JP2017212322A - Substrate housing container and management system therefor and management method for substrate housing container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate housing container and a management system therefor and a management method for the substrate housing container, for making it possible to easily determining replacement time of a housing container or a component thereof and easily select a replacement product.SOLUTION: A management system includes: detection means 30 that is provided on a substrate housing container 1 to detect a use state thereof; small-sized wireless communication means 40 that is provided on the substrate housing container 1 to determine examination/inspection time therefor; an examination/inspection device for performing an examination/inspection on the substrate housing container 1 at the examination/inspection time; and reporting means for reporting a content depending on any of a determination result on the examination/inspection time for the substrate housing container 1 by the wireless communication means 40 and an examination/inspection result on the substrate housing container 1 by the examination/inspection device, where the substrate housing container 1 is accessed by a predetermined related peripheral device. The wireless communication means 40 includes an operation processing unit for at least comparing a detection value by the detection means 30 with an examination/inspection value on the substrate housing container 1, and determines the examination/inspection time for the substrate housing container 1 on the basis of a result of the comparison.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a substrate storage container for storing, storing, transporting, and transporting a substrate made of a semiconductor wafer, a liquid crystal device, a glass wafer, a mask glass, and the like, a management system therefor, and a management method for the substrate storage container.

  A conventional substrate storage container is not shown, but a container body for arranging and storing a plurality of semiconductor wafers made of silicon wafers of φ300 mm in the vertical direction, a lid body for opening and closing the open front of the container body, and And a locking mechanism that locks the lid fitted on the front of the container body, and is positioned and mounted on a load port device attached to the semiconductor processing equipment, or is gripped by a ceiling transport device in a semiconductor manufacturing factory. (See Patent Documents 1, 2, and 3).

  The container body is formed into a front open box by a molding material containing a predetermined resin, and support pieces for semiconductor wafers are respectively provided on both sides of the inside of the container body, and the pair of support pieces are vertically arranged at a predetermined pitch. An array is formed. In addition, the bottom plate of the container body is provided with a positioning mechanism for accessing and positioning a predetermined related peripheral device, the rear wall of the container body, etc., the lot number of the substrate storage container, the production history of the semiconductor wafer, etc. An RFID tag for identification of an RFID system storing predetermined data is attached, and data of the RF tag is read and written using radio waves in a non-contact manner (see Patent Document 4).

  Such a substrate storage container is used so as to circulate in all production processes of semiconductors, or is used for each area of the production process, and is periodically used after being cleaned periodically. During repeated use, if the substrate storage container becomes old or is severely damaged, the semiconductor wafer will be damaged or the quality will be degraded. It is exchanged for a storage container. There is no clear criterion for this replacement period, and the years of use such as 8, 9, 10, etc. are the standard.

Japanese Patent No. 3636669 Japanese Patent No. 4767517 JP-T-2005-513659 Japanese Patent No. 4553840

  Conventional substrate storage containers are configured as described above, and there is no clear criterion for replacement timing, and usually the age of use is the standard for replacement timing. Since individual differences occur and the length of usable years varies, there is a problem that selection of replacement parts is not easy and selection work becomes complicated. In addition, when the substrate storage container is used to circulate in all production processes of semiconductors, since the use history is different for each substrate storage container, there is a variation in the replacement timing of each substrate storage container, and it is difficult to judge the replacement timing. There is a problem of becoming.

  In addition, when a substrate storage container is used for each area of the semiconductor production process, particularly when a substrate storage container is used in a metal wiring formation process or a heat treatment process of a semiconductor wafer, due to thermal deformation or the like, Performance degradation is severe and the life of the substrate storage container may be shortened. In view of this point, when a substrate storage container is used for each area of the production process, it is necessary to individually and specifically determine the criteria for determining the replacement timing of the substrate storage container for each area. Work becomes really difficult.

  The present invention has been made in view of the above, and it is possible to easily determine the replacement timing of a storage container and its parts, and to easily select a replacement product, its management system, and the substrate storage container. The purpose is to provide a management method.

In order to solve the above-described problems, the present invention includes a container main body that can store a plurality of substrates side by side, and a lid that opens and closes the opening of the container main body, and is accessed by a predetermined related peripheral device. There,
Detection means provided on at least one of the container main body and the lid and detecting its use state; wireless communication means provided on either the container main body and the lid and capable of communicating with an external communication device; Including notification means connected to the wireless communication means and provided in at least one of the container body and the lid,
At least one of the external communication device and the wireless communication means has a function of recording the detection value of the detection means and the threshold value related to the container body or the lid, and compares the detection value of the detection means and the threshold value related to the container body or the cover body. And a function to judge the use limit of the container body or lid according to the comparison result,
The notification means is characterized in that at least one of the external communication device and the wireless communication means notifies the contents according to the result of comparing the detection value of the detection means and the threshold value related to the container body or the lid.

In the present invention, in order to solve the above-mentioned problem, a detection means provided in the substrate storage container for detecting its use state, a wireless communication means provided in the substrate storage container for determining the inspection / inspection time, and inspection Inspection / inspection device for inspecting / inspecting the substrate storage container at the inspection time, contents according to the results of the inspection result of the substrate storage container by the wireless communication means and the inspection / inspection result of the substrate storage container by the inspection / inspection device And a notification means for notifying the system, and is a system that is accessed by a predetermined related peripheral device,
The wireless communication unit includes an external input unit that inputs a detection value from the detection unit, a data recording unit that records at least the detection value of the detection unit and the inspection / inspection value regarding the substrate storage container, and at least the detection value of the detection unit and the substrate. A calculation processing unit that compares the inspection and inspection values related to the storage container and a wireless communication unit that is communicably connected to the inspection and inspection apparatus, and determines the inspection and inspection timing of the substrate storage container based on the comparison result of the arithmetic processing unit. It is characterized by.

In the present invention, in order to solve the above-mentioned problem, a detection means provided in the substrate storage container for detecting its use state, a wireless communication means provided in the substrate storage container for determining the inspection / inspection time, and inspection Inspection and inspection device for inspecting and inspecting the substrate storage container at the inspection time, service providing means for analyzing the performance of the substrate storage container from the inspection and inspection content, and recording the inspection and inspection content of the substrate storage container by this inspection and inspection device, and wireless Notification to notify the contents according to any of the result of the inspection of the substrate storage container by the communication means, the result of the inspection of the substrate storage container by the inspection and inspection device, and the result of the analysis of the substrate storage container by the service providing means Means for accessing a predetermined associated peripheral device, comprising:
The wireless communication unit includes an external input unit that inputs a detection value from the detection unit, a data recording unit that records at least the detection value of the detection unit and the inspection / inspection value regarding the substrate storage container, and at least the detection value of the detection unit and the substrate. An arithmetic processing unit that compares the inspection and inspection values related to the storage container, and at least a wireless communication unit that is communicably connected to the service providing unit among the inspection and inspection device and the service providing unit. It is characterized by determining the inspection and inspection time of the substrate storage container.

  The substrate storage container includes a container main body capable of storing a plurality of substrates arranged in the vertical direction, and a lid that closes the opened front of the container main body in a sealed state. A plurality of support pieces that support the substantially horizontal are provided opposite to each other, and a positioning mechanism that is positioned by accessing a predetermined related peripheral device is provided at a lower portion of the container main body. A predetermined mechanism is provided at the upper portion of the container main body. A flange for accessing and holding the related peripheral device is provided, and the lid is fitted to the front surface of the container main body by rotating the rotation operation member by access from a predetermined related peripheral device. It is preferable to provide a locking mechanism for locking.

  In addition, an air supply valve capable of supplying gas from the outside of the container main body to the inside and an exhaust valve capable of exhausting gas from the inside of the container main body to the outside are provided below the container main body of the substrate storage container, respectively. A gas source is provided in the main body, and a hollow nozzle connected to the gas source is provided upright on the air supply valve, and a plurality of injection holes for injecting gas into the container main body are provided in the peripheral wall of the nozzle Should be perforated.

In addition, the inspection / inspection device accesses the positioning mechanism of the container body of the substrate storage container, positions and mounts it, and attaches and removes the lid body to the front surface of the container body by the lid opening / closing mechanism, and the dimensions of the substrate storage container Including a dimension measuring device for measuring
The load port device includes a valve unit that is connected to an air supply valve and an exhaust valve of the container main body to flow gas into and out of the container main body, and a plurality of measurement sensors that measure the flow rate of the gas flowing through the valve unit. A torque sensor that measures the rotational torque of the rotation operation member of the locking mechanism, a load sensor that measures the pressing force when the lid is pressed against the front of the container body, and a gas source in the container body is filled with gas And a filling unit to be included.

The detecting means is attached to the container body of the substrate storage container and projects a light projecting / receiving element for the lid to project the light beam toward the lid, and the light beam from the light projecting / receiving element for the lid is attached to the lid. A photoelectric sensor that detects the number of times the lid is opened and closed by measuring the time that the lid light emitting and receiving element is unable to receive the reflected light from the retroreflective member. Yes,
The wireless communication means inputs the number of opening / closing of the lid from the detecting means to the external input unit and records it in the data recording unit, and the number of times of opening / closing the lid recorded in the data recording unit and the inspection / inspection value of the lid As a result of the comparison in the arithmetic processing unit, as a result of the comparison in the arithmetic processing unit, when the lid opening / closing frequency is equal to or greater than the inspection inspection value of the lid, it is determined that the substrate storage container is in the inspection inspection period,
The inspection / inspection device inspects and inspects the sealing state of the substrate storage container according to the measurement values of the plurality of measurement sensors of the load port device, and the measurement values measured by the torque sensor of the load port device and the rotation operation member of the locking mechanism Inspect and check the locking mechanism according to the comparison result with the initial rotational torque value of the lid, and the lid body according to the comparison result between the measured value measured by the load sensor of the load port device and the initial pressing force value required for the lid body Inspect and check the quality of
When the wireless communication unit of the wireless communication unit receives the inspection / inspection result of the inspection / inspection apparatus or the analysis result of the service providing unit, the notification unit notifies the contents corresponding to the inspection / inspection result or analysis result of the substrate storage container. be able to.

The detection means is an acceleration sensor that is attached to the substrate storage container and detects the acceleration thereof.
The wireless communication means inputs the acceleration value of the substrate storage container from the detection means to the external input unit and records it in the data recording unit. The acceleration value of the substrate storage container recorded in the data recording unit and the inspection of the substrate storage container If the acceleration value of the substrate storage container is equal to or greater than the inspection inspection value of the substrate storage container as a result of the comparison with the inspection value by the arithmetic processing unit and the comparison by the arithmetic processing unit, the substrate storage container Judge that there is
The inspection / inspection device inspects and inspects the quality of the substrate storage container according to the comparison result between the measurement value measured by the dimension measurement device and the dimension threshold value of the substrate storage container,
When the wireless communication unit of the wireless communication unit receives the inspection / inspection result of the inspection / inspection apparatus or the analysis result of the service providing unit, the notification unit notifies the contents corresponding to the inspection / inspection result or analysis result of the substrate storage container. be able to.

The detection means is attached to the container body of the substrate storage container, and acts on the substrate storage container from the acceleration of the substrate storage container, the number of times the substrate storage container is transferred, the transfer distance of the substrate storage container, the number of times the substrate storage container is held by the flange, An acceleration sensor that detects at least one information value of the number of impacts, the maximum impact value that acted on the substrate storage container, and the maximum frequency that acted on the substrate storage container,
The wireless communication means inputs the information value from the detection means to the external input section and records it in the data recording section, and the arithmetic processing section outputs the information value recorded in the data recording section and the inspection / inspection value of the substrate storage container. In comparison, as a result of comparison in the arithmetic processing unit, when the information value is equal to or greater than the inspection / inspection value of the substrate storage container, it is determined that the substrate storage container is in the inspection / inspection period,
The inspection / inspection device inspects and inspects the quality of the substrate storage container according to the comparison result between the measurement value measured by the dimension measurement device and the dimension threshold value of the substrate storage container,
When the wireless communication unit of the wireless communication unit receives the inspection / inspection result of the inspection / inspection apparatus or the analysis result of the service providing unit, the notification unit notifies the contents corresponding to the inspection / inspection result or analysis result of the substrate storage container. It is possible.

