JP2017521032A - 電力増幅器出力と負荷電圧クランプ回路の絶縁を組み合わせるための変圧器を組み込んだ電源回路 - Google Patents
電力増幅器出力と負荷電圧クランプ回路の絶縁を組み合わせるための変圧器を組み込んだ電源回路 Download PDFInfo
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
- H02M7/5387—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M3/00—Conversion of dc power input into dc power output
- H02M3/01—Resonant DC/DC converters
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M3/00—Conversion of dc power input into dc power output
- H02M3/22—Conversion of dc power input into dc power output with intermediate conversion into ac
- H02M3/24—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters
- H02M3/28—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac
- H02M3/325—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal
- H02M3/335—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
- H02M3/33569—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only having several active switching elements
- H02M3/33571—Half-bridge at primary side of an isolation transformer
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M3/00—Conversion of dc power input into dc power output
- H02M3/22—Conversion of dc power input into dc power output with intermediate conversion into ac
- H02M3/24—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters
- H02M3/28—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac
- H02M3/325—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal
- H02M3/335—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
- H02M3/33569—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only having several active switching elements
- H02M3/33573—Full-bridge at primary side of an isolation transformer
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M3/00—Conversion of dc power input into dc power output
- H02M3/22—Conversion of dc power input into dc power output with intermediate conversion into ac
- H02M3/24—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters
- H02M3/28—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac
- H02M3/325—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal
- H02M3/335—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
- H02M3/337—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only in push-pull configuration
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
- H03F3/20—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers
- H03F3/21—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers with semiconductor devices only
- H03F3/211—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers with semiconductor devices only using a combination of several amplifiers
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F2200/00—Indexing scheme relating to amplifiers
- H03F2200/537—A transformer being used as coupling element between two amplifying stages
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F2200/00—Indexing scheme relating to amplifiers
- H03F2200/541—Transformer coupled at the output of an amplifier
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F2203/00—Indexing scheme relating to amplifiers with only discharge tubes or only semiconductor devices as amplifying elements covered by H03F3/00
- H03F2203/20—Indexing scheme relating to power amplifiers, e.g. Class B amplifiers, Class C amplifiers
- H03F2203/21—Indexing scheme relating to power amplifiers, e.g. Class B amplifiers, Class C amplifiers with semiconductor devices only
- H03F2203/211—Indexing scheme relating to power amplifiers, e.g. Class B amplifiers, Class C amplifiers with semiconductor devices only using a combination of several amplifiers
- H03F2203/21142—Output signals of a plurality of power amplifiers are parallel combined to a common output
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F2203/00—Indexing scheme relating to amplifiers with only discharge tubes or only semiconductor devices as amplifying elements covered by H03F3/00
- H03F2203/20—Indexing scheme relating to power amplifiers, e.g. Class B amplifiers, Class C amplifiers
- H03F2203/21—Indexing scheme relating to power amplifiers, e.g. Class B amplifiers, Class C amplifiers with semiconductor devices only
- H03F2203/211—Indexing scheme relating to power amplifiers, e.g. Class B amplifiers, Class C amplifiers with semiconductor devices only using a combination of several amplifiers
- H03F2203/21151—An output signal of a power amplifier being controlled by controlling power signal, e.g. by an inductive coupler
Abstract
Description
V=V2+VBE、ここでVBE≒0.6vであり、
I=I2+IQ、ここでIQ≒HFE×I2、HFE≒100であって、
その結果、IQ>>I2、かつPQ>>P2である。
Vはレール11に印加される電圧であり、
Rは負荷90のインピーダンスである。
C6およびC1のキャパシタンスCは以下の式(2)で定義され、
Fopは増幅器の動作周波数であり、
Rは負荷90のインピーダンスである。
インダクタL1およびL3のインダクタンスLは以下の式(3)で定義され、
FopはE級増幅器の動作周波数であり、
Rは負荷90のインピーダンスである。
11 直流(DC)電圧源入力
12 交流(AC)出力
13 信号源
13' 信号源
13A 信号源
13A' 信号源
13A" 信号源
13B 信号源
13B' 信号源
13B" 信号源
14 位相コントローラ
20 制御回路
22 ソフトスタート整流器
24 電力感知ユニット(PSU)
26 冷却ファン
28 DCスイッチ
30a 電力増幅器
30b 電力増幅器
30c 電力増幅器
30d 電力増幅器
32 駆動回路
34 結合および絶縁の変圧器
36 フィルタおよび電力感知の回路
38 位相制御変調器
40 フロントパネル制御回路
52 プラズマチャンバ
54 ガス入口
56 ガス出口
58 熱制御信号
60 プラズマコントローラ
62 真空信号
64 電圧信号
66 入口のガス流量と出口のガス流量の間の比を示す信号
68 電圧発生器
70 マイクロプロセッサ
72 電源
74 整合回路
80 整合回路
82 負荷
84 第1の可変キャパシタ
86 第2の可変キャパシタ
88 インダクタ
90 負荷
Claims (24)
- (i)第1の電源からの直流(DC)電圧、および(ii)制御信号を受け取り、前記制御信号に基づいて前記DC電圧を交流(AC)出力信号に変換するように構成された電力増幅器と、
第1の巻線、第2の巻線、および第3の巻線を含む変圧器であって、前記第1の巻線が前記AC出力信号を受け取るように構成されており、前記第2の巻線が前記AC出力信号に基づく出力電流を受け取るように構成されており、前記第2の巻線が出力端子を介して負荷に電流を供給する変圧器と、
複数のダイオードを備える整流器およびクランプ回路であって、前記ダイオードが、(i)前記第3の巻線にわたる電圧を整流し、(ii)前記出力端子における電圧をクランプし、(iii)前記第3の巻線から前記第1の電源または第2の電源に電力を戻すように構成されている整流器およびクランプ回路とを備える電源回路。 - 前記第1の巻線が1次巻線であり、前記第2の巻線が2次巻線であり、前記第3の巻線が3次巻線である請求項1に記載の電源回路。
- 前記複数のダイオードが、ダイオードブリッジ整流器の構成に配置された4つのダイオードをさらに備える請求項1に記載の電源回路。
- 前記4つのダイオードが、絶縁された組ダイオード整流器の構成で配置されている請求項3に記載の電源回路。
- 前記複数のダイオードが、全波ブリッジ整流器の構成に配置された対のダイオードをさらに備える請求項1に記載の電源回路。
- 前記複数のダイオードが、絶縁された2つのダイオード整流器の構成に配置された対のダイオードをさらに備える請求項5に記載の電源回路。
- (i)第1の電源からの直流(DC)電圧、および(ii)第2の制御信号を受け取り、
