JP6689672B2 - Substrate storage container, management system thereof, and substrate storage container management method - Google Patents

Description

  The present invention relates to a substrate storage container for storing, storing, carrying, and transporting a substrate made of a semiconductor wafer, a liquid crystal device, a glass wafer, a mask glass, etc., a management system therefor, and a management method for the substrate storage container.

  Although not shown, a conventional substrate storage container includes a container main body for accommodating a plurality of semiconductor wafers composed of φ300 mm silicon wafers arranged in a vertical direction in an aligned manner, and a lid for detachably opening and closing the open front surface of the container main body, It is equipped with a locking mechanism that locks the lid fitted to the front of the container body, and it is positioned and mounted on the load port device that is attached to the semiconductor processing equipment, or it is gripped on the ceiling transfer device of the semiconductor manufacturing factory and is used between processes. Are transported (see Patent Documents 1, 2, and 3).

  The container body is molded into a front open box with a molding material containing a predetermined resin, and support pieces for semiconductor wafers are provided opposite to each other on both inner sides, and the pair of support pieces are vertically arranged at a predetermined pitch. The array is formed. Further, the bottom plate of the container body is provided with a positioning mechanism for accessing and positioning a predetermined peripheral device, and the rear wall of the container body, etc., the lot number of the substrate storage container, the production history of semiconductor wafers, etc. An RF tag for identifying an RFID system that stores predetermined data is attached, and the data of this RF tag is read and written in a contactless manner using radio waves (see Patent Document 4).

  Such a substrate storage container is used so as to be circulated in all semiconductor manufacturing processes, or is used for each area of the manufacturing process, and is regularly cleaned and then repeatedly used. During repeated use, if the substrate storage container becomes old or severely damaged, the semiconductor wafer may become abnormal or the quality may deteriorate.Therefore, replace the components of the substrate storage container or use a new substrate. It is replaced with a storage container. There is no clear criterion for this replacement time, and the number of years of use such as 8 years, 9 years, 10 years, etc. is used as a guide.

Japanese Patent No. 3636669 Japanese Patent No. 4677517 Japanese Patent Publication No. 2005-513459 Japanese Patent No. 4553840

  The conventional board storage container is configured as described above, and there is no clear criterion for replacement timing, and the number of years of use is usually the standard for replacement timing. Since individual differences occur and the number of usable years varies, it is not easy to select replacement products and the selection work becomes complicated. Also, when the substrate storage container is used so as to circulate in all the semiconductor manufacturing processes, the usage history differs for each substrate storage container, so there is variation in the replacement time of each substrate storage container, and it is difficult to determine the replacement time. There is a problem that becomes.

  Further, when the substrate storage container is used for each area of the semiconductor production process, particularly when the substrate storage container is used in the process of forming the metal wiring of the semiconductor wafer or the heat treatment process, the substrate storage container may be deformed due to thermal deformation or the like. The performance may be severely deteriorated and the life of the substrate container may be shortened. In view of this point, when the substrate storage container is used for each area of the production process, it is necessary to specifically determine the criteria for determining the replacement timing of the substrate storage container for each area. Then, the replacement product is selected. The work gets really difficult.

  The present invention has been made in view of the above, and is capable of easily determining the replacement time of a storage container and its components, and a substrate storage container capable of easily selecting a replacement product, a management system thereof, and a substrate storage container. It is intended to provide a management method.

In the present invention, in order to solve the above problems, a substrate storage container, a detection means provided in the substrate storage container to detect the usage state thereof, and a wireless communication provided in the substrate storage container to determine the inspection / inspection time thereof. Means, an inspection / inspection device that inspects and inspects the substrate storage container at the time of inspection and inspection, and the result of either the judgment result of the inspection and inspection time of the substrate storage container by wireless communication means or the inspection and inspection result of the substrate storage container by the inspection and inspection device. And a notification means for notifying the content according to, which is to be accessed to a predetermined related peripheral device,
The substrate storage container includes a container body capable of storing a substrate, and a lid body that closes an open front surface of the container body in a sealed state,
The detecting means is attached to the container body of the substrate storage container and projects the light beam for the lid to project the light beam toward the lid body, and is mounted to the lid body to project the light beam from the light projecting and receiving element for the lid body to the lid body. A photoelectric sensor that includes a retroreflective member capable of reflecting the light-receiving element, detects the number of times of opening and closing the lid by measuring the time when the lid light projecting / receiving element cannot receive the reflected light from the retroreflective member,
The wireless communication means inputs the number of times of opening and closing of the lid from the detecting means to an external input unit and records it in the data recording unit, and records the number of times of opening and closing of the lid and the inspection and inspection value of the lid recorded in the data recording unit. When the number of times the lid is opened and closed is equal to or greater than the inspection and inspection value of the lid, the board storage container is determined to be in the inspection and inspection time.
The notification means is characterized in that, when the wireless communication means receives the inspection / inspection result of the inspection / inspection device, it informs the contents according to the inspection / inspection result of the substrate storage container.

Further, in order to solve the above problems in the present invention, a substrate storage container, a detection unit provided in the substrate storage container to detect the usage state thereof, and a substrate storage container provided to determine the inspection and inspection time thereof. Either a wireless communication means, an inspection / inspection device for inspecting and checking the board storage container at the time of inspection / inspection, or a judgment result of the inspection / inspection time of the board storage container by the wireless communication means and a result of inspection / inspection of the board storage container by the inspection / inspection device. And a notifying means for notifying the content according to the result of the above, which is to access a predetermined related peripheral device,
The substrate storage container includes a container body capable of storing a substrate, and a lid body that closes an open front surface of the container body in a sealed state,
The detection means is a temperature sensor that detects the number of heat shocks of the substrate storage container by measuring the temperature at the time of heat shock when a heated substrate is stored in the substrate storage container and a heat shock occurs.
The wireless communication means inputs the number of heat shocks from the detection means to an external input unit and records it in a data recording unit, and calculates the number of heat shocks recorded in this data recording unit and the inspection and inspection value of the substrate storage container. If the number of heat shocks is equal to or greater than the inspection and inspection value of the substrate storage container as a result of comparison by this arithmetic processing unit, it is determined that the substrate storage container is in the inspection and inspection time,
The notification means is characterized in that, when the wireless communication means receives the inspection / inspection result of the inspection / inspection device, it informs the contents according to the inspection / inspection result of the substrate storage container.

Further, in order to solve the above problems in the present invention, a substrate storage container, a detection unit provided in the substrate storage container to detect the usage state thereof, and a substrate storage container provided to determine the inspection and inspection time thereof. Either a wireless communication means, an inspection / inspection device that inspects and inspects the substrate storage container at the time of inspection and inspection, or a judgment result of the inspection and inspection time of the substrate storage container by the wireless communication means and the inspection and inspection result of the substrate storage container by the inspection and inspection device. And a notifying means for notifying the content according to the result of the above, which is to access a predetermined related peripheral device,
The substrate storage container includes a container body capable of storing a substrate, and a lid body that closes an open front surface of the container body in a sealed state,
The detection means is a temperature sensor that detects the number of times the substrate storage container is washed by measuring the drying temperature of the substrate storage container when the substrate storage container is washed and thermally dried.
The wireless communication means inputs the number of times of cleaning the substrate storage container from the detection means to the external input unit and records it in the data recording unit, and the number of cleanings of the substrate storage container recorded in this data recording unit and the inspection of the substrate storage container. If the number of cleanings of the substrate storage container exceeds the inspection and inspection value of the substrate storage container as a result of comparison with the inspection value in the arithmetic processing unit Judge that there is,
The notification means is characterized in that, when the wireless communication means receives the inspection / inspection result of the inspection / inspection device, it informs the contents according to the inspection / inspection result of the substrate storage container.

Further, in order to solve the above problems in the present invention, a substrate storage container, a detection unit provided in the substrate storage container to detect the usage state thereof, and a substrate storage container provided to determine the inspection and inspection time thereof. Either a wireless communication means, an inspection / inspection device for inspecting and checking the board storage container at the time of inspection / inspection, or a judgment result of the inspection / inspection time of the board storage container by the wireless communication means and a result of inspection / inspection of the board storage container by the inspection / inspection device. And a notifying means for notifying the content according to the result of the above, which is to access a predetermined related peripheral device,
The substrate storage container includes a container body capable of storing a substrate, and a lid body that closes an open front surface of the container body in a sealed state,
The detection means is an inclination sensor that detects the levelness of the substrate storage container when the substrate storage container is positioned and mounted on a predetermined related peripheral device,
The wireless communication means inputs the horizontal value of the substrate storage container from the detection means into the external input unit and records it in the data recording unit, and the horizontal value of the substrate storage container recorded in this data recording unit and the inspection of the substrate storage container. If the horizontal value of the substrate storage container approaches at least the inspection and inspection value of the substrate storage container as a result of comparison with the inspection value in the arithmetic processing unit and this arithmetic processing unit, the substrate storage container Judge that there is,
The notifying means is characterized in that, when the wireless communication means receives the inspection / inspection result of the inspection / inspection device, it informs the contents according to the inspection / inspection result or the analysis result of the substrate storage container.

The substrate storage container is provided with a plurality of support pieces that support a plurality of substrates in a substantially horizontal direction on opposite sides of the inside of the container body so as to access a predetermined peripheral device at the bottom of the container body. The positioning mechanism for positioning is provided, the container body is provided with a flange for accessing and holding a predetermined related peripheral device, and the lid body is rotated by the access from the predetermined related peripheral device. It is preferable to provide a locking mechanism for locking the lid body fitted to the front surface of the container body by rotating the member.

Further, an air supply valve capable of supplying gas from the outside of the container body to the inside and an exhaust valve capable of exhausting gas from the inside of the container body to the outside are provided at the bottom of the container body of the substrate storage container, respectively. A gas source is provided in the main body, and a nozzle connected to the gas source is provided upright on the air supply valve, and a plurality of injection holes for injecting gas into the container body are bored in the peripheral wall of the nozzle. Preferably.

