JP2017509918A5 - - Google Patents
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- JP2017509918A5 JP2017509918A5 JP2016553587A JP2016553587A JP2017509918A5 JP 2017509918 A5 JP2017509918 A5 JP 2017509918A5 JP 2016553587 A JP2016553587 A JP 2016553587A JP 2016553587 A JP2016553587 A JP 2016553587A JP 2017509918 A5 JP2017509918 A5 JP 2017509918A5
- Authority
- JP
- Japan
- Prior art keywords
- illumination
- mirror
- individual mirrors
- group
- mirror array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000005286 illumination Methods 0.000 claims description 28
- 230000003287 optical effect Effects 0.000 claims description 21
- 230000005855 radiation Effects 0.000 claims description 13
- 238000009826 distribution Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 6
- 230000001419 dependent effect Effects 0.000 claims 4
- 238000003491 array Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000001393 microlithography Methods 0.000 claims 1
- 210000001747 pupil Anatomy 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 3
- 238000009304 pastoral farming Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102014203189.3A DE102014203189A1 (de) | 2014-02-21 | 2014-02-21 | Spiegel-Array |
| DE102014203189.3 | 2014-02-21 | ||
| PCT/EP2015/053287 WO2015124555A1 (de) | 2014-02-21 | 2015-02-17 | Spiegel-array |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017509918A JP2017509918A (ja) | 2017-04-06 |
| JP2017509918A5 true JP2017509918A5 (https=) | 2018-03-29 |
| JP6568865B2 JP6568865B2 (ja) | 2019-08-28 |
Family
ID=52595296
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016553587A Active JP6568865B2 (ja) | 2014-02-21 | 2015-02-17 | ミラーアレイ |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9874819B2 (https=) |
| JP (1) | JP6568865B2 (https=) |
| KR (1) | KR102424717B1 (https=) |
| DE (1) | DE102014203189A1 (https=) |
| WO (1) | WO2015124555A1 (https=) |
Families Citing this family (46)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105308947B (zh) | 2013-06-13 | 2018-10-02 | 核心光电有限公司 | 双孔径变焦数字摄影机 |
| CN108535839B (zh) | 2013-07-04 | 2022-02-08 | 核心光电有限公司 | 小型长焦透镜套件 |
| CN105917641B (zh) | 2013-08-01 | 2018-10-19 | 核心光电有限公司 | 具有自动聚焦的纤薄多孔径成像系统及其使用方法 |
| US9392188B2 (en) | 2014-08-10 | 2016-07-12 | Corephotonics Ltd. | Zoom dual-aperture camera with folded lens |
| CN112327463B (zh) | 2015-01-03 | 2022-10-14 | 核心光电有限公司 | 微型长焦镜头模块和使用该镜头模块的相机 |
| KR102078978B1 (ko) | 2015-04-16 | 2020-02-19 | 코어포토닉스 리미티드 | 소형 접이식 카메라의 오토 포커스 및 광학 이미지 안정화 |
| US10230898B2 (en) | 2015-08-13 | 2019-03-12 | Corephotonics Ltd. | Dual aperture zoom camera with video support and switching / non-switching dynamic control |
| WO2017208090A1 (en) | 2016-05-30 | 2017-12-07 | Corephotonics Ltd. | Rotational ball-guided voice coil motor |
| KR20240036133A (ko) | 2016-06-19 | 2024-03-19 | 코어포토닉스 리미티드 | 듀얼 애퍼처 카메라 시스템에서의 프레임 동기화 |
| EP4224233B1 (en) | 2016-07-07 | 2024-12-11 | Corephotonics Ltd. | Linear ball guided voice coil motor for folded optic |
| DE102016217735A1 (de) * | 2016-09-16 | 2018-03-22 | Carl Zeiss Smt Gmbh | Komponente für eine Spiegelanordnung für die EUV-Lithographie |
| WO2018122650A1 (en) | 2016-12-28 | 2018-07-05 | Corephotonics Ltd. | Folded camera structure with an extended light-folding-element scanning range |
