JP2017101099A - Thermosetting resin composition, thermosetting resin film, printed wiring board, and semiconductor device - Google Patents

Thermosetting resin composition, thermosetting resin film, printed wiring board, and semiconductor device Download PDF

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JP2017101099A
JP2017101099A JP2015232839A JP2015232839A JP2017101099A JP 2017101099 A JP2017101099 A JP 2017101099A JP 2015232839 A JP2015232839 A JP 2015232839A JP 2015232839 A JP2015232839 A JP 2015232839A JP 2017101099 A JP2017101099 A JP 2017101099A
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thermosetting resin
component
resin composition
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resin film
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JP6675183B2 (en
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津与志 黒川
Tsuyoshi Kurokawa
津与志 黒川
聡子 高橋
Satoko Takahashi
聡子 高橋
吉田 真樹
Maki Yoshida
真樹 吉田
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Namics Corp
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Namics Corp
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Priority to KR1020187015799A priority patent/KR102570161B1/en
Priority to CN201680069328.6A priority patent/CN108368349A/en
Priority to PCT/JP2016/083756 priority patent/WO2017094489A1/en
Priority to TW105138638A priority patent/TWI731901B/en
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/16Nitrogen-containing compounds
    • C08K5/34Heterocyclic compounds having nitrogen in the ring
    • C08K5/3467Heterocyclic compounds having nitrogen in the ring having more than two nitrogen atoms in the ring
    • C08K5/3477Six-membered rings
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/49Phosphorus-containing compounds
    • C08K5/51Phosphorus bound to oxygen
    • C08K5/52Phosphorus bound to oxygen only
    • C08K5/521Esters of phosphoric acids, e.g. of H3PO4
    • C08K5/523Esters of phosphoric acids, e.g. of H3PO4 with hydroxyaryl compounds
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/16Nitrogen-containing compounds
    • C08K5/34Heterocyclic compounds having nitrogen in the ring
    • C08K5/3467Heterocyclic compounds having nitrogen in the ring having more than two nitrogen atoms in the ring
    • C08K5/3477Six-membered rings
    • C08K5/3492Triazines
    • C08K5/34924Triazines containing cyanurate groups; Tautomers thereof
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L101/00Compositions of unspecified macromolecular compounds
    • C08L101/12Compositions of unspecified macromolecular compounds characterised by physical features, e.g. anisotropy, viscosity or electrical conductivity
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits

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  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
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  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
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  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a thermosetting resin composition capable of forming an insulating film, which is excellent in dielectric characteristics, has high flame retardancy, and has high adhesion, without using a conventional halogen-based flame retardant.SOLUTION: There is provided a thermosetting resin composition which contains (A) aromatic condensed phosphoric ester, (B) melamine cyanurate, and (C) a resin having a relative dielectric constant at a frequency of 1.9 GHz of 2.9 or less, where the total of the (A) component and the (B) component is 45 pts.mass or more with respect to 100 pts.mass of the (C) component, and the (A) component is more than the (B) component. Preferably, the thermosetting resin composition has relative dielectric constant at a frequency of 1.9 GHz of 3.0 or less.SELECTED DRAWING: None

Description

本発明は、熱硬化性樹脂組成物、熱硬化性樹脂フィルム、プリント配線板、および半導体装置に関する。特に、難燃性の熱硬化性樹脂組成物、熱硬化性樹脂フィルム、プリント配線板、および半導体装置に関する。   The present invention relates to a thermosetting resin composition, a thermosetting resin film, a printed wiring board, and a semiconductor device. In particular, the present invention relates to a flame retardant thermosetting resin composition, a thermosetting resin film, a printed wiring board, and a semiconductor device.

近年、半導体分野において、伝送信号の高周波化が進んでいる。この伝送信号の高周波化に対応可能な低誘電率接着フィルムに対して、難燃性が、要求される用途がある。   In recent years, the frequency of transmission signals has been increasing in the semiconductor field. There are applications where flame retardancy is required for low dielectric constant adhesive films that can cope with high frequency transmission signals.

高周波に対応可能な材料としては、熱硬化性ポリフェニレンエーテル(PPE)等が、難燃性の材料としては、ハロゲン系難燃剤、リン系難燃剤、窒素系難燃剤等が、知られている。従来、使用されているハロゲン系難燃剤は、環境問題の観点からハロゲンフリーの要求が強く、リン系難燃剤、窒素系難燃剤等の使用が、検討されている。   Thermosetting polyphenylene ether (PPE) or the like is known as a material that can handle high frequencies, and halogen-based flame retardants, phosphorus-based flame retardants, nitrogen-based flame retardants, and the like are known as flame retardant materials. Conventionally, halogen-based flame retardants used have a strong halogen-free requirement from the viewpoint of environmental problems, and the use of phosphorus-based flame retardants, nitrogen-based flame retardants, and the like has been studied.

まず、ポリフェニレンエーテルを所定量、熱可塑性エラストマーを所定量、およびポリオレフィン樹脂を所定量含有する樹脂成分と、樹脂成分100質量部に対してリン系難燃剤および窒素系難燃剤の一方又は両方を5〜100質量部含有する難燃性樹脂シート、及びそれを用いたフラットケーブルが、報告されている(特許文献1)。   First, a resin component containing a predetermined amount of polyphenylene ether, a predetermined amount of thermoplastic elastomer, and a predetermined amount of polyolefin resin, and one or both of a phosphorus-based flame retardant and a nitrogen-based flame retardant with respect to 100 parts by mass of the resin component. A flame retardant resin sheet containing ˜100 parts by mass and a flat cable using the same have been reported (Patent Document 1).

しかしながら、上記難燃性樹脂シートは、フラットケーブルへの使用を前提としているため、プリント配線板用途としては、難燃性が十分ではないおそれがある。   However, since the flame retardant resin sheet is premised on use for a flat cable, there is a possibility that the flame retardancy is not sufficient for printed wiring board applications.

次に、分子内にポリフェニレンエーテル骨格を有する2官能性フェニレンエーテルオリゴマーの末端をビニル化した所定のビニル合物と、分子内にマレイミド基を2個以上有する所定のビスマレイミド化合物を含有する硬化性樹脂組成物が、報告されている(特許文献2)。この硬化性樹脂組成物には、リン系難燃剤が使用されている。   Next, curability containing a predetermined vinyl compound in which the terminal of a bifunctional phenylene ether oligomer having a polyphenylene ether skeleton in the molecule is vinylated and a predetermined bismaleimide compound having two or more maleimide groups in the molecule A resin composition has been reported (Patent Document 2). In this curable resin composition, a phosphorus-based flame retardant is used.

しかしながら、上記硬化性樹脂組成物に使用されているビスマレイミド化合物は、耐熱性に優れるが、上記硬化性樹脂組成物により作製されるフィルムは、剛直になり、フィルム成形性が悪く、フィルムの接着力が低い、という問題がある。   However, the bismaleimide compound used in the curable resin composition is excellent in heat resistance, but the film produced from the curable resin composition becomes rigid, has poor film moldability, and adheres to the film. There is a problem that power is low.

国際公開第2011/043129号International Publication No. 2011/043129 特開2009−161725号公報JP 2009-161725 A

本発明は、従来のハロゲン系難燃剤を使用せずに、誘電特性に優れ、難燃性が高く、接着力の高い絶縁性フィルムを形成し得る、熱硬化性樹脂組成物を提供することを目的とする。   The present invention provides a thermosetting resin composition that can form an insulating film having excellent dielectric properties, high flame retardancy, and high adhesion without using a conventional halogen flame retardant. Objective.