In addition, the inspection / inspection device accesses and positions the positioning mechanism of the container body of the substrate storage container for positioning, and the load port device that attaches and detaches the lid on the front of the container body by the lid opening / closing mechanism, and the dimensions of the substrate storage container. And a dimension measuring device for measuring
The load port device is a valve unit that is connected to an air supply valve and an exhaust valve of the container body to allow gas to flow in and out of the container body, and a plurality of measurement sensors that measure the flow rate of gas flowing through the valve unit, A torque sensor that measures the rotational torque of the rotating operation member of the locking mechanism, a load sensor that measures the pressing force when the lid body is pressed and attached to the front of the container body, and the gas source of the container body is filled with gas. It is preferable to include a filling unit.

In order to solve the above problems, the present invention provides a substrate storage container management method using the substrate storage container management system according to any one of claims 1 to 7.
The use state of the substrate storage container is detected by the detection means, and the detection value of this detection means and the inspection / inspection value regarding the substrate storage container are compared by the wireless communication means, and the inspection / inspection time of the substrate storage container is determined based on the comparison result. When it is determined that the board storage container is in the inspection and inspection period, the board storage container is inspected and inspected by the inspection and inspection device, and the inspection and inspection result of the board storage container by this inspection and inspection device is transmitted to the wireless communication means. It is characterized in that the notification means informs the contents according to the judgment result of the inspection and inspection time of the substrate storage container by the wireless communication means or the inspection and inspection result of the substrate storage container by the inspection and inspection device.

Here, the required number of semiconductor wafers, liquid crystal devices, glass wafers, mask glasses, etc. having a diameter of 200 mm, 300 mm, and 450 mm are included in the substrates in the claims (for example, 2 or less, 20 or more, etc.). The substrate storage container does not particularly need to be transparent, opaque, or semitransparent. Further, the predetermined related peripheral devices include at least a semiconductor processing device, a load port device that is installed in parallel with this device to open and close a lid, various transfer devices for a substrate storage container, and the like. The external communication device includes at least an inspection / inspection device, a load port device, various servers, and the like.

  The substrate storage container, in other words, at least the opening and closing of the lid, the presence or absence of the substrate, the acceleration of the substrate storage container, the number of times the substrate storage container is transported, the substrate storage container transport distance, the substrate Flange holding frequency of the storage container, number of impacts on the substrate storage container, maximum impact value on the substrate storage container, maximum vibration frequency on the substrate storage container, heat shock frequency, number of cleanings of the substrate storage container, substrate storage container Level, oxygen concentration in the substrate storage container, humidity, particles and the like.

A required number of detecting means are provided inside, above, below, rear and side portions of the substrate storage container and are used during operation, storage and inspection / inspection of the substrate storage container. The detection means includes at least a photoelectric sensor, an acceleration sensor, a temperature sensor, a temperature / humidity sensor, a humidity sensor, and a tilt sensor.

According to the present invention, the detection means detects the usage state of the substrate storage container when the substrate storage container is used, stored, tested, etc., and outputs the detected value to the wireless communication means. In the wireless communication unit, the data recording unit records the detection value of the detection unit, and the arithmetic processing unit compares the detection value with the inspection / inspection value of the substrate storage container. As a result, the detected value is the inspection / inspection value of the substrate storage container. If the value is less than the value or is not close to the inspection / inspection value of the substrate storage container, it is determined that the inspection / inspection time of the substrate storage container is not yet reached. When it is determined that the substrate storage container is not in the inspection and inspection period, the substrate storage container can be continuously used as it is.

  On the other hand, when the performance and quality of the substrate storage container deteriorates due to long-term use, etc., and the detected value approaches the inspection inspection value of the substrate storage container or becomes greater than the inspection inspection value, the arithmetic processing unit Judge that it is time to inspect and inspect the substrate storage container. When it is determined that the substrate storage container is to be inspected and inspected, the notification means can be turned on, blinked, and the corresponding characters displayed to notify the inspection, replacement, or preparation for replacement of the substrate storage container.

  The board storage container is inspected and inspected by an inspection and inspection device when it is judged that it is time to inspect and inspect. When the substrate storage container is defective as a result of the inspection and inspection by the inspection / inspection device, the notifying means can be turned on, blinked, or the corresponding character is displayed to notify the reinspection or replacement of the substrate storage container. Due to such notification regarding the substrate storage container, it is possible to repair the substrate storage container to maintain its performance, replace parts to improve the performance, or replace it with a new substrate storage container.

According to the present invention, the contents corresponding to either the result of the inspection / inspection time judgment of the substrate storage container by the wireless communication means and the inspection / inspection result of the substrate storage container by the inspection / inspection device are notified. There is an effect that the replacement time of the part can be easily determined and the replacement product can be easily selected. Further, the performance and quality of the substrate storage container and the time of replacement can be determined from the sealing state of the substrate storage container, the state of the lid and the locking mechanism.

According to the second aspect of the present invention, since the content according to either of the result of the judgment of the inspection / inspection time of the substrate storage container by the wireless communication means and the inspection / inspection result of the substrate storage container by the inspection / inspection device is notified, There is an effect that it is possible to easily determine the replacement time of the substrate storage container and its parts, and it is possible to easily select a replacement product. Further, the performance, quality, and replacement time of the substrate storage container can be determined from the heat shock when the heated substrate is stored in the substrate storage container.

According to the third aspect of the present invention, since the content corresponding to any one of the result of the judgment of the inspection and inspection time of the substrate storage container by the wireless communication means and the inspection and inspection result of the substrate storage container by the inspection and inspection device is notified, There is an effect that it is possible to easily determine the replacement time of the substrate storage container and its parts, and it is possible to easily select a replacement product. Further, the performance and quality of the substrate storage container and the replacement time can be determined from the number of times the substrate storage container is washed.

According to the invention of claim 4, the content corresponding to either the result of the judgment of the inspection / inspection time of the substrate storage container by the wireless communication means or the result of the inspection / inspection of the substrate storage container by the inspection / inspection device is notified. There is an effect that it is possible to easily determine the replacement time of the substrate storage container and its parts, and it is possible to easily select a replacement product. Further, it becomes possible to judge the performance, quality, and time of replacement of the substrate storage container from the levelness of the substrate storage container, and prevent the inclination when the substrate storage container is mounted.

According to the invention described in claim 5, by using the positioning mechanism, it is possible to position and mount the container body of the substrate storage container on the peripheral-related device with high accuracy. Further, by using the flange, it is possible to hold the container main body in the peripheral-related device and safely transport the substrate storage container in which the substrate is stored. Further, by utilizing the locking mechanism, it is possible to effectively prevent the lid body fitted to the front surface of the container body from falling off.

According to the invention described in claim 6, by using the air supply valve and the exhaust valve of the container body, a gas such as a purge gas can be circulated in and out of the container body, and the pressure difference between the inside and the outside of the substrate storage container can be eliminated. it can. Further, rather than simply supplying the gas from the air supply valve into the container body, the gas can be injected into the container body from the plurality of injection holes of the purge nozzle, so that the relative humidity in the container body becomes uniform. As it goes down, it becomes easier to control the flow of gas. Further, even if the air supply valve of the container body is not connected to the gas supply device, the gas is supplied from the gas source of the container body to the purge nozzle as necessary, and the gas is injected into the container body from the injection hole of the purge nozzle. can do.

According to the invention described in claim 7, the load port device of the inspection and inspection device positions and mounts the substrate storage container for inspection and inspection, and the locking mechanism of the lid is unlocked by the lid opening and closing mechanism of the load port device. After that, the lid body can be adsorbed and removed by the lid body opening / closing mechanism for inspection and inspection. In addition, the quality of the sealing property of the substrate storage container can be inspected and checked from the flow rate of the gas flowing inside and outside the substrate storage container, and moreover, the locking torque is measured from the measured value of the rotation torque when the lid opening / closing mechanism is rotated. The quality of the mechanism can be inspected and inspected. In addition, the quality of the container body and the lid of the substrate storage container is inspected and inspected based on the measurement result of the dimension measuring device or the measurement value of the pressing force when the lid is pressed against and fitted to the open front surface of the container body. be able to.

It is a section explanatory view showing typically an embodiment of a management system of a substrate storage container concerning the present invention. It is explanatory drawing which shows typically the wireless communication means in embodiment of the management system of the board | substrate storage container which concerns on this invention. It is explanatory drawing which shows typically the detection means, wireless communication means, and alerting | reporting means in embodiment of the management system of the board | substrate storage container which concerns on this invention. It is a side view which shows typically the inspection inspection device etc. in embodiment of the management system of the substrate storage container which concerns on this invention. It is a top view which shows typically the inspection inspection device etc. in embodiment of the management system of the board | substrate storage container which concerns on this invention. It is a front explanatory view which shows typically the container main body in another embodiment of the management system of the substrate storage container concerning the present invention.

  Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. A substrate storage container management system according to the present embodiment is a front open box type substrate storage container 1 as shown in FIGS. It is determined that the detecting means 30 is provided to detect the use state such as the seal state, the small wireless communication means 40 provided to the substrate storage container 1 to determine the inspection / inspection time, and the inspection / inspection time. A dedicated inspection / inspection device 50 for inspecting / inspecting the substrate storage container 1, one of a judgment result of inspection / inspection time of the substrate storage container 1 by the wireless communication means 40, and an inspection / inspection result of the substrate storage container 1 by the inspection / inspection device 50. A system in which the substrate storage container 1 is accessed by a predetermined related peripheral device 20 and is provided with a notifying unit 70 for notifying the content according to the result.

  As shown in FIG. 1, the substrate storage container 1 includes, for example, a transparent container main body 2 for accommodating and storing a plurality of semiconductor wafers W, and a lid 10 for detachably opening and closing the open front surface of the container main body 2. A lock mechanism that locks the lid 10 fitted to the front of the container body 2 is positioned and mounted on a load port device that is attached to a semiconductor processing device, or by a ceiling transfer device 22 of a semiconductor manufacturing factory. They are transported and regularly inspected and tested.

  Each semiconductor wafer W is, for example, a φ300 mm silicon wafer having a thickness of 775 μm. This semiconductor wafer W is appropriately subjected to various kinds of processing and processing in the semiconductor component manufacturing process (including 500 to 600 processes), and 25 sheets are horizontally inserted and stored in the container body 2, and the container body is also stored. Align 2 up and down.

  The container body 2, the lid body 10, and the locking mechanism are each configured by injection molding a plurality of components with a molding material containing a predetermined resin, and are configured by a combination of the plurality of components. Examples of the resin contained in the molding material include thermoplastic resins such as polycarbonate, cycloolefin polymer, cycloolefin copolymer, polyetherimide, polyetherketone, polyetheretherketone, polybutylene terephthalate, polyacetal, liquid crystal polymer, and the like. Alloys and the like can be given.

  If necessary, various antistatic agents such as a conductive substance composed of carbon fiber, carbon powder, carbon nanotubes, conductive polymers, etc., and anionic, cationic, nonionic, etc. are added to these resins. Further, a benzotriazole-based, salicylate-based, cyanoacrylate-based, oxalic acid anilide-based, hindered amine-based UV absorber is added, and glass fiber or carbon fiber for improving rigidity is also selectively added.

  The container main body 2 is formed in a transparent front open box having an open front surface, and is positioned and mounted on the load port device with the open front surface facing the horizontal direction, or by the ceiling transfer device 22 being gripped between the steps. Be transported. The container body 2 is provided with a pair of left and right support pieces 3 for supporting the semiconductor wafer W substantially horizontally on both inner sides of the container body, in other words, on inner surfaces of both side walls. Position restricting portions that restrict excessive insertion of W are integrally formed.

  The pair of left and right support pieces 3 are arranged at a predetermined pitch in the up-down direction, and between the support pieces 3 adjacent in the up-down direction, the side of the peripheral edge of the semiconductor wafer W floating from the support piece 3 is provided. A support groove 4 having a substantially U-shaped cross section for supporting is defined. Each support piece 3 is formed in an elongated plate shape that supports a side edge of the semiconductor wafer W, and a step portion that restricts the frontward protrusion of the semiconductor wafer W is integrally formed on the front surface.

  A plurality of (at least two or more) mounting holes are formed through the front portion or the rear portion of the bottom plate of the container main body 2, and a filter valve for gas replacement is fitted into each mounting hole via a gasket. The plurality of filter valves are supported by the bottom plate of the container body 2 and at least one or more air supply valve 5 for supplying a purge gas such as nitrogen gas into the container body 2 from an external purge gas supply device and the container body 2. At least one exhaust valve that is supported by the bottom plate and exhausts air from the inside of the container body 2 to the outside, and allows a gas such as a purge gas to flow in and out of the container body 2 so that the internal and external pressures of the substrate storage container 1 are increased. It works to close the gap.

  Positioning tools 6, which are positioning mechanisms for positioning the substrate storage container 1, are respectively provided on both front and rear sides of the bottom surface of the bottom surface of the container body 2, and the plurality of positioning tools 6 draw a substantially Y shape in a plane. Arranged. Each positioning tool 6 is basically formed in a substantially V-shaped cross section and has a substantially V-shaped cross section, and a recess having a pair of inclined surfaces is directed downward, and a positioning pin 21 on the load port device is recessed from above. By fitting and sliding contact with each other, it functions to position the container body 2 with high accuracy.

  On the back surface of the bottom plate of the container body 2, a separate bottom plate is horizontally attached and screwed through a screw tool, and the bottom plate exposes a plurality of air supply valves 5, an exhaust valve, and a positioning tool 6, respectively.

  A top flange 7 for transportation, which is gripped by a ceiling transportation device 22 of a semiconductor manufacturing factory, is detachably attached to a central portion of a top plate of the container body 2, and is provided on both sides of upper and lower portions in a front inner circumference of the container body 2. , Locking holes for the locking mechanism are respectively drilled. Further, a pair of left and right rear retainers capable of supporting the rear of the peripheral edge of the semiconductor wafer W are formed side by side on the left and right sides of the inner surface of the rear surface of the container body 2, and the pair of rear retainers are arranged at a predetermined pitch in the vertical direction of the container body 2. Arranged by. Further, substantially H-shaped mounting portions are formed in the center of both side walls of the container body 2, and grip portions functioning for gripping operation are detachably mounted to the respective mounting portions.

  The lid body 10 includes a lid body 11 that is pressed and fitted into the open front surface of the container body 2 and a surface plate 12 that covers the open surface of the lid body 11. Contact with the inner circumference of the front face through a seal gasket for hermetic sealing.

  The lid main body 11 is basically formed in a shallow dish with a substantially dish-shaped cross section, and is provided with a plurality of ribs for reinforcement and attachment therein. The lid main body 11 has a back surface that is a facing surface facing the semiconductor wafer W. A front retainer that elastically holds the semiconductor wafer W is attached. Further, a frame-shaped fitting groove is formed in the peripheral portion of the back surface of the lid main body 11, and an elastically deformable seal gasket which is pressed against the inner circumference of the front surface of the container main body 2 is tightly fitted in the fitting groove. The lid body 11 is provided at both upper and lower sides thereof with a retracting hole for the locking mechanism, which is opposed to the locking hole of the container body 2 and is formed.

  The surface plate 12 is formed in a horizontally long front rectangle, and is provided with a plurality of reinforcing and mounting ribs, screw holes, and the like. Operation holes for the locking mechanism are formed on both sides of the surface plate 12, respectively.

  The locking mechanism is a pair of left and right rotary operation members that are pivotally supported on both left and right sides of the lid body 11 of the lid body 10 and are rotatably operated from the outside, and the lid body 10 rotates as the rotation plates rotate. The lid body includes a plurality of advancing / retreating plates that slide in the up-down direction, and a plurality of locking claws that move in and out of the retracting holes of the lid body 11 to come into contact with and separate from the locking holes of the container body 2 as the advancing / retreating plates slide. It is interposed between the lid body 11 of 10 and the surface plate 12.

  Each rotary plate faces the operation hole of the surface plate 12 of the lid 10, and is rotated by the operation key of the load port device which penetrates this operation hole. Further, each locking claw is basically formed to be bent in a substantially L-shaped cross section and has a rotatable roller at its tip, and is pivotally supported near a retractable hole in the lid main body 11 to advance and retreat. It is connected to the tip of the moving plate via a pin, and the roller is brought into contact with and separated from the locking hole of the container body 2.

  As shown in FIGS. 1, 4 and 5, the predetermined related peripheral device 20 includes, for example, a load port device for accessing and positioning a plurality of positioning tools 6 which are positioning mechanisms for the container body 2, and a container body 2. The ceiling transfer device 22 is configured to access the top flange 7 and hold the top flange 7 from above. The load port device positions and mounts the substrate storage container 1 or mounts the rotating plate of the locking mechanism by automatically positioning the positioning pins 21 standing on the plurality of positioning tools 6 of the container body 2 from below to fit them automatically. By rotating with the operation key, the locking mechanism functions to lock or unlock. Further, after unlocking the locking mechanism, the lid body 10 is adsorbed and removed from the container body 2 by the lid body opening / closing mechanism, or the lid body 10 adsorbed on the front surface of the container body 2 is pressed by the lid body opening / closing mechanism. Mating and so on.

  The ceiling transfer device 22 includes a moving mechanism 24 that moves by being guided by a ceiling transfer rail 23 of a semiconductor manufacturing factory, and a lifting mechanism 25 that is installed in the moving mechanism 24 and that can move up and down. After gripping the top flange 7 of the substrate storage container 1 that is positioned and mounted on the device, the substrate storage container 1 is hung and conveyed at high speed from the load port device 52 to a predetermined device or location such as the inspection / inspection device 50. .

  As shown in FIG. 1, the detection means 30 is mounted on the lower part of the rear wall of the container body 2 to project and project a light beam obliquely toward the lower part of the lid body 10, and a light emitting / receiving element 31 for the substrate and a rear wall of the container body 2. A lid light projecting / receiving element 32 that is attached to the lower portion and horizontally projects a light beam toward the lower portion of the lid body 10, and a substrate light emitting / receiving element 31 and the lid body that are attached to the bottom lower portion of the lid body 11 of the lid body 10. A light beam from the light emitting / receiving element 32 for a substrate is formed by a retroreflective photoelectric sensor 34 having a return reflecting plate 33 capable of reflecting the light emitting / receiving element 31 for a substrate and the light emitting / receiving element 32 for a lid, respectively, and wireless communication means. Connected to 40. The substrate light emitting / receiving element 31 and the lid light emitting / receiving element 32 are arranged so that the substrate light emitting / receiving element 31 is located above the lid light emitting / receiving element 32.

  The detection means 30 detects the presence or absence of the semiconductor wafer W by measuring the time when the substrate light projecting / receiving element 31 cannot receive the reflected light from the regression reflection plate 33, and the lid light projecting / receiving element 32 recursively reflects. It functions to detect the number of times the lid 10 is opened and closed by measuring the time when the reflected light from the plate 33 cannot be received. For example, after detecting the presence of the semiconductor wafer W by measuring the time when the substrate light emitting / receiving element 31 cannot receive the reflected light from the retroreflective plate 33, the lid light projecting / receiving element 32 receives the light from the retroreflective plate 33. When the time when the reflected light cannot be received (for example, 10 seconds or more) is measured, the number of times the lid 10 is opened and closed is detected.

  The wireless communication means 40 is a microminiature IoT module that is lighter and smaller than a Japanese 1-yen coin and has a substantially rectangular planar shape, and is attached to the bottom plate, side wall, and bottom plate of the container body 2. As shown in FIG. 1 and FIG. 2, the wireless communication means 40 relates to, for example, an external input section 41 for inputting the detection value from the connected detection means 30, and at least the detection value of the detection means 30 and the substrate storage container 1. A data recording unit 42 for recording the inspection / inspection value, an arithmetic processing unit 43 for comparing the detection value of the detection means 30 with the inspection / inspection value for the substrate storage container 1, and for storing the detection value in the data recording unit 42, A wireless communication unit 44 that communicates with an external inspection / inspection device 50, a detection unit 30, an external input unit 41, a data recording unit 42, an arithmetic processing unit 43, and a battery unit 46 that supplies power to the wireless communication unit 44. It is configured as an ultra-low power consumption type and is supplied with power from a power supply 47.

  The external input unit 41 is formed, for example, in a substantially stamp shape on the four sides of the wireless communication unit 40 at a predetermined pitch, and is surface-mounted on a printed circuit board.

  The data recording unit 42 stores the number of times the lid 10 is opened / closed, the acceleration value of the substrate storage container 1, the number of times the substrate storage container 1 is transported, the substrate storage container 1 transportation distance, and the substrate as detection values of the detection unit 30 in the RAM of the memory. The number of times the top flange 7 of the storage container 1 is held, the number of impacts of the substrate storage container 1, the maximum impact value of the substrate storage container 1, the maximum frequency of the substrate storage container 1, the number of heat shocks of the substrate storage container 1, the number of the substrate storage container 1 The number of times of cleaning, the horizontal value of the substrate storage container 1, the oxygen concentration value in the substrate storage container 1, the number of times of use in a predetermined process, and the like are recorded and stored as necessary. When the wireless communication unit 44 receives the inspection / inspection result of the substrate storage container 1 from the inspection / inspection device 50, the inspection / inspection result of the substrate storage container 1 is recorded / stored.

  Further, the data recording unit 42 stores in the ROM of the memory as inspection and inspection values for the substrate storage container 1, the number of times the lid 10 is opened and closed, the acceleration value of the substrate storage container 1, the number of times the substrate storage container 1 is transported, and the substrate storage container 1 Transport distance, number of times the substrate holder 1 holds the top flange 7, the number of shocks of the substrate storage container 1, the maximum shock value of the substrate storage container 1, the maximum frequency of the substrate storage container 1, the number of heat shocks of the substrate storage container 1, the substrate The number of cleanings of the storage container 1, the horizontal value of the substrate storage container 1, the oxygen concentration value in the substrate storage container 1, the number of times of use in a predetermined process, etc. are recorded as threshold values. The inspection and inspection values for these substrate storage containers 1 are preset by a table test for comparison with the detection values of the detection means 30.

  The arithmetic processing unit 43 includes, for example, a 32-bit CPU that operates at a maximum of 32 MHz, and the CPU reads a predetermined program stored in the ROM of the data recording unit 42 using the RAM area of the data recording unit 42 as a work area. It realizes a predetermined function as a computer.

  Specifically, the function of comparing the number of times of opening and closing of the lid 10 recorded in the data recording unit 42 with the inspection and inspection value of the lid 10, the comparison result shows that the number of times of opening and closing of the lid 10 is the inspection and inspection of the lid 10. When the value is less than the value, the function of judging that the substrate storage container 1 is not yet the inspection and inspection time is compared, and as a result of comparison, when the number of times of opening and closing the lid 10 is equal to or more than the inspection and inspection value of the lid 10, A function of determining that the storage container 1 is in the inspection and inspection period is realized. The relationship between the number of times the lid 10 is opened and closed and the inspection and inspection value of the lid 10 is set in consideration of a table test, a past use record, an experimental result, and the like.

  The wireless communication unit 44 is communicatively connected to the inspection / inspection device 50 by radio in the 2.4 GHz band by an omnidirectional antenna 45, for example. In addition to being omnidirectional, the antenna 45 of the wireless communication unit 44 is selectively directional such as a high gain directional type capable of extending the communication distance, an inexpensive match stick type, a wire type capable of being mounted short and a substrate type. Adopted by. The battery unit 46 is made of, for example, a small button battery, and power is supplied from a power source 47 by a contact method or a non-contact method. The power source 47 is not particularly limited, but is installed in, for example, the load port device 52, the inspection / inspection device 50, or the like.

  As shown in FIGS. 4 and 5, the inspection / inspection apparatus 50 accesses the positioning pins 6 of the container body 2 of the substrate storage container 1 by the positioning pins 51 and positions and mounts them with high precision. The load port device 52 that attaches and detaches the lid body 10 to and from the front by the lid opening and closing mechanism that can move up and down, the dimension measuring device 59 that measures the dimensions of the substrate storage container 1, and the container body 2 with the lid body 10 removed. On the other hand, a robot handler 60 for loading and unloading a predetermined number of semiconductor wafers W is provided, and the load port device 52 is configured in conformity with a load port device that is attached to a semiconductor processing device, and is installed in a semiconductor production line. The quality of the substrate storage container 1 is inspected and inspected.

  The load port device 52 includes a valve unit 53 that allows gas to flow in and out of the container body 2. The valve unit 53 is connected to the air supply valve 5 of the container body 2 to supply a gas such as clean air or nitrogen gas. And a discharge valve 55 that is connected to the exhaust valve of the container body 2 and discharges clean air and gas such as nitrogen gas in the container body 2 to the outside. The amount of gas supplied from the supply valve 54 into the container body 2 is measured by the measurement sensor 56, and the amount of gas discharged from the discharge valve 55 to the outside of the container body 2 is measured by another measurement sensor 56A. To be done. The calculation results of the measurement values measured by the plurality of measurement sensors 56 and 56A are compared with a threshold value as an inspection / inspection item of the substrate storage container 1, and the quality of the substrate storage container 1 is inspected and inspected based on the comparison result with the threshold value. The inspection / inspection result is transmitted to the wireless communication means 40.

  In addition, the load port device 52 includes a torque sensor 57 that measures a rotational torque when the operation plate of the lid opening / closing mechanism rotates the rotating plate of the locking mechanism, and the lid 10 covers the front of the container body 2 with the opening. A load sensor 58 that measures the pressing force when the body opening / closing mechanism presses and fits is provided.

  The measurement values measured by the torque sensor 57 and the load sensor 58 are compared with an initial rotational torque value or an initial pressing force as an inspection / inspection item of the substrate storage container 1, and the quality of the substrate storage container 1 is inspected and inspected from the comparison result. The inspection and inspection result is transmitted to the wireless communication means 40. Further, the dimension measuring device 59 measures the dimension of the substrate storage container 1 with a plurality of photoelectric sensors, and this measured value is also compared with the dimension threshold as an inspection / inspection item of the substrate storage container 1, and from this comparison result, the substrate storage container is determined. The quality of 1 is inspected and inspected, and the inspection and inspection result is transmitted to the wireless communication means 40.

  As shown in FIG. 3, the notification means 70 includes, for example, an LED 71, a liquid crystal display (LCD) 72, a buzzer, a server communicatively connected to the wireless communication means 40 of the substrate housing container 1, and the like, and the container body 2 and its body. It is arranged on the bottom plate, a general load port device, and the inspection / inspection device 50.

  When the inspection / inspection device 50 inspects the quality of the substrate storage container 1 and the inspection / inspection device 50 indicates that the substrate storage container 1 is good, the notification means 70 does not give any notification, and when the substrate storage container 1 is defective, the substrate is notified. Notification of re-inspection or replacement of the storage container 1 is given. Specifically, when the notification means 70 is the LED 71, when it is determined that the quality of the substrate storage container 1 is still good, it does not blink or light, and when it is determined that the quality of the substrate storage container 1 deteriorates and it is determined to be defective. , Or lights up to notify the re-inspection or replacement of the substrate storage container 1.

  In the above configuration, when a plurality of semiconductor chips are formed on the semiconductor wafer W, the substrate storage container 1 is positioned and mounted on the load port device via the plurality of positioning tools 6, and the locking mechanism of the lid 10 is provided. The lid 10 is unlocked by the operation key of the lid opening / closing mechanism of the load port device, and the lid 10 is adsorbed and removed by the suction mechanism of the lid opening / closing mechanism of the load port device, and then the front face of the container body 2 with the opening. Then, the semiconductor wafer W is taken out by a dedicated robot hand. In this way, when the semiconductor wafer W is taken out by the dedicated robot, the semiconductor processing apparatus performs various kinds of processing and processing on the semiconductor wafer W, and after the processing and processing are completed, the semiconductor wafer W is stored again in the container body 2.

  Next, the lid body 10 is fitted to the front surface of the container body 2 by the suction mechanism of the lid body opening / closing mechanism of the load port device 52, and the locking mechanism of the lid body 10 is operated by the operation key of the lid body opening / closing mechanism of the load port device 52. When the locking operation is performed, the lid 10 is completely press-fitted to the front surface of the container body 2 and is transferred by the ceiling transfer device 22 in the next processing step. By repeating such processing, a plurality of semiconductor chips are formed on the semiconductor wafer W.

  When a plurality of semiconductor chips are formed on the semiconductor wafer W, the substrate storage container 1 is transferred from the container body 2 to a dedicated container for transporting the semiconductor wafer W to a subsequent process, and the substrate container 2 becomes empty. An unprocessed semiconductor wafer W is newly stored. The substrate storage container 1 in which a new semiconductor wafer W is stored is repeatedly used for the same operation as described above, but it is used after being regularly washed with the washing water of the washing device at a predetermined interval and dried. In addition, the basic performance is regularly tested after a predetermined period.

  Now, when the substrate storage container 1 is used, the detection means 30 projects light rays from the substrate light emitting / receiving element 31 and the lid light emitting / receiving element 32 onto the regressive reflection plate 33 of the lid 10, respectively, and the substrate light emitting / receiving element is received. 31 detects the presence or absence of the semiconductor wafer W by measuring the time when the reflected light from the retroreflective plate 33 cannot be received, and the lid light projecting / receiving element 32 cannot receive the reflected light from the retroreflective plate 33. The time is measured to detect the number of times the lid 10 is opened and closed, and the detected value is output to the wireless communication unit 40.

  The wireless communication means 40 records the number of times the lid 10 is opened and closed in the data recording unit 42, and the arithmetic processing unit 43 records the number of times the lid 10 is opened and closed and the inspection and inspection value of the lid 10 recorded in the data recording unit 42. As a result of the comparison, if the number of times the lid 10 is opened and closed is less than the inspection / inspection value of the lid 10, it is determined that the substrate storage container 1 is not yet in the inspection / inspection time. When the arithmetic processing unit 43 of the wireless communication means 40 determines that the substrate storage container 1 is not yet in the inspection / inspection time, the notification means 70 does not give any notification and the use of the substrate storage container 1 is continued.

  On the other hand, when the number of times the lid 10 is opened and closed is increased and the number of times the lid 10 is opened and closed is equal to or greater than the inspection and inspection value of the lid 10, the arithmetic processing unit 43 causes the quality of the lid 10 to deteriorate, It is determined that it is time to inspect and inspect the substrate storage container 1. When the arithmetic processing unit 43 determines that it is time to inspect and inspect the substrate storage container 1, the substrate storage container 1 is positioned and mounted on the load port device 52 of the inspection and inspection device 50 for inspection and inspection, and the lid 10 is locked. After the mechanism is unlocked by the operation key of the lid opening / closing mechanism of the load port device 52, the lid 10 is adsorbed and removed by the lid opening / closing mechanism for inspection and inspection.

  At this time, the valve unit 53 of the load port device 52 operates to supply gas from the supply valve 54 to the air supply valve 5 of the container body 2, and the gas in the container body 2 passes from the exhaust valve to the exhaust valve 55. The gas is discharged to the outside and the supply amount and discharge amount of the gas are measured by the plurality of measurement sensors 56 and 56A. The subtraction result of the measurement values measured by the plurality of measurement sensors 56 and 56A is compared with a threshold value as an inspection / inspection item of the substrate storage container 1, and the quality of the sealed state of the substrate storage container 1 is inspected from the comparison result with the threshold value. The inspection and inspection result is transmitted to the wireless communication means 40.

  As a result of the inspection / inspection device 50 inspecting whether or not the sealing state of the substrate storage container 1 is good, when the sealing state of the substrate storage container 1 is good, the notification means 70 does not give any notification, but the amount of exhaust gas decreases, etc. Thus, when the sealing state of the substrate storage container 1 is abnormal and defective, the substrate storage container 1 is re-inspected or replaced by blinking or displaying a corresponding character.

  By such re-inspection or notification of replacement preparation of the substrate storage container 1, the substrate storage container 1 is repaired to improve the sealing state, or the gasket or the sealing gasket is replaced to improve the sealing performance, or a new Since it can be replaced with the substrate storage container 1, it is possible to reduce the quality of the substrate storage container 1.

  Further, when the locking mechanism of the lid 10 is unlocked, the torque sensor 57 measures the rotational torque when the operation key of the lid opening / closing mechanism rotates the rotating plate of the locking mechanism, and the torque sensor 57 measures the torque. The measured value is compared with the initial rotational torque value, and the quality of the locking mechanism of the substrate container 1 is inspected and inspected based on the comparison result, and the inspection and inspection result is transmitted to the wireless communication means 40. As a result of the inspection / inspection device 50 inspecting the quality of the locking mechanism, if the locking mechanism is good, the notifying means 70 does not give any notification, but if the locking mechanism is abnormal and defective due to wear of parts, etc. , Flashes or displays corresponding characters to notify the reinspection or replacement of the substrate storage container 1.

  Further, when the container body 2 of the substrate storage container 1 is positioned and mounted on the load port device 52, the dimensions of the substrate storage container 1 are measured by a plurality of photoelectric sensors of the dimension measuring device 59, and the plurality of photoelectric sensors 34 are measured. The measured value is compared with a size threshold value, and the quality of the substrate container 1 is inspected and inspected based on the comparison result, and the inspection and inspection result is transmitted to the wireless communication means 40. As a result of the inspection / inspection device 50 inspecting the quality of the substrate storage container 1, if the dimensions of the substrate storage container 1 are good, the notification means 70 does not notify, but due to deterioration or deformation of the components, the substrate storage container 1 When the dimension of 1 is abnormal and defective, it blinks or displays a corresponding character to notify the reinspection or replacement of the substrate storage container 1.

  Further, when the lid body 10 is pressed and fitted by the lid body opening / closing mechanism to the open front surface of the container body 2, the load sensor 58 measures the pressing force, and the measurement value measured by the load sensor 58 is initially set. The pressing force is compared, the quality of the lid 10 of the substrate container 1 is inspected and inspected based on the comparison result, and the inspection and inspection result is transmitted to the wireless communication means 40. When the inspection / inspection device 50 inspects the quality of the lid 10 and the result is that the lid 10 is good, the notifying unit 70 does not notify, but the lid 10 is abnormal due to deterioration of the seal gasket or the front retainer. If the result is defective, the blinking or corresponding characters are displayed to notify the reinspection or replacement of the substrate storage container 1.

  Due to such notification of re-inspection or replacement of the substrate storage container 1, the container body 2 can be repaired to improve its quality or can be replaced with a new substrate storage container 1. Therefore, the quality of the substrate storage container 1 can be improved. A big drop can be expected.

  According to the above, the presence of abnormality in the performance or quality of the substrate storage container 1 is determined by the installation of the detection unit 30, the wireless communication unit 40, the inspection / inspection device 50, and the notification unit 70. There is no clear criterion for the replacement time, and even if there are individual differences in the replacement time, the replacement product can be easily selected, and the selection work of the replacement product can be simplified and speeded up. Further, since it becomes possible to accurately determine the replacement time of the substrate storage container 1, it becomes possible to manage the lifetime, and it is possible to expect great improvement in the work efficiency of the production process.

  Further, when the substrate storage container 1 is used so as to be circulated in the entire semiconductor manufacturing process, the replacement timing can be easily determined even if the usage history is different for each substrate storage container 1. Further, even when the substrate storage container 1 is used for each area of the semiconductor production process, it is not necessary to specifically set the criteria for determining the replacement timing of the substrate storage container 1 for each area, which is really convenient.

  Next, an embodiment in which the service providing unit 80 determines the performance and quality of the substrate storage container 1 instead of the inspection / inspection apparatus 50 will be described. In this case, the inspection / inspection device 50 records and accumulates the inspection / inspection content of the substrate storage container 1, and includes a service providing means 80 for analyzing the performance of the substrate storage container 1 from the inspection / inspection content. The notifying means 70 notifies the contents according to the analysis result of the substrate storage container 1 analyzed by.

  The wireless communication unit 40 is provided with an external input unit 41, a data recording unit 42, an arithmetic processing unit 43, a wireless communication unit 44, and a battery unit 46 as in the above embodiment, and the wireless communication unit 44 is an inspection / inspection device. Of the 50 and the service providing means 80, at least the service providing means 80 is communicably connected, and the analysis result analyzed by the service providing means 80 is received and recorded.

  The service providing unit 80 is composed of an external Internet server 81 or a large-capacity dedicated server 81 installed in the inspection / inspection device 50. The service providing means 80 has, for example, a large number of arithmetic cores, a large-capacity main memory, and various analysis software installed, and compares the performance and quality of the substrate container 1 with initial values based on the inspection and inspection contents of the inspection and inspection device 50. The detailed analysis is performed and the analysis result is recorded and transmitted to the wireless communication unit 44 of the wireless communication unit 40. The service providing unit 80 transmits / receives data to / from the arithmetic processing unit 43 of the wireless communication unit 40 as needed.

  In the above, the substrate storage container 1 is positioned and mounted on the load port device 52 of the inspection and inspection device 50 for inspection and inspection, and the locking mechanism of the lid 10 is unlocked by the operation key of the lid opening and closing mechanism of the load port device 52. After the operation, the lid 10 is sucked and removed by the lid opening / closing mechanism, and is inspected and inspected, the service providing means 80 causes the service providing means 80 to measure the values measured by the plurality of measurement sensors 56 and 56A of the inspection and inspection device 50. The performance and quality of the substrate storage container 1 are analyzed in detail from the measurement values measured by the torque sensor 57, the measurement values measured by a plurality of photoelectric sensors, and the measurement values measured by the load sensor 58, and the analysis results are recorded. The analysis result is transmitted to the wireless communication means 40.

  As a result of detailed analysis of the substrate storage container 1 by the service providing means 80, if the substrate storage container 1 is good, the notification means 70 does not give any notification, but the gas exhaust amount is reduced, the parts are worn, deteriorated or deformed. As a result, when the substrate storage container 1 is abnormal and defective, it blinks or displays a corresponding character to notify reinspection or replacement of the substrate storage container 1. The other parts are the same as those in the above-described embodiment, and thus the description thereof is omitted.

  In this embodiment, the same effect as the above embodiment can be expected, and if a server 81, particularly a large capacity server 81, is connected to the wireless communication means 40 and the inspection / inspection device 50 as the service providing means 80, the wireless communication means 40 can be obtained. It is possible to obtain an analysis capability superior to that of the inspection / inspection device 50, and it is possible to analyze the performance, quality, and replacement time of the substrate storage container 1 in more detail. In addition, the service providing unit 80 can transmit the performance and quality of the substrate storage container 1 analyzed in detail to the wireless communication unit 44 of the wireless communication unit 40, accumulate them, and use them effectively. Further, when the server 81 has analyzed the abnormality of the substrate storage container 1 in detail, the notification means 70 can prompt the replacement of the substrate storage container 1.

  Next, an embodiment will be described in which the performance and quality of the substrate storage container 1 is determined not by the number of times the lid 10 is opened and closed but by the acceleration. In this case, the detection means 30 is an acceleration sensor 35 attached to the bottom plate of the container body 2 of the substrate storage container 1 to detect the acceleration value thereof, and the acceleration sensor 35 is connected to the wireless communication means 40. (See Figure 3).

The acceleration sensor 35 includes a capacitance detection method, a piezo resistance method, a heat detection method, etc., but is not particularly limited.
In the wireless communication means 40, the acceleration value of the substrate storage container 1 from the detection means 30 is recorded in the data recording unit 42, and the arithmetic processing unit 43 records the acceleration value of the substrate storage container 1 in the data recording unit 42 and the substrate. When the acceleration value of the substrate storage container 1 is less than the inspection and inspection value of the substrate storage container 1, as a result of comparison with the inspection and inspection value of the storage container 1 and the comparison by the arithmetic processing unit 43, the substrate storage container 1 is still in use. Judge that it is not the time for inspection and inspection.

  On the other hand, when the acceleration value of the substrate storage container 1 becomes equal to or higher than the inspection / inspection value of the substrate storage container 1 due to the deterioration of the substrate storage container 1 or the like, it is determined that the inspection / inspection time of the substrate storage container 1 is reached. The relationship between the acceleration value of the substrate storage container 1 and the inspection / inspection value of the substrate storage container 1 is set in consideration of past usage records, experimental results, and the like.

  When it is judged that it is time for inspection and inspection, the substrate container 1 is positioned and mounted on the load port device 52 of the inspection and inspection device 50 and inspected and inspected. When the container main body 2 of the substrate storage container 1 is positioned and mounted on the load port device 52, a plurality of photoelectric sensors of the size measuring device 59 detect the size of the substrate storage container 1 and the presence or absence of deformation of the container main body 2 due to this dimensional change. The measured values measured by the plurality of photoelectric sensors 34 are compared with a size threshold value, and the quality of the substrate container 1 is inspected and inspected based on the comparison result, and the inspection and inspection result is transmitted to the wireless communication means 40. .

  If the inspection / inspection device 50 inspects the quality of the substrate storage container 1 and the result is that the substrate storage container 1 is good, the notification means 70 does not notify, but the substrate storage container 1 is abnormal and defective due to deformation or the like. In this case, blinking or display of corresponding characters is used to notify the reinspection or replacement of the substrate storage container 1. The other parts are the same as those in the above-described embodiment, and thus the description thereof is omitted.

  In this embodiment, the same effects as the above embodiment can be expected, and moreover, it is possible to grasp how much the initial performance of the substrate storage container 1 has deteriorated from the acceleration applied to the substrate storage container 1, and Obviously, it is possible to judge the performance, quality, and replacement time.

  Next, an embodiment will be described in which the performance and quality of the substrate storage container 1 is determined based on the number of times the substrate storage container 1 is conveyed, not the number of times the lid 10 is opened and closed. In this case, the detection means 30 is attached to the bottom plate of the container body 2 of the substrate storage container 1, and the acceleration of the detection means 30 determines the number of times the substrate storage container 1 is transported, the transport distance of the substrate storage container 1, and the top flange of the substrate storage container 1. 7 An acceleration sensor 35 for detecting an information value of at least one of the number of times of holding, the number of times of impact on the substrate storage container 1, the maximum impact value on the substrate storage container 1 and the maximum frequency of action on the substrate storage container 1. The acceleration sensor 35 is connected to the wireless communication means 40 (see FIG. 3).

  In the wireless communication means 40, the information value of the substrate storage container 1 from the detection means 30 is recorded in the data recording part 42, and the arithmetic processing part 43 records the information value of the substrate storage container 1 in the data recording part 42 and the substrate. When the information value of the substrate storage container 1 is less than the inspection and inspection value of the substrate storage container 1 as a result of comparison with the inspection and inspection value of the storage container 1 and the comparison by the arithmetic processing unit 43, the substrate storage container 1 is still in use. Judge that it is not the time for inspection and inspection. On the other hand, when the information value of the substrate storage container 1 becomes equal to or higher than the inspection / inspection value of the substrate storage container 1 due to damage of the substrate storage container 1 or the like, it is determined that the inspection / inspection time of the substrate storage container 1 is reached.

  When it is judged that it is time for inspection and inspection, the substrate container 1 is positioned and mounted on the load port device 52 of the inspection and inspection device 50 and inspected and inspected. When the container body 2 of the substrate storage container 1 is positioned and mounted on the load port device 52, the size of the substrate storage container 1 and the presence or absence of deformation of the substrate storage container 1 due to this dimensional change are determined by a plurality of photoelectric sensors of the size measuring device 59. The measurement values measured by the plurality of photoelectric sensors 34 are compared with a size threshold value, and the quality of the substrate storage container 1 is inspected and inspected based on the comparison result, and the inspection and inspection result is transmitted to the wireless communication means 40. It

  If the inspection / inspection device 50 inspects the quality of the substrate storage container 1 and the result is that the substrate storage container 1 is good, the notification means 70 does not notify, but the substrate storage container 1 is abnormal and defective due to deformation or the like. In this case, blinking or display of corresponding characters is used to notify the reinspection or replacement of the substrate storage container 1. The other parts are the same as those in the above-described embodiment, and thus the description thereof is omitted.

  In the present embodiment, the same effects as the above-described embodiment can be expected, and moreover, the number of times the substrate storage container 1 is transported, the distance that the substrate storage container 1 is transported, the number of times the top flange 7 of the substrate storage container 1 is held, and the substrate storage container 1 It is obvious that the performance, quality, and replacement time of the substrate storage container 1 can be determined from the number of impacts on the substrate storage container 1, the maximum impact value on the substrate storage container 1, or the maximum frequency on the substrate storage container 1. is there.

  Next, an embodiment in which the performance and quality of the substrate storage container 1 are determined based on the number of heat shocks of the substrate storage container 1 rather than the number of times the lid 10 is opened and closed will be described. In this case, the detection means 30 stores the heated semiconductor wafer W (hot wafer) in the substrate storage container 1 and measures the temperature at the time of heat shock when a heat shock occurs at about 100 ° C. A temperature sensor 36 for detecting the number of heat shocks of the substrate storage container 1 is used, and the temperature sensor 36 is connected to the wireless communication means 40 (see FIG. 3).

  The temperature sensor 36 is of a contact type, a non-contact type, an electric type, a mechanical type, or the like, and is installed inside the container body 2 that does not hinder the storage of the semiconductor wafer W, for example, near the back wall behind the inside. .

  In the wireless communication unit 40, the number of heat shocks from the detection unit 30 is recorded in the data recording unit 42, and the number of heat shocks recorded in the data recording unit 42 by the arithmetic processing unit 43 and the inspection and inspection value of the substrate storage container 1 are recorded. If the number of heat shocks is less than the inspection / inspection value of the substrate storage container 1 as a result of comparison by the arithmetic processing unit 43, it is determined that the substrate storage container 1 is not yet in the inspection / inspection time. On the other hand, as a result of comparison, if the number of heat shocks is equal to or greater than the inspection / inspection value of the substrate storage container 1, it is determined that the inspection / inspection time of the substrate storage container 1 is reached.

  When it is judged that it is time for inspection and inspection, the substrate container 1 is positioned and mounted on the load port device 52 of the inspection and inspection device 50 and inspected and inspected. When the container main body 2 of the substrate storage container 1 is positioned and mounted on the load port device 52, the size of the container main body 2, the presence or absence of deformation of the container main body 2 due to this dimensional change, and the support position of the semiconductor wafer W are measured by the size measuring device 59. Of the photoelectric sensors 34, and the measurement values measured by the photoelectric sensors 34 are compared with a size threshold value, and the quality of the substrate storage container 1 is inspected and inspected based on the comparison result, and the inspection and inspection result is wirelessly communicated. Is transmitted to the means 40.

  As a result of the inspection and inspection device 50 inspecting the quality of the container body 2, if the container body 2 is good, the notification means 70 does not notify, but if the container body 2 is defective due to deformation or the like, it blinks. Or the corresponding character is displayed to notify the re-inspection or replacement of the substrate storage container 1. The other parts are the same as those in the above-described embodiment, and thus the description thereof is omitted.

  In this embodiment, the same effects as those of the above embodiment can be expected, and moreover, the performance and quality of the substrate storage container 1 can be judged from the heat shock when the heated semiconductor wafer W is stored in the substrate storage container 1. You can

  Next, an embodiment in which the performance and quality of the substrate storage container 1 are determined based on the number of times the substrate storage container 1 is washed will be described. In this case, when the substrate storage container 1 is washed with cleaning water and heat-dried at about 60 ° C., the detection means 30 is washed to measure the drying temperature of the substrate storage container 1. A temperature sensor 36 for detecting the number of times is used, and the temperature sensor 36 is connected to the wireless communication means 40 (see FIG. 3).

  The temperature sensors 36 are installed on the container body 2 of the substrate housing container 1 and the outer surfaces of the lid body 10, respectively. The temperature measured by the temperature sensor 36 is set in consideration of the cleaning conditions and the drying conditions of the substrate storage container 1. Further, in the wireless communication means 40, the number of times of cleaning the substrate storage container 1 from the detection means 30 is recorded in the data recording unit 42, and the number of cleanings of the substrate storage container 1 recorded in the data recording unit 42 by the arithmetic processing unit 43. And the inspection / inspection value of the substrate storage container 1 are compared with each other, and as a result of comparison in the arithmetic processing unit 43, if the number of cleanings of the substrate storage container 1 is less than the inspection / inspection value of the substrate storage container 1, the substrate storage container 1 Judge that it is not the time for inspection and inspection.

  On the other hand, as a result of comparison, if the number of times the substrate storage container 1 has been washed exceeds the inspection / inspection value of the substrate storage container 1, it is determined that the inspection / inspection time of the substrate storage container 1 is reached. The number of times of cleaning the substrate storage container 1 is set in consideration of the cleaning condition and the drying condition of the substrate storage container 1.

  When it is judged that it is time for inspection and inspection, the substrate container 1 is positioned and mounted on the load port device 52 of the inspection and inspection device 50 and inspected and inspected. When the container body 2 of the substrate storage container 1 is positioned and mounted on the load port device 52, the size of the substrate storage container 1 and the presence or absence of deformation of the substrate storage container 1 due to this dimensional change are determined by a plurality of photoelectric sensors of the size measuring device 59. The measurement values measured by the plurality of photoelectric sensors 34 are compared with a size threshold value, and the quality of the substrate storage container 1 is inspected and inspected based on the comparison result, and the inspection and inspection result is transmitted to the wireless communication means 40. It

As a result of the inspection / inspection device 50 inspecting the quality of the substrate storage container 1, if the substrate storage container 1 is good, the notifying unit 70 does not notify, but if the substrate storage container 1 is defective due to deformation or the like, Indicates the re-inspection or replacement of the substrate storage container 1 by blinking or displaying corresponding characters. The other parts are the same as those in the above-described embodiment, and thus the description thereof is omitted.
In this embodiment as well, the same effects as the above embodiments can be expected, and the performance and quality of the substrate storage container 1 can be determined from the number of times of cleaning the substrate storage container 1.

  Next, an embodiment in which the performance and quality of the substrate storage container 1 are determined based on the levelness of the substrate storage container 1 will be described. In this case, the detecting means 30 is an inclination sensor for detecting the levelness of the substrate storage container 1 when the substrate storage container 1 is positioned and mounted on the positioning pin 21 on the load port device 52 via the positioning tool 6. 37, the inclination sensor 37 is connected to the wireless communication means 40 (see FIG. 3).

  As the inclination sensor 37, a type using bubbles or pendulums, a type using potentiometers or magnetism, a type using inclination of an electrolytic solution, or the like is used, and is attached to the bottom plate or bottom plate of the container body 2 in a highly accurate horizontal state. To be done.

  In the wireless communication unit 40, the horizontal value of the substrate storage container 1 from the detection unit 30 is recorded in the data recording unit 42, and the horizontal value of the substrate storage container 1 and the substrate recorded in the data recording unit 42 by the arithmetic processing unit 43. When the horizontal value of the substrate storage container 1 is less than the inspection and inspection value of the substrate storage container 1 as a result of comparison with the inspection and inspection value of the storage container 1 and the comparison by the arithmetic processing unit 43, the substrate storage container 1 is still in use. Judge that it is not the time for inspection and inspection. On the other hand, as a result of comparison, when the horizontal value of the substrate storage container 1 approaches the inspection / inspection value of the substrate storage container 1 or exceeds the inspection / inspection value of the substrate storage container 1, the positioning tool 6 is worn. Thus, it is determined that it is time to inspect and inspect the substrate storage container 1.

  When it is judged that it is time for inspection and inspection, the substrate container 1 is positioned and mounted on the load port device 52 of the inspection and inspection device 50 and inspected and inspected. When the container body 2 of the substrate storage container 1 is positioned and mounted on the load port device 52, the dimensions of the substrate storage container 1, the presence or absence of deformation of the substrate storage container 1 due to this dimensional change, and the position of the support piece 3 are measured. 59 photoelectric sensors 34 measure, and the photoelectric sensors 34 measure the measured values are compared with a size threshold value. Based on the comparison result, the quality of the substrate storage container 1 is inspected and inspected. It is transmitted to the communication means 40.

As a result of the inspection and inspection device 50 inspecting the quality of the substrate storage container 1, if the substrate storage container 1 is good, the notifying unit 70 does not notify, but due to deformation or damage of the positioning tool 6, the substrate storage container 1 When 1 is defective, it blinks or displays a corresponding character to notify the reinspection or replacement of the substrate storage container 1. The other parts are the same as those in the above-described embodiment, and thus the description thereof is omitted.
In the present embodiment, the same effect as the above embodiment can be expected, and further, the performance and quality of the substrate storage container 1 is judged from the levelness of the substrate storage container 1 to prevent the inclination when the substrate storage container 1 is mounted. It becomes possible.

  Next, an embodiment in which the performance and quality of the substrate storage container 1 are judged based on the oxygen concentration in the substrate storage container 1 will be described. In this case, as shown in FIGS. 3 and 6, the detecting means 30 is used to detect the oxygen concentration in the substrate storage container 1 at regular intervals when the semiconductor wafer W is stored in the substrate storage container 1. The oxygen concentration sensor 38 is incorporated in the container body 2 together with the wireless communication means 40.

  The container body 2 of the substrate storage container 1 stores the semiconductor wafer W during or after the processing of the metal wiring. Purge gas cylinders 13 for storing a purge gas such as nitrogen gas are respectively provided upright on both inner rear sides of the container body 2, and the purge gas cylinders 13 are provided on the pair of air supply valves 5 from the viewpoint of contributing to the flow control of the purge gas. Hollow cylindrical purge nozzles 14 that communicate with each other are erected so as to communicate with each other. A plurality of injection holes 15 that diffuse and inject the purge gas to the front inside the container body 2 are provided on the peripheral wall of each purge nozzle 14 in the vertical direction. Perforated side by side.

  The oxygen concentration sensor 38 is installed inside the container body 2 that does not hinder the storage of the semiconductor wafers W, specifically, near the back wall, and is used when the substrate storage container 1 is transported, stored, and inspected. To be done. The oxygen concentration sensor 38 includes a galvanic cell type, a zirconia solid electrolyte type, a magnetic type, and a wavelength tunable semiconductor laser spectroscopic type, but is not particularly limited.

  The substrate container 1 is positioned and mounted on the load port device 52 of the inspection / inspection device 50. The load port device 52 of the inspection / inspection device 50 includes a valve unit 53, a plurality of measurement sensors 56 / 56A, and a torque sensor 57. In addition to the load sensor 58, a plurality of purge gas cylinders 13 of the container body 2 are each provided with a filling unit for filling the purge gas. By filling the filling units, it is possible to prevent the purge gas cylinder 13 from running out of the purge gas. .

  In the wireless communication unit 40, the oxygen concentration value in the substrate storage container 1 from the detection unit 30 is recorded in the data recording unit 42, and the oxygen in the substrate storage container 1 is recorded in the data recording unit 42 by the arithmetic processing unit 43. When the concentration value and the inspection / inspection value of the substrate storage container 1 are compared with each other and the oxygen concentration value in the substrate storage container 1 is not close to the inspection / inspection value of the substrate storage container 1, as a result of the comparison in the arithmetic processing unit 43. Judges that the substrate storage container 1 has not yet reached the inspection and inspection time. On the other hand, as a result of comparison, if the oxygen concentration value in the substrate storage container 1 approaches the inspection / inspection value of the substrate storage container 1 or exceeds the inspection / inspection value of the substrate storage container 1, the container body 2 It is determined that it is time to inspect and inspect the substrate storage container 1 due to abnormality or deterioration of the above.

  As a result of the comparison made by the arithmetic processing unit 43 of the wireless communication means 40, the notification means 70 does not notify if the substrate storage container 1 is not yet the inspection / inspection time, but if the substrate storage container 1 is at the inspection / inspection time, The board storage container 1 is inspected, the preparation for replacement is made, or the replacement is notified.

  Further, in the purge gas cylinder 13, as a result of comparison by the arithmetic processing unit 43 of the wireless communication means 40, the oxygen concentration value in the substrate storage container 1 approaches the inspection and inspection value of the substrate storage container 1, or the inspection of the substrate storage container 1 is performed. When the value exceeds the inspection value, it is determined that the substrate storage container 1 is abnormal, the purge gas is supplied to the lower portion of the purge nozzle 14, and the purge gas is diffused and ejected from each of the plurality of ejection holes 15 of the purge nozzle 14. .

  When it is judged that it is time for inspection and inspection, the substrate container 1 is positioned and mounted on the load port device 52 of the inspection and inspection device 50 and inspected and inspected. When the container body 2 of the substrate storage container 1 is positioned and mounted on the load port device 52, the size of the substrate storage container 1 and the presence or absence of deformation of the substrate storage container 1 due to this dimensional change are determined by a plurality of photoelectric sensors of the size measuring device 59. Measured by the photoelectric sensors 34, and the measured values measured by the plurality of photoelectric sensors 34 are compared with a size threshold value, and the quality of the substrate container 1 is inspected and inspected based on the comparison result.

  At this time, the filling unit of the load port device 52 respectively fills the plurality of purge gas cylinders 13 of the container body 2 with purge gas. The other parts are the same as those in the above-described embodiment, and thus the description thereof is omitted.

  In the present embodiment, the same effect as the above embodiment can be expected, and further, the performance, quality, and replacement time of the substrate storage container 1 can be determined from the oxygen concentration value in the container body 2 of the substrate storage container 1. . Further, when the oxygen concentration value in the container body 2 is abnormal, the purge gas is supplied from the purge nozzle 14 into the container body 2, so that the deterioration of the atmosphere in the container body 2 can be effectively prevented, and the semiconductor wafer W It is possible to greatly contribute to the improvement of the yield of the semiconductor chips formed in the above.

  The detecting means 30 in the above embodiment is attached to the lower part of the back wall of the container body 2 to project and project light rays horizontally toward the lower part of the lid body 10, and the lid body of the lid body 10. A retroreflective photoelectric sensor 34, which is mounted on the lower part of the back surface of the backside 11 and is capable of reflecting the light beam from the light emitting / receiving element 32 for the lid to the light emitting / receiving element 32 for the lid, is a photoelectric sensor 34 of the retroreflective type, and wireless communication means You may connect to 40.

  Further, the detecting means 30 is attached to the front peripheral portion of the container body 2, and the light projecting / receiving element for the lid body projects the light beam in the peripheral wall direction of the lid body 10 through the minute transmission holes in the front peripheral portion of the container body 2. And a return reflection plate 33 mounted on the peripheral wall of the lid body 10 and capable of reflecting the light beam from the lid body light emitting and receiving element 32 to the lid body light emitting and receiving element 32 through a minute transmission hole. Alternatively, the number of times the lid 10 is opened and closed may be detected by measuring the number of times that the lid light projecting / receiving element 32 cannot receive light because the lid 10 is removed.

  Further, regardless of the presence / absence of the inspection / inspection device 50 or the service providing means 80, the notification means 70 determines that the substrate storage container 1 is not yet in the inspection / inspection time as a result of comparison by the arithmetic processing unit 43 of the wireless communication means 40. When it is determined that it is time to inspect and inspect the substrate storage container 1, the inspection, replacement, or preparation for replacement of the substrate storage container 1 may be notified.

  Regarding the inspection / inspection device 50 and the server 81, an external input unit 41 for inputting the detection value from the detection unit 30 and a data recording unit 42 for recording the detection value of the detection unit 30 and the threshold value for the substrate storage container 1. An arithmetic processing unit 43 that compares a detection value of the detection unit 30 with a threshold value related to the substrate storage container 1 and stores a detection signal in the data recording unit 42, and a wireless communication unit 44 that communicates with an external communication device. Can be configured into different structures.

