JP2017509918A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2017509918A5 JP2017509918A5 JP2016553587A JP2016553587A JP2017509918A5 JP 2017509918 A5 JP2017509918 A5 JP 2017509918A5 JP 2016553587 A JP2016553587 A JP 2016553587A JP 2016553587 A JP2016553587 A JP 2016553587A JP 2017509918 A5 JP2017509918 A5 JP 2017509918A5
- Authority
- JP
- Japan
- Prior art keywords
- illumination
- mirror
- individual mirrors
- group
- mirror array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005286 illumination Methods 0.000 claims description 28
- 230000003287 optical effect Effects 0.000 claims description 21
- 230000005855 radiation Effects 0.000 claims description 13
- 238000009826 distribution Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 6
- 230000001419 dependent effect Effects 0.000 claims 4
- 238000003491 array Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000001393 microlithography Methods 0.000 claims 1
- 210000001747 pupil Anatomy 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 3
- 238000009304 pastoral farming Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102014203189.3A DE102014203189A1 (de) | 2014-02-21 | 2014-02-21 | Spiegel-Array |
| DE102014203189.3 | 2014-02-21 | ||
| PCT/EP2015/053287 WO2015124555A1 (de) | 2014-02-21 | 2015-02-17 | Spiegel-array |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017509918A JP2017509918A (ja) | 2017-04-06 |
| JP2017509918A5 true JP2017509918A5 (https=) | 2018-03-29 |
| JP6568865B2 JP6568865B2 (ja) | 2019-08-28 |
Family
ID=52595296
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016553587A Active JP6568865B2 (ja) | 2014-02-21 | 2015-02-17 | ミラーアレイ |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9874819B2 (https=) |
| JP (1) | JP6568865B2 (https=) |
| KR (1) | KR102424717B1 (https=) |
| DE (1) | DE102014203189A1 (https=) |
| WO (1) | WO2015124555A1 (https=) |
Families Citing this family (46)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9185291B1 (en) | 2013-06-13 | 2015-11-10 | Corephotonics Ltd. | Dual aperture zoom digital camera |
| CN108535839B (zh) | 2013-07-04 | 2022-02-08 | 核心光电有限公司 | 小型长焦透镜套件 |
| CN108989649B (zh) | 2013-08-01 | 2021-03-19 | 核心光电有限公司 | 具有自动聚焦的纤薄多孔径成像系统及其使用方法 |
| US9392188B2 (en) | 2014-08-10 | 2016-07-12 | Corephotonics Ltd. | Zoom dual-aperture camera with folded lens |
| CN112327463B (zh) | 2015-01-03 | 2022-10-14 | 核心光电有限公司 | 微型长焦镜头模块和使用该镜头模块的相机 |
| KR102088603B1 (ko) | 2015-04-16 | 2020-03-13 | 코어포토닉스 리미티드 | 소형 접이식 카메라의 오토 포커스 및 광학 이미지 안정화 |
| EP4425424A3 (en) | 2015-08-13 | 2024-11-20 | Corephotonics Ltd. | Dual aperture zoom camera with video support and switching / non-switching dynamic control |
| US10488631B2 (en) | 2016-05-30 | 2019-11-26 | Corephotonics Ltd. | Rotational ball-guided voice coil motor |
| KR20240036133A (ko) | 2016-06-19 | 2024-03-19 | 코어포토닉스 리미티드 | 듀얼 애퍼처 카메라 시스템에서의 프레임 동기화 |
| KR102903119B1 (ko) | 2016-07-07 | 2025-12-22 | 코어포토닉스 리미티드 | 폴디드 옵틱용 선형 볼 가이드 보이스 코일 모터 |
| DE102016217735A1 (de) * | 2016-09-16 | 2018-03-22 | Carl Zeiss Smt Gmbh | Komponente für eine Spiegelanordnung für die EUV-Lithographie |
| WO2018122650A1 (en) | 2016-12-28 | 2018-07-05 | Corephotonics Ltd. | Folded camera structure with an extended light-folding-element scanning range |
| US10884321B2 (en) | 2017-01-12 | 2021-01-05 | Corephotonics Ltd. | Compact folded camera |
| US11111133B1 (en) * | 2017-01-30 | 2021-09-07 | Mirrorcle Technologies, Inc. | MEMS actuators with improved performance and cooling |
| CN114137791A (zh) | 2017-03-15 | 2022-03-04 | 核心光电有限公司 | 具有全景扫瞄范围的照相装置及移动装置 |
| KR102456315B1 (ko) | 2017-11-23 | 2022-10-18 | 코어포토닉스 리미티드 | 컴팩트 폴디드 카메라 구조 |
| EP3848749A1 (en) | 2018-02-05 | 2021-07-14 | Corephotonics Ltd. | Reduced height penalty for folded camera |
| US11640047B2 (en) | 2018-02-12 | 2023-05-02 | Corephotonics Ltd. | Folded camera with optical image stabilization |
| KR102795759B1 (ko) | 2018-04-23 | 2025-04-11 | 코어포토닉스 리미티드 | 연장된 2 자유도 회전 범위를 갖는 광학 경로 폴딩 요소 |
| KR102912051B1 (ko) * | 2018-07-04 | 2026-01-13 | 코어포토닉스 리미티드 | 자동차 또는 감시 애플리케이션을 위한 스캐닝 광학 경로 폴딩 요소들을 구비하는 카메라 |
| US11635596B2 (en) | 2018-08-22 | 2023-04-25 | Corephotonics Ltd. | Two-state zoom folded camera |
| WO2020077154A1 (en) * | 2018-10-10 | 2020-04-16 | Vyas Trilok | Villanova ultra efficient vertical windmill system and method |
| WO2020144528A1 (en) | 2019-01-07 | 2020-07-16 | Corephotonics Ltd. | Rotation mechanism with sliding joint |
| DE102019206865B4 (de) | 2019-05-13 | 2024-09-12 | Carl Zeiss Smt Gmbh | Verfahren und vorrichtung zum erzeugen eines mathematischen modells zum positionieren von einzelspiegeln eines facettenspiegels in einem optischen system |
| KR102365748B1 (ko) | 2019-07-31 | 2022-02-23 | 코어포토닉스 리미티드 | 카메라 패닝 또는 모션에서 배경 블러링을 생성하는 시스템 및 방법 |
| EP4045959B1 (en) | 2019-12-03 | 2025-02-05 | Corephotonics Ltd. | Actuators for providing an extended two-degree of freedom rotation range |
| US11949976B2 (en) | 2019-12-09 | 2024-04-02 | Corephotonics Ltd. | Systems and methods for obtaining a smart panoramic image |
| KR102811003B1 (ko) | 2020-02-22 | 2025-05-20 | 코어포토닉스 리미티드 | 매크로 촬영을 위한 분할 스크린 기능 |
| EP4097773A4 (en) | 2020-04-26 | 2023-11-01 | Corephotonics Ltd. | TEMPERATURE CONTROL FOR HALL BAR SENSOR CORRECTION |
| CN117372248A (zh) | 2020-05-17 | 2024-01-09 | 核心光电有限公司 | 全视场参考图像的图像拼接 |
| KR20250156831A (ko) | 2020-05-30 | 2025-11-03 | 코어포토닉스 리미티드 | 슈퍼 매크로 이미지를 얻기 위한 시스템 및 방법 |
| CN119355935A (zh) | 2020-07-15 | 2025-01-24 | 核心光电有限公司 | 用于校正扫描折叠相机和包含这样的扫描折叠相机的多相机中的视点像差的方法 |
| US11637977B2 (en) | 2020-07-15 | 2023-04-25 | Corephotonics Ltd. | Image sensors and sensing methods to obtain time-of-flight and phase detection information |
| CN114270145B (zh) | 2020-07-31 | 2024-05-17 | 核心光电有限公司 | 用于大行程线性位置感测的霍尔传感器-磁体几何结构 |
| KR102598070B1 (ko) | 2020-08-12 | 2023-11-02 | 코어포토닉스 리미티드 | 스캐닝 폴디드 카메라의 광학 이미지 안정화 |
| TWI888016B (zh) | 2021-03-11 | 2025-06-21 | 以色列商核心光電有限公司 | 彈出式照相機系統 |
| EP4726455A2 (en) | 2021-06-08 | 2026-04-15 | Corephotonics Ltd. | Systems and cameras for tilting a focal plane of a super-macro image |
| KR102940165B1 (ko) | 2021-07-21 | 2026-03-16 | 코어포토닉스 리미티드 | 팝-아웃 모바일 카메라 및 액추에이터 |
| EP4500266A1 (en) | 2022-03-24 | 2025-02-05 | Corephotonics Ltd. | Slim compact lens optical image stabilization |
| DE102022203369A1 (de) * | 2022-04-05 | 2023-10-05 | Carl Zeiss Smt Gmbh | Anordnung, Verfahren und Computerprogrammprodukt zur Kalibrierung von Facettenspiegeln |
| EP4573403A1 (en) * | 2022-08-16 | 2025-06-25 | Carl Zeiss SMT GmbH | Micro-optical element |
| DE102022209427A1 (de) | 2022-09-09 | 2024-03-14 | Carl Zeiss Smt Gmbh | Mikrospiegelanordnung mit federnd gelagerten Einzelspiegelelementen |
| DE102022209411A1 (de) | 2022-09-09 | 2024-03-14 | Carl Zeiss Smt Gmbh | Mikrospiegelanordnung mit einer Anzahl von Einzelspiegelelementen |
| DE102022212168A1 (de) | 2022-11-16 | 2024-05-16 | Carl Zeiss Smt Gmbh | EUV-Optik-Modul für eine EUV-Projektionsbelichtungsanlage |
| DE102022212167A1 (de) | 2022-11-16 | 2023-09-14 | Carl Zeiss Smt Gmbh | EUV-Quellen-Modul für eine EUV-Projektionsbelichtungsanlage |
| DE102023126597A1 (de) * | 2023-09-29 | 2025-04-03 | Carl Zeiss Smt Gmbh | Verfahren zur Verarbeitung analoger elektrischer Ausgangssignale |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10138313A1 (de) | 2001-01-23 | 2002-07-25 | Zeiss Carl | Kollektor für Beleuchtugnssysteme mit einer Wellenlänge < 193 nm |
| US7145269B2 (en) | 2004-03-10 | 2006-12-05 | Asml Netherlands B.V. | Lithographic apparatus, Lorentz actuator, and device manufacturing method |
| JP2007052256A (ja) | 2005-08-18 | 2007-03-01 | Fujifilm Corp | 回転変位型光変調素子及びこれを用いた光学装置 |
| DE102006023652B4 (de) | 2006-05-18 | 2008-10-30 | Esa Patentverwertungsagentur Sachsen-Anhalt Gmbh | Elektromotorische Einrichtung zur Betätigung von Gaswechselventilen |
| US7804603B2 (en) * | 2006-10-03 | 2010-09-28 | Asml Netherlands B.V. | Measurement apparatus and method |
| US20080100816A1 (en) * | 2006-10-31 | 2008-05-01 | Asml Netherlands B.V. | Lithographic apparatus and method |
| WO2008095695A2 (de) * | 2007-02-06 | 2008-08-14 | Carl Zeiss Smt Ag | Verfahren und vorrichtung zur überwachung von mehrfachspiegelanordnungen in einem beleuchtungssystem einer mikrolithographischen projektionsbelichtungsanlage |
| JP5329520B2 (ja) * | 2007-03-27 | 2013-10-30 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 低角度で入射する補正光を用いる補正光学素子 |
| EP2243047B1 (en) * | 2008-02-15 | 2021-03-31 | Carl Zeiss SMT GmbH | Facet mirror for use in a projection exposure apparatus for microlithography |
| JP5355699B2 (ja) | 2008-10-20 | 2013-11-27 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 放射線ビームを案内するための光学モジュール |
| KR101258344B1 (ko) * | 2008-10-31 | 2013-04-30 | 칼 짜이스 에스엠티 게엠베하 | Ｅｕｖ 마이크로리소그래피용 조명 광학 기기 |
| DE102009045694B4 (de) | 2009-10-14 | 2012-03-29 | Carl Zeiss Smt Gmbh | Beleuchtungsoptik für die Mikrolithographie sowie Beleuchtungssystem und Projektionsbelichtungsanlage mit einer derartigen Beleuchtungsoptik |
| DE102010040811A1 (de) * | 2010-09-15 | 2012-03-15 | Carl Zeiss Smt Gmbh | Abbildende Optik |
| DE102011006100A1 (de) | 2011-03-25 | 2012-09-27 | Carl Zeiss Smt Gmbh | Spiegel-Array |
| DE102012213515A1 (de) * | 2012-08-01 | 2014-02-06 | Carl Zeiss Smt Gmbh | Verfahren zum Betreiben einer mikrolithographischen Projektionsbelichtungsanlage |
| DE102014203188A1 (de) * | 2014-02-21 | 2015-08-27 | Carl Zeiss Smt Gmbh | Verfahren zur Beleuchtung eines Objektfeldes einer Projektionsbelichtungsanlage |
-
2014
- 2014-02-21 DE DE102014203189.3A patent/DE102014203189A1/de not_active Ceased
-
2015
- 2015-02-17 JP JP2016553587A patent/JP6568865B2/ja active Active
- 2015-02-17 KR KR1020167025881A patent/KR102424717B1/ko active Active
- 2015-02-17 WO PCT/EP2015/053287 patent/WO2015124555A1/de not_active Ceased
-
2016
- 2016-08-02 US US15/226,358 patent/US9874819B2/en not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2017509918A5 (https=) | ||
| EP2208113B1 (en) | Illumination optical apparatus, exposure apparatus, and device manufacturing method | |
| KR101644762B1 (ko) | 조명 장치, 조명 방법, 노광 장치, 노광 방법 및 디바이스 제조 방법 | |
| CN101681117B (zh) | 照明光学装置、曝光装置及元件制造方法 | |
| JP5727005B2 (ja) | 光学系及びマルチファセットミラー | |
| KR101470769B1 (ko) | 마이크로리소그래픽 투영 노광 장치의 조명 시스템 | |
| JP5106692B2 (ja) | 投影リソグラフィのための照明光学ユニット | |
| EP2169464A1 (en) | Illumination system of a microlithographic projection exposure apparatus | |
| CN102349026B (zh) | 微光刻投射曝光设备 | |
| TWI344062B (en) | Optical system for transforming numerical aperture | |
| US8913227B2 (en) | Illumination optical system, aligner, and process for fabricating device | |
| CN104718499B (zh) | 微光刻投射曝光设备的照明系统 | |
| JP5700272B2 (ja) | 照明光学系、露光装置、およびデバイス製造方法 | |
| US9977334B2 (en) | Lighting system of a microlithographic projection exposure system and method for operating such a lighting system | |
| CN106030412A (zh) | 微光刻投影曝光设备的照明系统和用于操作该系统的方法 | |
| JP6691105B2 (ja) | Ｅｕｖ投影リソグラフィのための照明光学ユニット | |
| US9261695B2 (en) | Illumination system of a microlithographic projection exposure apparatus | |
| JP2012004558A (ja) | 照明光学系、露光装置、およびデバイス製造方法 | |
| WO2010003527A1 (en) | Illumination system for a projection exposure apparatus in semiconductor lithography and projection exposure apparatus | |
| JP2009117561A (ja) | 照明装置、該照明装置に用いられる空間光変調ユニット、露光装置、及びデバイスの製造方法 | |
| HK1231968A1 (en) | Spatial light modulation unit, illumination optical apparatus, exposure apparatus, and device manufacturing method | |
| HK1144968B (en) | Illumination optical apparatus, exposure apparatus, and device manufacturing method | |
| WO2017108448A1 (en) | Illumination system of a microlithographic apparatus |