本発明は、以下の構成を有することによって上記問題を解決した熱硬化性樹脂組成物、熱硬化性樹脂フィルム、プリント配線板、および半導体装置に関する。
〔1〕(A)芳香族縮合リン酸エステルと、(B)メラミンシアヌレートと、(C)周波数1.9GHzでの比誘電率が2.9以下である樹脂と、を含み、(C)成分100質量部に対する(A)成分と(B)成分との合計が45質量部以上であり、(A)成分が(B)成分より多いことを特徴とする、熱硬化性樹脂組成物。
〔2〕周波数1.9GHzでの比誘電率が、3.0以下である、上記〔1〕記載の熱硬化性樹脂組成物。
〔3〕(A)成分が、ビスジキシレニルホスフェートである、上記〔1〕または〔2〕記載の熱硬化性樹脂組成物。
〔4〕上記〔1〕〜〔3〕のいずれか記載の熱硬化性樹脂組成物を用いる、熱硬化性樹脂フィルム。
〔5〕上記〔1〕〜〔3〕のいずれか記載の熱硬化性樹脂組成物の硬化物、または上記〔4〕記載の熱硬化性樹脂フィルムの硬化物を用いる、プリント配線板。
〔6〕上記〔1〕〜〔3〕のいずれか記載の樹脂組成物の硬化物、または上記〔4〕記載の熱硬化性樹脂フィルムの硬化物を用いる、半導体装置。
The present invention relates to a thermosetting resin composition, a thermosetting resin film, a printed wiring board, and a semiconductor device that have solved the above problems by having the following configuration.
[1] (A) an aromatic condensed phosphate ester, (B) melamine cyanurate, and (C) a resin having a relative dielectric constant of 2.9 or less at a frequency of 1.9 GHz, The thermosetting resin composition characterized in that the total of component (A) and component (B) is 45 parts by mass or more and component (A) is greater than component (B) relative to 100 parts by mass of component.
[2] The thermosetting resin composition according to [1], wherein the relative dielectric constant at a frequency of 1.9 GHz is 3.0 or less.
[3] The thermosetting resin composition according to the above [1] or [2], wherein the component (A) is bis-dixylenyl phosphate.
[4] A thermosetting resin film using the thermosetting resin composition according to any one of [1] to [3].
[5] A printed wiring board using the cured product of the thermosetting resin composition according to any one of [1] to [3] or the cured product of the thermosetting resin film according to [4].
[6] A semiconductor device using the cured product of the resin composition according to any one of [1] to [3] or the cured product of the thermosetting resin film according to [4].

本発明〔1〕によれば、ハロゲン系難燃剤を使用せずに、誘電特性に優れ、難燃性が高く、接着力が高い絶縁性フィルムを形成可能な熱硬化性樹脂組成物を提供することができる。   According to the present invention [1], there is provided a thermosetting resin composition capable of forming an insulating film having excellent dielectric properties, high flame retardancy, and high adhesion without using a halogen-based flame retardant. be able to.

本発明〔4〕によれば、誘電特性に優れ、難燃性が高く、接着力が高い熱硬化性樹脂組成物により形成された絶縁性フィルムを提供することができる。   According to the present invention [4], it is possible to provide an insulating film formed of a thermosetting resin composition having excellent dielectric properties, high flame retardancy, and high adhesive strength.

本発明〔5〕によれば、上記熱硬化性樹脂組成物の硬化物、または上記熱硬化性樹脂フィルムの硬化物により、誘電特性に優れ、難燃性が高いプリント配線板を提供することができる。本発明〔6〕によれば、上記熱硬化性樹脂組成物の硬化物、または上記熱硬化性樹脂フィルムの硬化物により、誘電特性に優れ、難燃性が高いため、高周波用途に適した半導体装置を提供することができる。   According to the present invention [5], the cured product of the thermosetting resin composition or the cured product of the thermosetting resin film can provide a printed wiring board having excellent dielectric properties and high flame retardancy. it can. According to the present invention [6], a cured product of the thermosetting resin composition or a cured product of the thermosetting resin film has excellent dielectric characteristics and high flame retardancy, so that it is a semiconductor suitable for high frequency applications. An apparatus can be provided.

〔熱硬化性樹脂組成物〕
本発明の熱硬化性樹脂組成物は、(A)芳香族縮合リン酸エステルと、(B)メラミンシアヌレートと、(C)周波数1.9GHzでの比誘電率が2.9以下である樹脂と、を含み、(C)成分100質量部に対する(A)成分と(B)成分との合計が45質量部以上であり、(A)成分が(B)成分より多い。ここで、(A)成分、および(B)成分は、難燃剤として添加する。(A)成分、および(B)成分は、誘電特性を悪化させにくい。本発明の熱硬化性樹脂組成物は、(A)成分と(B)成分を併用することにより、(A)成分または(B)成分を、それぞれ単独で使用する場合と比較して、米国UL規格の垂直燃焼試験のUL94のVTM−0相当の難燃性を満たすための難燃剤の添加量を、減少させることができる。難燃剤は、樹脂組成物の難燃性以外の物性を低下させる(例えば、接着性や硬化膜強度を低下させる)ため、添加量が少ない方が好ましい。
[Thermosetting resin composition]
The thermosetting resin composition of the present invention comprises (A) an aromatic condensed phosphate ester, (B) melamine cyanurate, and (C) a resin having a relative dielectric constant of 2.9 or less at a frequency of 1.9 GHz. The total of the component (A) and the component (B) with respect to 100 parts by mass of the component (C) is 45 parts by mass or more, and the component (A) is more than the component (B). Here, (A) component and (B) component are added as a flame retardant. The component (A) and the component (B) are unlikely to deteriorate the dielectric characteristics. In the thermosetting resin composition of the present invention, the combination of the component (A) and the component (B) makes it possible to use the component UL (A) or the component (B) in comparison with the case where the component (A) or the component (B) is used alone. It is possible to reduce the amount of flame retardant added to satisfy the flame retardancy equivalent to VTM-0 of UL94 in the standard vertical combustion test. Since a flame retardant reduces physical properties other than the flame retardancy of the resin composition (for example, lowers adhesiveness and cured film strength), it is preferable that the amount added is small.

