JP2017123728A5 - - Google Patents

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Publication number
JP2017123728A5
JP2017123728A5 JP2016001552A JP2016001552A JP2017123728A5 JP 2017123728 A5 JP2017123728 A5 JP 2017123728A5 JP 2016001552 A JP2016001552 A JP 2016001552A JP 2016001552 A JP2016001552 A JP 2016001552A JP 2017123728 A5 JP2017123728 A5 JP 2017123728A5
Authority
JP
Japan
Prior art keywords
diaphragm
piezoelectric element
driving body
electrode
sealing member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2016001552A
Other languages
English (en)
Japanese (ja)
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JP2017123728A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2016001552A priority Critical patent/JP2017123728A/ja
Priority claimed from JP2016001552A external-priority patent/JP2017123728A/ja
Publication of JP2017123728A publication Critical patent/JP2017123728A/ja
Publication of JP2017123728A5 publication Critical patent/JP2017123728A5/ja
Withdrawn legal-status Critical Current

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JP2016001552A 2016-01-07 2016-01-07 圧電アクチュエーター、電子機器、及びロボット Withdrawn JP2017123728A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016001552A JP2017123728A (ja) 2016-01-07 2016-01-07 圧電アクチュエーター、電子機器、及びロボット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016001552A JP2017123728A (ja) 2016-01-07 2016-01-07 圧電アクチュエーター、電子機器、及びロボット

Publications (2)

Publication Number Publication Date
JP2017123728A JP2017123728A (ja) 2017-07-13
JP2017123728A5 true JP2017123728A5 (cg-RX-API-DMAC7.html) 2019-01-31

Family

ID=59305796

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016001552A Withdrawn JP2017123728A (ja) 2016-01-07 2016-01-07 圧電アクチュエーター、電子機器、及びロボット

Country Status (1)

Country Link
JP (1) JP2017123728A (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7167545B2 (ja) * 2018-08-13 2022-11-09 Tdk株式会社 振動デバイス
KR102787633B1 (ko) * 2020-08-31 2025-03-26 엘지디스플레이 주식회사 진동 장치 및 이를 포함하는 장치

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0819273A (ja) * 1994-06-30 1996-01-19 Nikon Corp 超音波モータ
JP2005081538A (ja) * 2003-09-11 2005-03-31 Seiko Epson Corp マニピュレータおよびこれを備えた装置
JP2006340503A (ja) * 2005-06-02 2006-12-14 Seiko Epson Corp 圧電アクチュエータ及びこれを備えた機器
JP2010184422A (ja) * 2009-02-12 2010-08-26 Seiko Epson Corp 液体噴射ヘッドの製造方法
JP5056837B2 (ja) * 2009-12-21 2012-10-24 株式会社村田製作所 圧電デバイスの製造方法
JP5552825B2 (ja) * 2010-02-10 2014-07-16 セイコーエプソン株式会社 アクチュエータ、液滴噴射ヘッド及びその製造方法、並びに液滴噴射装置
JP6111849B2 (ja) * 2013-05-17 2017-04-12 コニカミノルタ株式会社 圧電デバイスの製造方法

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