JP2017139312A - 接合形成方法 - Google Patents
接合形成方法 Download PDFInfo
- Publication number
- JP2017139312A JP2017139312A JP2016018782A JP2016018782A JP2017139312A JP 2017139312 A JP2017139312 A JP 2017139312A JP 2016018782 A JP2016018782 A JP 2016018782A JP 2016018782 A JP2016018782 A JP 2016018782A JP 2017139312 A JP2017139312 A JP 2017139312A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- temperature
- heat treatment
- flash
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 65
- 230000015572 biosynthetic process Effects 0.000 title claims abstract description 11
- 239000004065 semiconductor Substances 0.000 claims abstract description 140
- 238000010438 heat treatment Methods 0.000 claims abstract description 119
- 238000005280 amorphization Methods 0.000 claims abstract description 19
- 150000002500 ions Chemical class 0.000 claims abstract description 16
- 238000005468 ion implantation Methods 0.000 claims abstract description 13
- 230000008569 process Effects 0.000 claims description 40
- 239000000758 substrate Substances 0.000 claims description 33
- 238000001953 recrystallisation Methods 0.000 claims description 27
- 239000002019 doping agent Substances 0.000 claims description 11
- 238000005304 joining Methods 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims 1
- 239000012535 impurity Substances 0.000 abstract description 42
- 230000005465 channeling Effects 0.000 abstract description 9
- 239000013078 crystal Substances 0.000 abstract description 8
- 238000011282 treatment Methods 0.000 abstract description 4
- 229910052736 halogen Inorganic materials 0.000 description 60
- 150000002367 halogens Chemical class 0.000 description 60
- 238000012546 transfer Methods 0.000 description 56
- 239000007789 gas Substances 0.000 description 35
- 230000007246 mechanism Effects 0.000 description 33
- 239000010410 layer Substances 0.000 description 19
- 229910052732 germanium Inorganic materials 0.000 description 16
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 15
- 239000010453 quartz Substances 0.000 description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 15
- 230000002093 peripheral effect Effects 0.000 description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
- 238000012545 processing Methods 0.000 description 12
- 229910001873 dinitrogen Inorganic materials 0.000 description 10
- 238000002513 implantation Methods 0.000 description 9
- 230000005855 radiation Effects 0.000 description 9
- 238000001994 activation Methods 0.000 description 7
- 229910052724 xenon Inorganic materials 0.000 description 7
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 7
- 230000004913 activation Effects 0.000 description 6
- 238000000137 annealing Methods 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 5
- 230000001678 irradiating effect Effects 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 125000004429 atom Chemical group 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- 238000006664 bond formation reaction Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 230000003028 elevating effect Effects 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- -1 germanium ions Chemical class 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- PNDPGZBMCMUPRI-UHFFFAOYSA-N iodine Chemical compound II PNDPGZBMCMUPRI-UHFFFAOYSA-N 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
- H01L21/26513—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically active species
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
- H01L21/2686—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation using incoherent radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- High Energy & Nuclear Physics (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Recrystallisation Techniques (AREA)
Abstract
【解決手段】半導体ウェハーの表面にプレアモルファス化処理を施して当該表面を非晶質状態とすることにより、続くイオン注入工程にてイオンを打ち込んだときに不純物が半導体ウェハーの表面から所定値よりも深く入り込んでしまうチャネリングを防止する。次に、半導体ウェハーに比較的低温の加熱処理を行って表面に形成されているアモルファス層を再結晶化させた後に、当該表面にフラッシュ光を照射して不純物を活性化させる。結晶構造を取り戻した半導体ウェハーの表面が比較的高温にフラッシュ加熱されても、注入された不純物が過度に深く拡散するのを防止することができる。その結果、不純物は半導体ウェハーの表面から浅い位置に留まり、浅い接合を実現することができる。
【選択図】図8
Description
3 制御部
4 ハロゲン加熱部
5 フラッシュ加熱部
6 チャンバー
7 保持部
65 熱処理空間
74 サセプタ
75 保持プレート
77 基板支持ピン
120 放射温度計
FL フラッシュランプ
HL ハロゲンランプ
W 半導体ウェハー
Claims (2)
- 半導体基板の表面にpn接合を形成する接合形成方法であって、
半導体基板の表面を非晶質状態にするプレアモルファス化工程と、
前記プレアモルファス化工程にて形成されたアモルファス層にドーパントのイオンを注入するイオン注入工程と、
前記半導体基板を第1の温度に加熱して前記アモルファス層を再結晶化させる再結晶化工程と、
前記再結晶化工程の後、前記半導体基板の表面にフラッシュランプからフラッシュ光を照射して当該表面を前記第1の温度よりも高温の第2の温度に加熱し、前記ドーパントを活性化させる活性化工程と、
を備えることを特徴とする接合形成方法。 - 請求項1記載の接合形成方法において、
前記再結晶化工程では、前記半導体基板を前記第1の温度にて60秒以上180秒以下加熱することを特徴とする接合形成方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016018782A JP2017139312A (ja) | 2016-02-03 | 2016-02-03 | 接合形成方法 |
TW105142016A TW201740439A (zh) | 2016-02-03 | 2016-12-19 | 接合形成方法 |
US15/411,315 US20170221715A1 (en) | 2016-02-03 | 2017-01-20 | Method for forming junction in semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016018782A JP2017139312A (ja) | 2016-02-03 | 2016-02-03 | 接合形成方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2017139312A true JP2017139312A (ja) | 2017-08-10 |
Family
ID=59387047
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016018782A Pending JP2017139312A (ja) | 2016-02-03 | 2016-02-03 | 接合形成方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20170221715A1 (ja) |
JP (1) | JP2017139312A (ja) |
TW (1) | TW201740439A (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10840114B1 (en) * | 2016-07-26 | 2020-11-17 | Raytheon Company | Rapid thermal anneal apparatus and method |
JP6960344B2 (ja) * | 2018-01-26 | 2021-11-05 | 株式会社Screenホールディングス | 熱処理方法および熱処理装置 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4617066A (en) * | 1984-11-26 | 1986-10-14 | Hughes Aircraft Company | Process of making semiconductors having shallow, hyperabrupt doped regions by implantation and two step annealing |
US4933994A (en) * | 1987-06-11 | 1990-06-19 | General Electric Company | Method for fabricating a self-aligned lightly doped drain semiconductor device with silicide |
US5095358A (en) * | 1990-04-18 | 1992-03-10 | National Semiconductor Corporation | Application of electronic properties of germanium to inhibit n-type or p-type diffusion in silicon |
KR100203131B1 (ko) * | 1996-06-24 | 1999-06-15 | 김영환 | 반도체 소자의 초저접합 형성방법 |
US6723621B1 (en) * | 1997-06-30 | 2004-04-20 | International Business Machines Corporation | Abrupt delta-like doping in Si and SiGe films by UHV-CVD |
US6284672B1 (en) * | 1999-03-02 | 2001-09-04 | Advanced Micro Devices, Inc. | Method of forming a super-shallow amorphous layer in silicon |
US20030124821A1 (en) * | 2001-12-28 | 2003-07-03 | Robertson Lance Stanford | Versatile system for forming shallow semiconductor device features |
US7094671B2 (en) * | 2004-03-22 | 2006-08-22 | Infineon Technologies Ag | Transistor with shallow germanium implantation region in channel |
US20060234455A1 (en) * | 2005-04-19 | 2006-10-19 | Chien-Hao Chen | Structures and methods for forming a locally strained transistor |
DE102007020261B4 (de) * | 2007-04-30 | 2009-07-16 | Advanced Micro Devices, Inc., Sunnyvale | Verfahren zur Erhöhung der Dotierstoffaktivierung unter Anwendung mehrerer sequenzieller fortschrittlicher Laser/Blitzlicht-Ausheizprozesse |
JP2009164451A (ja) * | 2008-01-09 | 2009-07-23 | Dainippon Screen Mfg Co Ltd | 熱処理装置 |
JP5317483B2 (ja) * | 2008-01-29 | 2013-10-16 | 株式会社東芝 | 半導体装置 |
JP5291965B2 (ja) * | 2008-03-25 | 2013-09-18 | 大日本スクリーン製造株式会社 | 熱処理装置 |
JP5507274B2 (ja) * | 2010-01-29 | 2014-05-28 | 大日本スクリーン製造株式会社 | 熱処理方法および熱処理装置 |
JP5819633B2 (ja) * | 2011-05-13 | 2015-11-24 | 株式会社Screenホールディングス | 熱処理装置および熱処理方法 |
JP5855353B2 (ja) * | 2011-05-13 | 2016-02-09 | 株式会社Screenホールディングス | 熱処理装置および熱処理方法 |
-
2016
- 2016-02-03 JP JP2016018782A patent/JP2017139312A/ja active Pending
- 2016-12-19 TW TW105142016A patent/TW201740439A/zh unknown
-
2017
- 2017-01-20 US US15/411,315 patent/US20170221715A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
TW201740439A (zh) | 2017-11-16 |
US20170221715A1 (en) | 2017-08-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2017017277A (ja) | 熱処理装置および熱処理方法 | |
JP6587955B2 (ja) | 熱処理装置 | |
JP6598630B2 (ja) | 熱処理方法 | |
JP2018148178A (ja) | 熱処理方法 | |
JP6554328B2 (ja) | 熱処理装置 | |
JP6864564B2 (ja) | 熱処理方法 | |
JP6622617B2 (ja) | 熱処理装置 | |
US11764100B2 (en) | Heat treatment susceptor and heat treatment apparatus | |
JP2019087632A (ja) | 熱処理装置および熱処理方法 | |
JP6960344B2 (ja) | 熱処理方法および熱処理装置 | |
JP2018082118A (ja) | ドーパント導入方法および熱処理方法 | |
JP6770915B2 (ja) | 熱処理装置 | |
JP2015018909A (ja) | 熱処理装置 | |
JP2017139312A (ja) | 接合形成方法 | |
JP6982446B2 (ja) | 熱処理装置 | |
WO2019181048A1 (ja) | 熱処理方法および熱処理装置 | |
JP2019149521A (ja) | 熱処理方法 | |
JP2015088635A (ja) | 熱処理装置および熱処理方法 | |
JP2012199470A (ja) | 熱処理方法および熱処理装置 | |
JP2018018873A (ja) | 熱処理方法 | |
US20190393055A1 (en) | Heat treatment susceptor and heat treatment apparatus | |
JP2016219719A (ja) | 熱処理装置 | |
JP6438326B2 (ja) | 熱処理装置 | |
JP2018029128A (ja) | ドーパント導入方法 | |
JP2018133424A (ja) | 熱処理装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20181221 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20190815 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190827 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20191024 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20200331 |