Rastersondenmikroskop und Verfahren zum Untersuchen einer Oberfläche mit großem Aspektverhältnis |
| JP2016575527A JP6630684B2 (ja) | 2014-06-26 | 2015-06-15 | 高アスペクト比を有する面を検査するための走査プローブ顕微鏡及び方法 |
| PCT/EP2015/063291 WO2015197398A1 (de) | 2014-06-26 | 2015-06-15 | Rastersondenmikroskop und verfahren zum untersuchen einer oberfläche mit grossem aspektverhältnis |
| US15/386,203 US10119990B2 (en) | 2014-06-26 | 2016-12-21 | Scanning probe microscope and method for examining a surface with a high aspect ratio |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102014212311.9A DE102014212311A1 (de) | 2014-06-26 | 2014-06-26 | Rastersondenmikroskop und Verfahren zum Untersuchen einer Oberfläche mit großem Aspektverhältnis |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE102014212311A1 true DE102014212311A1 (de) | 2015-12-31 |
Family
ID=53398095
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE102014212311.9A Pending DE102014212311A1 (de) | 2014-06-26 | 2014-06-26 | Rastersondenmikroskop und Verfahren zum Untersuchen einer Oberfläche mit großem Aspektverhältnis |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US10119990B2 (https=) |
| JP (1) | JP6630684B2 (https=) |
| DE (1) | DE102014212311A1 (https=) |
| WO (1) | WO2015197398A1 (https=) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018029151A1 (en) * | 2016-08-08 | 2018-02-15 | Carl Zeiss Smt Gmbh | Scanning probe microscope and method for examining a sample surface |
| DE102017202455A1 (de) | 2017-02-15 | 2018-08-16 | Nano Analytik Gmbh | MEMS- oder NEMS-basierter Sensor und Verfahren zum Betrieb eines solchen |
| WO2019016224A1 (en) | 2017-07-21 | 2019-01-24 | Carl Zeiss Smt Gmbh | METHOD AND APPARATUS FOR REMOVING EXCESS MATERIALS FROM A PHOTOLITHOGRAPHIC MASK |
| AT522624A1 (de) * | 2019-05-17 | 2020-12-15 | Univ Wien Tech | Cantilever für ein rasterkraftmikroskop |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB201705613D0 (en) | 2017-04-07 | 2017-05-24 | Infinitesima Ltd | Scanning probe system |
| JP7048964B2 (ja) * | 2018-03-26 | 2022-04-06 | 株式会社日立ハイテクサイエンス | 走査型プローブ顕微鏡及びその走査方法 |
| EP3591410A1 (en) * | 2018-07-06 | 2020-01-08 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Probe chip, scan head, scanning probe microscopy device and use of a probe chip |
| US11002759B2 (en) * | 2019-09-10 | 2021-05-11 | The United States Of America As Represented By The Secretary Of The Army | High-sensitivity, low thermal deflection, stress-matched atomic force microscopy and scanning thermal microscopy probes |
| US11169176B2 (en) * | 2020-03-05 | 2021-11-09 | Jerusalem College of Technology (JCT), Lev Academic Center | Photodetector for scanning probe microscope |
| CN112098680B (zh) * | 2020-09-16 | 2023-11-14 | 中国科学院深圳先进技术研究院 | 原子力显微测试系统及其样品台 |
| WO2025013582A1 (ja) * | 2023-07-12 | 2025-01-16 | 株式会社島津製作所 | 走査型プローブ顕微鏡 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0894651A (ja) | 1994-09-20 | 1996-04-12 | Olympus Optical Co Ltd | 集積型ｓｐｍセンサー及び測定方法 |
| DE10106854A1 (de) * | 2000-02-17 | 2001-10-31 | Seiko Instr Inc | Mikro-Tastkopf und Vorrichtung zum Messen einer Probenoberfläche |
| US20050012936A1 (en) * | 2003-07-18 | 2005-01-20 | Ken Murayama | Scanning probe microscope and measurement method using the same |
| US20050028583A1 (en) * | 2002-07-02 | 2005-02-10 | Chanmin Su | Method and apparatus of driving torsional resonance mode of a probe-based instrument |
| US8458810B2 (en) | 2011-04-07 | 2013-06-04 | Michael E. MCCONNEY | Scanning thermal twisting atomic force microscopy |
| DE10110933B4 (de) * | 2000-03-13 | 2013-08-22 | SII NanoTechnology Inc. | Mikrosonde und Abtastsondenvorrichtung mit der Mikrosonde |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5103095A (en) * | 1990-05-23 | 1992-04-07 | Digital Instruments, Inc. | Scanning probe microscope employing adjustable tilt and unitary head |
| JPH04161807A (ja) * | 1990-10-26 | 1992-06-05 | Olympus Optical Co Ltd | 走査型プローブ顕微鏡 |
| US5347854A (en) * | 1992-09-22 | 1994-09-20 | International Business Machines Corporation | Two dimensional profiling with a contact force atomic force microscope |
| JPH09267278A (ja) * | 1996-04-01 | 1997-10-14 | Denso Corp | マイクロマニピュレータおよび圧電アクチュエータ製造方法 |
| US20060156798A1 (en) * | 2003-12-22 | 2006-07-20 | Vladimir Mancevski | Carbon nanotube excitation system |
| US6441371B1 (en) * | 2000-04-03 | 2002-08-27 | Korea Institute Of Science And Technology | Scanning probe microscope |
| US20030233870A1 (en) * | 2001-07-18 | 2003-12-25 | Xidex Corporation | Multidimensional sensing system for atomic force microscopy |
| JP2005331509A (ja) * | 2004-04-19 | 2005-12-02 | Japan Science & Technology Agency | 固有振動可変型のカンチレバーによる測定対象物の計測方法および装置 |
| US7476556B2 (en) * | 2005-08-11 | 2009-01-13 | Micron Technology, Inc. | Systems and methods for plasma processing of microfeature workpieces |
| JP2006276027A (ja) * | 2006-05-15 | 2006-10-12 | Hitachi Ltd | 走査プローブ顕微鏡 |
| US7748260B2 (en) * | 2006-07-12 | 2010-07-06 | Veeco Instruments Inc. | Thermal mechanical drive actuator, thermal probe and method of thermally driving a probe |
| SG192224A1 (en) * | 2011-01-31 | 2013-09-30 | Infinitesima Ltd | Adaptive mode scanning probe microscope |
| US9739799B2 (en) * | 2014-02-28 | 2017-08-22 | Bruker Nano, Inc. | Method and apparatus to compensate for deflection artifacts in an atomic force microscope |
-
2014
- 2014-06-26 DE DE102014212311.9A patent/DE102014212311A1/de active Pending
-
2015
- 2015-06-15 WO PCT/EP2015/063291 patent/WO2015197398A1/de not_active Ceased
- 2015-06-15 JP JP2016575527A patent/JP6630684B2/ja active Active
-
2016
- 2016-12-21 US US15/386,203 patent/US10119990B2/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0894651A (ja) | 1994-09-20 | 1996-04-12 | Olympus Optical Co Ltd | 集積型ｓｐｍセンサー及び測定方法 |
| DE10106854A1 (de) * | 2000-02-17 | 2001-10-31 | Seiko Instr Inc | Mikro-Tastkopf und Vorrichtung zum Messen einer Probenoberfläche |
| DE10110933B4 (de) * | 2000-03-13 | 2013-08-22 | SII NanoTechnology Inc. | Mikrosonde und Abtastsondenvorrichtung mit der Mikrosonde |
| US20050028583A1 (en) * | 2002-07-02 | 2005-02-10 | Chanmin Su | Method and apparatus of driving torsional resonance mode of a probe-based instrument |
| US20050012936A1 (en) * | 2003-07-18 | 2005-01-20 | Ken Murayama | Scanning probe microscope and measurement method using the same |
| US8458810B2 (en) | 2011-04-07 | 2013-06-04 | Michael E. MCCONNEY | Scanning thermal twisting atomic force microscopy |
Non-Patent Citations (9)
| Title |
|---|
| "Algorithms for Scanned Probe Microscope Image Simulation, Surface Reconstruction, and Tip Estimation" in J. Res. Natl. Inst. Stand. Technol., Vol. 102, Nr. 4, July-August, Seiten 425-454 |
| "PRONANO: proceedings of the integrated project on massively parallel intelligent cantilever probe platforms for nanoscale analysis and synthesis, herausgegeben von Thomas Sulzbach und Ivo W. Rangelow, Münster: Verlagshaus Monsenstein und Vannerdat, ISBN: 978-3-86991-177-9 |
| Dong Hyun Kim, Kyung su Oh, Seungho Park, Ohmyoung Kwon, Young Ki Choi und Joon Sik Lee, in Proc. of MNHT2008, Micro/Nanoscale Heat Transfer Internat. Conf., Tainan, Taiwan, January 6-9, 2008, S. 1063-1067 |
| G. Dai et al.: "Development of a 3D-AFM for true 3D measurements of nanostructures", Meas. Sci. Technol. 22, pp. 094009 (2011) * |
| https://www.parkafm.com/ images/applications/semiconductors/note/1_Park_Systems_App_ Note_Sidewall _Roughness_2012_03_14.pdf |
| S.R. Manalis, S.C. Minne und C.F. Quate in den Artikel "Atomic force microscopy for high speed imaging using cantilevers with an integrated actuator and sensor", Appl. Phys. Lett. 68, 871 (1996) |
| Sang-Joon Cho, Byung-Woon Ahn, Joonhui Kim, Jung-Min Lee, Yueming Hua, Young K. Yoo und Sang-il Park beschreiben in dem Artikel "Three-dimensional imaging of undercut and sidewall structures by atomic force microscopy" in Ref. Sci. Instr. 82, S. 023707-1 bis 023707-5 (2011) |
| Y. Sarov, T. Ivanov und I.W. Rangelow beschreiben in dem Artikel "Controllable off-plane deflection of cantilevers for multiple scanning proximity probe arrays", Appl. Phys. A (2008), 92: 525-530, DOI 10.1007/s00339-008-4668-y |
| Yves Martin und H. Kumar Wickramashinghe in dem Artikel "Method for imaging sidewalls at atomic force microscopy" in Appl. Phys. Lett. 64 (19), 9 May 1994, S. 2498-2500 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018029151A1 (en) * | 2016-08-08 | 2018-02-15 | Carl Zeiss Smt Gmbh | Scanning probe microscope and method for examining a sample surface |
| TWI656347B (zh) * | 2016-08-08 | 2019-04-11 | 德商卡爾蔡司Ｓｍｔ有限公司 | 檢查樣品表面的掃描探針顯微鏡及方法 |
| DE102017202455A1 (de) | 2017-02-15 | 2018-08-16 | Nano Analytik Gmbh | MEMS- oder NEMS-basierter Sensor und Verfahren zum Betrieb eines solchen |
| DE102017202455B4 (de) * | 2017-02-15 | 2021-05-27 | Nano Analytik Gmbh | MEMS- oder NEMS-basierter Sensor und Verfahren zum Betrieb eines solchen |
| WO2019016224A1 (en) | 2017-07-21 | 2019-01-24 | Carl Zeiss Smt Gmbh | METHOD AND APPARATUS FOR REMOVING EXCESS MATERIALS FROM A PHOTOLITHOGRAPHIC MASK |
| AT522624A1 (de) * | 2019-05-17 | 2020-12-15 | Univ Wien Tech | Cantilever für ein rasterkraftmikroskop |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2017521655A (ja) | 2017-08-03 |
| WO2015197398A1 (de) | 2015-12-30 |
| US10119990B2 (en) | 2018-11-06 |
| US20170102407A1 (en) | 2017-04-13 |
| JP6630684B2 (ja) | 2020-01-15 |
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