JP2017123728A5 - - Google Patents

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Publication number
JP2017123728A5
JP2017123728A5 JP2016001552A JP2016001552A JP2017123728A5 JP 2017123728 A5 JP2017123728 A5 JP 2017123728A5 JP 2016001552 A JP2016001552 A JP 2016001552A JP 2016001552 A JP2016001552 A JP 2016001552A JP 2017123728 A5 JP2017123728 A5 JP 2017123728A5
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JP
Japan
Prior art keywords
diaphragm
piezoelectric element
driving body
electrode
sealing member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2016001552A
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English (en)
Japanese (ja)
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JP2017123728A (ja
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Publication date
Application filed filed Critical
Priority to JP2016001552A priority Critical patent/JP2017123728A/ja
Priority claimed from JP2016001552A external-priority patent/JP2017123728A/ja
Publication of JP2017123728A publication Critical patent/JP2017123728A/ja
Publication of JP2017123728A5 publication Critical patent/JP2017123728A5/ja
Withdrawn legal-status Critical Current

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JP2016001552A 2016-01-07 2016-01-07 圧電アクチュエーター、電子機器、及びロボット Withdrawn JP2017123728A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016001552A JP2017123728A (ja) 2016-01-07 2016-01-07 圧電アクチュエーター、電子機器、及びロボット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016001552A JP2017123728A (ja) 2016-01-07 2016-01-07 圧電アクチュエーター、電子機器、及びロボット

Publications (2)

Publication Number Publication Date
JP2017123728A JP2017123728A (ja) 2017-07-13
JP2017123728A5 true JP2017123728A5 (enExample) 2019-01-31

Family

ID=59305796

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016001552A Withdrawn JP2017123728A (ja) 2016-01-07 2016-01-07 圧電アクチュエーター、電子機器、及びロボット

Country Status (1)

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JP (1) JP2017123728A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7167545B2 (ja) * 2018-08-13 2022-11-09 Tdk株式会社 振動デバイス
KR102787633B1 (ko) * 2020-08-31 2025-03-26 엘지디스플레이 주식회사 진동 장치 및 이를 포함하는 장치

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0819273A (ja) * 1994-06-30 1996-01-19 Nikon Corp 超音波モータ
JP2005081538A (ja) * 2003-09-11 2005-03-31 Seiko Epson Corp マニピュレータおよびこれを備えた装置
JP2006340503A (ja) * 2005-06-02 2006-12-14 Seiko Epson Corp 圧電アクチュエータ及びこれを備えた機器
JP2010184422A (ja) * 2009-02-12 2010-08-26 Seiko Epson Corp 液体噴射ヘッドの製造方法
JP5056837B2 (ja) * 2009-12-21 2012-10-24 株式会社村田製作所 圧電デバイスの製造方法
JP5552825B2 (ja) * 2010-02-10 2014-07-16 セイコーエプソン株式会社 アクチュエータ、液滴噴射ヘッド及びその製造方法、並びに液滴噴射装置
JP6111849B2 (ja) * 2013-05-17 2017-04-12 コニカミノルタ株式会社 圧電デバイスの製造方法

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