| CN113805406A (zh) | 2017-01-12 | 2021-12-17 | 核心光电有限公司 | 紧凑型折叠式摄影机及其组装方法 |
| US11111133B1 (en) * | 2017-01-30 | 2021-09-07 | Mirrorcle Technologies, Inc. | MEMS actuators with improved performance and cooling |
| WO2018167581A1 (en) | 2017-03-15 | 2018-09-20 | Corephotonics Ltd. | Camera with panoramic scanning range |
| CN113075837B (zh) | 2017-11-23 | 2022-04-12 | 核心光电有限公司 | 摄影机及制法、移动电子设备及减小凸起占用空间的方法 |
| KR102242452B1 (ko) | 2018-02-05 | 2021-04-20 | 코어포토닉스 리미티드 | 폴디드 카메라에 대한 감소된 높이 페널티 |
| WO2019155289A1 (en) | 2018-02-12 | 2019-08-15 | Corephotonics Ltd. | Folded camera with optical image stabilization |
| US11268829B2 (en) | 2018-04-23 | 2022-03-08 | Corephotonics Ltd | Optical-path folding-element with an extended two degree of freedom rotation range |
| CN112272829B (zh) * | 2018-07-04 | 2025-04-08 | 核心光电有限公司 | 用于汽车或监控应用具有扫描光路折叠元件的相机 |
| WO2020039302A1 (en) | 2018-08-22 | 2020-02-27 | Corephotonics Ltd. | Two-state zoom folded camera |
| EP3864451A4 (en) * | 2018-10-10 | 2022-06-22 | Vyas, Trilok | ULTRA-EFFICIENT VERTICAL VILLANOVA WINDMILL SYSTEM AND PROCESS |
| WO2020144528A1 (en) | 2019-01-07 | 2020-07-16 | Corephotonics Ltd. | Rotation mechanism with sliding joint |
| DE102019206865B4 (de) * | 2019-05-13 | 2024-09-12 | Carl Zeiss Smt Gmbh | Verfahren und vorrichtung zum erzeugen eines mathematischen modells zum positionieren von einzelspiegeln eines facettenspiegels in einem optischen system |
| EP3837662A4 (en) | 2019-07-31 | 2021-12-15 | Corephotonics Ltd. | SYSTEM AND METHOD FOR GENERATING BACKGROUND BLUR DURING CAMERA PAN or MOVEMENT |
| CN114667469B (zh) | 2019-12-03 | 2024-11-26 | 核心光电有限公司 | 提供扩展的二自由度旋转范围的致动器 |
| US11949976B2 (en) | 2019-12-09 | 2024-04-02 | Corephotonics Ltd. | Systems and methods for obtaining a smart panoramic image |
| KR102811003B1 (ko) | 2020-02-22 | 2025-05-20 | 코어포토닉스 리미티드 | 매크로 촬영을 위한 분할 스크린 기능 |
| KR102732454B1 (ko) | 2020-04-26 | 2024-11-20 | 코어포토닉스 리미티드 | 홀 바 센서 보정을 위한 온도 제어 |
| EP4058978B1 (en) | 2020-05-17 | 2024-07-03 | Corephotonics Ltd. | Image stitching in the presence of a full field of view reference image |
| CN114080565B (zh) | 2020-05-30 | 2024-01-19 | 核心光电有限公司 | 用于获得超微距图像的系统和方法 |
| CN119583939A (zh) | 2020-07-15 | 2025-03-07 | 核心光电有限公司 | 移动电子装置 |
| US11637977B2 (en) | 2020-07-15 | 2023-04-25 | Corephotonics Ltd. | Image sensors and sensing methods to obtain time-of-flight and phase detection information |
| KR102778426B1 (ko) | 2020-07-31 | 2025-03-06 | 코어포토닉스 리미티드 | 큰 스트로크 선형 위치 감지를 위한 홀 센서-자석 구조 |
| CN116679419A (zh) | 2020-08-12 | 2023-09-01 | 核心光电有限公司 | 用于光学防抖的装置和方法 |
| KR20250165686A (ko) | 2021-03-11 | 2025-11-26 | 코어포토닉스 리미티드 | 팝-아웃 카메라 시스템 |
| EP4726455A2 (en) | 2021-06-08 | 2026-04-15 | Corephotonics Ltd. | Systems and cameras for tilting a focal plane of a super-macro image |
| KR102666903B1 (ko) | 2021-07-21 | 2024-05-16 | 코어포토닉스 리미티드 | 팝-아웃 모바일 카메라 및 액추에이터 |
| CN121091576A (zh) | 2022-03-24 | 2025-12-09 | 核心光电有限公司 | 薄型紧凑透镜光学图像稳定 |
| DE102022203369A1 (de) * | 2022-04-05 | 2023-10-05 | Carl Zeiss Smt Gmbh | Anordnung, Verfahren und Computerprogrammprodukt zur Kalibrierung von Facettenspiegeln |
| WO2024037916A1 (en) * | 2022-08-16 | 2024-02-22 | Carl Zeiss Smt Gmbh | Micro-optical element |
| DE102022209427A1 (de) | 2022-09-09 | 2024-03-14 | Carl Zeiss Smt Gmbh | Mikrospiegelanordnung mit federnd gelagerten Einzelspiegelelementen |
| DE102022209411A1 (de) | 2022-09-09 | 2024-03-14 | Carl Zeiss Smt Gmbh | Mikrospiegelanordnung mit einer Anzahl von Einzelspiegelelementen |
| DE102022212168A1 (de) | 2022-11-16 | 2024-05-16 | Carl Zeiss Smt Gmbh | EUV-Optik-Modul für eine EUV-Projektionsbelichtungsanlage |
| DE102022212167A1 (de) | 2022-11-16 | 2023-09-14 | Carl Zeiss Smt Gmbh | EUV-Quellen-Modul für eine EUV-Projektionsbelichtungsanlage |
| DE102023126597A1 (de) * | 2023-09-29 | 2025-04-03 | Carl Zeiss Smt Gmbh | Verfahren zur Verarbeitung analoger elektrischer Ausgangssignale |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10138313A1 (de) | 2001-01-23 | 2002-07-25 | Zeiss Carl | Kollektor für Beleuchtugnssysteme mit einer Wellenlänge < 193 nm |
| US7145269B2 (en) | 2004-03-10 | 2006-12-05 | Asml Netherlands B.V. | Lithographic apparatus, Lorentz actuator, and device manufacturing method |
| JP2007052256A (ja) * | 2005-08-18 | 2007-03-01 | Fujifilm Corp | 回転変位型光変調素子及びこれを用いた光学装置 |
| DE102006023652B4 (de) | 2006-05-18 | 2008-10-30 | Esa Patentverwertungsagentur Sachsen-Anhalt Gmbh | Elektromotorische Einrichtung zur Betätigung von Gaswechselventilen |
| US7804603B2 (en) * | 2006-10-03 | 2010-09-28 | Asml Netherlands B.V. | Measurement apparatus and method |
| US20080100816A1 (en) * | 2006-10-31 | 2008-05-01 | Asml Netherlands B.V. | Lithographic apparatus and method |
| KR101440762B1 (ko) * | 2007-02-06 | 2014-09-17 | 칼 짜이스 에스엠테 게엠베하 | 마이크로리소그래피 투영 노광 장치의 조명 시스템 내의 다수의 미러 어레이들을 감시하는 방법 및 장치 |
| JP5329520B2 (ja) * | 2007-03-27 | 2013-10-30 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 低角度で入射する補正光を用いる補正光学素子 |
| JP5487118B2 (ja) * | 2008-02-15 | 2014-05-07 | カール・ツァイス・エスエムティー・ゲーエムベーハー | マイクロリソグラフィのための投影露光装置に使用するファセットミラー |
| KR101769157B1 (ko) | 2008-10-20 | 2017-08-17 | 칼 짜이스 에스엠테 게엠베하 | 방사선 빔 안내를 위한 광학 모듈 |
| DE102009033223A1 (de) * | 2008-10-31 | 2010-05-06 | Carl Zeiss Smt Ag | Beleuchtungsoptik für die EUV-Mikrolithographie |
| DE102009045694B4 (de) * | 2009-10-14 | 2012-03-29 | Carl Zeiss Smt Gmbh | Beleuchtungsoptik für die Mikrolithographie sowie Beleuchtungssystem und Projektionsbelichtungsanlage mit einer derartigen Beleuchtungsoptik |
| DE102010040811A1 (de) * | 2010-09-15 | 2012-03-15 | Carl Zeiss Smt Gmbh | Abbildende Optik |
| DE102011006100A1 (de) | 2011-03-25 | 2012-09-27 | Carl Zeiss Smt Gmbh | Spiegel-Array |
| DE102012213515A1 (de) * | 2012-08-01 | 2014-02-06 | Carl Zeiss Smt Gmbh | Verfahren zum Betreiben einer mikrolithographischen Projektionsbelichtungsanlage |
| DE102014203188A1 (de) * | 2014-02-21 | 2015-08-27 | Carl Zeiss Smt Gmbh | Verfahren zur Beleuchtung eines Objektfeldes einer Projektionsbelichtungsanlage |
-
2014
- 2014-02-21 DE DE102014203189.3A patent/DE102014203189A1/de not_active Ceased
-
2015
- 2015-02-17 JP JP2016553587A patent/JP6568865B2/ja active Active
- 2015-02-17 KR KR1020167025881A patent/KR102424717B1/ko active Active
- 2015-02-17 WO PCT/EP2015/053287 patent/WO2015124555A1/de not_active Ceased
-
2016
- 2016-08-02 US US15/226,358 patent/US9874819B2/en not_active Expired - Fee Related
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