JP2017118054A5

JP2017118054A5 -

Info

Publication number: JP2017118054A5
Application number: JP2015254740A
Authority: JP
Filing date: 2015-12-25
Publication date: 2018-11-01

Description

本発明は、型を用いて物体の被処理領域上にインプリント材のパターンを形成するインプリント装置であって、前記物体の前記被処理領域側とは反対側の面が対向するように前記物体を保持する保持部材と、前記保持部材が前記物体を保持した状態で、前記反対側の面側に配置された放熱部材と、前記型と前記物体を介して前記放熱部材に光を照射する光学系を有し、前記放熱部材は、前記光学系から照射された光を受けて放熱し、前記被処理領域を変形させることを特徴とする。 The present invention provides an imprint apparatus for forming a pattern of the imprint material onto a processing area of an object by using a mold such that said surface opposite faces and the treated region side of the object irradiating a holding member that holds the object, in a state where the holding member is holding the object, a front Symbol opposite heat radiating member arranged on the side of the light on the heat dissipation member via the type and the object And the heat radiating member receives and radiates light irradiated from the optical system to deform the region to be processed .

Claims

An imprint apparatus that forms a pattern of an imprint material on a processing area of an object using a mold,
A holding member that holds the object such that a surface of the object opposite to the processing region side faces,
In a state where the holding member is holding the object, a heat radiation member disposed on the side of the front Symbol opposite,
An optical system for irradiating light to the heat dissipation member through the mold and the object;
The imprinting apparatus , wherein the heat radiating member receives and radiates light irradiated from the optical system to deform the region to be processed .

Respect absorption coefficient before Symbol optics to light you irradiation, the absorption coefficient of the material of the back side of the region side of the surface of the object to be processed region in the heat radiating member, and greater than the absorption coefficient of the quartz The imprint apparatus according to claim 1 .

The imprint apparatus according to claim 1, wherein the heat radiating member is disposed in a recess provided in the object or a recess provided in the holding member.

The imprint apparatus according to claim 3 , further comprising a gas supply unit configured to supply gas to the recess through a supply port provided in the holding member.

The imprint apparatus according to claim 4, wherein the gas is helium.

The imprint apparatus according to claim 3, wherein the concave portion is provided at a position facing a region on the back side of the processing target region.

The surface of the heat radiating member that faces the region on the back side of the region to be processed is provided with a groove that divides the surface that faces the region on the back side of the region to be processed into a plurality of regions. Item 7. The imprint apparatus according to any one of Items 1 to 6 .

The heat dissipation member is provided on a table provided on the object side of the holding member, according to claim 1 to 7 the thermal conductivity of the base is characterized by lower than the thermal conductivity of the heat radiating member The imprint apparatus of any one of these.

The heat radiation member, the imprint apparatus according to any one of claims 1 to 8, characterized in that said applying thermal energy with a spatial distribution relative to the treated area.

The heat dissipation member and the imprint apparatus according to any one of claims 1 to 9, characterized in that the object is non-contact.

An imprint apparatus that forms a pattern of an imprint material on a processing area of an object using a mold,
A holding member that holds the object such that a surface of the object opposite to the processing region side faces,
In a state where the holding member holds the object, it has a heating element disposed on the opposite surface side,
The imprinting apparatus according to claim 1, wherein the heating element emits thermal energy toward a region on the back side of the processing target region.

The imprint apparatus according to claim 11, wherein the heating element is disposed in a recess provided in the object or a recess provided in the holding member.

The imprint apparatus according to claim 12, further comprising a gas supply unit configured to supply gas to the recess through a supply port provided in the holding member.

The imprint apparatus according to claim 13, wherein the gas is helium.

An imprint apparatus that forms a pattern of an imprint material on a processing area of an object using a mold,
A holding member surface opposite holds the object so as to face the said treated region side of the object,
Deformation means for deforming the shape of the region to be processed of the object,
The deforming means is located in a space generated between the object and the holding member in a state where the holding member holds the object, and is opposite to the light by being irradiated with light through the mold and the object. An imprint apparatus comprising: a heat dissipating member that releases heat energy toward a region on the side surface behind the region to be processed.

Using the imprint apparatus according to any one of claims 1 to 15 to form a cured pattern of the imprint material on the treated area of the object;
A step of processing the object pattern is formed,
A method for producing an article comprising: