JP2017172019A - プラズマ処理装置 - Google Patents
プラズマ処理装置 Download PDFInfo
- Publication number
- JP2017172019A JP2017172019A JP2016061509A JP2016061509A JP2017172019A JP 2017172019 A JP2017172019 A JP 2017172019A JP 2016061509 A JP2016061509 A JP 2016061509A JP 2016061509 A JP2016061509 A JP 2016061509A JP 2017172019 A JP2017172019 A JP 2017172019A
- Authority
- JP
- Japan
- Prior art keywords
- cylindrical electrode
- shield
- spacer
- opening
- gap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
- H01J37/32633—Baffles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0068—Reactive sputtering characterised by means for confinement of gases or sputtered material, e.g. screens, baffles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0073—Reactive sputtering by exposing the substrates to reactive gases intermittently
- C23C14/0078—Reactive sputtering by exposing the substrates to reactive gases intermittently by moving the substrates between spatially separate sputtering and reaction stations
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32513—Sealing means, e.g. sealing between different parts of the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32541—Shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32559—Protection means, e.g. coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
- H01J37/32651—Shields, e.g. dark space shields, Faraday shields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
- H01J37/32761—Continuous moving
- H01J37/32779—Continuous moving of batches of workpieces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32899—Multiple chambers, e.g. cluster tools
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
- H01J37/3417—Arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02299—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment
- H01L21/02312—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment treatment by exposure to a gas or vapour
- H01L21/02315—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment treatment by exposure to a gas or vapour treatment by exposure to a plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
- Physical Vapour Deposition (AREA)
- General Chemical & Material Sciences (AREA)
Abstract
【解決手段】プラズマ処理装置は、開口部11が設けられた一端である下端と、閉塞された他端である上端を有し、内部にプロセスガスが導入され、電圧が印加されることによって当該プロセスガスをプラズマ化させる筒形電極10と、開口1aを有する真空容器であるチャンバ1を備え、上端が開口1aに絶縁部材22を介して取り付けられた筒形電極10が、チャンバ1の内部に延在する。プラズマ処理装置は、また、プロセスガスによって処理されるワークWを、筒形電極10の開口部11の下に搬送する搬送部である回転テーブル3と、真空容器の内部に延在する筒形電極10を、隙間dを介して覆うシールド13と、筒形電極10とシールド13の隙間dに設置され、絶縁材料で構成されたスペーサ30と、を備える。
【選択図】図3
Description
本発明の実施形態について、図面を参照して具体的に説明する。
本実施形態のプラズマ処理装置の動作と、スペーサ30の作用を説明する。ロードロック室から未処理のワークWをチャンバ1に搬入する。搬入したワークWは、回転テーブル3の保持部3aによって保持される。チャンバ1の内部は、排気部2によって排気されて真空状態にされている。回転テーブル3を駆動することにより、ワークWを搬送路Pに沿って搬送して、各処理ユニット4a〜4gの下を通過させる。
平行板のアノード−カソードから構成されるコンデンサにおいて、板間距離がk[m]、各平行板の面積がS[m2]である場合に、静電容量C[F]は以下の式(1)により求めることができる。
上述したように、本実施形態のプラズマ処理装置は、開口部11が設けられた一端である下端と、閉塞された他端である上端を有し、内部にプロセスガスが導入され、電圧が印加されることによって当該プロセスガスをプラズマ化させる筒形電極10と、開口1aを有する真空容器であるチャンバ1を備え、チャンバ1の開口1aに上端が絶縁部材22を介して取り付けられた筒形電極10がチャンバ1の内部に延在する。プラズマ処理装置は、また、プロセスガスによって処理されるワークWを、筒形電極10の開口部11の下に搬送する搬送部である回転テーブル3と、真空容器の内部に延在する筒形電極10を、隙間dを介して覆うシールド13と、筒形電極10とシールド13の隙間dの一部に設置され、絶縁材料で構成されたスペーサ30と、を備える。
(1)本発明は、上記の実施形態に限定されるものではない。たとえば、上述の実施形態では、膜処理において後酸化を行ったが、エッチング処理や窒化処理を行っても良い。エッチング処理の場合は、膜処理ユニット4eにアルゴンガスを導入し、窒化処理の場合は膜処理ユニット4eに窒素ガスを導入すると良い。
1a 開口
2 排気部
3 回転テーブル(搬送部)
3a 保持部
3b 回転軸
4a,4b,4c,4d,4f,4g 処理ユニット(成膜ユニット)
4e 処理ユニット(膜処理ユニット)
5 ロードロック部
6 ターゲット
7 DC電源
8 スパッタガス導入部
9 隔壁
10 筒形電極
10a フランジ
11 開口部
12 ハウジング
13 シールド
15 RF電源
16 プロセスガス導入部
20 制御部
21 マッチングボックス
22 絶縁部材
30 スペーサ
30a,30b,30c,30d 側面
31 ボルト穴
32 ボルト
33 傾斜部
P 搬送路
W ワーク
d 隙間
Claims (8)
- 開口部が設けられた一端と閉塞された他端を有し、内部にプロセスガスが導入され、電圧が印加されることによって当該プロセスガスをプラズマ化させる筒形電極と、
開口を有し、当該開口に前記他端が絶縁部材を介して取り付けられた前記筒形電極が内部に延在する真空容器と、
前記プロセスガスによって処理されるワークを、前記筒形電極の開口部の下に搬送する搬送部と、
前記真空容器に接続し、前記真空容器の内部に延在する前記筒形電極を隙間を介して覆うシールドと、
絶縁材料で構成され、前記筒形電極と前記シールドの隙間の一部に設置されたスペーサと、
を備えたことを特徴とするプラズマ処理装置。 - 前記スペーサはブロック形状であることを特徴とする請求項1記載のプラズマ処理装置。
- 前記スペーサは、前記筒形電極と対向する面及び前記シールドと対向する面の面積が1〜3cm2であることを特徴とする請求項2記載のプラズマ処理装置。
- 前記スペーサは、前記筒形電極と対向する面の、前記真空容器の前記開口側に位置する角に、前記シールド側に傾斜した傾斜部を有することを特徴とする請求項2又は3記載のプラズマ処理装置。
- 前記スペーサは、絶縁材料で構成されたボルトで前記シールドに固定されることを特徴とする請求項1〜4のいずれか一項に記載のプラズマ処理装置。
- 前記スペーサは、前記筒形電極の一端の近傍に設置されることを特徴とする請求項1〜5のいずれか一項に記載のプラズマ処理装置。
- 前記スペーサは、前記筒形電極の一端の近傍、他端の近傍、及び一端と他端の中間付近に設置されることを特徴とする請求項1〜5のいずれか一項に記載のプラズマ処理装置。
- 前記筒形電極及び前記シールドは角筒状であり、前記スペーサは、前記筒形電極及び前記シールドの対向する隙間にそれぞれ設置されることを特徴とする請求項1〜7のいずれか一項に記載のプラズマ処理装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016061509A JP6629116B2 (ja) | 2016-03-25 | 2016-03-25 | プラズマ処理装置 |
KR1020170029543A KR101962531B1 (ko) | 2016-03-25 | 2017-03-08 | 플라즈마 처리 장치 |
CN201710148321.XA CN107230608B (zh) | 2016-03-25 | 2017-03-13 | 等离子体处理装置 |
TW106109641A TWI634586B (zh) | 2016-03-25 | 2017-03-23 | Plasma processing device |
US15/467,602 US20170275761A1 (en) | 2016-03-25 | 2017-03-23 | Plasma processing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016061509A JP6629116B2 (ja) | 2016-03-25 | 2016-03-25 | プラズマ処理装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019200381A Division JP2020029621A (ja) | 2019-11-05 | 2019-11-05 | プラズマ処理装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2017172019A true JP2017172019A (ja) | 2017-09-28 |
JP2017172019A5 JP2017172019A5 (ja) | 2019-01-24 |
JP6629116B2 JP6629116B2 (ja) | 2020-01-15 |
Family
ID=59897754
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016061509A Active JP6629116B2 (ja) | 2016-03-25 | 2016-03-25 | プラズマ処理装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20170275761A1 (ja) |
JP (1) | JP6629116B2 (ja) |
KR (1) | KR101962531B1 (ja) |
CN (1) | CN107230608B (ja) |
TW (1) | TWI634586B (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019167618A (ja) * | 2018-03-22 | 2019-10-03 | 芝浦メカトロニクス株式会社 | 真空処理装置及びトレイ |
