JP2017216391A - 基板処理方法 - Google Patents
基板処理方法 Download PDFInfo
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- JP2017216391A JP2017216391A JP2016110055A JP2016110055A JP2017216391A JP 2017216391 A JP2017216391 A JP 2017216391A JP 2016110055 A JP2016110055 A JP 2016110055A JP 2016110055 A JP2016110055 A JP 2016110055A JP 2017216391 A JP2017216391 A JP 2017216391A
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- 239000000758 substrate Substances 0.000 title claims abstract description 86
- 238000003672 processing method Methods 0.000 title claims abstract description 44
- 238000012545 processing Methods 0.000 claims abstract description 222
- 238000009792 diffusion process Methods 0.000 claims abstract description 14
- 239000007789 gas Substances 0.000 claims description 340
- 238000005530 etching Methods 0.000 claims description 68
- 230000008021 deposition Effects 0.000 claims description 4
- 229910052756 noble gas Inorganic materials 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 47
- 230000008569 process Effects 0.000 abstract description 39
- 238000010926 purge Methods 0.000 description 79
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 15
- 239000001301 oxygen Substances 0.000 description 15
- 229910052760 oxygen Inorganic materials 0.000 description 15
- 238000009826 distribution Methods 0.000 description 9
- 239000003507 refrigerant Substances 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 5
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000004088 simulation Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 239000005046 Chlorosilane Substances 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000000231 atomic layer deposition Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- FZHAPNGMFPVSLP-UHFFFAOYSA-N silanamine Chemical compound [SiH3]N FZHAPNGMFPVSLP-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
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- C23C16/45523—Pulsed gas flow or change of composition over time
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- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
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Abstract
【解決手段】処理容器12内において基板Wにガスを供給し所定の処理を行う処理空間Aと、処理空間と連通し処理空間の圧力よりも所定の割合小さい圧力を有する排気空間Bと、を有する基板処理装置における基板処理方法である。基板に第1のガスを供給する第1の工程と、第1の工程の後、基板に第1のガスとは異なる第2のガスを供給する第2の工程と、を有する。基板の端部から処理空間と排気空間との境界までの距離、第2のガスの流れに垂直となる断面積、第2のガスの供給流量、処理空間の圧力、第2のガスに対する第1のガスの拡散係数から算出されるペクレ数が1より大きくなるように、第2の工程における基板の端部から処理空間と排気空間との境界までの距離、第2のガスの流れに垂直となる空間断面積及び第2のガスの供給流量の少なくともいずれかを調整する。
【選択図】図1
Description
本発明の一実施形態のプラズマ処理装置について説明する。図1は、一実施形態に係るプラズマ処理装置を示す概略構成図である。
次に、本発明の一実施形態の基板処理方法について説明する。以下では、ガスを置換する時間を短縮することが可能な、本発明の第1実施形態及び第2実施形態の基板処理方法について、前述のプラズマ処理装置を用いてウエハに形成されたシリコン酸化膜をエッチングする場合を例に挙げて説明する。以下の基板処理方法は、制御部100によりプラズマ処理装置10の各部の動作が制御されることにより実行される。
第1実施形態の基板処理方法について説明する。図2は、第1実施形態の基板処理方法を説明するためのフローチャートである。
第2実施形態の基板処理方法について説明する。図5は、第2実施形態の基板処理方法を説明するためのフローチャートである。
第3実施形態の基板処理方法について説明する。図6は、第3実施形態の基板処理方法を説明するためのフローチャートであり、コンティニュアスプラズマを使用した基板処理方法を説明するためのフローチャートである。
次に、本発明の効果を示すシミュレーション結果について説明する。
12 処理容器
34a ガス吐出孔
48 バッフル板
50 排気装置
PD 載置台
A 処理空間
B 排気空間
W ウエハ
Claims (11)
- 処理容器内において基板にガスを供給し所定の処理を行う処理空間と、前記処理空間と連通し前記処理空間の圧力よりも所定の割合小さい圧力を有する排気空間と、を有する基板処理装置における基板処理方法であって、
前記基板に第1のガスを供給する第1の工程と、
前記第1の工程の後、前記基板に前記第1のガスとは異なる第2のガスを供給する第2の工程と、
を有し、
前記基板の端部から前記処理空間と前記排気空間との境界までの距離をL、前記第2のガスの流れに垂直となる空間断面積をS(x)、前記第2のガスの供給流量をQ、前記処理空間の圧力をP、前記第2のガスに対する前記第1のガスの拡散係数をDとしたときに、
下記の数式(3)により算出されるペクレ数Peが1より大きくなるように、前記第2の工程における前記基板の端部から前記処理空間と前記排気空間との境界までの距離L、前記第2のガスの流れに垂直となる空間断面積S(x)及び前記第2のガスの供給流量Qの少なくともいずれかを調整することを特徴とする基板処理方法。
- 前記所定の割合が30%以上であることを特徴とする請求項1に記載の基板処理方法。
- 前記第1の工程において、前記第1のガスをプラズマ化して供給することを特徴とする請求項1又は2に記載の基板処理方法。
- 前記第2の工程において、前記第2のガスをプラズマ化して供給することを特徴とする請求項1乃至3のいずれか一項に記載の基板処理方法。
- 前記基板は載置台に載置されており、
前記ペクレ数Peが1となる場合の前記基板の端部から前記排気空間に向かう方向への距離をL1としたときに、
前記基板の半径と前記距離L1との和が前記載置台の半径よりも小さいことを特徴とする請求項1乃至4のいずれか一項に記載の基板処理方法。 - 前記第1の工程と前記第2の工程とが繰り返し行われ、
前記ペクレ数Peが1より大きくなるように、前記第1の工程における前記基板の端部から前記処理空間と前記排気空間との境界までの距離L、前記第2のガスの流れに垂直となる空間断面積S(x)及び前記第2のガスの供給流量Qの少なくともいずれかを調整することを特徴とする請求項1乃至5のいずれか一項に記載の基板処理方法。 - 前記第1のガスはエッチングガスを含み、前記第2のガスは希ガス、O2ガス、N2ガスの少なくとも1つのガスを含むことを特徴とする請求項1乃至6のいずれか一項に記載の基板処理方法。
- 前記第1のガスは、希ガス、O2ガス、N2ガスの少なくとも1つのガスを更に含み、
前記第2の工程において前記基板に供給される希ガス、O2ガス、N2ガスの少なくとも1つのガスの流量が、前記第1の工程において前記基板に供給される希ガス、O2ガス、N2ガスの少なくとも1つのガスの流量と同一であることを特徴とする請求項7に記載の基板処理方法。 - 前記第1のガスは成膜ガスを含み、前記第2のガスは希ガス、O2ガス、N2ガスの少なくとも1つのガスを含むことを特徴とする請求項1乃至6のいずれか一項に記載の基板処理方法。
- 前記第1のガスは、希ガス、O2ガス、N2ガスの少なくとも1つのガスを更に含み、
前記第2の工程において前記基板に供給される希ガス、O2ガス、N2ガスの少なくとも1つのガスの流量が、前記第1の工程において前記基板に供給される希ガス、O2ガス、N2ガスの少なくとも1つのガスの流量と同一であることを特徴とする請求項9に記載の基板処理方法。 - 前記第2の工程の後、前記基板に第3のガスを供給する第3の工程と、
前記第3の工程の後、前記基板に前記第3のガスとは異なる第4のガスを供給する第4の工程と、
を有し、
前記ペクレ数Peが1より大きくなるように、前記第4の工程における前記基板の端部から前記処理空間と前記排気空間との境界までの距離Lと、前記第2のガスの流れに垂直となる空間断面積S(x)と、前記第2のガスの供給流量Qとの少なくともいずれかを調整することを特徴とする請求項1乃至10のいずれか一項に記載の基板処理方法。
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