JP2017118054A5 - - Google Patents
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- Publication number
- JP2017118054A5 JP2017118054A5 JP2015254740A JP2015254740A JP2017118054A5 JP 2017118054 A5 JP2017118054 A5 JP 2017118054A5 JP 2015254740 A JP2015254740 A JP 2015254740A JP 2015254740 A JP2015254740 A JP 2015254740A JP 2017118054 A5 JP2017118054 A5 JP 2017118054A5
- Authority
- JP
- Japan
- Prior art keywords
- region
- imprint apparatus
- holding member
- imprint
- processed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000463 material Substances 0.000 claims description 6
- 230000017525 heat dissipation Effects 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 6
- 238000010521 absorption reaction Methods 0.000 claims 3
- 238000010438 heat treatment Methods 0.000 claims 3
- 239000001307 helium Substances 0.000 claims 2
- 229910052734 helium Inorganic materials 0.000 claims 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims 2
- 230000005855 radiation Effects 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015254740A JP2017118054A (ja) | 2015-12-25 | 2015-12-25 | インプリント装置、インプリント方法、および物品の製造方法 |
| KR1020187021163A KR20180096770A (ko) | 2015-12-25 | 2016-11-10 | 임프린트 장치, 임프린트 방법 및 물품 제조 방법 |
| PCT/JP2016/004859 WO2017110032A1 (en) | 2015-12-25 | 2016-11-10 | Imprint apparatus, method of imprinting, and method of fabricating product |
| TW105138272A TW201735105A (zh) | 2015-12-25 | 2016-11-22 | 壓印設備，壓印方法及製造物品的方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015254740A JP2017118054A (ja) | 2015-12-25 | 2015-12-25 | インプリント装置、インプリント方法、および物品の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2017118054A JP2017118054A (ja) | 2017-06-29 |
| JP2017118054A5 true JP2017118054A5 (enExample) | 2018-11-01 |
Family
ID=59089850
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015254740A Withdrawn JP2017118054A (ja) | 2015-12-25 | 2015-12-25 | インプリント装置、インプリント方法、および物品の製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2017118054A (enExample) |
| KR (1) | KR20180096770A (enExample) |
| TW (1) | TW201735105A (enExample) |
| WO (1) | WO2017110032A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102463923B1 (ko) * | 2017-09-18 | 2022-11-07 | 에스케이하이닉스 주식회사 | 임프린트 패턴 형성 방법 및 임프린트 장치 |
| JP7061895B2 (ja) * | 2018-02-27 | 2022-05-02 | Hoya株式会社 | インプリントモールド用基板、マスクブランク及びインプリントモールドの製造方法 |
| TWI771623B (zh) * | 2018-11-08 | 2022-07-21 | 日商佳能股份有限公司 | 壓印裝置和產品製造方法 |
| JP7286391B2 (ja) * | 2019-04-16 | 2023-06-05 | キヤノン株式会社 | インプリント装置及び物品の製造方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005045168A (ja) * | 2003-07-25 | 2005-02-17 | Tokyo Electron Ltd | インプリント方法およびインプリント装置 |
| WO2006068068A1 (ja) * | 2004-12-20 | 2006-06-29 | Komatsu Industries Corp. | 温調プレートおよび熱転写プレス機械 |
| ATE549294T1 (de) * | 2005-12-09 | 2012-03-15 | Obducat Ab | Vorrichtung und verfahren zum transfer von mustern mit zwischenstempel |
| JP5686779B2 (ja) * | 2011-10-14 | 2015-03-18 | キヤノン株式会社 | インプリント装置、それを用いた物品の製造方法 |
| JP5935385B2 (ja) | 2012-02-27 | 2016-06-15 | 大日本印刷株式会社 | ナノインプリント用レプリカテンプレートの製造方法及びレプリカテンプレート |
| US10359696B2 (en) * | 2013-10-17 | 2019-07-23 | Canon Kabushiki Kaisha | Imprint apparatus, and method of manufacturing article |
-
2015
- 2015-12-25 JP JP2015254740A patent/JP2017118054A/ja not_active Withdrawn
-
2016
- 2016-11-10 KR KR1020187021163A patent/KR20180096770A/ko not_active Ceased
- 2016-11-10 WO PCT/JP2016/004859 patent/WO2017110032A1/en not_active Ceased
- 2016-11-22 TW TW105138272A patent/TW201735105A/zh unknown
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