(A)成分である芳香族縮合リン酸エステルは、熱硬化性樹脂組成物に難燃性を付与する。芳香族縮合リン酸エステルとしては、ビスジキシレニルホスフェートが好ましく、具体的には、化学式(1)で表されるレゾルシノールビス−ジキシレニルホスフェート:   The aromatic condensed phosphate ester (A) imparts flame retardancy to the thermosetting resin composition. As the aromatic condensed phosphate ester, bisdixylenyl phosphate is preferable. Specifically, resorcinol bis-dixylenyl phosphate represented by the chemical formula (1):

Figure 2017101099
Figure 2017101099

化学式(2)で表されるp−クレゾールビスージキシレニルホスフェート: P-cresol bis-dixylenyl phosphate represented by the chemical formula (2):

Figure 2017101099
Figure 2017101099

化学式(3)で表されるビフェノールビス−ジキシレニルホスフェート: Biphenol bis-dixylenyl phosphate represented by chemical formula (3):

Figure 2017101099
Figure 2017101099

化学式(4)で表されるレゾルシノールビス−ジフェニルホスフェート: Resorcinol bis-diphenyl phosphate represented by chemical formula (4):

Figure 2017101099
Figure 2017101099

化学式(5)で表されるビスフェノールAビス−ジフェニルホスフェート: Bisphenol A bis-diphenyl phosphate represented by chemical formula (5):

Figure 2017101099
Figure 2017101099

がより好ましい。ここで、レゾルシノールビス−ジキシレニルホスフェートは、常温固形(粉末状)で、樹脂に溶解し、p−クレゾールビスージキシレニルホスフェートとビフェノールビス−ジキシレニルホスフェートは、常温固形(粉末状)で、樹脂に溶解せず、レゾルシノールビス−ジフェニルホスフェートとビスフェノールAビス−ジフェニルホスフェートは、液状である。粉末状であるビスジキシレニルホスフェートを用いることにより、液状である他の芳香族縮合リン酸エステルと比較して、熱硬化性樹脂フィルム形成後の経時によるブルーミングの発生を少なくすることができる。 Is more preferable. Here, resorcinol bis-dixylenyl phosphate is solid at room temperature (powder) and dissolved in resin, and p-cresol bis-dixylenyl phosphate and biphenol bis-dixylenyl phosphate are solid at room temperature (powder). Resorcinol bis-diphenyl phosphate and bisphenol A bis-diphenyl phosphate do not dissolve in the resin and are liquid. By using powdered bisdixylenyl phosphate, it is possible to reduce the occurrence of blooming over time after the thermosetting resin film is formed, as compared with other aromatic condensed phosphate esters that are liquid.

(B)成分であるメラミンシアヌレートは、熱硬化性樹脂組成物に難燃性を付与する。メラミンシアヌレート(C・C)は、化学式(6): The melamine cyanurate as the component (B) imparts flame retardancy to the thermosetting resin composition. Melamine cyanurate (C 3 H 6 N 6 .C 3 H 3 N 3 O 3 ) has the chemical formula (6):

Figure 2017101099
Figure 2017101099

で表される。 It is represented by

(C)成分である周波数1.9GHzでの比誘電率が2.9以下である樹脂は、熱硬化性樹脂組成物に高周波特性(すなわち低誘電率)、耐熱性、接着性を付与する。ここで、高周波特性とは、高周波領域での伝送損失を小さくする性質をいい、(C)成分は、比誘電率(ε)が2.9以下であるので、高周波特性に非常に優れている。(C)成分は、(C1)熱硬化性樹脂と、(C2)分子中の主鎖の不飽和二重結合が水添されたスチレン系ブロックコポリマーとを含むと、好ましい。   The resin having a relative dielectric constant of 2.9 or less at a frequency of 1.9 GHz, which is the component (C), imparts high-frequency characteristics (that is, low dielectric constant), heat resistance, and adhesiveness to the thermosetting resin composition. Here, the high frequency characteristic means a property of reducing transmission loss in a high frequency region, and the component (C) has a very high frequency characteristic because the relative dielectric constant (ε) is 2.9 or less. . The component (C) preferably contains (C1) a thermosetting resin and (C2) a styrenic block copolymer in which the unsaturated double bond of the main chain in the molecule is hydrogenated.

(C1)成分である熱硬化性樹脂は、熱硬化性樹脂組成物に、接着性、高周波特性、耐熱性を付与する。(C1)成分としては、末端にスチレン基を有する樹脂、エポキシ樹脂が、好ましく、末端にスチレン基を有する樹脂がより好ましい。   The thermosetting resin as the component (C1) imparts adhesiveness, high frequency characteristics, and heat resistance to the thermosetting resin composition. As the component (C1), a resin having a styrene group at the terminal and an epoxy resin are preferable, and a resin having a styrene group at the terminal is more preferable.

末端にスチレン基を有する樹脂としては、下記の一般式(7):   As the resin having a styrene group at the terminal, the following general formula (7):

Figure 2017101099
Figure 2017101099
Figure 2017101099
Figure 2017101099

(式中、
、R、R、R、R、R、Rは同一又は異なってもよく、水素原子、ハロゲン原子、アルキル基、ハロゲン化アルキル基又はフェニル基であり、
−(O−X−O)−は構造式(8)で示され、ここで、R、R、R10、R14、R15は、同一又は異なってもよく、ハロゲン原子又は炭素数6以下のアルキル基又はフェニル基であり、R11、R12、R13は、同一又は異なってもよく、水素原子、ハロゲン原子又は炭素数6以下のアルキル基又はフェニル基であり、
−(Y−O)−は構造式(9)で示される1種類の構造、又は構造式(9)で示される2種類以上の構造がランダムに配列したものであり、ここで、R16、R17は同一又は異なってもよく、ハロゲン原子又は炭素数6以下のアルキル基又はフェニル基であり、R18、R19は同一又は異なってもよく、水素原子、ハロゲン原子又は炭素数6以下のアルキル基又はフェニル基であり、
Zは炭素数1以上の有機基であり、場合により酸素原子、窒素原子、硫黄原子、ハロゲン原子を含むこともあり、
a、bは少なくともいずれか一方が0でない、0〜300の整数を示し、
c、dは0又は1の整数を示す)で示される、ビニル基が結合したフェニル基を両末端に持つ熱硬化性ポリフェニレンエーテルのオリゴマー体(以下、変性PPEという)が好ましい。(C1)成分として変性PPEを用いる場合には、高周波特性が優れていることに加えて、耐熱性が優れており、硬化後の熱硬化性樹脂組成物の経時変化が生じにくく、この熱硬化性樹脂組成物を有するプリント配線板、半導体装置の長期信頼性を維持できる。さらに、樹脂中の親水基の数が少ないため吸湿性や耐薬品性に優れる、という特徴がある。この変性PPEは、特開2004−59644号公報に記載されたとおりである。
(Where
R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 7 may be the same or different and are a hydrogen atom, a halogen atom, an alkyl group, a halogenated alkyl group or a phenyl group,
— (O—X—O) — is represented by the structural formula (8), in which R 8 , R 9 , R 10 , R 14 , and R 15 may be the same or different and are each a halogen atom or a carbon number 6 or less alkyl group or phenyl group, R 11 , R 12 and R 13 may be the same or different, and are a hydrogen atom, a halogen atom or an alkyl group or phenyl group having 6 or less carbon atoms,
-(YO)-is one type of structure represented by the structural formula (9) or two or more types of structures represented by the structural formula (9) arranged at random, where R 16 , R 17 may be the same or different, and is a halogen atom, an alkyl group having 6 or less carbon atoms, or a phenyl group, and R 18 and R 19 may be the same or different, and may be a hydrogen atom, halogen atom, or 6 or less carbon atoms. An alkyl group or a phenyl group,
Z is an organic group having 1 or more carbon atoms, and may contain an oxygen atom, a nitrogen atom, a sulfur atom, or a halogen atom in some cases,
a and b each represents an integer of 0 to 300, at least one of which is not 0;
A thermosetting polyphenylene ether oligomer (hereinafter, referred to as modified PPE) having a phenyl group bonded to a vinyl group at both ends, which is represented by c and d are integers of 0 or 1, is preferable. When the modified PPE is used as the component (C1), in addition to excellent high-frequency characteristics, heat resistance is excellent, and the thermosetting resin composition after curing hardly changes over time. Long-term reliability of a printed wiring board and a semiconductor device having a conductive resin composition can be maintained. Furthermore, since the number of hydrophilic groups in the resin is small, it has a feature of being excellent in hygroscopicity and chemical resistance. This modified PPE is as described in JP-A-2004-59644.

