JP2017158277A - 高電圧発生回路 - Google Patents
高電圧発生回路 Download PDFInfo
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- JP2017158277A JP2017158277A JP2016038642A JP2016038642A JP2017158277A JP 2017158277 A JP2017158277 A JP 2017158277A JP 2016038642 A JP2016038642 A JP 2016038642A JP 2016038642 A JP2016038642 A JP 2016038642A JP 2017158277 A JP2017158277 A JP 2017158277A
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- high voltage
- generation circuit
- voltage generation
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- 230000000052 comparative effect Effects 0.000 description 14
- 150000002500 ions Chemical class 0.000 description 12
- 238000010586 diagram Methods 0.000 description 9
- 239000003990 capacitor Substances 0.000 description 4
- 230000003068 static effect Effects 0.000 description 4
- 230000005611 electricity Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/02—Conversion of ac power input into dc power output without possibility of reversal
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/02—Conversion of ac power input into dc power output without possibility of reversal
- H02M7/04—Conversion of ac power input into dc power output without possibility of reversal by static converters
- H02M7/06—Conversion of ac power input into dc power output without possibility of reversal by static converters using discharge tubes without control electrode or semiconductor devices without control electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/248—Components associated with high voltage supply
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
- H01T23/00—Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/08—Circuits specially adapted for the generation of control voltages for semiconductor devices incorporated in static converters
- H02M1/088—Circuits specially adapted for the generation of control voltages for semiconductor devices incorporated in static converters for the simultaneous control of series or parallel connected semiconductor devices
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/02—Conversion of ac power input into dc power output without possibility of reversal
- H02M7/04—Conversion of ac power input into dc power output without possibility of reversal by static converters
- H02M7/06—Conversion of ac power input into dc power output without possibility of reversal by static converters using discharge tubes without control electrode or semiconductor devices without control electrode
- H02M7/10—Conversion of ac power input into dc power output without possibility of reversal by static converters using discharge tubes without control electrode or semiconductor devices without control electrode arranged for operation in series, e.g. for multiplication of voltage
- H02M7/103—Containing passive elements (capacitively coupled) which are ordered in cascade on one source
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
- H05F3/00—Carrying-off electrostatic charges
- H05F3/04—Carrying-off electrostatic charges by means of spark gaps or other discharge devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
- H01T19/00—Devices providing for corona discharge
- H01T19/04—Devices providing for corona discharge having pointed electrodes
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/0048—Circuits or arrangements for reducing losses
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B70/00—Technologies for an efficient end-user side electric power management and consumption
- Y02B70/10—Technologies improving the efficiency by using switched-mode power supplies [SMPS], i.e. efficient power electronics conversion e.g. power factor correction or reduction of losses in power supplies or efficient standby modes
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Elimination Of Static Electricity (AREA)
- Rectifiers (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Plasma Technology (AREA)
- Dc-Dc Converters (AREA)
Abstract
【解決手段】高電圧発生回路10は、交流電源12、正極性高電圧生成回路14および負極性高電圧生成回路16を備え、交流電源12と正極性高電圧生成回路14との間、または交流電源12と負極性高電圧生成回路16との間に交流電源12から供給される交流電圧の位相を変換する位相変換器18が設けられる。
【選択図】図1
Description
14…正極性高電圧生成回路 16…負極性高電圧生成回路
18、19…位相変換器 20…正極用トランス
22…正極用倍電圧整流回路 23…正極用トランス駆動回路
24…負極用トランス 26…負極用倍電圧整流回路
27…負極用トランス駆動回路
28、30…抵抗素子(インピーダンス素子)
32…放電電極(負荷)
Claims (6)
- 負荷に正のパルス高電圧と負のパルス高電圧を交互に印加する高電圧発生回路であって、
交流電源、正極性高電圧生成回路および負極性高電圧生成回路を備え、
上記交流電源と上記正極性高電圧生成回路との間、または上記交流電源と上記負極性高電圧生成回路との間に上記交流電源から供給される交流電圧の位相を変換する位相変換器が設けられることを特徴とする高電圧発生回路。 - 請求項1記載の高電圧発生回路において、
上記位相変換器は、上記交流電源から供給される交流電圧の位相を反転させるものである
ことを特徴とする高電圧発生回路。 - 請求項1記載の高電圧発生回路において、
上記正極性高電圧生成回路および上記負極性高電圧生成回路はいずれもトランスと倍電圧整流回路から構成される
ことを特徴とする高電圧発生回路。 - 請求項3記載の高電圧発生回路において、
上記交流電源と上記正極性高電圧生成回路との間、および、上記交流電源と上記負極性高電圧生成回路との間に電圧レベルを調整可能なトランス駆動回路が設けられる
ことを特徴とする高電圧発生回路。 - 請求項1記載の高電圧発生回路において、
上記正極性高電圧生成回路の出力端子と上記負極性高電圧生成回路の出力端子との間には二つのインピーダンス素子が直列に接続され、これらのインピーダンス素子の相互接続端に上記負荷が接続される
ことを特徴とする高電圧発生回路。 - 請求項1記載の高電圧発生回路において、
上記負荷はイオナイザの放電電極である
ことを特徴とする高電圧発生回路。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016038642A JP6467715B2 (ja) | 2016-03-01 | 2016-03-01 | 高電圧発生回路 |
US15/432,234 US10097104B2 (en) | 2016-03-01 | 2017-02-14 | High voltage generation circuit |
TW106105914A TWI678875B (zh) | 2016-03-01 | 2017-02-22 | 高壓產生電路 |
DE102017104022.6A DE102017104022A1 (de) | 2016-03-01 | 2017-02-27 | Schaltung zur Generierung von Hochspannung |
KR1020170026294A KR101876917B1 (ko) | 2016-03-01 | 2017-02-28 | 고전압 생성 회로 |
CN201710113442.0A CN107147308B (zh) | 2016-03-01 | 2017-02-28 | 高电压产生电路 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016038642A JP6467715B2 (ja) | 2016-03-01 | 2016-03-01 | 高電圧発生回路 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017158277A true JP2017158277A (ja) | 2017-09-07 |
JP6467715B2 JP6467715B2 (ja) | 2019-02-13 |
Family
ID=59650895
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016038642A Active JP6467715B2 (ja) | 2016-03-01 | 2016-03-01 | 高電圧発生回路 |
Country Status (6)
Country | Link |
---|---|
US (1) | US10097104B2 (ja) |
JP (1) | JP6467715B2 (ja) |
KR (1) | KR101876917B1 (ja) |
CN (1) | CN107147308B (ja) |
DE (1) | DE102017104022A1 (ja) |
TW (1) | TWI678875B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022018873A1 (ja) * | 2020-07-22 | 2022-01-27 | 株式会社日立ハイテク | 直流高電圧源装置および荷電粒子ビーム装置 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7010169B2 (ja) * | 2018-08-02 | 2022-01-26 | 株式会社島津製作所 | 除電装置及び電子天秤 |
KR20230007172A (ko) | 2021-07-05 | 2023-01-12 | 한국전기연구원 | 전압 체배기를 포함하는 고전압 전원 장치 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5212420A (en) * | 1975-07-17 | 1977-01-31 | Nisshin Haiboruteeji Kk | Dc high voltage generator |
US5671132A (en) * | 1996-03-13 | 1997-09-23 | Spellman High Voltage Company | High voltage bipolar CT scanner power supply |
JP2000058290A (ja) * | 1998-06-04 | 2000-02-25 | Keyence Corp | 除電装置 |
JP2005294004A (ja) * | 2004-03-31 | 2005-10-20 | Sunx Ltd | 除電装置 |
JP2006211855A (ja) * | 2005-01-31 | 2006-08-10 | Sanyo Electric Co Ltd | 交流直流変換器 |
US9263965B1 (en) * | 2015-04-22 | 2016-02-16 | Lawrence A. Leske | Producing an odd number full wave voltage multiplier |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5212420U (ja) * | 1975-07-11 | 1977-01-28 | ||
JPH0727097U (ja) | 1993-10-21 | 1995-05-19 | 横河航空電機株式会社 | 除電器 |
JP3028292B2 (ja) | 1995-10-20 | 2000-04-04 | 株式会社ハイデン研究所 | 正負パルス式高電圧電源 |
US6806689B2 (en) * | 2002-03-22 | 2004-10-19 | International Rectifier Corporation | Multi-phase buck converter |
KR100518387B1 (ko) * | 2005-04-18 | 2005-09-30 | 주식회사 시마월드 | 교류용 음이온 및 은이온 발생기 |
JP2007066770A (ja) * | 2005-08-31 | 2007-03-15 | Sunx Ltd | 除電装置 |
JP4818093B2 (ja) * | 2006-12-19 | 2011-11-16 | ミドリ安全株式会社 | 除電装置 |
JP5073325B2 (ja) | 2007-03-13 | 2012-11-14 | シシド静電気株式会社 | イオン生成装置 |
JP5069491B2 (ja) * | 2007-04-10 | 2012-11-07 | ミドリ安全株式会社 | イオンバランス調整電極およびこれを備えた除電装置 |
CN201390664Y (zh) * | 2009-03-31 | 2010-01-27 | 连昶昇 | 一种水处理器 |
JP5351598B2 (ja) * | 2009-04-24 | 2013-11-27 | ミドリ安全株式会社 | 除電装置 |
JP5508302B2 (ja) | 2011-01-21 | 2014-05-28 | 株式会社キーエンス | 除電器 |
JP5786577B2 (ja) * | 2011-09-14 | 2015-09-30 | オムロン株式会社 | 除電装置 |
-
2016
- 2016-03-01 JP JP2016038642A patent/JP6467715B2/ja active Active
-
2017
- 2017-02-14 US US15/432,234 patent/US10097104B2/en active Active
- 2017-02-22 TW TW106105914A patent/TWI678875B/zh active
- 2017-02-27 DE DE102017104022.6A patent/DE102017104022A1/de active Pending
- 2017-02-28 CN CN201710113442.0A patent/CN107147308B/zh active Active
- 2017-02-28 KR KR1020170026294A patent/KR101876917B1/ko active IP Right Grant
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5212420A (en) * | 1975-07-17 | 1977-01-31 | Nisshin Haiboruteeji Kk | Dc high voltage generator |
US5671132A (en) * | 1996-03-13 | 1997-09-23 | Spellman High Voltage Company | High voltage bipolar CT scanner power supply |
JP2000058290A (ja) * | 1998-06-04 | 2000-02-25 | Keyence Corp | 除電装置 |
JP2005294004A (ja) * | 2004-03-31 | 2005-10-20 | Sunx Ltd | 除電装置 |
JP2006211855A (ja) * | 2005-01-31 | 2006-08-10 | Sanyo Electric Co Ltd | 交流直流変換器 |
US9263965B1 (en) * | 2015-04-22 | 2016-02-16 | Lawrence A. Leske | Producing an odd number full wave voltage multiplier |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022018873A1 (ja) * | 2020-07-22 | 2022-01-27 | 株式会社日立ハイテク | 直流高電圧源装置および荷電粒子ビーム装置 |
GB2611697A (en) * | 2020-07-22 | 2023-04-12 | Hitachi High Tech Corp | DC high-voltage source device and charged particle beam device |
Also Published As
Publication number | Publication date |
---|---|
KR20170102437A (ko) | 2017-09-11 |
DE102017104022A1 (de) | 2017-09-07 |
CN107147308A (zh) | 2017-09-08 |
US20170257036A1 (en) | 2017-09-07 |
US10097104B2 (en) | 2018-10-09 |
TW201737608A (zh) | 2017-10-16 |
KR101876917B1 (ko) | 2018-07-10 |
JP6467715B2 (ja) | 2019-02-13 |
CN107147308B (zh) | 2019-06-28 |
TWI678875B (zh) | 2019-12-01 |
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