JP6675183B2 - Thermosetting resin composition, thermosetting resin film, printed wiring board, and semiconductor device - Google Patents

Thermosetting resin composition, thermosetting resin film, printed wiring board, and semiconductor device Download PDF

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JP6675183B2
JP6675183B2 JP2015232839A JP2015232839A JP6675183B2 JP 6675183 B2 JP6675183 B2 JP 6675183B2 JP 2015232839 A JP2015232839 A JP 2015232839A JP 2015232839 A JP2015232839 A JP 2015232839A JP 6675183 B2 JP6675183 B2 JP 6675183B2
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thermosetting resin
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resin composition
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JP2017101099A (en
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津与志 黒川
津与志 黒川
聡子 高橋
聡子 高橋
吉田 真樹
真樹 吉田
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Namics Corp
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Priority to KR1020187015799A priority patent/KR102570161B1/en
Priority to TW105138638A priority patent/TWI731901B/en
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/16Nitrogen-containing compounds
    • C08K5/34Heterocyclic compounds having nitrogen in the ring
    • C08K5/3467Heterocyclic compounds having nitrogen in the ring having more than two nitrogen atoms in the ring
    • C08K5/3477Six-membered rings
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/49Phosphorus-containing compounds
    • C08K5/51Phosphorus bound to oxygen
    • C08K5/52Phosphorus bound to oxygen only
    • C08K5/521Esters of phosphoric acids, e.g. of H3PO4
    • C08K5/523Esters of phosphoric acids, e.g. of H3PO4 with hydroxyaryl compounds
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/16Nitrogen-containing compounds
    • C08K5/34Heterocyclic compounds having nitrogen in the ring
    • C08K5/3467Heterocyclic compounds having nitrogen in the ring having more than two nitrogen atoms in the ring
    • C08K5/3477Six-membered rings
    • C08K5/3492Triazines
    • C08K5/34924Triazines containing cyanurate groups; Tautomers thereof
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L101/00Compositions of unspecified macromolecular compounds
    • C08L101/12Compositions of unspecified macromolecular compounds characterised by physical features, e.g. anisotropy, viscosity or electrical conductivity
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits

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Description

本発明は、熱硬化性樹脂組成物、熱硬化性樹脂フィルム、プリント配線板、および半導体装置に関する。特に、難燃性の熱硬化性樹脂組成物、熱硬化性樹脂フィルム、プリント配線板、および半導体装置に関する。   The present invention relates to a thermosetting resin composition, a thermosetting resin film, a printed wiring board, and a semiconductor device. In particular, it relates to a flame-retardant thermosetting resin composition, a thermosetting resin film, a printed wiring board, and a semiconductor device.

近年、半導体分野において、伝送信号の高周波化が進んでいる。この伝送信号の高周波化に対応可能な低誘電率接着フィルムに対して、難燃性が、要求される用途がある。   In recent years, the frequency of transmission signals has been increasing in the semiconductor field. There is an application in which flame retardancy is required for a low dielectric constant adhesive film capable of coping with a higher frequency of a transmission signal.

高周波に対応可能な材料としては、熱硬化性ポリフェニレンエーテル(PPE)等が、難燃性の材料としては、ハロゲン系難燃剤、リン系難燃剤、窒素系難燃剤等が、知られている。従来、使用されているハロゲン系難燃剤は、環境問題の観点からハロゲンフリーの要求が強く、リン系難燃剤、窒素系難燃剤等の使用が、検討されている。   Thermosetting polyphenylene ether (PPE) and the like are known as materials capable of coping with high frequency, and halogen-based flame retardants, phosphorus-based flame retardants, and nitrogen-based flame retardants are known as flame-retardant materials. Conventionally, halogen-based flame retardants used are strongly required to be halogen-free from the viewpoint of environmental problems, and the use of phosphorus-based flame retardants, nitrogen-based flame retardants, and the like has been studied.