一般式(7)で示される変性PPEの−(O−X−O)−についての構造式(8)において、R、R、R10、R14、R15は、好ましくは、炭素数3以下のアルキル基であり、R11、R12、R13は、好ましくは、水素原子又は炭素数3以下のアルキル基である。具体的には、構造式(10)が挙げられる。 In the structural formula (8) for — (O—X—O) — of the modified PPE represented by the general formula (7), R 8 , R 9 , R 10 , R 14 and R 15 are preferably carbon atoms. It is an alkyl group having 3 or less, and R 11 , R 12 and R 13 are preferably a hydrogen atom or an alkyl group having 3 or less carbon atoms. Specifically, structural formula (10) is mentioned.

Figure 2017101099
Figure 2017101099

−(Y−O)−についての構造式(9)において、R16、R17は、好ましくは、炭素数3以下のアルキル基であり、R18、R19は、好ましくは、水素原子又は炭素数3以下のアルキル基である。具体的には、構造式(11)又は(12)が挙げられる。 In Structural Formula (9) for — (Y—O) —, R 16 and R 17 are preferably an alkyl group having 3 or less carbon atoms, and R 18 and R 19 are preferably a hydrogen atom or a carbon atom. It is an alkyl group having a number of 3 or less. Specifically, structural formula (11) or (12) is mentioned.

Figure 2017101099
Figure 2017101099

Zは、炭素数3以下のアルキレン基が挙げられ、具体的には、メチレン基である。   Z includes an alkylene group having 3 or less carbon atoms, specifically a methylene group.

a、bは少なくともいずれか一方が0でない、0〜300の整数を示し、好ましくは0〜30の整数を示す。   a and b each represent an integer of 0 to 300, preferably at least one of which is not 0, and preferably represents an integer of 0 to 30.

末端にスチレン基を有する樹脂は、平均分子量分子量800〜3500であると好ましく、800〜3000である一般式(7)の変性PPEが、より好ましい。更に好ましくは、数平均分子量800〜2500である。数平均分子量は、ゲルパーミエーションクロマトグラフィー法(GPC)により、標準ポリスチレンによる検量線を用いた値とする。   The resin having a styrene group at the end preferably has an average molecular weight molecular weight of 800 to 3,500, and more preferably a modified PPE of the general formula (7) having a molecular weight of 800 to 3000. More preferably, the number average molecular weight is 800 to 2500. The number average molecular weight is a value using a standard polystyrene calibration curve by gel permeation chromatography (GPC).

エポキシ樹脂は、液状エポキシ樹脂であっても固形エポキシ樹脂であってもよい。エポキシ樹脂としては、アミノフェノール型エポキシ樹脂、ビスフェノールA型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、ナフタレン型エポキシ樹脂、ビフェニル型エポキシ樹脂、水添ビスフェノール型エポキシ樹脂、脂環式エポキシ樹脂、アルコールエーテル型エポキシ樹脂、環状脂肪族型エポキシ樹脂、フルオレン型エポキシ樹脂、シロキサン系エポキシ樹脂等が挙げられ、熱硬化性樹脂組成物の流動性、熱硬化性樹脂フィルムの柔軟性の観点から、液状ビスフェノールA型エポキシ樹脂、液状ビスフェノールF型エポキシ樹脂、液状ナフタレン型エポキシ樹脂、液状ビフェニル型エポキシ樹脂が、好ましい。耐熱性、耐久性の観点からは固形エポキシ樹脂であると好ましい。   The epoxy resin may be a liquid epoxy resin or a solid epoxy resin. Epoxy resins include aminophenol type epoxy resin, bisphenol A type epoxy resin, bisphenol F type epoxy resin, naphthalene type epoxy resin, biphenyl type epoxy resin, hydrogenated bisphenol type epoxy resin, alicyclic epoxy resin, alcohol ether type epoxy. Resin, cycloaliphatic epoxy resin, fluorene epoxy resin, siloxane epoxy resin and the like. From the viewpoint of fluidity of thermosetting resin composition and flexibility of thermosetting resin film, liquid bisphenol A type epoxy Resins, liquid bisphenol F type epoxy resins, liquid naphthalene type epoxy resins, and liquid biphenyl type epoxy resins are preferred. From the viewpoint of heat resistance and durability, a solid epoxy resin is preferable.

エポキシ樹脂の市販品としては、ビスフェノールA型エポキシ樹脂(例:ダイソー製LX−01、新日鐵化学製YDF8170、三菱化学製828、828EL)、アミノフェノール型エポキシ樹脂(例:三菱化学製JER630、JER630LSD)、ビスフェノールF型エポキシ樹脂(例:新日鐵化学製YDF870GS)、ナフタレン型エポキシ樹脂(例:DIC製HP4032D)、ビフェニル型エポキシ樹脂(例:日本化薬製NC−3000−H)、シロキサン系エポキシ樹脂(例:信越化学製TSL9906)等が挙げられる。   Commercially available epoxy resins include bisphenol A type epoxy resins (eg, LX-01 manufactured by Daiso, YDF8170 manufactured by Nippon Steel Chemical, 828, 828EL manufactured by Mitsubishi Chemical), aminophenol type epoxy resins (eg, JER630 manufactured by Mitsubishi Chemical, JER630LSD), bisphenol F type epoxy resin (Example: YDF870GS manufactured by Nippon Steel Chemical Co., Ltd.), naphthalene type epoxy resin (Example: HP 4032D manufactured by DIC), biphenyl type epoxy resin (Example: NC-3000-H manufactured by Nippon Kayaku), siloxane Epoxy resin (eg, TSL9906 manufactured by Shin-Etsu Chemical Co., Ltd.) and the like.

(C1)成分は、単独でも2種以上を併用してもよい。   (C1) A component may be individual or may use 2 or more types together.

(C2)成分は、分子中の主鎖の不飽和二重結合が水添されたスチレン系ブロックコポリマーであり、この水添スチレン系ブロックコポリマーとしては、スチレン−エチレン/ブチレン−スチレンブロック共重合体(SEBS)や、スチレン−(エチレン−エチレン/プロピレン)−スチレンブロック共重合体(SEEPS)、スチレン−エチレン/プロピレン−スチレンブロック共重合体(SEPS)等が、挙げられ、SEBS、SEEPSが好ましい。SEBSやSEEPSは、誘電特性に優れ、(C1)成分の選択肢であるポリフェニレンエーテル(PPE)、変性PPE等と相溶性がよく、耐熱性をもつ熱硬化性樹脂組成物を形成できるからである。さらに、スチレン系ブロックコポリマーは、熱硬化性樹脂組成物の低弾性化にも寄与するため、熱硬化性樹脂フィルムに柔軟性を付与し、また熱硬化性樹脂組成物の硬化物に3GPa以下の低弾性が求められる用途に好適である。   The component (C2) is a styrene block copolymer in which unsaturated double bonds in the main chain in the molecule are hydrogenated. As the hydrogenated styrene block copolymer, a styrene-ethylene / butylene-styrene block copolymer is used. (SEBS), styrene- (ethylene-ethylene / propylene) -styrene block copolymer (SEEPS), styrene-ethylene / propylene-styrene block copolymer (SEPS), and the like, and SEBS and SEEPS are preferable. This is because SEBS and SEEPS have excellent dielectric properties, are compatible with polyphenylene ether (PPE), modified PPE, and the like, which are options for the component (C1), and can form a thermosetting resin composition having heat resistance. Furthermore, since the styrenic block copolymer contributes to lowering the elasticity of the thermosetting resin composition, it gives flexibility to the thermosetting resin film, and the cured product of the thermosetting resin composition has 3 GPa or less. Suitable for applications where low elasticity is required.

(C2)成分の重量平均分子量は、30,000〜200,000であるものが好ましく、80,000〜120,000であることがより好ましい。重量平均分子量は、ゲルパーミエーションクロマトグラフィー法(GPC)により、標準ポリスチレンによる検量線を用いた値とする。   The weight average molecular weight of the component (C2) is preferably 30,000 to 200,000, and more preferably 80,000 to 120,000. The weight average molecular weight is a value obtained by gel permeation chromatography (GPC) using a standard polystyrene calibration curve.

(C2)成分は、単独でも2種以上を併用してもよい。   (C2) A component may be individual or may use 2 or more types together.

熱硬化性樹脂組成物は、さらに、(C3)アクリレートモノマーを含むと、接着力向上の観点から、好ましい。   It is preferable that the thermosetting resin composition further contains (C3) acrylate monomer from the viewpoint of improving the adhesive strength.

また、(C1)としてエポキシ樹脂を使用する場合には、熱硬化性樹脂組成物は、さらに、硬化のために硬化触媒を含む。この硬化触媒としては、イミダゾール等が挙げられる。また、(C1)として末端にスチレン基を有する樹脂を使用する場合には、有機過酸化物のような硬化触媒を含むと、熱硬化性樹脂組成物の硬化性の観点から好ましい。   When an epoxy resin is used as (C1), the thermosetting resin composition further contains a curing catalyst for curing. Examples of the curing catalyst include imidazole. Moreover, when using resin which has a styrene group at the terminal as (C1), it is preferable from a curable viewpoint of a thermosetting resin composition to contain a curing catalyst like an organic peroxide.

次に、(A)成分と(B)成分との合計は、(C)成分100質量部に対して、45〜90質量部が好ましく、50〜85質量部が、より好ましい。   Next, 45-90 mass parts is preferable with respect to 100 mass parts of (C) component, and, as for the sum total of (A) component and (B) component, 50-85 mass parts is more preferable.

(A)成分は、(A)成分と(B)成分の合計100質量部に対し、60〜85質量部であることが好ましく、65〜80質量部であることが、より好ましい。難燃剤の割合をこの範囲とすることで、(A)成分と(B)成分の相乗効果を得ることができ、難燃効果をもたらすのに必要な難燃剤の絶対量を少なくすることができる。   (A) It is preferable that it is 60-85 mass parts with respect to a total of 100 mass parts of (A) component and (B) component, and it is more preferable that it is 65-80 mass parts. By setting the ratio of the flame retardant within this range, the synergistic effect of the component (A) and the component (B) can be obtained, and the absolute amount of the flame retardant necessary for providing the flame retardant effect can be reduced. .

(C1)成分は、熱硬化性樹脂組成物の高周波特性、耐熱性、耐薬品性の観点から、(C)成分100質量部に対して、15〜55質量部が好ましい。   The component (C1) is preferably 15 to 55 parts by mass with respect to 100 parts by mass of the component (C) from the viewpoints of high frequency characteristics, heat resistance, and chemical resistance of the thermosetting resin composition.

(C2)成分は、熱硬化性樹脂組成物の高周波特性、低弾性化の観点から、(C)成分100質量部に対して、40〜80質量部が好ましい。   The component (C2) is preferably 40 to 80 parts by mass with respect to 100 parts by mass of the component (C) from the viewpoint of high frequency characteristics and low elasticity of the thermosetting resin composition.

(C3)成分は、(C)成分100質量部に対して、1〜5質量部が好ましい。硬化触媒は、(C)成分100質量部に対して、0.1〜4質量部が好ましい。   As for (C3) component, 1-5 mass parts is preferable with respect to 100 mass parts of (C) component. As for a curing catalyst, 0.1-4 mass parts is preferable with respect to 100 mass parts of (C) component.

なお、熱硬化性樹脂組成物は、本発明の効果を損なわない範囲で、フィラー、シランカップリング剤等のカップリング剤、粘着性付与剤、消泡剤、流動調整剤、成膜補助剤、分散助剤等の添加剤を含むことができる。   In addition, the thermosetting resin composition is a range that does not impair the effects of the present invention, a filler, a coupling agent such as a silane coupling agent, a tackifier, an antifoaming agent, a flow regulator, a film forming auxiliary agent, Additives such as dispersion aids can be included.

熱硬化性樹脂組成物は、樹脂組成物を構成する(A)、(B)、(C)成分等の原料を、有機溶剤に溶解又は分散等させることにより、作製することができる。これらの原料の溶解又は分散等の装置としては、特に限定されるものではないが、加熱装置を備えた攪拌機、デゾルバー、ライカイ機、3本ロールミル、ボールミル、プラネタリーミキサー、ビーズミル等を使用することができる。また、これら装置を適宜組み合わせて使用してもよい。   The thermosetting resin composition can be produced by dissolving or dispersing raw materials such as the components (A), (B), and (C) constituting the resin composition in an organic solvent. The apparatus for dissolving or dispersing these raw materials is not particularly limited, but a stirrer, a dissolver, a reiki machine, a three roll mill, a ball mill, a planetary mixer, a bead mill, etc. equipped with a heating device should be used. Can do. Moreover, you may use combining these apparatuses suitably.

有機溶剤としては、芳香族系溶剤として、例えばトルエン、キシレン等、ケトン系溶剤として、例えばメチルエチルケトン、メチルイソブチルケトン等が挙げられる。有機溶剤は、単独でも、2種以上を組み合わせて用いてもよい。作業性の点から、熱硬化性樹脂組成物は、200〜3000mPa・sの粘度の範囲であることが好ましい。粘度は、E型粘度計を用いて、回転数10rpm、25℃で測定した値とする。   Examples of the organic solvent include aromatic solvents such as toluene and xylene, and ketone solvents such as methyl ethyl ketone and methyl isobutyl ketone. The organic solvents may be used alone or in combination of two or more. From the viewpoint of workability, the thermosetting resin composition preferably has a viscosity range of 200 to 3000 mPa · s. The viscosity is a value measured using an E-type viscometer at a rotation speed of 10 rpm and 25 ° C.

得られる熱硬化性樹脂組成物は、周波数1.9GHzでの比誘電率(ε)が、3.0以下であると、好ましい。(A)成分および(B)成分は、熱硬化性樹脂組成物の比誘電率(ε)および誘電正接(tanδ)を、比較的高くしない難燃剤であるため、熱硬化性樹脂組成物の比誘電率(ε)および誘電正接(tanδ)を低く抑えることができる。   The obtained thermosetting resin composition preferably has a relative dielectric constant (ε) at a frequency of 1.9 GHz of 3.0 or less. Since the component (A) and the component (B) are flame retardants that do not relatively increase the relative dielectric constant (ε) and dielectric loss tangent (tan δ) of the thermosetting resin composition, the ratio of the thermosetting resin composition The dielectric constant (ε) and the dielectric loss tangent (tan δ) can be kept low.

〔熱硬化性樹脂フィルム〕
次に、熱硬化性樹脂フィルムの形成方法について、説明する。熱硬化性樹脂フィルムは、熱硬化性樹脂組成物から、所望の形状に形成される。具体的には、熱硬化性樹脂フィルムは、上述の熱硬化性樹脂組成物を、支持体の上に、塗布した後、乾燥することにより、得ることができる。支持体は、特に限定されず、銅、アルミニウム等の金属箔、ポリエステル樹脂、ポリエチレン樹脂、ポリエチレンテレフタレート樹脂(PET)等の有機フィルム等が挙げられる。支持体はシリコーン系化合物等で離型処理されていてもよい。なお、熱硬化性樹脂組成物は、種々の形状で使用することができ、形状は特に限定されない。
[Thermosetting resin film]
Next, a method for forming a thermosetting resin film will be described. The thermosetting resin film is formed into a desired shape from the thermosetting resin composition. Specifically, the thermosetting resin film can be obtained by applying the above-mentioned thermosetting resin composition on a support and drying it. The support is not particularly limited, and examples thereof include metal foils such as copper and aluminum, organic films such as polyester resins, polyethylene resins, and polyethylene terephthalate resins (PET). The support may be release-treated with a silicone compound or the like. The thermosetting resin composition can be used in various shapes, and the shape is not particularly limited.

熱硬化性樹脂組成物を支持体に塗布する方法は、特に限定されないが、薄膜化・膜厚制御の点からはグラビア法、スロットダイ法、ドクターブレード法が好ましい。スロットダイ法により、熱硬化後の厚さが5〜300μmになる熱硬化性樹脂組成物の未硬化フィルム、すなわち熱硬化性樹脂フィルムを得ることができる。   The method for applying the thermosetting resin composition to the support is not particularly limited, but the gravure method, the slot die method, and the doctor blade method are preferable from the viewpoint of thinning and controlling the film thickness. By the slot die method, an uncured film of a thermosetting resin composition having a thickness after heat curing of 5 to 300 μm, that is, a thermosetting resin film can be obtained.

乾燥条件は、熱硬化性樹脂組成物に使用される有機溶剤の種類や量、塗布の厚み等に応じて、適宜、設定することができ、例えば、50〜120℃で、1〜60分程度とすることができる。このようにして得られた熱硬化性樹脂フィルムは、良好な保存安定性を有する。なお、熱硬化性樹脂フィルムは、所望のタイミングで、支持体から剥離することができる。   The drying conditions can be appropriately set according to the type and amount of the organic solvent used in the thermosetting resin composition, the thickness of the coating, and the like, for example, at 50 to 120 ° C. for about 1 to 60 minutes. It can be. The thermosetting resin film thus obtained has good storage stability. In addition, a thermosetting resin film can be peeled from a support body at a desired timing.

熱硬化性樹脂フィルムの硬化は、例えば、150〜230℃で、30〜180分間の条件で行うことができる。熱硬化性樹脂フィルムの硬化は、銅箔等による配線が形成された基板間に熱硬化性樹脂フィルムを挟んでから行ってもよく、銅箔等による配線を形成した熱硬化性樹脂フィルムを、適宜積層した後に行ってもよい。また、熱硬化性樹脂フィルムは、基板上の配線を保護するカバーレイフィルムとして用いることもでき、その際の硬化条件も同様である。なお、熱硬化性樹脂組成物も、同様に硬化させることができる。   The thermosetting resin film can be cured, for example, at 150 to 230 ° C. for 30 to 180 minutes. The curing of the thermosetting resin film may be performed after sandwiching the thermosetting resin film between the substrates on which the wiring made of copper foil or the like is formed, and the thermosetting resin film on which the wiring made of copper foil or the like is formed, You may carry out after laminating | stacking suitably. The thermosetting resin film can also be used as a coverlay film for protecting the wiring on the substrate, and the curing conditions at that time are the same. The thermosetting resin composition can be similarly cured.

本発明の熱硬化性樹脂フィルムは、難燃剤の量が少なくても硬化後に高い難燃性を付与することができる。このため、難燃剤の含有量を従来よりも少なくすることができ、硬化後の熱硬化性樹脂フィルムを強靭なものにすることができる。ここで、熱硬化性樹脂フィルム中の難燃剤の含有量が多いと、硬化後の熱硬化性樹脂フィルムがもろくなり易くなり、硬化膜強度が低下する。硬化膜強度の低下は、例えばクラック発生や接着性の低下等をもたらすため、好ましくない。従来、プリント基板で使用されているプリプレグ(繊維に樹脂を含浸させたシート)より、フィルムの方が難燃剤の量による影響が出やすい。   The thermosetting resin film of the present invention can impart high flame retardancy after curing even if the amount of the flame retardant is small. For this reason, content of a flame retardant can be decreased rather than before and the thermosetting resin film after hardening can be made tough. Here, when there is much content of the flame retardant in a thermosetting resin film, the thermosetting resin film after hardening will become weak easily, and cured film strength will fall. A decrease in the strength of the cured film is not preferable because it causes, for example, generation of cracks and a decrease in adhesiveness. Conventionally, the influence of the amount of the flame retardant is more likely to occur in a film than in a prepreg (a sheet in which a fiber is impregnated with a resin) used in a printed circuit board.

〔プリント配線板〕
本発明のプリント配線板は、上述の熱硬化性樹脂組成物、または上述の熱硬化性樹脂フィルムを用い、これを硬化して作製する。このプリント配線板は、上記熱硬化性樹脂組成物の硬化物、または上記熱硬化性樹脂フィルムの硬化物により、誘電特性に優れ、難燃性が高い。プリント配線板の中では、フレキシブルプリント配線板(Flexible Printed Circuit,FPC)用のフレキシブル銅張積層板(Flexible Copper Clad Laminate,FCCL)、多層基板用の銅張積層板 (Copper Clad Laminate,CCL)、またはビルドアップ材などに適している。プリント配線板の製造方法は、特に、限定されず、一般的なプリプレグを使用してプリント配線板を作製する場合と同様の方法を、用いることができる。
[Printed wiring board]
The printed wiring board of the present invention is produced by curing the above-described thermosetting resin composition or the above-described thermosetting resin film. This printed wiring board has excellent dielectric properties and high flame retardancy due to the cured product of the thermosetting resin composition or the cured product of the thermosetting resin film. Among printed wiring boards, flexible copper clad laminates (FCCL) for flexible printed circuit boards (FPC), copper clad laminates (CCL) for multilayer boards (CCL), Or it is suitable for build-up materials. The manufacturing method of a printed wiring board is not specifically limited, The same method as the case where a printed wiring board is produced using a general prepreg can be used.

〔本導体装置〕
本発明の半導体装置は、上述の熱硬化性樹脂組成物、または上述の熱硬化性樹脂フィルムを用い、これを硬化して作製する。この半導体装置は、上記熱硬化性樹脂組成物の硬化物、または上記熱硬化性樹脂フィルムの硬化物により、誘電特性に優れ、難燃性が高いため、高周波用途に適する。ここで、半導体装置とは、半導体特性を利用することで機能しうる装置全般を指し、電子部品、半導体回路、これらを組み込んだモジュール、電子機器等を含むものである。
[This conductor device]
The semiconductor device of the present invention is manufactured by using the above-mentioned thermosetting resin composition or the above-mentioned thermosetting resin film and curing it. This semiconductor device is suitable for high-frequency applications because it has excellent dielectric properties and high flame retardancy due to the cured product of the thermosetting resin composition or the cured product of the thermosetting resin film. Here, the semiconductor device refers to all devices that can function by utilizing semiconductor characteristics, and includes electronic components, semiconductor circuits, modules incorporating these, electronic devices, and the like.