JP2020050907A (ja) * | 2018-09-26 | 2020-04-02 | 芝浦メカトロニクス株式会社 | 成膜装置 |
JP2020050939A (ja) * | 2018-09-28 | 2020-04-02 | 芝浦メカトロニクス株式会社 | 成膜装置及び成膜製品の製造方法 |
JP2022519663A (ja) * | 2019-02-06 | 2022-03-24 | エヴァテック・アーゲー | イオンを生成する方法および装置 |
WO2023021856A1 (ja) * | 2021-08-18 | 2023-02-23 | 株式会社Screenホールディングス | 基板処理装置 |
WO2023171313A1 (ja) * | 2022-03-07 | 2023-09-14 | Agc株式会社 | 遠赤外線透過部材及び遠赤外線透過部材の製造方法 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7141989B2 (ja) * | 2018-09-28 | 2022-09-26 | 芝浦メカトロニクス株式会社 | 成膜装置 |
US11505866B2 (en) * | 2019-04-25 | 2022-11-22 | Shibaura Mechatronics Corporation | Film formation apparatus and film formation method |
US11545347B2 (en) * | 2020-11-05 | 2023-01-03 | Applied Materials, Inc. | Internally divisible process chamber using a shutter disk assembly |
JP2022155711A (ja) * | 2021-03-31 | 2022-10-14 | 芝浦メカトロニクス株式会社 | 成膜装置 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5144759B2 (ja) * | 1972-11-01 | 1976-11-30 | ||
JPS56152973A (en) * | 1980-04-30 | 1981-11-26 | Tokuda Seisakusho Ltd | Sputter etching device |
JPH065522A (ja) * | 1992-06-17 | 1994-01-14 | Mitsubishi Heavy Ind Ltd | 高周波プラズマcvd装置 |
US5264256A (en) * | 1992-09-08 | 1993-11-23 | Xerox Corporation | Apparatus and process for glow discharge comprising substrate temperature control by shutter adjustment |
TW299559B (ja) * | 1994-04-20 | 1997-03-01 | Tokyo Electron Co Ltd | |
JPH11120949A (ja) * | 1997-10-13 | 1999-04-30 | Nissin Electric Co Ltd | イオンビーム照射装置 |
JP4428873B2 (ja) | 2001-02-28 | 2010-03-10 | 芝浦メカトロニクス株式会社 | スパッタリング装置 |
JP4482308B2 (ja) * | 2002-11-26 | 2010-06-16 | 東京エレクトロン株式会社 | プラズマ処理装置及びプラズマ処理方法 |
JP2004323965A (ja) * | 2003-04-28 | 2004-11-18 | Canon Inc | ラジカル発生方法及び同装置 |
CN100398693C (zh) * | 2005-08-11 | 2008-07-02 | 孙卓 | 多功能复合磁控等离子体溅射装置 |
KR101687565B1 (ko) * | 2009-03-30 | 2016-12-19 | 도쿄엘렉트론가부시키가이샤 | 플라즈마 처리 장치 및 플라즈마 처리 방법 |
JP5648349B2 (ja) * | 2009-09-17 | 2015-01-07 | 東京エレクトロン株式会社 | 成膜装置 |
WO2011055671A1 (ja) * | 2009-11-04 | 2011-05-12 | 東京エレクトロン株式会社 | 成膜方法およびキャパシタの形成方法 |
JP2012204644A (ja) * | 2011-03-25 | 2012-10-22 | Tokyo Electron Ltd | プラズマ処理装置及びプラズマ処理方法 |
JP5712874B2 (ja) * | 2011-09-05 | 2015-05-07 | 東京エレクトロン株式会社 | 成膜装置、成膜方法及び記憶媒体 |
US9396908B2 (en) * | 2011-11-22 | 2016-07-19 | Lam Research Corporation | Systems and methods for controlling a plasma edge region |
EP2785152A4 (en) * | 2011-11-22 | 2015-07-29 | Kobe Steel Ltd | PLASMA GENERATING SOURCE AND VACUUM PLASMA PROCESSING DEVICE HAVING THE SAME |
JP5861583B2 (ja) * | 2012-07-13 | 2016-02-16 | 東京エレクトロン株式会社 | 成膜装置及び成膜方法 |
US20140262031A1 (en) * | 2013-03-12 | 2014-09-18 | Sergey G. BELOSTOTSKIY | Multi-mode etch chamber source assembly |
JP6249659B2 (ja) * | 2013-07-25 | 2017-12-20 | 東京エレクトロン株式会社 | プラズマ処理装置 |
-
2016
- 2016-03-25 JP JP2016061509A patent/JP6629116B2/ja active Active
-
2017
- 2017-03-08 KR KR1020170029543A patent/KR101962531B1/ko active IP Right Grant
