JP2017103952A5 - - Google Patents

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Publication number
JP2017103952A5
JP2017103952A5 JP2015236647A JP2015236647A JP2017103952A5 JP 2017103952 A5 JP2017103952 A5 JP 2017103952A5 JP 2015236647 A JP2015236647 A JP 2015236647A JP 2015236647 A JP2015236647 A JP 2015236647A JP 2017103952 A5 JP2017103952 A5 JP 2017103952A5
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JP
Japan
Prior art keywords
insulating layer
piezoelectric
electrode
forming
motor
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JP2015236647A
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English (en)
Japanese (ja)
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JP6641943B2 (ja
JP2017103952A (ja
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Priority to JP2015236647A priority Critical patent/JP6641943B2/ja
Priority claimed from JP2015236647A external-priority patent/JP6641943B2/ja
Publication of JP2017103952A publication Critical patent/JP2017103952A/ja
Publication of JP2017103952A5 publication Critical patent/JP2017103952A5/ja
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Publication of JP6641943B2 publication Critical patent/JP6641943B2/ja
Expired - Fee Related legal-status Critical Current
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JP2015236647A 2015-12-03 2015-12-03 モーター用圧電駆動装置およびその製造方法、モーター、ロボット、ならびにポンプ Expired - Fee Related JP6641943B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015236647A JP6641943B2 (ja) 2015-12-03 2015-12-03 モーター用圧電駆動装置およびその製造方法、モーター、ロボット、ならびにポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015236647A JP6641943B2 (ja) 2015-12-03 2015-12-03 モーター用圧電駆動装置およびその製造方法、モーター、ロボット、ならびにポンプ

Publications (3)

Publication Number Publication Date
JP2017103952A JP2017103952A (ja) 2017-06-08
JP2017103952A5 true JP2017103952A5 (cg-RX-API-DMAC10.html) 2018-11-08
JP6641943B2 JP6641943B2 (ja) 2020-02-05

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ID=59017245

Family Applications (1)

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JP2015236647A Expired - Fee Related JP6641943B2 (ja) 2015-12-03 2015-12-03 モーター用圧電駆動装置およびその製造方法、モーター、ロボット、ならびにポンプ

Country Status (1)

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JP (1) JP6641943B2 (cg-RX-API-DMAC10.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115250626B (zh) * 2021-02-26 2024-05-28 京东方科技集团股份有限公司 一种触觉反馈基板、触觉反馈装置及触觉反馈方法
CN117356198A (zh) * 2022-04-29 2024-01-05 京东方科技集团股份有限公司 压电致动器及触觉反馈装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5070674B2 (ja) * 2004-06-14 2012-11-14 富士ゼロックス株式会社 インクジェット記録ヘッド、及びインクジェット記録装置
JP2010180738A (ja) * 2009-02-04 2010-08-19 Seiko Epson Corp マイクロポンプ
JP5708098B2 (ja) * 2011-03-18 2015-04-30 株式会社リコー 液体吐出ヘッド、液体吐出装置および画像形成装置
JP6060672B2 (ja) * 2012-12-20 2017-01-18 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置、圧電素子及びその製造方法
JP6268999B2 (ja) * 2013-12-06 2018-01-31 セイコーエプソン株式会社 圧電モーター、ロボットハンド、ロボット、指アシスト装置、電子部品搬送装置、電子部品検査装置、送液ポンプ、印刷装置、電子時計、投影装置

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