本発明について、実施例により説明するが、本発明はこれらに限定されるものではない。なお、以下の実施例において、部、%はことわりのない限り、質量部、質量%を示す。   The present invention will be described with reference to examples, but the present invention is not limited thereto. In the following examples, parts and% indicate parts by mass and mass% unless otherwise specified.

〔実施例1〜7、比較例1〜10〕
〈熱硬化性樹脂組成物の作製〉
表1〜3に示す配合で、樹脂、エラストマー、溶解性の(A)成分である芳香族縮合リン酸塩エステル(1)およびトルエンを容器に計り取り、加熱攪拌機を用いて加熱溶解し、室温まで冷却した後、そこに(B)成分であるメラミンシアヌレート、硬化触媒、添加剤を計り入れ、自転・公転式の攪拌機(マゼルスター)で3分間攪拌混合した後、ビーズミルを使用して分散し、トルエンで粘度調整して熱硬化性樹脂組成物を調整した。なお、非溶解性の(A)成分である芳香族縮合リン酸塩エステル(2)を使用する場合には、樹脂、エラストマーおよびトルエンを容器に計り取り、加熱攪拌機を用いて加熱溶解し、室温まで冷却した後に加えて、後は上記と同様に調整した。
[Examples 1-7, Comparative Examples 1-10]
<Preparation of thermosetting resin composition>
In the composition shown in Tables 1-3, resin, elastomer, soluble condensed (A) component aromatic condensed phosphate ester (1) and toluene are weighed into a container, heated and dissolved using a heating stirrer, (B) component melamine cyanurate, curing catalyst, and additives are weighed in and mixed with a rotating / revolving stirrer (Mazerustar) for 3 minutes, and then dispersed using a bead mill. The thermosetting resin composition was adjusted by adjusting the viscosity with toluene. When the aromatic condensed phosphate ester (2), which is an insoluble component (A), is used, the resin, elastomer and toluene are weighed into a container and heated and dissolved using a heating stirrer. After cooling to the same level, the rest was adjusted as described above.

〔評価方法〕
〈1.難燃性試験〉
得られた熱硬化性樹脂組成物を、離型剤を施した50μm厚のポリエチレンテレフタレート(PET)フィルム上に、乾燥塗膜が25±5μmの膜厚になるように塗布機を用いて塗布し、80℃×10分間乾燥し、熱硬化性樹脂フィルムを得た。得られた熱硬化性樹脂フィルムを、真空プレス機でプレス硬化(180℃×60分、圧力:0.5MPa)した後、200×50mmに裁断し、PETフィルムを剥がし、試験用試料を作製した。米国UL規格の垂直燃焼試験のUL94 VTM 試験方法に準じて、試験用試料の難燃性を、評価した。表1〜3に、結果を示す。
〔Evaluation method〕
<1. Flame Retardancy Test>
The obtained thermosetting resin composition was applied on a 50 μm-thick polyethylene terephthalate (PET) film to which a release agent was applied, using an applicator so that the dried coating film had a thickness of 25 ± 5 μm. And dried at 80 ° C. for 10 minutes to obtain a thermosetting resin film. The obtained thermosetting resin film was press-cured with a vacuum press (180 ° C. × 60 minutes, pressure: 0.5 MPa), then cut to 200 × 50 mm, and the PET film was peeled off to prepare a test sample. . In accordance with the UL94 VTM test method of the vertical combustion test of the US UL standard, the flame retardancy of the test sample was evaluated. Tables 1 to 3 show the results.

〈2.比誘電率(ε)、誘電正接(tanδ)の測定〉
1.難燃性試験と同様の方法で、離型剤を施した50μm厚のPETフィルム上に、乾燥塗膜が25±5μmの膜厚になるように、熱硬化性樹脂組成物を、塗布、乾燥、硬化し、硬化した熱硬化性樹脂フィルムを得た。硬化した熱硬化性樹脂フィルムを、130×40mmに裁断した後、PETフィルムを剥がし、比誘電率・誘電正接測定用試料を作製した。スプリットポスト誘電体共振器(SPDR)により、誘電体共振周波数1.9GHzで、測定用試料の比誘電率(ε)、誘電正接(tanδ)を、測定した。比誘電率は、3.0以下、誘電正接は、0.0040以下であると、好ましい。表1〜2に、結果を示す。同様に、実施例で使用した(C)成分の比誘電率(ε)を測定した。
<2. Measurement of relative permittivity (ε) and dielectric loss tangent (tan δ)>
1. In the same manner as the flame retardancy test, a thermosetting resin composition was applied on a 50 μm-thick PET film to which a release agent was applied so that the dried coating film had a thickness of 25 ± 5 μm, and dried. The cured thermoset resin film was obtained. After the cured thermosetting resin film was cut into 130 × 40 mm, the PET film was peeled off to prepare a sample for measuring relative dielectric constant / dielectric loss tangent. The relative permittivity (ε) and dielectric loss tangent (tan δ) of the measurement sample were measured with a split post dielectric resonator (SPDR) at a dielectric resonance frequency of 1.9 GHz. The relative dielectric constant is preferably 3.0 or less and the dielectric loss tangent is preferably 0.0040 or less. Tables 1 and 2 show the results. Similarly, the relative dielectric constant (ε) of the component (C) used in the examples was measured.

〈3.ピール強度試験〉
1.難燃性試験と同様の方法で、離型剤を施した50μm厚のPETフィルム上に、乾燥塗膜が25±5μmの膜厚になるように、熱硬化性樹脂組成物を、塗布、乾燥して得られた熱硬化性樹脂フィルムを、100×100mmに裁断し、PETフィルムを剥がした。剥がした熱硬化性樹脂フィルムの片面に12μm厚の銅箔光沢面を、もう一方の面には12μm厚のポリイミドフィルムを重ね合わせ、真空プレス機でプレス硬化(180℃×60分、圧力:0.5MPa)して接着し、ピール強度試験用試料を作製した。作製したピール強度試験用試料を、10mm幅にカットし、オートグラフで銅箔とポリイミドフィルムを引きはがしてピール強度を測定した。測定結果について、各N=5の平均値を計算した。ピール強度は、5.0N/cm以上であると、好ましい。表3に、結果を示す。
<3. Peel strength test>
1. In the same manner as the flame retardancy test, a thermosetting resin composition was applied on a 50 μm-thick PET film to which a release agent was applied so that the dried coating film had a thickness of 25 ± 5 μm, and dried. The thermosetting resin film thus obtained was cut to 100 × 100 mm, and the PET film was peeled off. A 12 μm thick copper foil glossy surface is laminated on one side of the peeled thermosetting resin film, and a 12 μm thick polyimide film is laminated on the other side, followed by press curing (180 ° C. × 60 minutes, pressure: 0). .5 MPa) and bonded to produce a peel strength test sample. The peel strength test sample thus prepared was cut to a width of 10 mm, and the peel strength was measured by peeling off the copper foil and the polyimide film with an autograph. For the measurement results, the average value of each N = 5 was calculated. The peel strength is preferably 5.0 N / cm or more. Table 3 shows the results.

Figure 2017101099
Figure 2017101099

Figure 2017101099
Figure 2017101099

Figure 2017101099
Figure 2017101099

表1、2からわかるように、実施例1〜7は、難燃性、比誘電率(ε)、誘電正接(tanδ)のすべてにおいて良好な結果であった。表には記載していないが、全ての(C)成分の比誘電率(ε)は、2.9以下であった。なお、実施例1において、難燃剤((A)成分+(B)成分)を抜いた場合の比誘電率(ε)は2.5、誘電正接(tanδ)は0.0028であり、難燃剤の添加による比誘電率(ε)、誘電正接(tanδ)の増加は、少なかった。これに対して、(A)成分を多量に含有し、(B)成分を使用しなかった比較例1は、難燃性試験の結果が悪かった。(A)と(B)を同量使用した比較例2は、難燃性試験の結果が悪かった。(C)成分100質量部に対する(A)成分と(B)成分の合計が45質量部未満の比較例3は、難燃性試験の結果が悪かった。(A)成分と(B)成分の代わりにポリリン酸アンモニウムを使用した比較例4は、比誘電率、誘電正接が高かった。(A)成分の代わりに、ポリリン酸メラミン・メラム・メレム複塩を使用した比較例5、ホスファフェナントレン系化合物(1)を使用した比較例6は、難燃性試験の結果が悪く、比誘電率、誘電正接が高かった。(A)成分の代わりにホスファフェナントレン系化合物(2)を使用した比較例7は、難燃性試験の結果が悪かった。(A)成分の代わりにホスファゼン化合物(1)を使用した比較例8は、誘電正接が高かった。(A)成分の代わりにホスファゼン化合物(2)を使用した比較例9は、難燃性試験の結果が悪く、誘電正接が高かった。   As can be seen from Tables 1 and 2, Examples 1 to 7 were good results in all of flame retardancy, relative dielectric constant (ε), and dielectric loss tangent (tan δ). Although not shown in the table, the relative dielectric constant (ε) of all the components (C) was 2.9 or less. In Example 1, when the flame retardant (component (A) + component (B)) is removed, the relative dielectric constant (ε) is 2.5, and the dielectric loss tangent (tan δ) is 0.0028. The increase in relative dielectric constant (ε) and dielectric loss tangent (tan δ) was small. On the other hand, Comparative Example 1 which contained a large amount of component (A) and did not use component (B) had a poor flame retardant test result. In Comparative Example 2 using the same amount of (A) and (B), the result of the flame retardancy test was bad. The result of the flame retardance test was bad in Comparative Example 3 in which the total of the component (A) and the component (B) with respect to 100 parts by mass of the component (C) was less than 45 parts by mass. In Comparative Example 4 using ammonium polyphosphate instead of the components (A) and (B), the relative dielectric constant and dielectric loss tangent were high. Comparative Example 5 using melamine / melam / melem double salt polyphosphate instead of component (A) and Comparative Example 6 using phosphaphenanthrene compound (1) have poor flame retardant test results. The dielectric constant and dielectric loss tangent were high. In Comparative Example 7 using the phosphaphenanthrene compound (2) in place of the component (A), the result of the flame retardancy test was bad. Comparative Example 8 using the phosphazene compound (1) instead of the component (A) had a high dielectric loss tangent. In Comparative Example 9 in which the phosphazene compound (2) was used in place of the component (A), the result of the flame retardancy test was poor and the dielectric loss tangent was high.

表3からわかるように、実施例1、4は、ピール強度が高かった。これに対して、(A)成分を多量に含有し、(B)成分を使用しなかった比較例10は、ピール強度が低かった。なお、表3に記載していないが、実施例1〜7のピール強度は、すべて5.0N/cm以上であった。   As can be seen from Table 3, Examples 1 and 4 had high peel strength. In contrast, Comparative Example 10 that contained a large amount of the component (A) and did not use the component (B) had a low peel strength. Although not shown in Table 3, the peel strengths of Examples 1 to 7 were all 5.0 N / cm or more.

上記のように、本発明の熱硬化性樹脂組成物は、ハロゲン系難燃剤を使用せずに、誘電特性に優れた材料を使用し、難燃性が高く、接着力の高い絶縁性フィルムを形成可能であり、非常に有用である。本発明のプリント配線板は、上記熱硬化性樹脂組成物の硬化物、または上記熱硬化性樹脂フィルムの硬化物により、誘電特性に優れ、難燃性が高い。本発明の半導体装置は、上記熱硬化性樹脂組成物の硬化物、または上記熱硬化性樹脂フィルムの硬化物により、誘電特性に優れ、難燃性が高いため、高周波用途に適する。   As described above, the thermosetting resin composition of the present invention uses an insulating film having high flame retardancy and high adhesive strength, using a material having excellent dielectric characteristics without using a halogen-based flame retardant. It can be formed and is very useful. The printed wiring board of the present invention has excellent dielectric properties and high flame retardancy due to the cured product of the thermosetting resin composition or the cured product of the thermosetting resin film. The semiconductor device of the present invention is suitable for high-frequency applications because it has excellent dielectric properties and high flame retardancy due to the cured product of the thermosetting resin composition or the cured product of the thermosetting resin film.

Claims (6)

(A)芳香族縮合リン酸エステルと、(B)メラミンシアヌレートと、(C)周波数1.9GHzでの比誘電率が2.9以下である樹脂と、を含み、(C)成分100質量部に対する(A)成分と(B)成分との合計が45質量部以上であり、(A)成分が(B)成分より多いことを特徴とする、熱硬化性樹脂組成物。   (A) aromatic condensed phosphate ester, (B) melamine cyanurate, and (C) resin having a relative dielectric constant of 2.9 or less at a frequency of 1.9 GHz, and (C) component 100 mass The thermosetting resin composition, wherein the sum of the component (A) and the component (B) is 45 parts by mass or more, and the amount of the component (A) is greater than that of the component (B). 周波数1.9GHzでの比誘電率が、3.0以下である、請求項1記載の熱硬化性樹脂組成物。   The thermosetting resin composition according to claim 1, wherein a relative dielectric constant at a frequency of 1.9 GHz is 3.0 or less. (A)成分が、ビスジキシレニルホスフェートである、請求項1または2記載の熱硬化性樹脂組成物。 The thermosetting resin composition according to claim 1 or 2, wherein the component (A) is bisdixylenyl phosphate. 請求項1〜3のいずれか1項記載の熱硬化性樹脂組成物を用いる、熱硬化性樹脂フィルム。   A thermosetting resin film using the thermosetting resin composition according to claim 1. 請求項1〜3のいずれか1項記載の熱硬化性樹脂組成物の硬化物、または請求項4記載の熱硬化性樹脂フィルムの硬化物を用いる、プリント配線板。   The printed wiring board using the hardened | cured material of the thermosetting resin composition of any one of Claims 1-3, or the hardened | cured material of the thermosetting resin film of Claim 4. 請求項1〜3のいずれか1項記載の樹脂組成物の硬化物、または請求項4記載の熱硬化性樹脂フィルムの硬化物を用いる、半導体装置。   The semiconductor device using the hardened | cured material of the resin composition of any one of Claims 1-3, or the hardened | cured material of the thermosetting resin film of Claim 4.
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JP6675183B2 (en) 2020-04-01
KR20180088659A (en) 2018-08-06

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