- 2017-03-13 CN CN201710148321.XA patent/CN107230608B/zh active Active
- 2017-03-23 TW TW106109641A patent/TWI634586B/zh active
- 2017-03-23 US US15/467,602 patent/US20170275761A1/en not_active Abandoned
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019167618A (ja) * | 2018-03-22 | 2019-10-03 | 芝浦メカトロニクス株式会社 | 真空処理装置及びトレイ |
JP2020050907A (ja) * | 2018-09-26 | 2020-04-02 | 芝浦メカトロニクス株式会社 | 成膜装置 |
JP7154086B2 (ja) | 2018-09-26 | 2022-10-17 | 芝浦メカトロニクス株式会社 | 成膜装置 |
JP2020050939A (ja) * | 2018-09-28 | 2020-04-02 | 芝浦メカトロニクス株式会社 | 成膜装置及び成膜製品の製造方法 |
JP7162483B2 (ja) | 2018-09-28 | 2022-10-28 | 芝浦メカトロニクス株式会社 | 成膜装置及び成膜製品の製造方法 |
JP2022519663A (ja) * | 2019-02-06 | 2022-03-24 | エヴァテック・アーゲー | イオンを生成する方法および装置 |
WO2023021856A1 (ja) * | 2021-08-18 | 2023-02-23 | 株式会社Screenホールディングス | 基板処理装置 |
WO2023171313A1 (ja) * | 2022-03-07 | 2023-09-14 | Agc株式会社 | 遠赤外線透過部材及び遠赤外線透過部材の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
TWI634586B (zh) | 2018-09-01 |
KR20170113093A (ko) | 2017-10-12 |
CN107230608A (zh) | 2017-10-03 |
KR101962531B1 (ko) | 2019-03-26 |
US20170275761A1 (en) | 2017-09-28 |
TW201735095A (zh) | 2017-10-01 |
CN107230608B (zh) | 2019-06-21 |
JP6629116B2 (ja) | 2020-01-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2017172019A (ja) | プラズマ処理装置 | |
US20160284522A1 (en) | Upper electrode, edge ring, and plasma processing apparatus | |
KR102322816B1 (ko) | 플라즈마 처리 장치 | |
US9978570B2 (en) | Reaction chamber and semi-conductor processing device | |
KR20170119319A (ko) | 플라즈마 처리 장치 및 그것에 이용하는 배기 구조 | |
KR20190066593A (ko) | 배기 장치, 처리 장치 및 배기 방법 | |
TWI695183B (zh) | 成膜裝置 | |
KR20130132355A (ko) | 유도 결합 플라즈마 처리 장치 | |
US20150170891A1 (en) | Particle backflow preventing part and substrate processing apparatus | |
JP2020503670A (ja) | 真空プラズマ加工対象物処理装置 | |
US9966233B2 (en) | Plasma processing apparatus | |
US20110039417A1 (en) | Plasma processing apparatus and plasma processing method | |
JP2004327767A (ja) | プラズマ処理装置 | |
JP2020029621A (ja) | プラズマ処理装置 | |
CN113903649B (zh) | 半导体工艺设备 | |
JP7224192B2 (ja) | プラズマ処理装置 | |
CN110965030B (zh) | 成膜装置 | |
CN108695131B (zh) | 反应腔室 | |
JP6380158B2 (ja) | 製造装置 | |
JP7166147B2 (ja) | プラズマ処理装置 | |
JP2023048694A (ja) | 成膜装置 | |
JP2020050907A (ja) | 成膜装置 | |
KR100880540B1 (ko) | 플라즈마 처리장치 | |
JP2016225203A (ja) | プラズマ処理装置 | |
JP2010245145A (ja) | プラズマ処理装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20181207 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20181207 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190903 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20190830 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20191009 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20191112 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20191204 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6629116 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |