JP2017146137A - 圧力検出ユニット及びこれを用いた圧力センサ、並びに圧力検出ユニットの製造方法 - Google Patents

圧力検出ユニット及びこれを用いた圧力センサ、並びに圧力検出ユニットの製造方法 Download PDF

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Publication number
JP2017146137A
JP2017146137A JP2016026701A JP2016026701A JP2017146137A JP 2017146137 A JP2017146137 A JP 2017146137A JP 2016026701 A JP2016026701 A JP 2016026701A JP 2016026701 A JP2016026701 A JP 2016026701A JP 2017146137 A JP2017146137 A JP 2017146137A
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JP
Japan
Prior art keywords
pressure detection
base
detection unit
pressure
terminal pin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2016026701A
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English (en)
Japanese (ja)
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JP2017146137A5 (enExample
Inventor
倫久 青山
Tsunehisa Aoyama
倫久 青山
元桐 向井
Gento Mukai
元桐 向井
葉子 田村
Yoko Tamura
葉子 田村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikoki Corp
Original Assignee
Fujikoki Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikoki Corp filed Critical Fujikoki Corp
Priority to JP2016026701A priority Critical patent/JP2017146137A/ja
Priority to KR1020160182321A priority patent/KR20170096577A/ko
Priority to US15/429,504 priority patent/US10260979B2/en
Priority to CN201710081345.8A priority patent/CN107084814A/zh
Priority to EP17156181.4A priority patent/EP3208590A1/en
Publication of JP2017146137A publication Critical patent/JP2017146137A/ja
Publication of JP2017146137A5 publication Critical patent/JP2017146137A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0069—Electrical connection means from the sensor to its support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/24—Housings ; Casings for instruments
    • G01D11/245—Housings for sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0672—Leakage or rupture protection or detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/142—Multiple part housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
JP2016026701A 2016-02-16 2016-02-16 圧力検出ユニット及びこれを用いた圧力センサ、並びに圧力検出ユニットの製造方法 Pending JP2017146137A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2016026701A JP2017146137A (ja) 2016-02-16 2016-02-16 圧力検出ユニット及びこれを用いた圧力センサ、並びに圧力検出ユニットの製造方法
KR1020160182321A KR20170096577A (ko) 2016-02-16 2016-12-29 압력 검출 유닛 및 이것을 사용한 압력 센서, 및 압력 검출 유닛의 제조 방법
US15/429,504 US10260979B2 (en) 2016-02-16 2017-02-10 Pressure detection unit, pressure sensor using the same, and method of manufacturing pressure detection unit
CN201710081345.8A CN107084814A (zh) 2016-02-16 2017-02-15 压力检测单元及其制造方法、以及使用其的压力传感器
EP17156181.4A EP3208590A1 (en) 2016-02-16 2017-02-15 Pressure detection unit, pressure sensor using the same, and method of manufacturing pressure detection unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016026701A JP2017146137A (ja) 2016-02-16 2016-02-16 圧力検出ユニット及びこれを用いた圧力センサ、並びに圧力検出ユニットの製造方法

Publications (2)

Publication Number Publication Date
JP2017146137A true JP2017146137A (ja) 2017-08-24
JP2017146137A5 JP2017146137A5 (enExample) 2019-03-14

Family

ID=58056982

Family Applications (1)

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JP2016026701A Pending JP2017146137A (ja) 2016-02-16 2016-02-16 圧力検出ユニット及びこれを用いた圧力センサ、並びに圧力検出ユニットの製造方法

Country Status (5)

Country Link
US (1) US10260979B2 (enExample)
EP (1) EP3208590A1 (enExample)
JP (1) JP2017146137A (enExample)
KR (1) KR20170096577A (enExample)
CN (1) CN107084814A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110672261A (zh) * 2018-07-03 2020-01-10 株式会社不二工机 压力检测单元及使用该压力检测单元的压力传感器

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6624966B2 (ja) * 2016-02-16 2019-12-25 株式会社不二工機 圧力検出ユニット及びこれを用いた圧力センサ
JP2018163074A (ja) * 2017-03-27 2018-10-18 日本電産トーソク株式会社 油圧センサ取付構造
CN107782356B (zh) * 2017-11-15 2024-03-15 四川理工学院 一种室外通用型无线传感器节点
US11262771B2 (en) * 2019-09-23 2022-03-01 Rosemount Inc. High pressure capsule and header for process fluid pressure transmitter

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58168931A (ja) * 1982-03-30 1983-10-05 Hitachi Ltd 圧力検出器
JPS595931A (ja) * 1982-07-02 1984-01-12 Nippon Denso Co Ltd 半導体圧力センサ
EP0797085A1 (en) * 1996-03-22 1997-09-24 BITRON S.p.A. Pressure sensor and process for producing same
JP2003287472A (ja) * 2002-03-28 2003-10-10 Fuji Koki Corp 圧力センサ
JP2004045216A (ja) * 2002-07-11 2004-02-12 Toyoda Mach Works Ltd 圧力センサ
JP2004077139A (ja) * 2002-08-09 2004-03-11 Toyoda Mach Works Ltd 圧力センサ及びその製造方法
JP2008511005A (ja) * 2004-08-23 2008-04-10 ハネウェル・インターナショナル・インコーポレーテッド 背面検知および単一ａｓｉｃによる差圧測定
JP2012068105A (ja) * 2010-09-22 2012-04-05 Fuji Koki Corp 圧力センサ
JP2014153073A (ja) * 2013-02-05 2014-08-25 Saginomiya Seisakusho Inc 圧力検知ユニット
JP2014211389A (ja) * 2013-04-19 2014-11-13 日本精機株式会社 圧力検出装置
JP2015031573A (ja) * 2013-08-01 2015-02-16 株式会社デンソー センサ装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10308820B4 (de) * 2003-02-27 2006-10-12 Ifm Electronic Gmbh Sensor, Meßzelle zur Verwendung in einem Sensor und Verfahren zur Herstellung einer Meßzelle
DE102009003178A1 (de) 2009-05-18 2010-11-25 Endress + Hauser Gmbh + Co. Kg Keramisches Bauteil mit mindestens einer elektrischen Durchführung, Verfahren zu dessen Herstellung und Drucksensor mit einem solchen Bauteil
JP5833835B2 (ja) * 2011-05-11 2015-12-16 株式会社不二工機 圧力センサ
JP6293562B2 (ja) * 2014-04-17 2018-03-14 株式会社不二工機 圧力センサ
JP6703850B2 (ja) * 2016-02-16 2020-06-03 株式会社不二工機 圧力検出ユニット及びこれを用いた圧力センサ
JP6624966B2 (ja) * 2016-02-16 2019-12-25 株式会社不二工機 圧力検出ユニット及びこれを用いた圧力センサ

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58168931A (ja) * 1982-03-30 1983-10-05 Hitachi Ltd 圧力検出器
JPS595931A (ja) * 1982-07-02 1984-01-12 Nippon Denso Co Ltd 半導体圧力センサ
EP0797085A1 (en) * 1996-03-22 1997-09-24 BITRON S.p.A. Pressure sensor and process for producing same
JP2003287472A (ja) * 2002-03-28 2003-10-10 Fuji Koki Corp 圧力センサ
JP2004045216A (ja) * 2002-07-11 2004-02-12 Toyoda Mach Works Ltd 圧力センサ
JP2004077139A (ja) * 2002-08-09 2004-03-11 Toyoda Mach Works Ltd 圧力センサ及びその製造方法
JP2008511005A (ja) * 2004-08-23 2008-04-10 ハネウェル・インターナショナル・インコーポレーテッド 背面検知および単一ａｓｉｃによる差圧測定
JP2012068105A (ja) * 2010-09-22 2012-04-05 Fuji Koki Corp 圧力センサ
JP2014153073A (ja) * 2013-02-05 2014-08-25 Saginomiya Seisakusho Inc 圧力検知ユニット
JP2014211389A (ja) * 2013-04-19 2014-11-13 日本精機株式会社 圧力検出装置
JP2015031573A (ja) * 2013-08-01 2015-02-16 株式会社デンソー センサ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110672261A (zh) * 2018-07-03 2020-01-10 株式会社不二工机 压力检测单元及使用该压力检测单元的压力传感器

Also Published As

Publication number Publication date
KR20170096577A (ko) 2017-08-24
US10260979B2 (en) 2019-04-16
CN107084814A (zh) 2017-08-22
EP3208590A1 (en) 2017-08-23
US20170234750A1 (en) 2017-08-17

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