Further, the detection means is a temperature sensor that detects the number of heat shocks of the substrate storage container by measuring the temperature at the time of the heat shock when a heat shock occurs by storing the heated substrate in the substrate storage container,
The wireless communication means inputs the number of heat shocks from the detection means to the external input unit and records it in the data recording unit, and calculates the number of heat shocks recorded in the data recording unit and the inspection / inspection value of the substrate storage container When the number of heat shocks is equal to or greater than the inspection / inspection value of the substrate storage container, the substrate storage container is determined to be in the inspection / inspection period.
The inspection / inspection device inspects and inspects the quality of the substrate storage container according to the comparison result between the measurement value measured by the dimension measurement device and the dimension threshold value of the substrate storage container,
When the wireless communication unit of the wireless communication unit receives the inspection / inspection result of the inspection / inspection apparatus or the analysis result of the service providing unit, the notification unit notifies the contents corresponding to the inspection / inspection result or analysis result of the substrate storage container. It is possible.

The detection means is a temperature sensor that measures the drying temperature of the substrate storage container and detects the number of times of cleaning the substrate storage container when the substrate storage container is cleaned and thermally dried.
The wireless communication means inputs the number of cleanings of the substrate storage container from the detection means to the external input unit and records it in the data recording unit, and the number of cleanings of the substrate storage container recorded in the data recording unit and the inspection of the substrate storage container When the number of cleanings of the substrate storage container is equal to or greater than the inspection inspection value of the substrate storage container as a result of comparing the inspection value with the arithmetic processing unit Judge that there is
The inspection / inspection device inspects and inspects the quality of the substrate storage container according to the comparison result between the measurement value measured by the dimension measurement device and the dimension threshold value of the substrate storage container,
When the wireless communication unit of the wireless communication unit receives the inspection / inspection result of the inspection / inspection apparatus or the analysis result of the service providing unit, the notification unit notifies the contents corresponding to the inspection / inspection result or analysis result of the substrate storage container. It is possible.

The detection means is an inclination sensor that detects the level of the substrate storage container when the substrate storage container is positioned and mounted on a predetermined related peripheral device via a positioning mechanism.
The wireless communication means inputs the horizontal value of the substrate storage container from the detection means to the external input unit, records it in the data recording unit, and inspects the horizontal value of the substrate storage container recorded in the data recording unit and the substrate storage container If the horizontal value of the substrate storage container approaches at least the inspection / inspection value of the substrate storage container as a result of the comparison with the inspection value by the arithmetic processing unit and the comparison by the arithmetic processing unit, the substrate storage container Judge that there is
The inspection / inspection device inspects and inspects the quality of the substrate storage container according to the comparison result between the measurement value measured by the dimension measurement device and the dimension threshold value of the substrate storage container,
When the wireless communication unit of the wireless communication unit receives the inspection / inspection result of the inspection / inspection apparatus or the analysis result of the service providing unit, the notification unit notifies the contents corresponding to the inspection / inspection result or analysis result of the substrate storage container. be able to.

The detection means is an oxygen concentration sensor that detects the oxygen concentration in the substrate storage container when the substrate is stored in the substrate storage container.
The wireless communication means inputs the oxygen concentration value in the substrate storage container from the detection means to the external input unit and records it in the data recording unit, and the oxygen concentration value in the substrate storage container recorded in the data recording unit and the substrate When the inspection processing value of the storage container is compared with the arithmetic processing unit, and the result of the comparison by the arithmetic processing unit is that the oxygen concentration value in the substrate storage container is at least close to the inspection inspection value of the substrate storage container, the substrate storage Judge that the container is in the inspection and inspection period, let the purge gas source of the container body supply the purge gas to the purge nozzle,
The inspection and inspection device fills the gas from the filling unit to the gas source of the substrate storage container,
When it is determined by the wireless communication means that the substrate storage container is at the inspection / inspection time, the notification means can notify the contents according to the determination result of the wireless communication means.

In the present invention, in order to solve the above problem, a substrate storage container management method using the substrate storage container management system according to claim 2,
The use state of the substrate storage container is detected by the detection means, the detection value of the detection means is compared with the inspection / inspection value regarding the substrate storage container by the wireless communication means, and the inspection / inspection time of the substrate storage container is determined based on the comparison result. When it is determined that the substrate storage container is in the inspection / inspection period, the substrate storage container is inspected / inspected by the inspection / inspection apparatus, and the inspection / inspection result of the substrate storage container by the inspection / inspection apparatus is transmitted to the wireless communication means. It is characterized in that the notification means notifies the contents according to the judgment result of the inspection and inspection timing of the substrate storage container by the wireless communication means or the inspection and inspection result of the substrate storage container by the inspection and inspection apparatus.

Furthermore, in order to solve the above-described problems in the present invention, a substrate storage container management method using the substrate storage container management system according to claim 3,
The use state of the substrate storage container is detected by the detection means, the detection value of the detection means is compared with the inspection / inspection value regarding the substrate storage container by the wireless communication means, and the inspection / inspection time of the substrate storage container is determined based on the comparison result. When it is determined that the substrate storage container is in the inspection and inspection period, the substrate storage container is inspected and inspected by the inspection and inspection apparatus, and the inspection and inspection contents of the substrate storage container by the inspection and inspection apparatus are recorded in the service providing means. In addition, the performance of the substrate storage container is analyzed from the contents of the inspection and inspection, the analysis result of the substrate storage container by the service providing means is transmitted to the wireless communication means and recorded, and the inspection and inspection result of the substrate storage container by the inspection and inspection device or the service The content according to the analysis result of the substrate storage container by the providing means is notified by the notification means.

  Here, the substrate in the claims includes at least the necessary number (for example, 2 or less, 20 or more) of semiconductor wafers, liquid crystal devices, glass wafers, mask glasses, etc. of φ200, 300, 450 mm. The substrate storage container is mainly a front open box type, but does not specifically ask top open box type, bottom open box type, transparent, opaque, or translucent. The predetermined related peripheral device includes at least a semiconductor processing device, a load port device that opens and closes a lid attached to the device, and various transfer devices for a substrate storage container. The external communication device includes at least an inspection / inspection device, a load port device, various servers, and the like.

  Substrate storage container, in other words, the use state of the container main body and the cover includes at least opening / closing of the cover, presence / absence of the substrate, acceleration of the substrate storage container, number of times of transport of the substrate storage container, transport distance of the substrate storage container, substrate The number of times the storage container is held by the flange, the number of impacts that acted on the substrate storage container, the maximum impact value that acted on the substrate storage container, the maximum frequency that acted on the substrate storage container, the number of heat shocks, the number of times the substrate storage container was washed, the substrate storage container Level, oxygen concentration in the substrate storage container, humidity, particles, and the like.

  The required number of detection means is provided in the inside, upper part, lower part, rear part, and side part of the substrate storage container, and is used at the time of operation, storage and inspection / inspection of the substrate storage container. This detection means includes at least a photoelectric sensor, an acceleration sensor, a temperature sensor, a temperature / humidity sensor, a humidity sensor, a tilt sensor, an oxygen concentration sensor, a gas sensor, and the like.

  According to the present invention, when the substrate storage container is used, stored, during a performance test, etc., the detection means detects the use state of the container body or lid of the substrate storage container, and the detected value is transmitted to an external communication device or wireless communication. Output to the means. The external communication device or the wireless communication means records the detection value of the detection means, compares the detection value with a threshold value related to the container body or lid of the substrate storage container, and as a result, the detected value relates to the container body or lid. If it is less than the threshold value or has not approached the threshold value for the container body or lid, it is determined that the substrate storage container is still usable. When it is determined that the substrate storage container is still usable, the substrate storage container can be used continuously.

  On the other hand, if the performance or quality of the substrate storage container deteriorates due to the prolonged use period, etc., and the detected value approaches or exceeds the threshold value related to the container body or lid, an external communication device or wireless communication The means determines that the use limit of the container main body or the lid is close, that is, the replacement time of the substrate storage container is close. When it is determined that the use limit of the substrate storage container is close, the user can check the existing substrate storage container or prepare to replace it with a new substrate storage container.

  According to the present invention, the detection means detects the use state of the substrate storage container when the substrate storage container is used, stored, or tested, and the detected value is output to the wireless communication means. In the wireless communication means, the data recording unit records the detection value of the detection unit, and the arithmetic processing unit compares the detection value with the inspection / inspection value of the substrate storage container. If it is less than or less than the inspection / inspection value of the substrate storage container, it is determined that the substrate storage container is not yet in the inspection / inspection period. If it is determined that the substrate storage container is not yet in the inspection / inspection period, the substrate storage container can be used as it is.

  On the other hand, if the performance and quality of the substrate storage container deteriorates due to long-term use, etc., and the detected value approaches or exceeds the inspection inspection value of the substrate storage container, the arithmetic processing unit It is determined that it is time to inspect and inspect the substrate storage container. When it is determined that the substrate storage container is in the inspection / inspection period, the notification means is turned on, blinked, and the corresponding characters are displayed, so that the inspection, replacement, or preparation for replacement of the substrate storage container can be notified.

  The substrate storage container is inspected and inspected by an inspection and inspection device when it is determined that the inspection and inspection time is reached. If the substrate storage container is defective as a result of the inspection / inspection by the inspection / inspection apparatus, the notification means can be turned on and blinking, the corresponding characters can be displayed, and the re-inspection or replacement of the substrate storage container can be notified. By such notification regarding the substrate storage container, it is possible to repair the substrate storage container to maintain the performance, to replace parts to improve the performance, or to replace with a new substrate storage container.

  According to the present invention, the external communication device or the wireless communication means determines the use limit of the container body or lid of the substrate storage container according to the comparison result between the detected value and the threshold value related to the container body or lid of the substrate storage container. Therefore, there is an effect that the substrate storage container can be selected and a replacement of the substrate storage container can be easily selected.

  According to the invention of claim 2, since the contents according to either the result of the determination of the inspection and inspection timing of the substrate storage container by the wireless communication means and the inspection and inspection result of the substrate storage container by the inspection and inspection device are notified, There is an effect that it is possible to easily determine the replacement time of the substrate storage container and its components, and to easily select a replacement product.

  According to the invention described in claim 3, if at least a server, particularly a large-capacity server, is connected as a service providing means to the inspection / inspection apparatus, an analysis capability superior to that of the wireless communication means and the inspection / inspection apparatus can be obtained. The performance and quality of the substrate storage container and the replacement time can be analyzed in more detail. Also, if a server is connected as a service providing means to the wireless communication means, the service providing means can transmit the performance and quality of the substrate storage container analyzed in detail to the wireless communication section of the wireless communication means for effective use. it can. Furthermore, when the server analyzes the abnormality of the substrate storage container in detail, the notification unit can prompt the user to replace the substrate storage container.

  According to the fourth aspect of the invention, the use of the positioning mechanism makes it possible to position and mount the container main body of the substrate storage container on the peripheral related apparatus with high accuracy. Further, by using the flange, it is possible to hold the container main body in the peripheral related device and safely transport the substrate storage container storing the substrate. Further, by utilizing the locking mechanism, it is possible to effectively prevent the lid body fitted on the front surface of the container body from dropping off.

  According to the fifth aspect of the present invention, if the air supply valve and the exhaust valve of the container main body are used, a gas such as purge gas can be circulated in and out of the container main body to eliminate the internal / external pressure difference of the substrate storage container. it can. In addition, the gas can be injected into the container body from the plurality of injection holes of the purge nozzle instead of simply supplying the gas into the container body from the air supply valve, so that the relative humidity in the container body is uniform. It becomes easy to control the flow of gas so as to lower. Furthermore, even if the supply valve of the container body is not connected to a gas supply device or the like, gas is supplied from the gas source of the container body to the purge nozzle as needed, and the gas is injected into the container body from the injection hole of the purge nozzle. can do.

  According to the sixth aspect of the present invention, the substrate storage container is positioned and mounted on the load port device of the inspection / inspection device for inspection and inspection, or the locking mechanism of the lid is unlocked by the lid opening / closing mechanism of the load port device. Thereafter, the lid body can be adsorbed and removed by the lid body opening / closing mechanism and inspected and inspected. In addition, it is possible to inspect and check the sealing property of the substrate storage container from the flow rate of the gas flowing inside and outside the substrate storage container, and to lock the locking mechanism from the measured value of the rotational torque when the lid opening / closing mechanism rotates. The quality of the mechanism can be inspected and inspected. In addition, the quality of the container body and the lid of the substrate storage container is inspected and inspected from the measurement result of the dimension measuring device or the measured value of the pressing force when the lid is pressed and fitted to the open front of the container body. be able to.

According to the seventh aspect of the present invention, it is possible to determine the performance and quality of the substrate storage container and the replacement time from the sealed state of the substrate storage container, the state of the lid and the locking mechanism.
According to the eighth aspect of the present invention, it is possible to determine how much the performance of the substrate storage container has deteriorated from the acceleration acting on the substrate storage container, and to determine the performance, quality, and replacement time of the substrate storage container. Become.

According to the ninth aspect of the present invention, the number of times of transporting the substrate storage container, the transport distance of the substrate storage container, the number of times of holding the flange of the substrate storage container, the number of impacts acting on the substrate storage container, and the maximum impact value acting on the substrate storage container. Alternatively, it is possible to determine the performance and quality of the substrate storage container and the replacement time from the maximum frequency applied to the substrate storage container.
According to the tenth aspect of the present invention, the performance and quality of the substrate storage container and the replacement time can be determined from the heat shock when the heated substrate is stored in the substrate storage container.

According to the eleventh aspect of the present invention, the performance and quality of the substrate storage container and the replacement time can be determined from the number of times the substrate storage container is cleaned.
According to the twelfth aspect of the present invention, it is possible to determine the performance and quality of the substrate storage container and the replacement time from the level of the substrate storage container, and to prevent the inclination when the substrate storage container is mounted.

  According to the thirteenth aspect of the present invention, the performance and quality of the substrate storage container and the replacement time can be determined from the oxygen concentration value in the substrate storage container. Further, when the oxygen concentration value in the substrate storage container is abnormal, purge gas is supplied from the purge nozzle into the container body, so that it is possible to effectively prevent the deterioration of the atmosphere in the container body, and the substrate is a semiconductor wafer. In this case, it is possible to contribute to an improvement in the yield of semiconductor chips formed on the semiconductor wafer.

It is a section explanatory view showing typically an embodiment of a management system of a substrate storage container concerning the present invention. It is explanatory drawing which shows typically the radio | wireless communication means in embodiment of the management system of the substrate storage container which concerns on this invention. It is explanatory drawing which shows typically the detection means, radio | wireless communication means, and alerting | reporting means in embodiment of the management system of the substrate storage container which concerns on this invention. It is a side view showing typically an inspection inspection device etc. in an embodiment of a management system of a substrate storage container concerning the present invention. It is a top view which shows typically the inspection / inspection apparatus etc. in embodiment of the management system of the substrate storage container which concerns on this invention. It is front explanatory drawing which shows typically the container main body in another embodiment of the management system of the substrate storage container which concerns on this invention.

  Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. A substrate storage container management system according to this embodiment includes a front open box type substrate storage container 1 as shown in FIGS. The detection means 30 provided to detect the use state such as the seal state, the small wireless communication means 40 provided in the substrate storage container 1 for determining the inspection / inspection time, and the inspection / inspection time are determined. Any one of a dedicated inspection / inspection apparatus 50 for inspecting / inspecting the substrate storage container 1, a determination result of the inspection / inspection time of the substrate storage container 1 by the wireless communication means 40, and an inspection / inspection result of the substrate storage container 1 by the inspection / inspection apparatus 50 And a notifying means 70 for notifying contents according to the result, and is a system in which the substrate storage container 1 is accessed to a predetermined related peripheral device 20.

  As shown in FIG. 1, the substrate storage container 1 includes, for example, a transparent container main body 2 for aligning and storing a plurality of semiconductor wafers W, a lid 10 for opening and closing the open front of the container main body 2, and And a locking mechanism that locks the lid body 10 fitted to the front surface of the container body 2, and is positioned and mounted on a load port device provided in the semiconductor processing apparatus or by a ceiling transport device 22 in a semiconductor manufacturing factory. Transported, regularly inspected and tested.

  Each semiconductor wafer W is made of a silicon wafer of φ300 mm having a thickness of 775 μm, for example. The semiconductor wafer W is appropriately subjected to various processing and processing in the manufacturing process of semiconductor parts (up to 500 to 600 processes), and 25 pieces are horizontally inserted and stored in the container body 2. Align in the vertical direction of 2.

  The container body 2, the lid body 10, and the locking mechanism are each formed by combining a plurality of parts by injection molding with a molding material containing a predetermined resin. Examples of the resin contained in the molding material include thermoplastic resins such as polycarbonate, cycloolefin polymer, cycloolefin copolymer, polyetherimide, polyether ketone, polyether ether ketone, polybutylene terephthalate, polyacetal, and liquid crystal polymer, and these resins. Examples include alloys.

  These resins are added with various antistatic agents such as conductive materials made of carbon fibers, carbon powder, carbon nanotubes, conductive polymers, and the like, and anions, cations, and nonionics as required. Further, benzotriazole-based, salicylate-based, cyanoacrylate-based, oxalic acid anilide-based, hindered amine-based ultraviolet absorbers are added, and glass fibers, carbon fibers, and the like that improve rigidity are also selectively added.

  The container body 2 is formed in a transparent front open box whose front face is opened, and is positioned and mounted on the load port device with the opened front face oriented in the horizontal horizontal direction, or by gripping the ceiling transport device 22, Be transported. The container body 2 is provided with a pair of left and right support pieces 3 for supporting the semiconductor wafer W substantially horizontally on the inner sides thereof, in other words, on the inner surfaces of the both side walls, respectively, Position restricting portions that restrict excessive insertion of W are integrally formed.

  The pair of left and right support pieces 3 are arranged at a predetermined pitch in the vertical direction, and between the support piece 3 and the support piece 3 adjacent to each other in the vertical direction, the side edge of the semiconductor wafer W floating from the support piece 3 is located laterally. A supporting groove 4 having a substantially U-shaped cross section to be supported is defined. Each support piece 3 is formed in a long and narrow plate shape that supports the peripheral edge of the side of the semiconductor wafer W, and a stepped portion that restricts the forward protrusion of the semiconductor wafer W is integrally formed on the front surface.

  A plurality (at least two or more) of mounting holes are drilled through the front portion or the rear portion of the bottom plate of the container body 2, and a gas replacement filter valve is fitted into each mounting hole via a gasket. The plurality of filter valves are supported by the bottom plate of the container body 2 and include at least one supply valve 5 for supplying a purge gas such as nitrogen gas into the container body 2 from an external purge gas supply device; It comprises at least one exhaust valve that is supported by the bottom plate and exhausts air from the inside of the container body 2 to the outside. By flowing a gas such as purge gas into and out of the container body 2, the internal / external pressure of the substrate storage container 1 It works to close the difference.

  Positioning tools 6 that are positioning mechanisms for positioning the substrate storage container 1 are provided on both sides of the front portion and the rear center of the bottom surface of the bottom plate of the container body 2 so that the plurality of positioning tools 6 draw a substantially Y-shaped plane. Arranged. Each positioning tool 6 is basically formed in a substantially V-shaped cross section having a substantially elliptical shape in a plane, and a concave portion having a pair of inclined surfaces thereof is directed downward, and the positioning pin 21 on the load port device has a concave portion from above. The container main body 2 functions to be positioned with high accuracy by fitting and sliding contact.

  A separate bottom plate is screwed onto the back surface of the bottom plate of the container body 2 in a horizontal manner via a screw tool, and the bottom plate exposes the plurality of air supply valves 5, exhaust valves, and positioning tools 6, respectively.

  At the center of the top plate of the container body 2, a transfer top flange 7 gripped by the ceiling transfer device 22 of the semiconductor manufacturing factory is detachably mounted. The locking holes for the locking mechanism are respectively drilled. A pair of left and right rear retainers capable of supporting the rear of the peripheral edge of the semiconductor wafer W are formed side by side on the left and right sides of the inner surface of the back wall of the container body 2, and the pair of rear retainers are arranged at a predetermined pitch in the vertical direction of the container body 2. Arranged in In addition, a substantially H-shaped mounting portion is defined at the center of both side walls of the container body 2, and a grip portion that functions for gripping operation is detachably mounted on each mounting portion.

  The lid body 10 includes a lid body 11 that is pressed and fitted into the opened front surface of the container body 2, and a surface plate 12 that covers the opened surface of the lid body 11. It contacts the inner periphery of the front face through a sealing gasket for hermetic sealing.

  The lid body 11 is basically formed in a substantially dish-shaped section with a shallow bottom, and is provided with a plurality of reinforcing and mounting ribs inside, and on the back surface, which is the facing surface facing the semiconductor wafer W, A front retainer that elastically holds the semiconductor wafer W is mounted. Further, a frame-shaped fitting groove is formed in the rear peripheral edge portion of the lid body 11, and an elastically deformable seal gasket that press-contacts the front inner periphery of the container body 2 is tightly fitted in the fitting groove. In the upper and lower side portions of the peripheral wall of the lid body 11, a lock mechanism retracting hole facing the locking hole of the container body 2 is penetrated and drilled.

  The surface plate 12 is formed in a horizontally long front rectangle, and a plurality of reinforcing and mounting ribs, screw holes, and the like are provided. On both sides of the surface plate 12, operation holes for the locking mechanism are formed.

  The locking mechanism includes a rotation plate that is a pair of left and right rotation operation members that are pivotally supported on both the left and right sides of the lid body 11 of the lid body 10 and that are rotationally operated from the outside, and the lid body 10 of the lid body 10 as the rotation plates rotate. A plurality of advancing and retracting plates that slide in the vertical direction; and a plurality of locking claws that protrude and retract from the protruding and retracting holes of the lid main body 11 and slide into and out of the locking holes of the container main body 2 as each of the advancing and retracting plates slides. It is interposed between the 10 lid bodies 11 and the surface plate 12.

  Each rotating plate faces the operation hole of the surface plate 12 of the lid 10 and is rotated by an operation key of the load port device penetrating the operation hole. Each locking claw is basically bent and formed in a substantially L-shaped cross section, and has a rotatable roller at the tip thereof. The locking claw is pivotally supported in the vicinity of the retracting hole in the lid body 11 so as to advance and retreat. The roller plate is connected to the distal end of the moving plate via a pin, and the roller is brought into and out of the locking hole of the container body 2.

  As shown in FIGS. 1, 4, and 5, the predetermined related peripheral device 20 includes a load port device that accesses and positions a plurality of positioning tools 6 that are positioning mechanisms of the container body 2, and the container body 2. It consists of a ceiling conveying device 22 that accesses the top flange 7 and holds it from above. The load port device positions and mounts the substrate storage container 1 or mounts the rotation plate of the locking mechanism by fitting the positioning pins 21 erected on the plurality of positioning tools 6 of the container body 2 from below and automatically rescues them. By rotating with an operation key, the locking mechanism functions to lock or unlock. Further, after unlocking the locking mechanism, the lid body 10 is removed from the container body 2 by adsorbing it by the lid body opening / closing mechanism, or the lid body 10 adsorbed to the open front of the container body 2 is pressed by the lid body opening / closing mechanism. Or mating.

  The ceiling transport device 22 includes a moving mechanism 24 that moves while being guided by a ceiling transport rail 23 in a semiconductor manufacturing factory, and a gripping mechanism 25 that can be moved up and down installed on the moving mechanism 24. The gripping mechanism 25 is a load port. After gripping the top flange 7 of the substrate storage container 1 positioned and mounted on the apparatus, the substrate storage container 1 is suspended and conveyed from the load port device 52 to a predetermined apparatus or location such as the inspection / inspection apparatus 50 at high speed. .

  As shown in FIG. 1, the detection means 30 is mounted on the lower portion of the back wall of the container body 2 to project light rays obliquely toward the lower portion of the lid 10, and the back wall of the container body 2. A light projecting / receiving element 32 for the lid that projects light rays horizontally toward the lower part of the lid 10 and a light projecting / receiving element 31 for the substrate and the lid mounted on the lower back of the lid body 11 of the lid 10. Wireless communication means comprising a retro-reflective photoelectric sensor 34 provided with a retro-reflective plate 33 capable of reflecting the light beam from the light projecting / receiving element 32 to the light projecting / receiving element 31 for the substrate and the light projecting / receiving element 32 for the lid. 40. The substrate light projecting / receiving element 31 and the lid light projecting / receiving element 32 are arranged such that the substrate light projecting / receiving element 31 is positioned above the lid light projecting / receiving element 32.

  The detecting means 30 detects the presence / absence of the semiconductor wafer W by measuring the time when the substrate light projecting / receiving element 31 is unable to receive the reflected light from the regressive reflection plate 33, and the lid light projecting / receiving element 32 is regressively reflected. It functions to detect the number of times the lid 10 is opened and closed by measuring the time when the reflected light from the plate 33 cannot be received. For example, after detecting the presence of the semiconductor wafer W by measuring the time when the substrate light projecting / receiving element 31 cannot receive the reflected light from the regressive reflection plate 33, the cover light projecting / receiving element 32 is removed from the regressive reflection plate 33. When the time during which the reflected light cannot be received (for example, 10 seconds or more) is measured, the number of times the lid 10 is opened and closed is detected.

  The wireless communication means 40 is composed of an ultra-compact IoT module that is lighter and smaller than a Japanese one-yen coin and has a substantially rectangular plane, and is attached to the bottom plate, the side wall, and the bottom plate of the container body 2. As shown in FIG. 1 and FIG. 2, the wireless communication unit 40 relates to, for example, an external input unit 41 that inputs a detection value from a connected detection unit 30, and at least the detection value of the detection unit 30 and the substrate storage container 1. A data recording unit 42 that records the inspection and inspection values, an arithmetic processing unit 43 that compares the detection values of the detection means 30 and the inspection and inspection values related to the substrate storage container 1, and stores the detection values in the data recording unit 42; A wireless communication unit 44 that communicates with an external inspection / inspection device 50, a detection unit 30, an external input unit 41, a data recording unit 42, an arithmetic processing unit 43, and a battery unit 46 that supplies power to the wireless communication unit 44. In addition, the power is supplied from the power source 47.

  The external input unit 41 is formed in a substantially stamp shape at a predetermined pitch on, for example, four sides of the wireless communication unit 40 and is surface-mounted on a printed board.

  The data recording unit 42 stores the number of times the lid 10 is opened and closed, the acceleration value of the substrate storage container 1, the number of times the substrate storage container 1 is transported, the transport distance of the substrate storage container 1, The number of times the top flange 7 of the storage container 1 is held, the number of impacts of the substrate storage container 1, the maximum impact value of the substrate storage container 1, the maximum frequency of the substrate storage container 1, the number of heat shocks of the substrate storage container 1, The number of times of cleaning, the horizontal value of the substrate storage container 1, the oxygen concentration value in the substrate storage container 1, the number of uses in a predetermined process, etc. are recorded and accumulated as necessary. When the wireless communication unit 44 receives the inspection / inspection result of the substrate storage container 1 from the inspection / inspection apparatus 50, the inspection / inspection result of the substrate storage container 1 is recorded and accumulated.

  In addition, the data recording unit 42 stores the number of times the lid 10 is opened and closed, the acceleration value of the substrate storage container 1, the number of times the substrate storage container 1 is transported, Transport distance, number of times of holding top flange 7 of substrate storage container 1, number of impacts of substrate storage container 1, maximum impact value of substrate storage container 1, maximum frequency of substrate storage container 1, number of heat shocks of substrate storage container 1, substrate The number of cleanings of the storage container 1, the horizontal value of the substrate storage container 1, the oxygen concentration value in the substrate storage container 1, the number of uses in a predetermined process, and the like are recorded as threshold values. The inspection / inspection values for the substrate storage container 1 are set in advance by a table test for comparison with the detection values of the detection means 30.

  The arithmetic processing unit 43 includes, for example, a 32-bit CPU that operates at a maximum of 32 MHz. This CPU reads a predetermined program stored in the ROM of the data recording unit 42 using the RAM area of the data recording unit 42 as a work area. A predetermined function is realized as a computer.

  Specifically, the function of comparing the number of opening / closing of the lid body 10 recorded in the data recording unit 42 with the inspection / inspection value of the lid body 10, and as a result of the comparison, the number of opening / closing of the lid body 10 is the inspection / inspection of the lid body 10. If it is less than the value, the function of determining that the substrate storage container 1 is not yet inspected and inspected, and as a result of comparison, if the number of times the lid 10 is opened and closed exceeds the inspection and inspection value of the lid 10, A function of determining that the storage container 1 is in the inspection / inspection period is realized. The relationship between the number of times the lid 10 is opened and closed and the inspection / inspection value of the lid 10 is set in consideration of table tests, past use results, experimental results, and the like.

  The wireless communication unit 44 is connected to the inspection / inspection apparatus 50 by radio in the 2.4 GHz band, for example, by an omnidirectional antenna 45. As the antenna 45 of the wireless communication unit 44, in addition to non-directionality, a high gain directional type capable of extending the communication distance, an inexpensive match stick type, a wire type that can be mounted with a low height, a board type, etc. are selective. Adopted. The battery unit 46 is made of, for example, a small button battery or the like, and power is supplied from the power source 47 by a contact method or a non-contact method. Although the power supply 47 is not specifically limited, For example, it installs in the load port apparatus 52, the inspection / inspection apparatus 50, etc.

  As shown in FIGS. 4 and 5, the inspection / inspection apparatus 50 accesses the positioning pins 51 to the plurality of positioning tools 6 of the container main body 2 of the substrate storage container 1 and positions and mounts them with high accuracy. A load port device 52 that attaches and removes the lid body 10 to and from the front of the machine by a lid opening and closing mechanism, a dimension measuring device 59 that measures the dimensions of the substrate storage container 1, and the container body 2 from which the lid body 10 is removed. And a robot handler 60 for taking in and out a predetermined number of semiconductor wafers W. The load port device 52 is configured in accordance with the load port device provided in the semiconductor processing apparatus, and is installed in a semiconductor production line. The substrate storage container 1 is checked for quality.

  The load port device 52 includes a valve unit 53 that allows gas to flow inside and outside the container body 2, and the valve unit 53 is connected to the air supply valve 5 of the container body 2 to supply gas such as clean air or nitrogen gas. And a discharge valve 55 that is connected to an exhaust valve of the container body 2 and discharges gas such as clean air and nitrogen gas in the container body 2 to the outside. The supply amount of the gas supplied from the supply valve 54 into the container body 2 is measured by the measurement sensor 56, and the discharge amount of the gas discharged from the discharge valve 55 to the outside of the container body 2 is measured by another measurement sensor 56A. Is done. The calculation results of the measurement values measured by the plurality of measurement sensors 56 and 56A are compared with a threshold value as an inspection / inspection item of the substrate storage container 1, and the quality of the substrate storage container 1 is inspected / inspected from the comparison result with the threshold value. This inspection / inspection result is transmitted to the wireless communication means 40.

  Further, the load port device 52 includes a torque sensor 57 that measures the rotational torque when the operation key of the lid opening / closing mechanism rotates the rotation plate of the locking mechanism, and the lid 10 on the front surface of the container body 2 that is open. A load sensor 58 that measures the pressing force when the body opening / closing mechanism is pressed and fitted is provided.

  The measured values measured by the torque sensor 57 and the load sensor 58 are compared with the initial rotational torque value or the initial pressing force as the inspection / inspection item of the substrate storage container 1, and the quality of the substrate storage container 1 is inspected / inspected based on the comparison result. The inspection / inspection result is transmitted to the wireless communication means 40. The dimension measuring device 59 measures the dimensions of the substrate storage container 1 with a plurality of photoelectric sensors, and this measured value is also compared with a dimension threshold value as an inspection / inspection item of the substrate storage container 1. 1 is inspected and inspected, and the inspection and inspection result is transmitted to the wireless communication means 40.

  As shown in FIG. 3, the notification means 70 includes, for example, an LED 71, a liquid crystal display (LCD) 72, a buzzer, a server connected to the wireless communication means 40 of the substrate storage container 1, and the like. A bottom plate, a general load port device, and an inspection / inspection device 50 are provided.

  As a result of the inspection / inspection device 50 inspecting / inspecting the quality of the substrate storage container 1, the notification means 70 does not notify the substrate storage container 1 if it is good, and if the substrate storage container 1 is defective, A re-inspection or replacement of the storage container 1 is notified. Specifically, when the notification means 70 is the LED 71, when it is determined that the quality of the substrate storage container 1 is still good, it does not blink / light up, and when the quality of the substrate storage container 1 is deteriorated and is determined to be defective. Lit or lit to notify the re-inspection or replacement of the substrate storage container 1.

  In the above configuration, when a plurality of semiconductor chips are formed on the semiconductor wafer W, the substrate storage container 1 is positioned and mounted on the load port device via the plurality of positioning tools 6, and the locking mechanism of the lid 10 is provided. The unlocking operation is performed by the operation key of the lid opening / closing mechanism of the load port device, and the lid 10 is adsorbed and removed by the adsorption mechanism of the lid opening / closing mechanism of the load port device. The semiconductor wafer W is taken out from the dedicated robot hand. When the semiconductor wafer W is taken out by the dedicated robot in this way, the semiconductor processing apparatus performs various types of processing and processing on the semiconductor wafer W, and after completion of these processing and processing, the semiconductor wafer W is stored in the container body 2 again.

  Next, the lid 10 is fitted to the front surface of the container body 2 by the suction mechanism of the lid opening / closing mechanism of the load port device 52, and the locking mechanism of the lid 10 is operated by the operation key of the lid opening / closing mechanism of the load port device 52. By performing the locking operation, the lid body 10 is completely pressed and fitted to the front surface of the container body 2 and is transported by the ceiling transport device 22 to the next processing step. By repeating such processing, a plurality of semiconductor chips are formed on the semiconductor wafer W.

  When a plurality of semiconductor chips are formed on the semiconductor wafer W, the substrate storage container 1 is transferred from the container body 2 to a dedicated container for transporting to the subsequent process, and the empty container body 2 is transferred to the substrate container 2. An unprocessed semiconductor wafer W is newly stored. The substrate storage container 1 in which a new semiconductor wafer W is stored is repeatedly used in the same operation as described above, but is used after being periodically cleaned with cleaning water from a cleaning device at a predetermined interval and dried. In addition, after a predetermined period, the basic performance is periodically tested.

  Now, when the substrate storage container 1 is used, the detection means 30 projects light rays from the substrate light projecting / receiving element 31 and the lid light projecting / receiving element 32 onto the regression reflecting plate 33 of the lid body 10, respectively. 31 detects the presence or absence of the semiconductor wafer W by measuring the time when the reflected light from the return reflection plate 33 cannot be received, and the light projecting / receiving element 32 for the lid cannot receive the reflection light from the return reflection plate 33. The time is measured to detect the number of times the lid 10 is opened and closed, and the detected value is output to the wireless communication means 40.

  The wireless communication means 40 records the number of times the lid 10 is opened / closed in the data recording unit 42, and the arithmetic processing unit 43 uses the number of times the lid 10 is opened / closed and the inspection / inspection value of the lid 10 recorded in the data recording unit 42. As a result of the comparison, if the number of opening / closing of the lid 10 is less than the inspection / inspection value of the lid 10, it is determined that the substrate storage container 1 is not yet in the inspection / inspection period. When the arithmetic processing unit 43 of the wireless communication means 40 determines that the substrate storage container 1 is not yet inspected and inspected, the notification means 70 does not notify anything and the use of the substrate storage container 1 is continued.

  On the other hand, when the number of times the lid 10 is opened and closed increases, and the number of times the lid 10 is opened and closed is equal to or greater than the inspection and inspection value of the lid 10, the arithmetic processing unit 43 reduces the quality of the lid 10, It is determined that it is time to inspect and inspect the substrate storage container 1. When the arithmetic processing unit 43 determines that it is time to inspect and inspect the substrate storage container 1, the substrate storage container 1 is positioned and mounted on the load port device 52 of the inspection and inspection apparatus 50, and the lid 10 is locked. After the mechanism is unlocked by the operation key of the lid opening / closing mechanism of the load port device 52, the lid 10 is removed by suction by the lid opening / closing mechanism and inspected.

  At this time, the valve unit 53 of the load port device 52 operates to supply gas from the supply valve 54 to the air supply valve 5 of the container body 2, and the gas in the container body 2 passes from the exhaust valve via the discharge valve 55. The gas is discharged to the outside, and the gas supply amount and the discharge amount are measured by the plurality of measurement sensors 56 and 56A. The subtraction result of the measurement values measured by the plurality of measurement sensors 56 and 56A is compared with a threshold value as an inspection / inspection item for the substrate storage container 1, and the result of comparison with the threshold value is used to inspect whether the sealing state of the substrate storage container 1 is good or bad. Inspection is performed, and the inspection inspection result is transmitted to the wireless communication means 40.

  When the inspection / inspection apparatus 50 inspects / inspects the sealing state of the substrate storage container 1, if the sealing state of the substrate storage container 1 is good, the notification means 70 does not notify anything, but the gas exhaust amount decreases, etc. Thus, when the sealing state of the substrate storage container 1 is abnormal and defective, it blinks or displays a corresponding character to notify the re-inspection or replacement of the substrate storage container 1.

  By such re-inspection of the substrate storage container 1 or notification of replacement preparation, the substrate storage container 1 is repaired to improve the sealing state, the gasket or the seal gasket is replaced to improve the sealing performance, or a new Since it can replace | exchange for the board | substrate storage container 1, the quality fall of the board | substrate storage container 1 can be aimed at.

  When the locking mechanism of the lid 10 is unlocked, the torque sensor 57 measures the rotational torque when the operation key of the lid opening / closing mechanism rotates the rotation plate of the locking mechanism. The measured value is compared with the initial rotational torque value, and the quality of the locking mechanism of the substrate storage container 1 is inspected and inspected from the comparison result, and the inspection and inspection result is transmitted to the wireless communication means 40. As a result of the inspection / inspection of the locking mechanism by the inspection / inspection device 50, when the locking mechanism is good, the notification means 70 does not notify anything, but when the locking mechanism is abnormal due to wear of parts, etc. , Blinking or displaying corresponding characters, etc., to notify the re-inspection or replacement of the substrate storage container 1.

  When the container body 2 of the substrate storage container 1 is positioned and mounted on the load port device 52, the dimensions of the substrate storage container 1 are measured by the plurality of photoelectric sensors of the dimension measuring device 59, and the plurality of photoelectric sensors 34 measure. The measured value is compared with a dimension threshold value, and the quality of the substrate storage container 1 is inspected and inspected from the comparison result, and the inspection and inspection result is transmitted to the wireless communication means 40. When the inspection / inspection apparatus 50 checks the quality of the substrate storage container 1 and the dimensions of the substrate storage container 1 are good, the notification means 70 does not notify the substrate storage container 1 due to deterioration or deformation of parts. When the dimension of 1 is abnormal and defective, it flashes or displays a corresponding character to notify re-inspection or replacement of the substrate storage container 1.

  Further, when the lid body 10 is pressed and fitted to the front surface of the container body 2 by the lid opening / closing mechanism, the load sensor 58 measures the pressing force, and the measurement value measured by the load sensor 58 is an initial value. Compared with the pressing force, the quality of the lid 10 of the substrate storage container 1 is inspected and inspected from the comparison result, and the inspection and inspection result is transmitted to the wireless communication means 40. As a result of the inspection / inspection of the lid 10 by the inspection / inspection apparatus 50, when the lid 10 is good, the notification means 70 does not notify, but the lid 10 is abnormal due to deterioration of the seal gasket or the front retainer. In the case of failure, it flashes or displays a corresponding character to notify re-inspection or replacement of the substrate storage container 1.

  By notifying such re-inspection or replacement of the substrate storage container 1, the container body 2 can be repaired to improve the quality, or can be replaced with a new substrate storage container 1. We can expect much decline.

  According to the above, the presence of abnormality in performance and quality of the substrate storage container 1 is determined by the installation of the detection means 30, the wireless communication means 40, the inspection / inspection device 50, and the notification means 70. There is no clear criterion for the replacement time, and even if there are individual differences in the replacement time, the replacement product can be easily selected, and the replacement work selection operation can be simplified and speeded up. In addition, since it is possible to accurately determine the replacement timing of the substrate storage container 1, lifetime management becomes possible, and improvement in work efficiency of the production process can be greatly expected.

  Further, when the substrate storage container 1 is used so as to circulate in the entire production process of the semiconductor, even if the use history is different for each substrate storage container 1, the replacement time can be easily determined. Further, even when the substrate storage container 1 is used for each area of the semiconductor production process, it is not necessary to individually determine the criteria for determining the replacement timing of the substrate storage container 1 for each area, which is convenient.

  Next, an embodiment in which the performance and quality of the substrate storage container 1 are determined by the service providing unit 80 instead of the inspection / inspection apparatus 50 will be described. In this case, the contents of inspection / inspection of the substrate storage container 1 by the inspection / inspection apparatus 50 are recorded / accumulated, and also provided with service providing means 80 for analyzing the performance of the substrate storage container 1 from the inspection / inspection contents. The notification means 70 notifies the contents according to the analysis result of the substrate storage container 1 analyzed.

  The wireless communication means 40 includes an external input unit 41, a data recording unit 42, an arithmetic processing unit 43, a wireless communication unit 44, and a battery unit 46, as in the above embodiment. 50 and the service providing means 80 are communicably connected to at least the service providing means 80, and receive and record the analysis result analyzed by the service providing means 80.

  The service providing unit 80 includes an external Internet server 81 or a large-capacity dedicated server 81 provided in the inspection / inspection apparatus 50. The service providing means 80 is installed with, for example, a large number of arithmetic cores, a large-capacity main memory, and various analysis software, and compares the performance and quality of the substrate storage container 1 with the initial values based on the inspection / inspection contents of the inspection / inspection apparatus 50. The analysis is performed in detail, and the analysis result is recorded and transmitted to the wireless communication unit 44 of the wireless communication means 40. The service providing unit 80 transmits / receives data to / from the arithmetic processing unit 43 of the wireless communication unit 40 as necessary.

  In the above, the substrate storage container 1 is positioned and mounted on the load port device 52 of the inspection / inspection device 50, and inspection / inspection is performed, or the locking mechanism of the lid 10 is unlocked by the operation key of the lid opening / closing mechanism of the load port device 52. After the operation, when the lid 10 is removed by suction by the lid opening / closing mechanism and inspected and inspected, the service providing means 80 measures the measurement values measured by the plurality of measurement sensors 56 and 56A of the inspection and inspection device 50, While analyzing in detail the performance and quality of the substrate storage container 1 from the measurement values measured by the torque sensor 57, the measurement values measured by the plurality of photoelectric sensors, and the measurement values measured by the load sensor 58, the analysis results are recorded, The analysis result is transmitted to the wireless communication means 40.

  As a result of the detailed analysis of the substrate storage container 1 by the service providing unit 80, when the substrate storage container 1 is good, the notification unit 70 does not notify anything, but the gas exhaust amount decreases, the parts are worn, deteriorated or deformed. For example, when the substrate storage container 1 is abnormal and defective, it blinks or displays a corresponding character to notify the re-inspection or replacement of the substrate storage container 1. The other parts are the same as those in the above embodiment, and the description thereof is omitted.

  In this embodiment, the same effect as that of the above embodiment can be expected. If a server 81, particularly a large-capacity server 81, is connected as the service providing means 80 to the wireless communication means 40 or the inspection / inspection apparatus 50, the wireless communication means 40 is used. Analysis capability superior to that of the inspection / inspection apparatus 50 can be obtained, and the performance, quality, and replacement time of the substrate storage container 1 can be analyzed in more detail. Further, the service providing unit 80 can transmit and store the performance and quality of the substrate storage container 1 analyzed in detail to the wireless communication unit 44 of the wireless communication unit 40 for effective use. Further, when the server 81 analyzes the abnormality of the substrate storage container 1 in detail, the notification means 70 can prompt the user to replace the substrate storage container 1.

  Next, an embodiment will be described in which the performance and quality of the substrate storage container 1 are determined not by the number of times of opening / closing the lid 10 but by acceleration. In this case, the detection means 30 is an acceleration sensor 35 that is mounted on the bottom plate of the container body 2 of the substrate storage container 1 and detects the acceleration value thereof, and the acceleration sensor 35 is connected to the wireless communication means 40. (See FIG. 3).

The acceleration sensor 35 includes a capacitance detection method, a piezoresistance method, a heat detection method, and the like, but is not particularly limited.
In the wireless communication unit 40, the acceleration value of the substrate storage container 1 from the detection unit 30 is recorded in the data recording unit 42, and the acceleration value of the substrate storage container 1 and the substrate recorded in the data recording unit 42 by the arithmetic processing unit 43 are recorded. If the inspection value of the storage container 1 is compared with the calculation processing unit 43 and the acceleration value of the substrate storage container 1 is less than the inspection / inspection value of the substrate storage container 1, the substrate storage container 1 is still Judge that it is not time for inspection.

  On the other hand, when the acceleration value of the substrate storage container 1 becomes equal to or higher than the inspection / inspection value of the substrate storage container 1 due to deterioration of the substrate storage container 1 over time, it is determined that the inspection / inspection time of the substrate storage container 1 is reached. The relationship between the acceleration value of the substrate storage container 1 and the inspection / inspection value of the substrate storage container 1 is set in consideration of past use results and experimental results.

  The substrate storage container 1 is positioned and mounted on the load port device 52 of the inspection / inspection apparatus 50 and inspected / inspected when it is determined that the inspection / inspection time is reached. When the container main body 2 of the substrate storage container 1 is positioned and mounted on the load port device 52, the plurality of photoelectric sensors of the dimension measuring device 59 indicate the dimensions of the substrate storage container 1 and the presence or absence of deformation of the container main body 2 in accordance with the dimensional change. The measured values measured by the plurality of photoelectric sensors 34 are compared with a dimension threshold value, and the quality of the substrate storage container 1 is inspected and inspected from the comparison result, and the inspection and inspection results are transmitted to the wireless communication means 40. .

  If the inspection / inspection apparatus 50 checks the quality of the substrate storage container 1 and the substrate storage container 1 is good, the notification means 70 does not notify, but the substrate storage container 1 is abnormal due to deformation or the like. In such a case, the recheck or replacement of the substrate storage container 1 is notified by blinking or displaying the corresponding character. The other parts are the same as those in the above embodiment, and the description thereof is omitted.

  Also in this embodiment, the same effect as the above embodiment can be expected, and the degree of deterioration of the initial performance of the substrate storage container 1 is grasped from the acceleration applied to the substrate storage container 1, and the substrate storage container 1 Obviously, performance, quality and replacement time can be judged.

  Next, an embodiment will be described in which the performance and quality of the substrate storage container 1 are determined not by the number of times the lid 10 is opened and closed but by the number of times the substrate storage container 1 is transported. In this case, the detection means 30 is mounted on the bottom plate of the container body 2 of the substrate storage container 1 and the number of times the substrate storage container 1 is transferred, the transfer distance of the substrate storage container 1, the top flange of the substrate storage container 1 based on the acceleration. 7. An acceleration sensor 35 that detects at least one of information values of the number of holding times, the number of impacts that acted on the substrate storage container 1, the maximum impact value that acted on the substrate storage container 1, and the maximum frequency that acted on the substrate storage container 1. The acceleration sensor 35 is connected to the wireless communication means 40 (see FIG. 3).

  In the wireless communication means 40, the information value of the substrate storage container 1 from the detection means 30 is recorded in the data recording unit 42, and the information value of the substrate storage container 1 and the substrate recorded in the data recording unit 42 by the arithmetic processing unit 43. When the information value of the substrate storage container 1 is less than the inspection / inspection value of the substrate storage container 1 as a result of comparison with the inspection / inspection value of the storage container 1 and the calculation processing unit 43, the substrate storage container 1 is still Judge that it is not time for inspection. On the other hand, when the information value of the substrate storage container 1 becomes equal to or higher than the inspection / inspection value of the substrate storage container 1 due to damage of the substrate storage container 1 or the like, it is determined that the inspection / inspection time of the substrate storage container 1 is reached.

  The substrate storage container 1 is positioned and mounted on the load port device 52 of the inspection / inspection apparatus 50 and inspected / inspected when it is determined that the inspection / inspection time is reached. When the container main body 2 of the substrate storage container 1 is positioned and mounted on the load port device 52, the size of the substrate storage container 1 and the presence or absence of deformation of the substrate storage container 1 due to the change in dimensions are measured by a plurality of photoelectric sensors. The measured values measured by the plurality of photoelectric sensors 34 are compared with a dimensional threshold value, the quality of the substrate storage container 1 is inspected and inspected from the comparison result, and the inspection and inspection results are transmitted to the wireless communication means 40. The

  If the inspection / inspection apparatus 50 checks the quality of the substrate storage container 1 and the substrate storage container 1 is good, the notification means 70 does not notify, but the substrate storage container 1 is abnormal due to deformation or the like. In such a case, the recheck or replacement of the substrate storage container 1 is notified by blinking or displaying the corresponding character. The other parts are the same as those in the above embodiment, and the description thereof is omitted.

  In this embodiment, the same effect as the above embodiment can be expected, and the number of times the substrate storage container 1 is transferred, the transfer distance of the substrate storage container 1, the number of times the top flange 7 is held in the substrate storage container 1, the substrate storage container 1 It is obvious that the performance and quality of the substrate storage container 1 and the replacement time can be determined from the number of impacts applied to the substrate storage container 1, the maximum impact value applied to the substrate storage container 1, or the maximum frequency applied to the substrate storage container 1. is there.

  Next, an embodiment will be described in which the performance and quality of the substrate storage container 1 are determined based on the number of heat shocks of the substrate storage container 1 instead of the number of times the lid 10 is opened and closed. In this case, the detection means 30 stores the heated semiconductor wafer W (hot wafer) in the substrate storage container 1 and measures the temperature at the time of heat shock when a heat shock occurs around 100 ° C. A temperature sensor 36 for detecting the number of heat shocks of the substrate storage container 1 is used, and this temperature sensor 36 is connected to the wireless communication means 40 (see FIG. 3).

  The temperature sensor 36 includes a contact type, a non-contact type, an electric type, a mechanical type, and the like, and is installed inside the container body 2 that does not interfere with the storage of the semiconductor wafer W, for example, near the back wall on the inside rear side. .

  The wireless communication unit 40 records the number of heat shocks from the detection unit 30 in the data recording unit 42, and the number of heat shocks recorded in the data recording unit 42 by the arithmetic processing unit 43 and the inspection / inspection value of the substrate storage container 1. When the number of heat shocks is less than the inspection / inspection value of the substrate storage container 1, it is determined that the substrate storage container 1 is not yet in the inspection / inspection period. On the other hand, as a result of comparison, when the number of heat shocks is equal to or greater than the inspection / inspection value of the substrate storage container 1, it is determined that the inspection / inspection time of the substrate storage container 1 is reached.

  The substrate storage container 1 is positioned and mounted on the load port device 52 of the inspection / inspection apparatus 50 and inspected / inspected when it is determined that the inspection / inspection time is reached. When the container main body 2 of the substrate storage container 1 is positioned and mounted on the load port device 52, the dimensions of the container main body 2, the presence / absence of deformation of the container main body 2 due to the dimensional change, and the support position of the semiconductor wafer W are measured. The measured values measured by the plurality of photoelectric sensors are compared with the dimension threshold value, and the quality of the substrate storage container 1 is inspected and inspected from the comparison result, and the inspection and inspection result is wirelessly communicated. Transmitted to the means 40.

  As a result of inspection / inspection of the container main body 2 by the inspection / inspection apparatus 50, the notification means 70 does not notify when the container main body 2 is good, but flashes when the container main body 2 is defective due to deformation or the like. Or re-inspecting or replacing the substrate storage container 1 by displaying a corresponding character or the like. The other parts are the same as those in the above embodiment, and the description thereof is omitted.

  In this embodiment, the same effect as the above embodiment can be expected, and the performance and quality of the substrate storage container 1 are judged from the heat shock when the heated semiconductor wafer W is stored in the substrate storage container 1. Can do.

  Next, an embodiment in which the performance and quality of the substrate storage container 1 are determined based on the number of cleanings of the substrate storage container 1 will be described. In this case, when the substrate storage container 1 is washed with washing water and thermally dried at about 60 ° C., the detecting means 30 measures the drying temperature of the substrate storage container 1 to clean the substrate storage container 1. The temperature sensor 36 detects the number of times, and the temperature sensor 36 is connected to the wireless communication means 40 (see FIG. 3).

  The temperature sensors 36 are respectively installed on the outer surface of the container body 2 and the lid body 10 of the substrate storage container 1. The measurement temperature of the temperature sensor 36 is set in consideration of the cleaning condition and the drying condition of the substrate storage container 1. The wireless communication means 40 records the number of times of cleaning the substrate storage container 1 from the detection means 30 in the data recording unit 42, and the number of times of cleaning the substrate storage container 1 recorded in the data recording unit 42 by the arithmetic processing unit 43. Are compared with the inspection / inspection value of the substrate storage container 1 and, as a result of comparison by the arithmetic processing unit 43, if the number of cleanings of the substrate storage container 1 is less than the inspection / inspection value of the substrate storage container 1, the substrate storage container 1 Judged that it is not yet time for inspection.

  On the other hand, as a result of the comparison, when the number of times of cleaning the substrate storage container 1 is equal to or greater than the inspection / inspection value of the substrate storage container 1, it is determined that the inspection / inspection time of the substrate storage container 1 is reached. The number of cleanings of the substrate storage container 1 is set in consideration of the cleaning conditions and the drying conditions of the substrate storage container 1.

  The substrate storage container 1 is positioned and mounted on the load port device 52 of the inspection / inspection apparatus 50 and inspected / inspected when it is determined that the inspection / inspection time is reached. When the container main body 2 of the substrate storage container 1 is positioned and mounted on the load port device 52, the size of the substrate storage container 1 and the presence or absence of deformation of the substrate storage container 1 due to the change in dimensions are measured by a plurality of photoelectric sensors. The measured values measured by the plurality of photoelectric sensors 34 are compared with a dimensional threshold value, the quality of the substrate storage container 1 is inspected and inspected from the comparison result, and the inspection and inspection results are transmitted to the wireless communication means 40. The

When the inspection / inspection apparatus 50 checks the quality of the substrate storage container 1 and the substrate storage container 1 is good, the notification means 70 does not notify, but the substrate storage container 1 is defective due to deformation or the like. Blinks or displays a corresponding character to notify the re-inspection or replacement of the substrate storage container 1. The other parts are the same as those in the above embodiment, and the description thereof is omitted.
In this embodiment, the same effect as the above embodiment can be expected, and the performance and quality of the substrate storage container 1 can be determined from the number of times the substrate storage container 1 is cleaned.

  Next, an embodiment in which the performance and quality of the substrate storage container 1 are determined based on the level of the substrate storage container 1 will be described. In this case, the detecting means 30 is an inclination sensor that detects the level of the substrate container 1 when the substrate container 1 is positioned and mounted on the positioning pin 21 on the load port device 52 via the positioning tool 6. 37, and this inclination sensor 37 is connected to the wireless communication means 40 (see FIG. 3).

  The tilt sensor 37 is of a type using bubbles or pendulums, a type using a potentiometer or magnetism, a type using the tilt of the electrolyte, etc., and is mounted on the bottom plate or bottom plate of the container body 2 in a highly accurate horizontal state. Is done.

  In the wireless communication means 40, the horizontal value of the substrate storage container 1 from the detection means 30 is recorded in the data recording unit 42, and the horizontal value of the substrate storage container 1 and the substrate recorded by the arithmetic processing unit 43 in the data recording unit 42. When the horizontal value of the substrate storage container 1 is less than the inspection / inspection value of the substrate storage container 1 as a result of the comparison with the inspection / inspection value of the storage container 1 and the calculation processing unit 43, the substrate storage container 1 is still Judge that it is not time for inspection. On the other hand, as a result of comparison, if the horizontal value of the substrate storage container 1 approaches the inspection / inspection value of the substrate storage container 1 or exceeds the inspection / inspection value of the substrate storage container 1, the wear of the positioning tool 6, etc. Thus, it is determined that it is time to inspect and inspect the substrate storage container 1.

  The substrate storage container 1 is positioned and mounted on the load port device 52 of the inspection / inspection apparatus 50 and inspected / inspected when it is determined that the inspection / inspection time is reached. When the container main body 2 of the substrate storage container 1 is positioned and mounted on the load port device 52, the dimensions of the substrate storage container 1, the presence / absence of deformation of the substrate storage container 1 accompanying this dimensional change, and the position of the support piece 3 are measured. The plurality of photoelectric sensors 59 measure, and the measured values measured by the plurality of photoelectric sensors 34 are compared with a dimension threshold value, and the quality of the substrate storage container 1 is inspected and inspected based on the comparison result, and the inspection and inspection result is wireless. It is transmitted to the communication means 40.

As a result of the inspection / inspection of the substrate storage container 1 by the inspection / inspection apparatus 50, if the substrate storage container 1 is good, the notification means 70 does not notify the substrate storage container 1 due to deformation or damage of the positioning tool 6. If 1 is defective, it blinks or displays a corresponding character to notify re-inspection or replacement of the substrate storage container 1. The other parts are the same as those in the above embodiment, and the description thereof is omitted.
In this embodiment, the same effect as the above embodiment can be expected, and the performance and quality of the substrate storage container 1 are judged from the level of the substrate storage container 1 to prevent the inclination when the substrate storage container 1 is mounted. It becomes possible.

  Next, an embodiment in which the performance and quality of the substrate storage container 1 are determined based on the oxygen concentration in the substrate storage container 1 will be described. In this case, as shown in FIGS. 3 and 6, the detection means 30 detects the oxygen concentration in the substrate storage container 1 at regular intervals when the semiconductor wafer W is stored in the substrate storage container 1. The oxygen concentration sensor 38 is built in the container main body 2 together with the wireless communication means 40 as a sensor 38.

  The substrate body 2 of the substrate storage container 1 stores a semiconductor wafer W during or after the processing of metal wiring. Purge gas cylinders 13 for storing a purge gas such as nitrogen gas are respectively provided on both sides of the interior of the container main body 2. A purge gas cylinder 13 and a purge gas cylinder 13 are provided on the pair of air supply valves 5 from the viewpoint of controlling the flow of the purge gas. The hollow cylindrical purge nozzles 14 are in communication with each other, and a plurality of injection holes 15 for diffusing and injecting the purge gas in the front of the container body 2 are vertically provided on the peripheral wall of each purge nozzle 14. Perforated side by side.

  The oxygen concentration sensor 38 is installed in the rear side of the container body 2 that does not hinder the storage of the semiconductor wafer W, specifically, near the rear wall, and is used when the substrate storage container 1 is transported, stored, or inspected. Is done. The oxygen concentration sensor 38 includes a galvanic cell type, a zirconia solid electrolyte type, a magnetic type, and a wavelength tunable semiconductor laser spectroscopic type, but is not particularly limited.

  The substrate storage container 1 is positioned and mounted on the load port device 52 of the inspection / inspection device 50. The load port device 52 of the inspection / inspection device 50 includes a valve unit 53, a plurality of measurement sensors 56 and 56A, and a torque sensor 57. In addition to the load sensor 58, a plurality of purge gas cylinders 13 of the container main body 2 are provided with a filling unit for filling the purge gas, respectively. Filling of the filling unit can prevent the purge gas cylinder 13 from running out of purge gas. .

  In the wireless communication means 40, the oxygen concentration value in the substrate storage container 1 from the detection means 30 is recorded in the data recording unit 42, and the oxygen in the substrate storage container 1 recorded in the data recording unit 42 by the arithmetic processing unit 43. When the concentration value and the inspection / inspection value of the substrate storage container 1 are compared and compared by the arithmetic processing unit 43, the oxygen concentration value in the substrate storage container 1 is not close to the inspection / inspection value of the substrate storage container 1. Determines that the substrate storage container 1 is not yet inspected and inspected. On the other hand, as a result of comparison, when the oxygen concentration value in the substrate storage container 1 approaches the inspection / inspection value of the substrate storage container 1 or exceeds the inspection / inspection value of the substrate storage container 1, the container body 2 It is determined that it is time to inspect and inspect the substrate storage container 1 due to abnormality or deterioration of the substrate.

  As a result of the comparison by the arithmetic processing unit 43 of the wireless communication means 40, the notification means 70 does not notify when the substrate storage container 1 is not yet in the inspection / inspection period, but when the substrate storage container 1 is in the inspection / inspection period, An inspection, preparation for replacement, or replacement of the substrate storage container 1 is notified.

  In the purge gas cylinder 13, as a result of comparison by the arithmetic processing unit 43 of the wireless communication means 40, the oxygen concentration value in the substrate storage container 1 approaches the inspection / inspection value of the substrate storage container 1, or the substrate storage container 1 is inspected. If it exceeds the inspection value, it is determined that the substrate storage container 1 is abnormal, the purge gas is supplied to the lower part of the purge nozzle 14, and the purge gas functions to diffuse and inject from the plurality of injection holes 15 of the purge nozzle 14. .

  The substrate storage container 1 is positioned and mounted on the load port device 52 of the inspection / inspection apparatus 50 and inspected / inspected when it is determined that the inspection / inspection time is reached. When the container main body 2 of the substrate storage container 1 is positioned and mounted on the load port device 52, the size of the substrate storage container 1 and the presence or absence of deformation of the substrate storage container 1 due to the change in dimensions are measured by a plurality of photoelectric sensors. The measurement values measured by the plurality of photoelectric sensors 34 are compared with a dimension threshold value, and the quality of the substrate storage container 1 is inspected and inspected from the comparison result.

  At this time, the filling unit of the load port device 52 fills the plurality of purge gas cylinders 13 of the container body 2 with the purge gas, respectively. The other parts are the same as those in the above embodiment, and the description thereof is omitted.

  Also in this embodiment, the same effect as the above embodiment can be expected, and the performance, quality, and replacement time of the substrate storage container 1 can be determined from the oxygen concentration value in the container body 2 of the substrate storage container 1. . Furthermore, when the oxygen concentration value in the container main body 2 is abnormal, purge gas is supplied from the purge nozzle 14 into the container main body 2, so that the deterioration of the atmosphere in the container main body 2 can be effectively prevented, and the semiconductor wafer W This can greatly contribute to the improvement of the yield of the semiconductor chips formed on the substrate.

  In addition, the detection means 30 in the said embodiment is mounted | worn with the back wall lower part of the container main body 2, and the light projecting / receiving element 32 for lids which projects a light beam to the lower direction of the lid 10 horizontally, and the lid main body of the lid 10 11, a retroreflective photoelectric sensor 34 provided with a retroreflective plate 33 which is attached to the lower part of the back surface of the head 11 and can reflect the light beam from the light projecting / receiving element 32 for the lid to the light projecting / receiving element 32 for the lid. 40 may be connected.

  Further, the light projecting / receiving element for the lid body that is mounted on the front peripheral edge of the container body 2 and projects the light beam toward the peripheral wall of the lid body 10 through the minute transmission holes in the front peripheral edge of the container body 2. 32 and a reflection reflection plate 33 attached to the peripheral wall of the lid 10 and capable of reflecting the light beam from the lid light projecting / receiving element 32 to the lid light projecting / receiving element 32 through a minute transmission hole. The photoelectric sensor 34 may be configured to detect the number of times the lid body 10 is opened and closed by measuring the number of times the lid light emitting / receiving element 32 has become unable to receive light when the lid body 10 is removed.

  In addition, regardless of the presence or absence of the inspection / inspection apparatus 50 and the service providing unit 80, the notification unit 70 determines that the substrate storage container 1 is not yet in the inspection / inspection period as a result of comparison by the arithmetic processing unit 43 of the wireless communication unit 40. In such a case, no notification is given, and if it is determined that the substrate storage container 1 is in the inspection / inspection period, the inspection, replacement, or preparation for replacement of the substrate storage container 1 may be notified.

  Further, for the inspection / inspection apparatus 50 and the server 81, an external input unit 41 for inputting a detection value from the detection unit 30, and a data recording unit 42 for recording the detection value of the detection unit 30 and a threshold value related to the substrate storage container 1; A calculation processing unit 43 that compares a detection value of the detection unit 30 with a threshold value related to the substrate storage container 1 and stores a detection signal in the data recording unit 42; and a wireless communication unit 44 that communicates with an external communication device. Can be configured.

  As with the wireless communication means 40, the function of comparing the number of times the lid 10 is opened and closed recorded in the data recording unit 42 and the threshold value for the number of times the lid 10 is opened and closed. When the opening / closing frequency threshold of 10 is not approaching, the function of determining that the substrate storage container 1 is not yet the use limit, and as a result of comparison, the opening / closing frequency of the lid 10 approaches the opening / closing frequency threshold of the lid 10 The function of determining that the usage limit of the substrate storage container 1 is near, and as a result of comparison, if the number of times the lid 10 is opened and closed exceeds the threshold value of the number of times the lid 10 is opened and closed, the substrate storage container 1 will exceed the usage limit. It is possible to realize a function of determining that the value has been exceeded and to notify the notification unit 70 of the function.

  The substrate storage container, the management system thereof, and the management method of the substrate storage container according to the present invention are used in the field of manufacturing a substrate storage container for storing a substrate such as a semiconductor wafer.

DESCRIPTION OF SYMBOLS 1 Substrate storage container 2 Container body 3 Support piece 5 Air supply valve 6 Positioning tool (positioning mechanism)
7 Top flange (flange)
10 Lid 13 Purge gas cylinder (gas source)
14 Purge nozzle (nozzle)
DESCRIPTION OF SYMBOLS 15 Injection hole 20 Peripheral related apparatus 21 Positioning pin 22 Ceiling conveyance apparatus 25 Grasping mechanism 30 Detection means 31 Substrate light projecting / receiving element 32 Cover light projecting / receiving element 33 Retroreflection plate 34 Photoelectric sensor 35 Acceleration sensor 36 Temperature sensor 37 Inclination sensor 38 Oxygen concentration sensor 40 Wireless communication means 41 External input unit 42 Data recording unit 43 Operation processing unit 44 Wireless communication unit 45 Antenna 46 Battery unit 50 Inspection / inspection device (external communication device)
51 Alignment Pin 52 Load Port Device (External Communication Device)
53 Valve unit 56 Measurement sensor 56A Measurement sensor 57 Torque sensor 58 Load sensor 59 Dimension measurement device 70 Notification means 71 LED
80 Service providing means 81 Server (external communication device)
W Semiconductor wafer (substrate)

Claims (15)