まず、ポリフェニレンエーテルを所定量、熱可塑性エラストマーを所定量、およびポリオレフィン樹脂を所定量含有する樹脂成分と、樹脂成分100質量部に対してリン系難燃剤および窒素系難燃剤の一方又は両方を5〜100質量部含有する難燃性樹脂シート、及びそれを用いたフラットケーブルが、報告されている(特許文献1)。   First, a resin component containing a predetermined amount of a polyphenylene ether, a predetermined amount of a thermoplastic elastomer, and a predetermined amount of a polyolefin resin, and one or both of a phosphorus-based flame retardant and a nitrogen-based flame retardant per 100 parts by mass of the resin component. A flame-retardant resin sheet containing 〜100 parts by mass and a flat cable using the same have been reported (Patent Document 1).

しかしながら、上記難燃性樹脂シートは、フラットケーブルへの使用を前提としているため、プリント配線板用途としては、難燃性が十分ではないおそれがある。   However, since the flame-retardant resin sheet is premised on use for a flat cable, the flame retardancy may not be sufficient for use in a printed wiring board.

次に、分子内にポリフェニレンエーテル骨格を有する2官能性フェニレンエーテルオリゴマーの末端をビニル化した所定のビニル合物と、分子内にマレイミド基を2個以上有する所定のビスマレイミド化合物を含有する硬化性樹脂組成物が、報告されている(特許文献2)。この硬化性樹脂組成物には、リン系難燃剤が使用されている。   Next, a curable composition containing a predetermined vinyl compound obtained by vinylating the terminal of a bifunctional phenylene ether oligomer having a polyphenylene ether skeleton in the molecule and a predetermined bismaleimide compound having two or more maleimide groups in the molecule. A resin composition has been reported (Patent Document 2). This curable resin composition contains a phosphorus-based flame retardant.

しかしながら、上記硬化性樹脂組成物に使用されているビスマレイミド化合物は、耐熱性に優れるが、上記硬化性樹脂組成物により作製されるフィルムは、剛直になり、フィルム成形性が悪く、フィルムの接着力が低い、という問題がある。   However, the bismaleimide compound used in the curable resin composition has excellent heat resistance, but the film made of the curable resin composition becomes rigid, has poor film moldability, and has poor adhesion to the film. There is a problem that power is low.

国際公開第2011/043129号International Publication No. 2011/043129 特開2009−161725号公報JP 2009-161725 A

本発明は、従来のハロゲン系難燃剤を使用せずに、誘電特性に優れ、難燃性が高く、接着力の高い絶縁性フィルムを形成し得る、熱硬化性樹脂組成物を提供することを目的とする。   The present invention provides a thermosetting resin composition which does not use a conventional halogen-based flame retardant, has excellent dielectric properties, has high flame retardancy, and can form an insulating film having high adhesive strength. Aim.