前記第2の制御信号に基づいて、前記DC電圧を第2の交流(AC)出力信号に変換するように構成された第2の電力増幅器をさらに備える電源回路であって、
前記変圧器が第4の巻線をさらに備え、前記第4の巻線が前記第2のAC出力信号を受け取るように構成されている請求項1に記載の電源回路。 - 前記制御信号および前記第2の制御信号が、前記それぞれの第1の電力増幅器を、前記第2の電力増幅器に対して同相または逆相で動作させる請求項7に記載の電源回路。
- 前記電力増幅器が、フルブリッジ構成に配置された複数のスイッチを含む請求項1に記載の電源回路。
- 第1の電源から直流(DC)電圧を受け取って、前記DC電圧を交流(AC)出力信号に変換するように構成された電力増幅器と、
第1の巻線、第2の巻線、および第3の巻線を含む変圧器であって、前記第1の巻線が前記AC出力信号を受け取るように構成されており、前記第2の巻線が前記AC出力信号に基づく出力電流を受け取るように構成されており、前記第2の巻線が出力端子を介して負荷に電流を供給する変圧器と、
複数のダイオードを備える整流器およびクランプ回路であって、前記ダイオードが、前記第3の巻線にわたる電圧を整流すること、前記出力端子における電圧をクランプすること、および前記第3の巻線から前記第1の電源または第2の電源に電力を戻すことのうちの少なくとも2つを行うように構成されている整流器およびクランプ回路とを備える電源回路。 - 前記第1の巻線が1次巻線であり、前記第2の巻線が2次巻線であり、前記第3の巻線が3次巻線である請求項10に記載の電源回路。
- 前記複数のダイオードが、ダイオードブリッジ整流器の構成に配置された4つのダイオードをさらに備える請求項10に記載の電源回路。
- 前記4つのダイオードが、絶縁された組ダイオード整流器の構成で配置されている請求項12に記載の電源回路。
- 前記複数のダイオードが、全波ブリッジ整流器の構成に配置された対のダイオードをさらに備える請求項10に記載の電源回路。
- 前記複数のダイオードが、絶縁された2つのダイオード整流器の構成に配置された対のダイオードをさらに備える請求項14に記載の電源回路。
- 第2の電源から直流(DC)電圧を受け取って、前記DC電圧を第2の交流(AC)出力信号に変換するように構成された第2の電力増幅器をさらに備える電源回路であって、
前記変圧器が第4の巻線をさらに備え、
前記第4の巻線が前記第2のAC出力信号を受け取るように構成されている請求項10に記載の電源回路。 - 前記電力増幅器が、前記第2の電力増幅器に対して同相または逆相で動作する請求項16に記載の電源回路。
- 前記電力増幅器と前記第2の電力増幅器が同一のユニットまたは別個のユニットである請求項16に記載の電源回路。
- 第1の電源から直流(DC)電圧を受け取って、前記DC電圧を交流(AC)出力信号に変換するための手段と、
第1の巻線、第2の巻線、および第3の巻線を含む、変圧のための手段であって、前記第1の巻線が前記AC出力信号を受け取り、前記第2の巻線が前記AC出力信号に基づく出力電流を受け取り、前記第2の巻線が出力端子を介して負荷に電流を供給する変圧のための手段と、
前記第3の巻線にわたる電圧を整流すること、前記出力端子における電圧をクランプすること、および前記第3の巻線から前記第1の電源または第2の電源に電力を戻すことのうちの少なくとも2つを行うように配置された複数のダイオードを含んでいる整流器およびクランプ手段とを備える電源回路。 - 前記複数のダイオードが、ダイオードブリッジ整流器の構成に配置された4つのダイオードをさらに備える請求項19に記載の電源回路。
- 前記複数のダイオードが、全波ブリッジ整流器の構成に配置された対のダイオードをさらに備える請求項19に記載の電源回路。
- 第2の電源から直流(DC)電圧を受け取って、前記DC電圧を第2の交流(AC)出力信号に変換するための第2の手段であって、
前記変圧のための手段が第4の巻線をさらに備え、前記第4の巻線が前記第2のAC出力信号を受け取るように構成されている第2の手段をさらに備える請求項19に記載の電源回路。 - 前記受け取るための手段が、前記受け取るための第2の手段に対して同相または逆相で動作する請求項22に記載の電源回路。
- 前記受け取るための手段と前記受け取るための第2の手段が同一のユニットまたは別個のユニットである請求項22に記載の電源回路。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201462019119P | 2014-06-30 | 2014-06-30 | |
US62/019,119 | 2014-06-30 | ||
US14/751,586 | 2015-06-26 | ||
US14/751,586 US9748864B2 (en) | 2014-06-30 | 2015-06-26 | Power supply circuits incorporating transformers for combining of power amplifier outputs and isolation of load voltage clamping circuits |
PCT/US2015/038338 WO2016003914A1 (en) | 2014-06-30 | 2015-06-29 | Power supply circuits incorporating transformers for combining of power amplifier outputs and isolation of load voltage clamping circuits |
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WO2016003914A1 (en) | 2016-01-07 |
EP3161948A4 (en) | 2018-02-21 |
CN106797177A (zh) | 2017-05-31 |
EP3161948A1 (en) | 2017-05-03 |
KR102289330B1 (ko) | 2021-08-12 |
KR20170027714A (ko) | 2017-03-10 |
CN112787535A (zh) | 2021-05-11 |
JP6496329B2 (ja) | 2019-04-03 |
US9748864B2 (en) | 2017-08-29 |
US20150381057A1 (en) | 2015-12-31 |
SG11201609153QA (en) | 2016-12-29 |
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