A substrate storage container comprising a container body capable of storing a plurality of substrates side by side and a lid for opening and closing the opening of the container body, and being accessed by a predetermined related peripheral device,
Detection means provided on at least one of the container main body and the lid and detecting its use state; wireless communication means provided on either the container main body and the lid and capable of communicating with an external communication device; Including notification means connected to the wireless communication means and provided in at least one of the container body and the lid,
At least one of the external communication device and the wireless communication means has a function of recording the detection value of the detection means and the threshold value related to the container body or the lid, and compares the detection value of the detection means and the threshold value related to the container body or the cover body. And a function to judge the use limit of the container body or lid according to the comparison result,
The informing means notifies at least one of the external communication device and the wireless communication means of the contents according to the result of comparing the detection value of the detecting means and the threshold value relating to the container body or the lid. container. Detection means provided on the substrate storage container for detecting the use state thereof, wireless communication means provided on the substrate storage container for determining the inspection / inspection time, and inspection / inspection apparatus for inspecting / inspecting the substrate storage container at the inspection / inspection time And a notification means for notifying the contents according to any of the results of the inspection and inspection timing of the substrate storage container by the wireless communication means and the inspection and inspection result of the substrate storage container by the inspection and inspection device, A management system for a substrate storage container accessed by an apparatus,
The wireless communication unit includes an external input unit that inputs a detection value from the detection unit, a data recording unit that records at least the detection value of the detection unit and the inspection / inspection value regarding the substrate storage container, and at least the detection value of the detection unit and the substrate. A calculation processing unit that compares the inspection and inspection values related to the storage container and a wireless communication unit that is communicably connected to the inspection and inspection apparatus, and determines the inspection and inspection timing of the substrate storage container based on the comparison result of the arithmetic processing unit. A management system for a substrate storage container. Detection means provided on the substrate storage container for detecting the use state thereof, wireless communication means provided on the substrate storage container for determining the inspection / inspection time, and inspection / inspection apparatus for inspecting / inspecting the substrate storage container at the inspection / inspection time In addition, the contents of the inspection and inspection of the substrate storage container by the inspection and inspection apparatus are recorded, the service providing means for analyzing the performance of the substrate storage container from the inspection and inspection contents, and the determination result of the inspection and inspection time of the substrate storage container by the wireless communication means A notification means for notifying the contents according to any of the results of the inspection and inspection of the substrate storage container by the inspection and inspection device and the analysis result of the substrate storage container by the service providing means, and is accessed by a predetermined related peripheral device. A substrate storage container management system,
The wireless communication unit includes an external input unit that inputs a detection value from the detection unit, a data recording unit that records at least the detection value of the detection unit and the inspection / inspection value regarding the substrate storage container, and at least the detection value of the detection unit and the substrate. An arithmetic processing unit that compares the inspection and inspection values related to the storage container, and at least a wireless communication unit that is communicably connected to the service providing unit among the inspection and inspection device and the service providing unit. A management system for a substrate storage container, characterized in that the inspection inspection time of the substrate storage container is determined.   The substrate storage container includes a container main body capable of storing a plurality of substrates arranged in the vertical direction, and a lid body that closes the opened front surface of the container main body in a sealed state. A plurality of horizontally supporting pieces are provided opposite to each other, and a positioning mechanism for accessing and positioning a predetermined related peripheral device is provided at the lower part of the container main body, and a predetermined related peripheral is provided at the upper part of the container main body. A flange for accessing and holding the device is provided, and the lid is locked with the lid fitted on the front surface of the container body by rotating the rotation operation member upon access from a predetermined related peripheral device. 4. The substrate storage container management system according to claim 2, wherein a locking mechanism is provided.   An air supply valve capable of supplying gas from the outside of the container body to the inside and an exhaust valve capable of exhausting gas from the inside of the container body to the outside are provided below the container body of the substrate storage container. A gas source is provided, and the air supply valve is provided with a hollow nozzle connected to the gas source, and a plurality of injection holes for injecting gas into the container body are perforated on the peripheral wall of the nozzle. The management system of a substrate storage container according to claim 4. The inspection / inspection device accesses and positions the positioning mechanism of the substrate body of the substrate storage container, measures the dimensions of the load port device that attaches and removes the lid body to the front of the container body with the lid opening / closing mechanism, and the dimensions of the substrate storage container And a dimension measuring device
The load port device is connected to an air supply valve and an exhaust valve of the container main body, and distributes gas inside and outside the container main body, and a plurality of measurement sensors for measuring the flow rate of the gas flowing through the valve unit, A torque sensor that measures the rotational torque of the rotation operation member of the locking mechanism, a load sensor that measures the pressing force when the lid is pressed and attached to the front of the container body, and a gas source of the container body is filled with gas. 6. The substrate storage container management system according to claim 5, further comprising a filling unit. The detecting means is attached to the container body of the substrate storage container and projects a light projecting / receiving element for the lid, and projects light from the light projecting / receiving element for the lid, which is attached to the lid. A photoelectric sensor that detects the number of times the lid is opened and closed by measuring the time when the lid light projecting and receiving element is unable to receive the reflected light from the regression member.
The wireless communication means inputs the number of opening / closing of the lid from the detecting means to the external input unit and records it in the data recording unit, and the number of times of opening / closing the lid recorded in the data recording unit and the inspection / inspection value of the lid As a result of the comparison in the arithmetic processing unit, as a result of the comparison in the arithmetic processing unit, when the lid opening / closing frequency is equal to or greater than the inspection inspection value of the lid, it is determined that the substrate storage container is in the inspection inspection period,
The inspection / inspection device inspects and inspects the sealing state of the substrate storage container according to the measurement values of the plurality of measurement sensors of the load port device, and the measurement values measured by the torque sensor of the load port device and the rotation operation member of the locking mechanism Inspect and check the locking mechanism according to the comparison result with the initial rotational torque value of the lid, and the lid body according to the comparison result between the measured value measured by the load sensor of the load port device and the initial pressing force value required for the lid body Inspect and check the quality of
The informing means notifies the contents according to the inspection inspection result or analysis result of the substrate storage container when the wireless communication unit of the wireless communication means receives the inspection inspection result of the inspection inspection apparatus or the analysis result of the service providing means. Item 7. The substrate storage container management system according to Item 6. The detection means is an acceleration sensor that is attached to the substrate storage container and detects its acceleration,
The wireless communication means inputs the acceleration value of the substrate storage container from the detection means to the external input unit and records it in the data recording unit. The acceleration value of the substrate storage container recorded in the data recording unit and the inspection of the substrate storage container If the acceleration value of the substrate storage container is equal to or greater than the inspection inspection value of the substrate storage container as a result of the comparison with the inspection value by the arithmetic processing unit and the comparison by the arithmetic processing unit, the substrate storage container Judge that there is
The inspection / inspection device inspects and inspects the quality of the substrate storage container according to the comparison result between the measurement value measured by the dimension measurement device and the dimension threshold value of the substrate storage container,
The informing means notifies the contents according to the inspection inspection result or analysis result of the substrate storage container when the wireless communication unit of the wireless communication means receives the inspection inspection result of the inspection inspection apparatus or the analysis result of the service providing means. Item 7. The substrate storage container management system according to Item 6. The detection means is attached to the container body of the substrate storage container. From the acceleration of the substrate storage container, the number of times the substrate storage container is transferred, the distance of the substrate storage container, the number of times the substrate storage container is held by the flange, and the number of impacts applied to the substrate storage container. An acceleration sensor that detects at least one information value of a maximum impact value acting on the substrate storage container and a maximum frequency acting on the substrate storage container;
The wireless communication means inputs the information value from the detection means to the external input section and records it in the data recording section, and the arithmetic processing section outputs the information value recorded in the data recording section and the inspection / inspection value of the substrate storage container. In comparison, as a result of comparison in the arithmetic processing unit, when the information value is equal to or greater than the inspection / inspection value of the substrate storage container, it is determined that the substrate storage container is in the inspection / inspection period,
The inspection / inspection device inspects and inspects the quality of the substrate storage container according to the comparison result between the measurement value measured by the dimension measurement device and the dimension threshold value of the substrate storage container,
The informing means notifies the contents according to the inspection inspection result or analysis result of the substrate storage container when the wireless communication unit of the wireless communication means receives the inspection inspection result of the inspection inspection apparatus or the analysis result of the service providing means. Item 7. The substrate storage container management system according to Item 6. The detection means is a temperature sensor that detects the number of heat shocks of the substrate storage container by measuring the temperature at the time of the heat shock when a heat shock occurs by storing the heated substrate in the substrate storage container,
The wireless communication means inputs the number of heat shocks from the detection means to the external input unit and records it in the data recording unit, and calculates the number of heat shocks recorded in the data recording unit and the inspection / inspection value of the substrate storage container When the number of heat shocks is equal to or greater than the inspection / inspection value of the substrate storage container, the substrate storage container is determined to be in the inspection / inspection period.
The inspection / inspection device inspects and inspects the quality of the substrate storage container according to the comparison result between the measurement value measured by the dimension measurement device and the dimension threshold value of the substrate storage container,
The informing means notifies the contents according to the inspection inspection result or analysis result of the substrate storage container when the wireless communication unit of the wireless communication means receives the inspection inspection result of the inspection inspection apparatus or the analysis result of the service providing means. Item 7. The substrate storage container management system according to Item 6. The detection means is a temperature sensor that measures the drying temperature of the substrate storage container and detects the number of times of cleaning the substrate storage container when the substrate storage container is washed and thermally dried.
The wireless communication means inputs the number of cleanings of the substrate storage container from the detection means to the external input unit and records it in the data recording unit, and the number of cleanings of the substrate storage container recorded in the data recording unit and the inspection of the substrate storage container When the number of cleanings of the substrate storage container is equal to or greater than the inspection inspection value of the substrate storage container as a result of comparing the inspection value with the arithmetic processing unit Judge that there is
The inspection / inspection device inspects and inspects the quality of the substrate storage container according to the comparison result between the measurement value measured by the dimension measurement device and the dimension threshold value of the substrate storage container,
The informing means notifies the contents according to the inspection inspection result or analysis result of the substrate storage container when the wireless communication unit of the wireless communication means receives the inspection inspection result of the inspection inspection apparatus or the analysis result of the service providing means. Item 7. The substrate storage container management system according to Item 6. The detection means is an inclination sensor that detects the level of the substrate storage container when the substrate storage container is positioned and mounted on a predetermined related peripheral device via a positioning mechanism.
The wireless communication means inputs the horizontal value of the substrate storage container from the detection means to the external input unit, records it in the data recording unit, and inspects the horizontal value of the substrate storage container recorded in the data recording unit and the substrate storage container If the horizontal value of the substrate storage container approaches at least the inspection / inspection value of the substrate storage container as a result of the comparison with the inspection value by the arithmetic processing unit and the comparison by the arithmetic processing unit, the substrate storage container Judge that there is
The inspection / inspection device inspects and inspects the quality of the substrate storage container according to the comparison result between the measurement value measured by the dimension measurement device and the dimension threshold value of the substrate storage container,
The informing means notifies the contents according to the inspection inspection result or analysis result of the substrate storage container when the wireless communication unit of the wireless communication means receives the inspection inspection result of the inspection inspection apparatus or the analysis result of the service providing means. Item 7. The substrate storage container management system according to Item 6. The detection means is an oxygen concentration sensor that detects the oxygen concentration in the substrate storage container when the substrate is stored in the substrate storage container.
The wireless communication means inputs the oxygen concentration value in the substrate storage container from the detection means to the external input unit and records it in the data recording unit, and the oxygen concentration value in the substrate storage container recorded in the data recording unit and the substrate When the inspection processing value of the storage container is compared with the arithmetic processing unit, and the result of the comparison by the arithmetic processing unit is that the oxygen concentration value in the substrate storage container is at least close to the inspection inspection value of the substrate storage container, the substrate storage Judge that the container is in the inspection and inspection period, let the purge gas source of the container body supply the purge gas to the purge nozzle,
The inspection and inspection device fills the gas from the filling unit to the gas source of the substrate storage container,
7. The management system for a substrate storage container according to claim 6, wherein the notification means notifies the contents according to the determination result of the wireless communication means when it is determined by the wireless communication means that the substrate storage container is in an inspection / inspection period. A substrate storage container management method using the substrate storage container management system according to claim 2,
The use state of the substrate storage container is detected by the detection means, the detection value of the detection means is compared with the inspection / inspection value regarding the substrate storage container by the wireless communication means, and the inspection / inspection time of the substrate storage container is determined based on the comparison result. When it is determined that the substrate storage container is in the inspection / inspection period, the substrate storage container is inspected / inspected by the inspection / inspection apparatus, and the inspection / inspection result of the substrate storage container by the inspection / inspection apparatus is transmitted to the wireless communication means. The contents of the inspection of the substrate storage container by the wireless communication means and the contents according to the inspection inspection result of the substrate storage container by the inspection / inspection apparatus are notified by the notification means. Management method. A substrate storage container management method using the substrate storage container management system according to claim 3,
The use state of the substrate storage container is detected by the detection means, the detection value of the detection means is compared with the inspection / inspection value regarding the substrate storage container by the wireless communication means, and the inspection / inspection time of the substrate storage container is determined based on the comparison result. When it is determined that the substrate storage container is in the inspection and inspection period, the substrate storage container is inspected and inspected by the inspection and inspection apparatus, and the inspection and inspection contents of the substrate storage container by the inspection and inspection apparatus are recorded in the service providing means. In addition, the performance of the substrate storage container is analyzed from the contents of the inspection and inspection, the analysis result of the substrate storage container by the service providing means is transmitted to the wireless communication means and recorded, and the inspection and inspection result of the substrate storage container by the inspection and inspection device or the service A method for managing a substrate storage container, wherein the notification means notifies the contents according to the analysis result of the substrate storage container by the providing means.