  Then, similar to the wireless communication means 40, the function of comparing the number of times of opening and closing of the lid 10 recorded in the data recording unit 42 with the threshold value of the number of times of opening and closing of the lid 10, the comparison result shows that the number of times of opening and closing of the lid 10 is the lid. When the open / close frequency threshold of 10 is not approached, the function of judging that the substrate storage container 1 is not at the limit of use is compared, and as a result of comparison, when the open / close frequency of the lid 10 approaches the open / close frequency threshold of the lid 10. Is a function of determining that the use limit of the substrate storage container 1 is close, and as a result of comparison, when the number of times the lid 10 is opened and closed exceeds the threshold of the number of times the lid 10 is opened and closed, the use limit of the substrate storage container 1 is reached. It is possible to realize the function of determining that the number has been exceeded and to notify the notification means 70.

  The substrate storage container, the management system therefor, and the substrate storage container management method according to the present invention are used in the field of manufacturing a substrate storage container for storing a substrate such as a semiconductor wafer.

1 Substrate Storage Container 2 Container Body 3 Supporting Piece 5 Air Supply Valve 6 Positioning Tool (Positioning Mechanism)
7 Top flange (flange)
10 Lid 13 Purge gas cylinder (gas source)
14 Purge nozzle (nozzle)
15 Injection Hole 20 Peripheral Related Device 21 Positioning Pin 22 Ceiling Transfer Device 25 Grasping Mechanism 30 Detecting Unit 31 Substrate Emitter / Receiver Element 32 Cover Emitter / Receiver Element 33 Retroreflective Plate 34 Photoelectric Sensor 35 Accelerometer 36 Temperature Sensor 37 Tilt Sensor 38 Oxygen concentration sensor 40 Wireless communication means 41 External input section 42 Data recording section 43 Calculation processing section 44 Wireless communication section 45 Antenna 46 Battery section 50 Inspection and inspection device (external communication device)
51 alignment pin 52 load port device (external communication device)
53 valve unit 56 measurement sensor 56A measurement sensor 57 torque sensor 58 load sensor 59 dimension measurement device 70 notification means 71 LED
80 Service providing means 81 Server (external communication device)
W semiconductor wafer (substrate)

Claims (8)

The board storage container, the detection means provided in the board storage container to detect the usage state thereof, the wireless communication means provided in the board storage container to determine the inspection / inspection time, and the board storage container at the inspection / inspection time An inspection / inspection device for inspecting and inspecting, and an informing device for informing the contents depending on either the result of the inspection / inspection time of the substrate storage container by the wireless communication means or the inspection / inspection result of the substrate storage container by the inspection / inspection device. A management system for a board storage container, which is provided with access to a predetermined related peripheral device,
The substrate storage container includes a container body capable of storing a substrate, and a lid body that closes an open front surface of the container body in a sealed state,
The detecting means is attached to the container body of the substrate storage container and projects the light beam for the lid to project the light beam toward the lid body, and is mounted to the lid body to project the light beam from the light projecting and receiving element for the lid body to the lid body. A photoelectric sensor that includes a retroreflective member capable of reflecting the light-receiving element, detects the number of times of opening and closing the lid by measuring the time when the lid light projecting / receiving element cannot receive the reflected light from the retroreflective member,
The wireless communication means inputs the number of times of opening and closing of the lid from the detecting means to an external input unit and records it in the data recording unit, and records the number of times of opening and closing of the lid and the inspection and inspection value of the lid recorded in the data recording unit. When the number of times the lid is opened and closed is equal to or greater than the inspection and inspection value of the lid, the board storage container is determined to be in the inspection and inspection time.
The management system for a substrate storage container, wherein the notifying unit notifies the contents according to the inspection and inspection result of the substrate storage container when the wireless communication unit receives the inspection and inspection result of the inspection and inspection device. The board storage container, the detection means provided in the board storage container to detect the usage state thereof, the wireless communication means provided in the board storage container to determine the inspection / inspection time, and the board storage container at the inspection / inspection time An inspection / inspection device for inspecting and inspecting, and an informing device for informing the contents depending on either the result of the inspection / inspection time of the substrate storage container by the wireless communication means or the inspection / inspection result of the substrate storage container by the inspection / inspection device. A management system for a board storage container, which is provided with access to a predetermined related peripheral device,
The substrate storage container includes a container body capable of storing a substrate, and a lid body that closes an open front surface of the container body in a sealed state,
The detection means is a temperature sensor that detects the number of heat shocks of the substrate storage container by measuring the temperature at the time of heat shock when a heated substrate is stored in the substrate storage container and a heat shock occurs.
The wireless communication means inputs the number of heat shocks from the detection means to an external input unit and records it in a data recording unit, and calculates the number of heat shocks recorded in this data recording unit and the inspection and inspection value of the substrate storage container. If the number of heat shocks is equal to or greater than the inspection and inspection value of the substrate storage container as a result of comparison by this arithmetic processing unit, it is determined that the substrate storage container is in the inspection and inspection time,
The management system for a substrate storage container, wherein the notifying unit notifies the contents according to the inspection and inspection result of the substrate storage container when the wireless communication unit receives the inspection and inspection result of the inspection and inspection device . The board storage container, the detection means provided in the board storage container to detect the usage state thereof, the wireless communication means provided in the board storage container to determine the inspection / inspection time, and the board storage container at the inspection / inspection time An inspection / inspection device for inspecting and inspecting, and an informing device for informing the contents depending on either the result of the inspection / inspection time of the substrate storage container by the wireless communication means or the inspection / inspection result of the substrate storage container by the inspection / inspection device. A management system for a board storage container, which is provided with access to a predetermined related peripheral device,
The substrate storage container includes a container body capable of storing a substrate, and a lid body that closes an open front surface of the container body in a sealed state,
The detection means is a temperature sensor that detects the number of times the substrate storage container is washed by measuring the drying temperature of the substrate storage container when the substrate storage container is washed and thermally dried.
The wireless communication means inputs the number of times of cleaning the substrate storage container from the detection means to the external input unit and records it in the data recording unit, and the number of cleanings of the substrate storage container recorded in this data recording unit and the inspection of the substrate storage container. If the number of cleanings of the substrate storage container exceeds the inspection and inspection value of the substrate storage container as a result of comparison with the inspection value in the arithmetic processing unit Judge that there is,
The management system for a substrate storage container, wherein the notifying unit notifies the contents according to the inspection and inspection result of the substrate storage container when the wireless communication unit receives the inspection and inspection result of the inspection and inspection device . The board storage container, the detection means provided in the board storage container to detect the usage state thereof, the wireless communication means provided in the board storage container to determine the inspection / inspection time, and the board storage container at the inspection / inspection time An inspection / inspection device for inspecting and inspecting, and an informing device for informing the contents depending on either the result of the inspection / inspection time of the substrate storage container by the wireless communication means or the inspection / inspection result of the substrate storage container by the inspection / inspection device. A management system for a board storage container, which is provided with access to a predetermined related peripheral device,
The substrate storage container includes a container body capable of storing a substrate, and a lid body that closes an open front surface of the container body in a sealed state,
The detection means is an inclination sensor that detects the levelness of the substrate storage container when the substrate storage container is positioned and mounted on a predetermined related peripheral device,
The wireless communication means inputs the horizontal value of the substrate storage container from the detection means into the external input unit and records it in the data recording unit, and the horizontal value of the substrate storage container recorded in this data recording unit and the inspection of the substrate storage container. If the horizontal value of the substrate storage container approaches at least the inspection and inspection value of the substrate storage container as a result of comparison with the inspection value in the arithmetic processing unit and this arithmetic processing unit, the substrate storage container Judge that there is,
A management system for a substrate storage container, wherein the notifying means notifies the contents according to the inspection and inspection result or the analysis result of the substrate storage container when the wireless communication means receives the inspection and inspection result of the inspection and inspection device. The substrate storage container is provided with a plurality of supporting pieces that support a plurality of substrates in a substantially horizontal direction on opposite sides of the inside of the container body, and is positioned at a lower portion of the container body by accessing a predetermined peripheral device. A positioning mechanism is provided, the container body is provided with a flange for accessing and holding a predetermined related peripheral device, and the lid body is provided with a rotation operation member by an access from the predetermined related peripheral device. 5. The substrate storage container management system according to claim 1, further comprising a locking mechanism that locks a lid body fitted on the front surface of the container body by rotating . At the bottom of the container body of the substrate storage container, an air supply valve capable of supplying gas from the outside of the container body to the inside and an exhaust valve capable of exhausting gas from the inside of the container body to the outside are respectively provided. A gas source is provided, and a nozzle connected to the gas source is provided upright on the air supply valve, and a plurality of injection holes for injecting gas into the container body are bored in a peripheral wall of the nozzle. The management system for a substrate storage container according to claim 1 . The inspection / inspection device accesses the positioning mechanism of the container body of the substrate storage container, positions and mounts it, and measures the dimensions of the load port device that attaches and detaches the lid on the front of the container body by the lid opening and closing mechanism and the substrate storage container. And a dimension measuring device to
The load port device is a valve unit that is connected to an air supply valve and an exhaust valve of the container body to allow gas to flow in and out of the container body, and a plurality of measurement sensors that measure the flow rate of gas flowing through the valve unit, A torque sensor that measures the rotational torque of the rotating operation member of the locking mechanism, a load sensor that measures the pressing force when the lid body is pressed and attached to the front of the container body, and the gas source of the container body is filled with gas. 7. The substrate storage container management system according to claim 6, further comprising a filling unit . A substrate storage container management method using the substrate storage container management system according to claim 1.
The use state of the substrate storage container is detected by the detection means, and the detection value of this detection means and the inspection / inspection value regarding the substrate storage container are compared by the wireless communication means, and the inspection / inspection time of the substrate storage container is determined based on the comparison result. When it is determined that the board storage container is in the inspection and inspection period, the board storage container is inspected and inspected by the inspection and inspection device, and the inspection and inspection result of the board storage container by this inspection and inspection device is transmitted to the wireless communication means. Of the substrate storage container by the wireless communication means, and the content according to the result of the inspection / inspection time judgment of the substrate storage container by the wireless communication means or the inspection / inspection result of the substrate storage container by the inspection / inspection device is notified by the notification means. Management method.