JP2017500749A - 逆導通半導体素子 - Google Patents
逆導通半導体素子 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 30
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010292 electrical insulation Methods 0.000 description 2
- 230000036470 plasma concentration Effects 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
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Abstract
Description
本発明は、パワーエレクトロニクスの分野に関し、より特定的には請求項1のプリアンブルに係る逆導通半導体素子に関する。
US8212283 B2には、二重モード絶縁ゲートトランジスタ(Bi-mode Insulated Gate Transistor:BIGT)の形態の先行技術の逆導通絶縁ゲートバイポーラトランジスタ(reverse-conducting insulated gate bipolar transistor:RC−IGBT)が記載されており(図1に示されている)、当該RC−IGBTは、共通のウェハ100上にフリーホイールダイオードおよび絶縁ゲートバイポーラトランジスタ(insulated gate bipolar transistor:IGBT)を備え、ウェハの一部は、第1のドーピング濃度を有する(n−)ドープベース層101およびベース層厚み102を形成する。RC−IGBTは、コレクタ側103とエミッタ側104とを備え、コレクタ側103は、ウェハ100のエミッタ側104の反対側に配置されている。
・各々のパイロット領域エリアがpドープエリアであり、当該pドープエリアでは、任意の境界点までの全ての最短距離の最大値は、ベース層厚み102よりも大きい
・パイロット領域境界と活性領域境界との間にベース層厚み102の少なくとも1倍の最小距離があるように、活性領域110の中央部分に少なくとも1つのパイロット領域22が配置されている
・少なくとも1つの第2の領域20が、少なくとも1つのパイロット領域22ではなくアノード層2の部分である
・少なくとも1つのパイロット領域22の総面積(面積の合計)が、活性領域110の10〜30%である
・各々の第1の領域幅11が、ベース層厚み102よりも小さい。
本発明の目的は、スイッチング性能が向上した、ターンオフ中のダイナミックアバランシェが少ない、最大ターンオフ機能が向上した二重モード絶縁ゲートトランジスタを提供することである。
本発明の逆導通絶縁ゲートバイポーラトランジスタ(RC−IGBT)は、フリーホイールダイオードと、絶縁ゲートバイポーラトランジスタ(IGBT)とを共通のウェハ上に備え、ウェハの一部は、第1のドーピング濃度およびベース層厚みを有する第1の導電型のベース層を形成する。絶縁ゲートバイポーラトランジスタは、コレクタ側と、エミッタ側とを備え、コレクタ側は、ウェハのエミッタ側の反対側に配置される。
・各々のパイロット領域エリアは、第2の導電型のエリアであり、任意の境界点までのあらゆる(すなわち、全ての可能な)最短距離の最大値は、ベース層厚みの2倍よりも大きく、すなわち、パイロット領域幅は、ベース層厚みの2倍よりも大きく、パイロット領域は、ベース層厚みの2倍未満の互いからの距離を有する第1の領域によって、パイロット領域境界で横方向から囲まれる
・少なくとも1つのパイロット領域は、混合領域が少なくとも1つのパイロット領域を横方向から囲むように素子の中央部分に配置され、例示的に、混合領域の幅(活性領域と末端領域との間の界面とパイロット領域の境界との間の距離)は、ベース層厚みの少なくとも1倍、例示的にはベース層厚みの2倍である
・少なくとも1つの第2の領域は、少なくとも1つのパイロット領域ではないアノード層の部分である
・少なくとも1つのパイロット領域の総面積は、混合領域の面積の10%〜45%である
・各々の第1の領域幅は、ベース層厚みよりも小さい。
添付の図面を参照して、以下の本文において本発明の主題をより詳細に説明する。
図1には、逆導通絶縁ゲートバイポーラトランジスタ(RC−IGBT)とも称される本発明の逆導通半導体素子200の第1の実施例が示されている。RC−IGBT200は、n型ベース層101を備え、当該n型ベース層101は、一体化されたIGBTのエミッタ側104を形成する第1の主面と、一体化されたIGBTのコレクタ側103を形成する、第1の主面とは反対側の第2の主面とを有する。ベース層101は、第1の低ドーピング濃度、典型的には最終的な逆導通絶縁ゲートバイポーラトランジスタにおける未修正のドーピングを有する(n−)ドープウェハ100の一部である。代替的に、当該素子は、pドープウェハを発端として当該pドープウェハの上に例えばエピタキシャル成長によってベース層101を作製することで製造されてもよい。例示的な実施例では、ベース層厚み102は、第1のドーピング濃度を有するウェハの部分(すなわち、ベース層101)のコレクタ側103とエミッタ側104との間の最大垂直距離である。例示的な実施例では、ベース層厚みは、(約1200Vの素子では)少なくとも100μmであり、(約2500Vの素子では)少なくとも300μmであり、(約4500Vの素子では)少なくとも500μmである。
参照符号の一覧
1 カソード層、10 第1の領域、11 第1の領域の幅、2 アノード層、20 第2の領域、21 第2の領域の幅、22 パイロット領域、23 パイロット領域の幅、3 ソース領域、31 第1の面密度、32 第2の面密度、4 ウェル層、41 強化層、5,5′ ゲート層、55 ゲートパッド、6 絶縁層、61 第1の電気絶縁層、62 第2の電気絶縁層、7 バッファ層、8 エミッタ電極、9 コレクタ電極、100 ウェハ、101 ベース層、102 ベース層厚み、103 コレクタ側、104 エミッタ側、110 活性領域、111 末端エリア、112 パイロット領域境界と活性領域境界との間の距離、200 RC−IGBT、250 MOSセル。
Claims (15)
- 逆導通半導体素子(200)であって、フリーホイールダイオードと、絶縁ゲートバイポーラトランジスタとを共通のウェハ(100)上に備え、前記ウェハ(100)の一部は、第1のドーピング濃度およびベース層厚み(102)を有する第1の導電型のベース層(101)を形成し、
前記絶縁ゲートバイポーラトランジスタは、コレクタ側(103)と、前記ウェハ(100)の前記コレクタ側(103)とは反対側のエミッタ側(104)とを備え、
前記ベース層厚み(102)は、前記第1のドーピング濃度を有する前記ウェハの部分の前記コレクタ側(103)と前記エミッタ側(104)との間の最大垂直距離であり、
前記第1の導電型および前記第1のドーピング濃度よりも高いドーピング濃度のカソード層(1)と、前記第1の導電型とは異なる第2の導電型のアノード層(2)とが、前記コレクタ側(103)に交互に配置され、
前記第1の導電型の複数のソース領域(3)と、前記第2の導電型のウェル層(4)と、第1の絶縁層(61)によって前記第1または第2の導電型のいずれかの層から絶縁される導電性ゲート層(5)を有するゲート電極とが、前記エミッタ側(104)に配置され、
前記カソード層(1)は、少なくとも1つの第1の領域(10)を備え、各々の第1の領域(10)は、第1の領域幅(11)を有し、
前記アノード層(2)は、少なくとも1つの第2の領域(20)を備え、各々の第2の領域(20)は、第2の領域幅(21)を有し、前記アノード層(2)は、少なくとも1つのパイロット領域(22)を備え、各々のパイロット領域(22)は、パイロット領域幅(23)を有し、
いかなる領域も、領域幅と、領域境界によって囲まれる領域面積とを有し、
最短距離は、前記領域面積内の点と前記領域境界上の点との間の最小長さであり、
各々の領域幅は、前記領域内の全ての最短距離の最大値の2倍であると規定され、
前記逆導通半導体素子(200)は、前記素子(200)の中央部分に活性領域(110)を備え、前記活性領域(110)は、前記ウェハ(100)内のエリアであり、前記エリアは、前記ソース領域(3)、ウェル層(4)およびゲート層(50)を含み、前記ソース領域(3)、ウェル層(4)およびゲート層(50)の投影部に配置され、
各々のパイロット領域エリアは、前記ベース層厚み(102)の少なくとも2倍の幅を有するエリアであり、
前記パイロット領域(22)は、前記ベース層厚み(102)の2倍未満の互いからの距離を有する第1の領域(10)によって、パイロット領域境界で横方向から囲まれ、
前記少なくとも1つの第2の領域(20)は、前記少なくとも1つのパイロット領域(22)ではない前記アノード層(2)の部分であり、
混合領域は、前記少なくとも1つの第1および第2の領域(10,20)を備え、
前記少なくとも1つのパイロット領域(22)は、前記混合領域が前記少なくとも1つのパイロット領域(22)を横方向から囲むように前記素子(200)の前記中央部分に配置され、
前記混合領域は、前記ベース層厚み(102)の少なくとも1倍の幅を有し、
前記少なくとも1つのパイロット領域(22)の総面積は、前記混合領域の面積の10%〜45%であり、
各々の第1の領域幅(11)は、前記ベース層厚み(102)よりも小さく、
前記少なくとも1つのパイロット領域(22)のうちの1つの投影部に位置する前記エミッタ側(104)の各エリアにおいて、前記複数のソース領域(3)は、第1の面密度(31)を有し、
前記混合領域の投影部に位置する前記エミッタ側(104)の各エリアにおいて、前記複数のソース領域(3)は、第2の面密度(32)を有し、
前記第1の面密度(31)は、前記第2の面密度(32)よりも低いことを特徴とする、逆導通半導体素子(200)。 - 前記第1の面密度(31)は、前記第2の面密度(32)のせいぜい50%またはせいぜい10%またはせいぜい5%であることを特徴とする、請求項1に記載の逆導通半導体素子(200)。
- 前記第1の面密度(31)はゼロであることを特徴とする、請求項1に記載の逆導通半導体素子(200)。
- 前記少なくとも1つのパイロット領域(22)のうちの1つの投影部と重なる前記エミッタ側(104)に、前記ゲート電極(5)の外部接触部のためのゲートパッドが配置されることを特徴とする、請求項1から3のいずれか1項に記載の逆導通半導体素子(200)。
- 少なくとも1つまたは各々の第2の領域幅(21)は、前記ベース層厚み(102)よりも大きいことを特徴とする、請求項1から4のいずれか1項に記載の逆導通半導体素子(200)。
- 各々のパイロット領域エリアは、前記ベース層厚み(102)の少なくとも2.5倍または3倍または4倍の幅を有することを特徴とする、請求項1から5のいずれか1項に記載の逆導通半導体素子(200)。
- 前記パイロット領域(22)は、正方形、長方形、円形、星形、ひし形、または六角形を有することを特徴とする、請求項1から6のいずれか1項に記載の逆導通半導体素子(200)。
- 前記パイロット領域(22)は、三ツ星を形成する3つの突出部、十字を形成する4つの突出部、または5つ以上の突出部を備える星形を有することを特徴とする、請求項7に記載の逆導通半導体素子(200)。
- 前記少なくとも1つのパイロット領域(22)は、少なくとも1つまたは各々の第2の領域(20)に接続されることを特徴とする、請求項1から8のいずれか1項に記載の逆導通半導体素子(200)。
- 前記少なくとも1つのパイロット領域(22)は、単一のパイロット領域であるか、または、少なくとも2つのパイロット領域(22)は、第2の領域(20)を介して互いに相互接続され、前記単一のパイロット領域または前記少なくとも2つのパイロット領域は、前記活性領域(110)の境界まで延在する第2の領域(22)に接続されることを特徴とする、請求項9に記載の逆導通半導体素子(200)。
- 前記第2の領域(20)+パイロット領域(22)の面積に対する前記第1の領域(10,12)の総面積は、10%〜45%であることを特徴とする、請求項1から10のいずれか1項に記載の逆導通半導体素子(200)。
- 前記少なくとも1つのパイロット領域(22)の総面積は、前記混合領域の18%〜33%または22%〜28%であることを特徴とする、請求項1から11のいずれか1項に記載の逆導通半導体素子(200)。
- 前記少なくとも1つのパイロット領域(22)は、単一の領域で構成されるか、または、前記少なくとも1つのパイロット領域(22)は、前記ベース層厚み(102)のせいぜい2倍、特に前記ベース層厚み(102)のせいぜい1倍だけ互いに分離される複数の領域を備えることを特徴とする、請求項1から12のいずれか1項に記載の逆導通半導体素子(200)。
- 前記混合領域は、前記ベース層厚み(102)の少なくとも2倍の幅を有することを特徴とする、請求項1から13のいずれか1項に記載の逆導通半導体素子(200)。
- 前記ゲート電極は、トレンチゲート電極(5)または平面ゲート電極(5′)として形成されることを特徴とする、請求項1から14のいずれか1項に記載の逆導通半導体素子(200)。
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