JP2017156453A5 - - Google Patents
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- Publication number
- JP2017156453A5 JP2017156453A5 JP2016037902A JP2016037902A JP2017156453A5 JP 2017156453 A5 JP2017156453 A5 JP 2017156453A5 JP 2016037902 A JP2016037902 A JP 2016037902A JP 2016037902 A JP2016037902 A JP 2016037902A JP 2017156453 A5 JP2017156453 A5 JP 2017156453A5
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- recess
- base
- variable focus
- focus mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000006835 compression Effects 0.000 claims description 3
- 238000007906 compression Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims 1
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Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016037902A JP6485388B2 (ja) | 2016-02-29 | 2016-02-29 | 可変焦点ミラーおよび光走査装置 |
| PCT/JP2017/000804 WO2017149946A1 (ja) | 2016-02-29 | 2017-01-12 | 可変焦点ミラーおよび光走査装置 |
| US16/080,038 US20190064509A1 (en) | 2016-02-29 | 2017-01-12 | Variable focus mirror and optical scanning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016037902A JP6485388B2 (ja) | 2016-02-29 | 2016-02-29 | 可変焦点ミラーおよび光走査装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017156453A JP2017156453A (ja) | 2017-09-07 |
| JP2017156453A5 true JP2017156453A5 (cg-RX-API-DMAC10.html) | 2018-04-12 |
| JP6485388B2 JP6485388B2 (ja) | 2019-03-20 |
Family
ID=59742704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016037902A Active JP6485388B2 (ja) | 2016-02-29 | 2016-02-29 | 可変焦点ミラーおよび光走査装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20190064509A1 (cg-RX-API-DMAC10.html) |
| JP (1) | JP6485388B2 (cg-RX-API-DMAC10.html) |
| WO (1) | WO2017149946A1 (cg-RX-API-DMAC10.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT202000023110A1 (it) * | 2020-09-30 | 2022-03-30 | St Microelectronics Srl | Dispositivo microelettromeccanico a specchio con compensazione di errori di planarita' |
| GB202101833D0 (en) * | 2021-02-10 | 2021-03-24 | Sintef Tto As | Actuating device |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7369723B1 (en) * | 2001-11-09 | 2008-05-06 | The Charles Stark Draper Laboratory, Inc. | High speed piezoelectric optical system with tunable focal length |
| JP2004347753A (ja) * | 2003-05-21 | 2004-12-09 | Matsushita Electric Ind Co Ltd | 形状可変ミラー素子及び形状可変ミラー素子の製造方法並びに形状可変ミラーユニット並びに光ピックアップ |
| FR2950153B1 (fr) * | 2009-09-15 | 2011-12-23 | Commissariat Energie Atomique | Dispositif optique a membrane deformable a actionnement piezoelectrique |
| FR2950154B1 (fr) * | 2009-09-15 | 2011-12-23 | Commissariat Energie Atomique | Dispositif optique a membrane deformable a actionnement piezoelectrique en forme de couronne continue |
| EP2713196A1 (en) * | 2012-09-27 | 2014-04-02 | poLight AS | Deformable lens having piezoelectric actuators arranged with an interdigitated electrode configuration |
| JP2014215534A (ja) * | 2013-04-26 | 2014-11-17 | 株式会社デンソー | 光走査装置 |
| JP5916668B2 (ja) * | 2013-07-17 | 2016-05-11 | 富士フイルム株式会社 | ミラー駆動装置及びその駆動方法 |
| JP2015210450A (ja) * | 2014-04-28 | 2015-11-24 | キヤノン電子株式会社 | 振動素子、光走査装置、画像形成装置、画像投影装置および光学パターン読み取り装置 |
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2016
- 2016-02-29 JP JP2016037902A patent/JP6485388B2/ja active Active
-
2017
- 2017-01-12 US US16/080,038 patent/US20190064509A1/en not_active Abandoned
- 2017-01-12 WO PCT/JP2017/000804 patent/WO2017149946A1/ja not_active Ceased