JP2017154933A - 板ガラスおよびその製造方法 - Google Patents
板ガラスおよびその製造方法 Download PDFInfo
- Publication number
- JP2017154933A JP2017154933A JP2016040101A JP2016040101A JP2017154933A JP 2017154933 A JP2017154933 A JP 2017154933A JP 2016040101 A JP2016040101 A JP 2016040101A JP 2016040101 A JP2016040101 A JP 2016040101A JP 2017154933 A JP2017154933 A JP 2017154933A
- Authority
- JP
- Japan
- Prior art keywords
- plate glass
- notch
- glass
- manufacturing
- support surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
- C03C15/02—Surface treatment of glass, not in the form of fibres or filaments, by etching for making a smooth surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02021—Edge treatment, chamfering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02422—Non-crystalline insulating materials, e.g. glass, polymers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/67086—Apparatus for fluid treatment for etching for wet etching with the semiconductor substrates being dipped in baths or vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
- B24B41/047—Grinding heads for working on plane surfaces
- B24B41/053—Grinding heads for working on plane surfaces for grinding or polishing glass
Abstract
Description
5a 第一位置決めピン(位置決め部材)
7 支持面
14 保護層
G 板ガラス
Ga 周縁部
Gb 切欠き部
Claims (9)
- 周縁部に切欠き部を有する円盤状の板ガラスを製造する方法において、
前記切欠き部にエッチング処理を施すことを特徴とする、板ガラスの製造方法。 - 前記切欠き部の位置を揃えて複数の前記板ガラスを積層し、前記切欠き部にエッチング処理を施す、請求項1に記載の板ガラスの製造方法。
- 前記複数の板ガラスにおける前記切欠き部の位置を位置決め部材により揃える、請求項2に記載の板ガラスの製造方法。
- 前記複数の板ガラスを載置する載置台に前記位置決め部材を着脱自在又は移動可能に取り付ける、請求項3に記載の板ガラスの製造方法。
- 前記載置台は、前記板ガラスが載置される支持面を有し、前記支持面は、水平方向に対して傾斜状に配置される、請求項4に記載の板ガラスの製造方法。
- 前記複数の板ガラスの間に保護層を形成する、請求項2から5のいずれか1項に記載の板ガラスの製造方法。
- 前記保護層は、液体により構成されてなる請求項6に記載の板ガラスの製造方法。
- 前記板ガラスの前記切欠き部と、前記切欠き部を除く前記板ガラスの前記周縁部とにエッチング処理を施す、請求項2から7のいずれか1項に記載の板ガラスの製造方法。
- 周縁部に切欠き部を有する円盤状の板ガラスであって、
主表面が非エッチング面からなり、
前記切欠き部がエッチング面からなることを特徴とする板ガラス。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016040101A JP6664658B2 (ja) | 2016-03-02 | 2016-03-02 | 板ガラスの製造方法 |
US16/064,041 US10773994B2 (en) | 2016-03-02 | 2016-12-02 | Plate glass and method for producing same |
CN201680070288.7A CN108290777B (zh) | 2016-03-02 | 2016-12-02 | 板状玻璃及其制造方法 |
PCT/JP2016/085974 WO2017149877A1 (ja) | 2016-03-02 | 2016-12-02 | 板ガラスおよびその製造方法 |
KR1020187010081A KR102614200B1 (ko) | 2016-03-02 | 2016-12-02 | 판유리의 제조 방법 |
TW105142273A TWI663136B (zh) | 2016-03-02 | 2016-12-20 | Plate glass and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016040101A JP6664658B2 (ja) | 2016-03-02 | 2016-03-02 | 板ガラスの製造方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020009278A Division JP6853970B2 (ja) | 2020-01-23 | 2020-01-23 | 板ガラスの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017154933A true JP2017154933A (ja) | 2017-09-07 |
JP6664658B2 JP6664658B2 (ja) | 2020-03-13 |
Family
ID=59743813
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016040101A Active JP6664658B2 (ja) | 2016-03-02 | 2016-03-02 | 板ガラスの製造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US10773994B2 (ja) |
JP (1) | JP6664658B2 (ja) |
KR (1) | KR102614200B1 (ja) |
CN (1) | CN108290777B (ja) |
TW (1) | TWI663136B (ja) |
WO (1) | WO2017149877A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102309886B1 (ko) * | 2020-05-04 | 2021-10-07 | 주식회사 도우인시스 | 박막 글라스 커팅 및 이송용 카세트 및 이를 이용한 박막 글라스 커팅 방법 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001150311A (ja) * | 1999-09-14 | 2001-06-05 | Ricoh Co Ltd | 薄肉円盤の円周加工方法および加工装置 |
JP2008041985A (ja) * | 2006-08-08 | 2008-02-21 | Tokyo Ohka Kogyo Co Ltd | サポートプレート |
JP2009040431A (ja) * | 2007-08-06 | 2009-02-26 | Nippon Electric Glass Co Ltd | 板状物梱包体及びその製造方法並びにスペーサ |
JP2010003365A (ja) * | 2008-06-20 | 2010-01-07 | Furukawa Electric Co Ltd:The | ガラス基板の製造方法 |
JP2012099172A (ja) * | 2010-10-29 | 2012-05-24 | Showa Denko Kk | 磁気記録媒体用ガラス基板の製造方法 |
WO2013137329A1 (ja) * | 2012-03-13 | 2013-09-19 | Hoya株式会社 | 電子機器用カバーガラスのガラス基板、及びその製造方法 |
JP2014210679A (ja) * | 2013-04-18 | 2014-11-13 | 旭硝子株式会社 | パレット及びガラス板収納体 |
WO2016088868A1 (ja) * | 2014-12-04 | 2016-06-09 | 日本電気硝子株式会社 | ガラス板 |
WO2016189945A1 (ja) * | 2015-05-22 | 2016-12-01 | 日本電気硝子株式会社 | ガラス基板の研削方法 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1358061A (en) * | 1971-05-21 | 1974-06-26 | Glaverbel | Methods of strengthening glass articles |
US5196088A (en) * | 1988-08-05 | 1993-03-23 | Tru Vue, Inc. | Process and apparatus for producing non-glare glass by etching |
DE4134356A1 (de) * | 1991-10-17 | 1993-04-22 | Ernst Auwaerter Karosserie Und | Verfahren zum herstellen einer scheibe, und eine scheibe |
US6685539B1 (en) * | 1999-08-24 | 2004-02-03 | Ricoh Company, Ltd. | Processing tool, method of producing tool, processing method and processing apparatus |
JP4162567B2 (ja) | 2003-10-14 | 2008-10-08 | スピードファム株式会社 | ウェハノッチの鏡面加工装置 |
EP1738224A1 (en) * | 2004-04-22 | 2007-01-03 | Asahi Glass Company, Limited | Low-expansion glass substrate for a reflective mask and reflective mask |
US7618895B2 (en) * | 2004-12-06 | 2009-11-17 | Asahi Glass Company, Limited | Method for etching doughnut-type glass substrates |
DE102006046719A1 (de) * | 2006-10-02 | 2008-04-03 | Ab Enzymes Gmbh | Klonierung, Expression und Verwendung saurer Phospholipasen |
US20080128088A1 (en) | 2006-10-30 | 2008-06-05 | Jusung Engineering Co., Ltd. | Etching apparatus for edges of substrate |
US8722189B2 (en) * | 2007-12-18 | 2014-05-13 | Hoya Corporation | Cover glass for mobile terminals, manufacturing method of the same and mobile terminal device |
US8713968B2 (en) * | 2010-05-03 | 2014-05-06 | Corning Incorporated | Method and apparatus for making a 3D glass article |
US20120052302A1 (en) * | 2010-08-24 | 2012-03-01 | Matusick Joseph M | Method of strengthening edge of glass article |
US9434644B2 (en) * | 2010-09-30 | 2016-09-06 | Avanstrate Inc. | Cover glass and method for producing cover glass |
JP2012169024A (ja) * | 2011-02-16 | 2012-09-06 | Showa Denko Kk | 磁気記録媒体用ガラス基板の製造方法 |
JP5327275B2 (ja) * | 2011-05-27 | 2013-10-30 | 旭硝子株式会社 | 端面研磨ブラシ及び磁気記録媒体用ガラス基板の製造方法 |
CN202424332U (zh) * | 2011-12-26 | 2012-09-05 | 安波电机(宁德)有限公司 | 一种便于层叠理片的定子矽钢片 |
JP6111240B2 (ja) * | 2012-03-13 | 2017-04-05 | Hoya株式会社 | 電子機器用カバーガラスのガラス基板の製造方法 |
CN104205218A (zh) * | 2012-03-30 | 2014-12-10 | 旭硝子株式会社 | 支承轴、磁盘用玻璃基板的端面研磨方法、及磁盘用玻璃基板的制造方法 |
US9375820B2 (en) * | 2012-04-16 | 2016-06-28 | Corning Incorporated | Method and system for finishing glass sheets |
WO2016037343A1 (en) * | 2014-09-12 | 2016-03-17 | Schott Glass Technologies (Suzhou) Co. Ltd. | Ultrathin chemically toughened glass article and method for producing such a glass article |
JP2017528412A (ja) * | 2014-09-16 | 2017-09-28 | ザ ケマーズ カンパニー エフシー リミテッド ライアビリティ カンパニー | ガラス基板に使用するためのエッチング切断溶液 |
CN112250313A (zh) * | 2015-02-02 | 2021-01-22 | 康宁股份有限公司 | 强化层压玻璃制品边缘的方法及由此形成的层压玻璃制品 |
-
2016
- 2016-03-02 JP JP2016040101A patent/JP6664658B2/ja active Active
- 2016-12-02 KR KR1020187010081A patent/KR102614200B1/ko active IP Right Grant
- 2016-12-02 WO PCT/JP2016/085974 patent/WO2017149877A1/ja active Application Filing
- 2016-12-02 CN CN201680070288.7A patent/CN108290777B/zh active Active
- 2016-12-02 US US16/064,041 patent/US10773994B2/en active Active
- 2016-12-20 TW TW105142273A patent/TWI663136B/zh active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001150311A (ja) * | 1999-09-14 | 2001-06-05 | Ricoh Co Ltd | 薄肉円盤の円周加工方法および加工装置 |
JP2008041985A (ja) * | 2006-08-08 | 2008-02-21 | Tokyo Ohka Kogyo Co Ltd | サポートプレート |
JP2009040431A (ja) * | 2007-08-06 | 2009-02-26 | Nippon Electric Glass Co Ltd | 板状物梱包体及びその製造方法並びにスペーサ |
JP2010003365A (ja) * | 2008-06-20 | 2010-01-07 | Furukawa Electric Co Ltd:The | ガラス基板の製造方法 |
JP2012099172A (ja) * | 2010-10-29 | 2012-05-24 | Showa Denko Kk | 磁気記録媒体用ガラス基板の製造方法 |
WO2013137329A1 (ja) * | 2012-03-13 | 2013-09-19 | Hoya株式会社 | 電子機器用カバーガラスのガラス基板、及びその製造方法 |
JP2014210679A (ja) * | 2013-04-18 | 2014-11-13 | 旭硝子株式会社 | パレット及びガラス板収納体 |
WO2016088868A1 (ja) * | 2014-12-04 | 2016-06-09 | 日本電気硝子株式会社 | ガラス板 |
WO2016189945A1 (ja) * | 2015-05-22 | 2016-12-01 | 日本電気硝子株式会社 | ガラス基板の研削方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102309886B1 (ko) * | 2020-05-04 | 2021-10-07 | 주식회사 도우인시스 | 박막 글라스 커팅 및 이송용 카세트 및 이를 이용한 박막 글라스 커팅 방법 |
Also Published As
Publication number | Publication date |
---|---|
KR20180119551A (ko) | 2018-11-02 |
TWI663136B (zh) | 2019-06-21 |
KR102614200B1 (ko) | 2023-12-15 |
CN108290777B (zh) | 2022-08-02 |
JP6664658B2 (ja) | 2020-03-13 |
US10773994B2 (en) | 2020-09-15 |
CN108290777A (zh) | 2018-07-17 |
WO2017149877A1 (ja) | 2017-09-08 |
US20180370849A1 (en) | 2018-12-27 |
TW201800357A (zh) | 2018-01-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR102120495B1 (ko) | 반도체 웨이퍼의 제조 방법 | |
US9437439B2 (en) | Processing method for wafer having chamfered portion along the outer circumference thereof followed by thinning and separating | |
JPWO2006073098A1 (ja) | ワークのブレイク方法及び装置、スクライブ及びブレイク方法、並びにブレイク機能付きスクライブ装置 | |
TW200805546A (en) | Support plate, transfer apparatus, peeling apparatus and peeling method | |
TWI650292B (zh) | 脆性材料基板之分斷方法及分斷裝置 | |
JP2013098248A (ja) | 保持テーブル | |
TW201437163A (zh) | 刻劃輪、刻劃裝置及刻劃輪之製造方法 | |
JP2007294748A (ja) | ウェーハ搬送方法 | |
WO2017149877A1 (ja) | 板ガラスおよびその製造方法 | |
TWI459504B (zh) | 一種提供夾具平台空氣區的系統及方法 | |
TW201740449A (zh) | 晶圓之製造方法及晶圓 | |
JP6853970B2 (ja) | 板ガラスの製造方法 | |
CN112201566A (zh) | 一种晶圆片减薄方法、装置和卸片夹具 | |
JP2006159334A (ja) | ダイシングドレステーブル構造及びダイサ | |
JP5528202B2 (ja) | 支持トレイ | |
KR20040002595A (ko) | 실리콘 웨이퍼의 가공 방법 | |
US20140045411A1 (en) | Methods of and apparatus for producing wafers | |
JP2010184319A (ja) | 切削方法 | |
JP2014004663A (ja) | 被加工物の加工方法 | |
WO2017149876A1 (ja) | 板ガラス及びその製造方法並びにエッチング処理装置 | |
CN214237744U (zh) | 用于倒棱机的固定装置及倒棱机 | |
JP7243649B2 (ja) | Soiウェーハの貼合わせ方法 | |
JP2021070173A (ja) | ウエハの製造方法 | |
CN106181676B (zh) | 一种薄形平面光学元件磁性消应力上盘方法 | |
JP4513647B2 (ja) | 光学素子の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20181009 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20191129 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20191213 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200120 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200202 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6664658 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |