JP2017112234A5 - - Google Patents

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Publication number
JP2017112234A5
JP2017112234A5 JP2015245747A JP2015245747A JP2017112234A5 JP 2017112234 A5 JP2017112234 A5 JP 2017112234A5 JP 2015245747 A JP2015245747 A JP 2015245747A JP 2015245747 A JP2015245747 A JP 2015245747A JP 2017112234 A5 JP2017112234 A5 JP 2017112234A5
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JP
Japan
Prior art keywords
unsaturated compound
derived
moles
copolymer
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2015245747A
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English (en)
Japanese (ja)
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JP2017112234A (ja
JP6561821B2 (ja
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Priority to JP2015245747A priority Critical patent/JP6561821B2/ja
Priority claimed from JP2015245747A external-priority patent/JP6561821B2/ja
Publication of JP2017112234A publication Critical patent/JP2017112234A/ja
Publication of JP2017112234A5 publication Critical patent/JP2017112234A5/ja
Application granted granted Critical
Publication of JP6561821B2 publication Critical patent/JP6561821B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2015245747A 2015-12-17 2015-12-17 絶縁膜形成用組成物およびそれを用いたゲート絶縁膜 Expired - Fee Related JP6561821B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015245747A JP6561821B2 (ja) 2015-12-17 2015-12-17 絶縁膜形成用組成物およびそれを用いたゲート絶縁膜

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015245747A JP6561821B2 (ja) 2015-12-17 2015-12-17 絶縁膜形成用組成物およびそれを用いたゲート絶縁膜

Publications (3)

Publication Number Publication Date
JP2017112234A JP2017112234A (ja) 2017-06-22
JP2017112234A5 true JP2017112234A5 (enExample) 2018-09-13
JP6561821B2 JP6561821B2 (ja) 2019-08-21

Family

ID=59081773

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015245747A Expired - Fee Related JP6561821B2 (ja) 2015-12-17 2015-12-17 絶縁膜形成用組成物およびそれを用いたゲート絶縁膜

Country Status (1)

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JP (1) JP6561821B2 (enExample)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62516A (ja) * 1985-06-26 1987-01-06 Canon Inc 活性エネルギ−線硬化型樹脂組成物
JP2003048929A (ja) * 2001-05-29 2003-02-21 Nippon Shokubai Co Ltd 硬化性樹脂組成物
JP2004300375A (ja) * 2003-04-01 2004-10-28 Showa Highpolymer Co Ltd エポキシ樹脂組成物およびその硬化物
JP2011228678A (ja) * 2010-04-01 2011-11-10 Sumitomo Chemical Co Ltd フッ素系有機化合物溶媒を含む有機薄膜トランジスタ絶縁層用組成物
WO2011162001A1 (ja) * 2010-06-23 2011-12-29 旭硝子株式会社 硬化性組成物および硬化膜の製造方法
JP2012195580A (ja) * 2011-03-03 2012-10-11 Mitsubishi Chemicals Corp 電界効果トランジスタのゲート絶縁層用組成物、ゲート絶縁層、電界効果トランジスタ及び表示パネル
JP2013214649A (ja) * 2012-04-03 2013-10-17 Asahi Glass Co Ltd 半導体装置およびその製造方法
JP6369023B2 (ja) * 2014-01-08 2018-08-08 東洋インキＳｃホールディングス株式会社 反応性モノマーおよびそれを用いてなる樹脂組成物

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