本発明は、以下の構成を有することによって上記問題を解決した熱硬化性樹脂組成物、熱硬化性樹脂フィルム、プリント配線板、および半導体装置に関する。
〔1〕(A)芳香族縮合リン酸エステルと、(B)メラミンシアヌレートと、(C)周波数1.9GHzでの比誘電率が2.9以下である樹脂と、を含み、(C)成分100質量部に対する(A)成分と(B)成分との合計が45質量部以上であり、(A)成分が(B)成分より多いことを特徴とする、熱硬化性樹脂組成物。
〔2〕周波数1.9GHzでの比誘電率が、3.0以下である、上記〔1〕記載の熱硬化性樹脂組成物。
〔3〕(A)成分が、ビスジキシレニルホスフェートである、上記〔1〕または〔2〕記載の熱硬化性樹脂組成物。
〔4〕上記〔1〕〜〔3〕のいずれか記載の熱硬化性樹脂組成物を用いる、熱硬化性樹脂フィルム。
〔5〕上記〔1〕〜〔3〕のいずれか記載の熱硬化性樹脂組成物の硬化物、または上記〔4〕記載の熱硬化性樹脂フィルムの硬化物を用いる、プリント配線板。
〔6〕上記〔1〕〜〔3〕のいずれか記載の樹脂組成物の硬化物、または上記〔4〕記載の熱硬化性樹脂フィルムの硬化物を用いる、半導体装置。
The present invention relates to a thermosetting resin composition, a thermosetting resin film, a printed wiring board, and a semiconductor device that solve the above-mentioned problems by having the following configurations.
[1] including (A) an aromatic condensed phosphate ester, (B) melamine cyanurate, and (C) a resin having a relative dielectric constant at a frequency of 1.9 GHz of 2.9 or less; A thermosetting resin composition, wherein the total of the component (A) and the component (B) is at least 45 parts by mass based on 100 parts by mass of the component, and the component (A) is more than the component (B).
[2] The thermosetting resin composition according to the above [1], wherein a relative dielectric constant at a frequency of 1.9 GHz is 3.0 or less.
[3] The thermosetting resin composition according to the above [1] or [2], wherein the component (A) is bisdixylenyl phosphate.
[4] A thermosetting resin film using the thermosetting resin composition according to any one of [1] to [3].
[5] A printed wiring board using a cured product of the thermosetting resin composition according to any one of [1] to [3] or a cured product of the thermosetting resin film according to [4].
[6] A semiconductor device using a cured product of the resin composition according to any one of [1] to [3] or a cured product of the thermosetting resin film according to [4].

本発明〔1〕によれば、ハロゲン系難燃剤を使用せずに、誘電特性に優れ、難燃性が高く、接着力が高い絶縁性フィルムを形成可能な熱硬化性樹脂組成物を提供することができる。   According to the present invention [1], there is provided a thermosetting resin composition capable of forming an insulating film having excellent dielectric properties, high flame retardancy, and high adhesion without using a halogen-based flame retardant. be able to.

本発明〔4〕によれば、誘電特性に優れ、難燃性が高く、接着力が高い熱硬化性樹脂組成物により形成された絶縁性フィルムを提供することができる。   According to the present invention [4], it is possible to provide an insulating film formed of a thermosetting resin composition having excellent dielectric properties, high flame retardancy, and high adhesive strength.

本発明〔5〕によれば、上記熱硬化性樹脂組成物の硬化物、または上記熱硬化性樹脂フィルムの硬化物により、誘電特性に優れ、難燃性が高いプリント配線板を提供することができる。本発明〔6〕によれば、上記熱硬化性樹脂組成物の硬化物、または上記熱硬化性樹脂フィルムの硬化物により、誘電特性に優れ、難燃性が高いため、高周波用途に適した半導体装置を提供することができる。   According to the present invention [5], a cured product of the thermosetting resin composition or a cured product of the thermosetting resin film can provide a printed wiring board having excellent dielectric properties and high flame retardancy. it can. According to the present invention [6], a cured product of the thermosetting resin composition or a cured product of the thermosetting resin film has excellent dielectric properties and high flame retardancy, and is therefore a semiconductor suitable for high frequency applications. An apparatus can be provided.

〔熱硬化性樹脂組成物〕
本発明の熱硬化性樹脂組成物は、(A)芳香族縮合リン酸エステルと、(B)メラミンシアヌレートと、(C)周波数1.9GHzでの比誘電率が2.9以下である樹脂と、を含み、(C)成分100質量部に対する(A)成分と(B)成分との合計が45質量部以上であり、(A)成分が(B)成分より多い。ここで、(A)成分、および(B)成分は、難燃剤として添加する。(A)成分、および(B)成分は、誘電特性を悪化させにくい。本発明の熱硬化性樹脂組成物は、(A)成分と(B)成分を併用することにより、(A)成分または(B)成分を、それぞれ単独で使用する場合と比較して、米国UL規格の垂直燃焼試験のUL94のVTM−0相当の難燃性を満たすための難燃剤の添加量を、減少させることができる。難燃剤は、樹脂組成物の難燃性以外の物性を低下させる(例えば、接着性や硬化膜強度を低下させる)ため、添加量が少ない方が好ましい。
(Thermosetting resin composition)
The thermosetting resin composition of the present invention comprises (A) an aromatic condensed phosphate ester, (B) melamine cyanurate, and (C) a resin having a relative dielectric constant at a frequency of 1.9 GHz of 2.9 or less. And the total of the component (A) and the component (B) with respect to 100 parts by mass of the component (C) is 45 parts by mass or more, and the component (A) is more than the component (B). Here, the components (A) and (B) are added as flame retardants. The components (A) and (B) hardly deteriorate the dielectric properties. The thermosetting resin composition of the present invention, when used in combination with the component (A) and the component (B), can be used in comparison with the case where the component (A) or the component (B) is used alone. The addition amount of the flame retardant for satisfying the flame retardancy equivalent to VTM-0 of UL94 in the standard vertical combustion test can be reduced. Since the flame retardant reduces physical properties other than the flame retardancy of the resin composition (for example, decreases the adhesiveness and the strength of the cured film), it is preferable that the amount added is small.

(A)成分である芳香族縮合リン酸エステルは、熱硬化性樹脂組成物に難燃性を付与する。芳香族縮合リン酸エステルとしては、ビスジキシレニルホスフェートが好ましく、具体的には、化学式(1)で表されるレゾルシノールビス−ジキシレニルホスフェート:   The aromatic condensed phosphate ester as the component (A) imparts flame retardancy to the thermosetting resin composition. As the aromatic condensed phosphate, bisdixylenyl phosphate is preferable, and specifically, resorcinol bis-dixylenyl phosphate represented by the chemical formula (1):

Figure 0006675183
Figure 0006675183

化学式(2)で表されるp−クレゾールビスージキシレニルホスフェート: P-Cresol bisdixylenyl phosphate represented by the chemical formula (2):

Figure 0006675183
Figure 0006675183

化学式(3)で表されるビフェノールビス−ジキシレニルホスフェート: Biphenol bis-dixylenyl phosphate represented by the chemical formula (3):

Figure 0006675183
Figure 0006675183

化学式(4)で表されるレゾルシノールビス−ジフェニルホスフェート: Resorcinol bis-diphenyl phosphate represented by the chemical formula (4):

Figure 0006675183
Figure 0006675183

化学式(5)で表されるビスフェノールAビス−ジフェニルホスフェート: Bisphenol A bis-diphenyl phosphate represented by the chemical formula (5):

Figure 0006675183
Figure 0006675183

がより好ましい。ここで、レゾルシノールビス−ジキシレニルホスフェートは、常温固形(粉末状)で、樹脂に溶解し、p−クレゾールビスージキシレニルホスフェートとビフェノールビス−ジキシレニルホスフェートは、常温固形(粉末状)で、樹脂に溶解せず、レゾルシノールビス−ジフェニルホスフェートとビスフェノールAビス−ジフェニルホスフェートは、液状である。粉末状であるビスジキシレニルホスフェートを用いることにより、液状である他の芳香族縮合リン酸エステルと比較して、熱硬化性樹脂フィルム形成後の経時によるブルーミングの発生を少なくすることができる。 Is more preferred. Here, resorcinol bis-dixylenyl phosphate is a solid at room temperature (powder) and is dissolved in a resin, and p-cresol bis-dixylenyl phosphate and biphenol bis-dixylenyl phosphate are solid at room temperature (powder). Resorcinol bis-diphenyl phosphate and bisphenol A bis-diphenyl phosphate are insoluble in resin. By using bisdixylenyl phosphate in powder form, it is possible to reduce the occurrence of blooming over time after the formation of the thermosetting resin film, as compared with other liquid aromatic condensed phosphate esters.

(B)成分であるメラミンシアヌレートは、熱硬化性樹脂組成物に難燃性を付与する。メラミンシアヌレート(C・C)は、化学式(6): Melamine cyanurate as the component (B) imparts flame retardancy to the thermosetting resin composition. Melamine cyanurate (C 3 H 6 N 6 .C 3 H 3 N 3 O 3 ) has a chemical formula (6):

Figure 0006675183
Figure 0006675183

で表される。 It is represented by

(C)成分である周波数1.9GHzでの比誘電率が2.9以下である樹脂は、熱硬化性樹脂組成物に高周波特性(すなわち低誘電率)、耐熱性、接着性を付与する。ここで、高周波特性とは、高周波領域での伝送損失を小さくする性質をいい、(C)成分は、比誘電率(ε)が2.9以下であるので、高周波特性に非常に優れている。(C)成分は、(C1)熱硬化性樹脂と、(C2)分子中の主鎖の不飽和二重結合が水添されたスチレン系ブロックコポリマーとを含むと、好ましい。   The resin having a relative dielectric constant of 2.9 or less at a frequency of 1.9 GHz, which is a component (C), imparts high-frequency characteristics (that is, low dielectric constant), heat resistance, and adhesiveness to the thermosetting resin composition. Here, the high-frequency characteristics refer to a property of reducing transmission loss in a high-frequency region, and the component (C) is very excellent in high-frequency characteristics since the relative dielectric constant (ε) is 2.9 or less. . The component (C) preferably contains (C1) a thermosetting resin and (C2) a styrene-based block copolymer in which unsaturated double bonds of a main chain in a molecule are hydrogenated.

(C1)成分である熱硬化性樹脂は、熱硬化性樹脂組成物に、接着性、高周波特性、耐熱性を付与する。(C1)成分としては、末端にスチレン基を有する樹脂、エポキシ樹脂が、好ましく、末端にスチレン基を有する樹脂がより好ましい。   The thermosetting resin as the component (C1) imparts adhesiveness, high-frequency characteristics, and heat resistance to the thermosetting resin composition. As the component (C1), a resin having a styrene group at the terminal and an epoxy resin are preferable, and a resin having a styrene group at the terminal is more preferable.

末端にスチレン基を有する樹脂としては、下記の一般式(7):   Examples of the resin having a styrene group at the terminal include the following general formula (7):

Figure 0006675183
Figure 0006675183
Figure 0006675183
Figure 0006675183

(式中、
、R、R、R、R、R、Rは同一又は異なってもよく、水素原子、ハロゲン原子、アルキル基、ハロゲン化アルキル基又はフェニル基であり、
−(O−X−O)−は構造式(8)で示され、ここで、R、R、R10、R14、R15は、同一又は異なってもよく、ハロゲン原子又は炭素数6以下のアルキル基又はフェニル基であり、R11、R12、R13は、同一又は異なってもよく、水素原子、ハロゲン原子又は炭素数6以下のアルキル基又はフェニル基であり、
−(Y−O)−は構造式(9)で示される1種類の構造、又は構造式(9)で示される2種類以上の構造がランダムに配列したものであり、ここで、R16、R17は同一又は異なってもよく、ハロゲン原子又は炭素数6以下のアルキル基又はフェニル基であり、R18、R19は同一又は異なってもよく、水素原子、ハロゲン原子又は炭素数6以下のアルキル基又はフェニル基であり、
Zは炭素数1以上の有機基であり、場合により酸素原子、窒素原子、硫黄原子、ハロゲン原子を含むこともあり、
a、bは少なくともいずれか一方が0でない、0〜300の整数を示し、
c、dは0又は1の整数を示す)で示される、ビニル基が結合したフェニル基を両末端に持つ熱硬化性ポリフェニレンエーテルのオリゴマー体(以下、変性PPEという)が好ましい。(C1)成分として変性PPEを用いる場合には、高周波特性が優れていることに加えて、耐熱性が優れており、硬化後の熱硬化性樹脂組成物の経時変化が生じにくく、この熱硬化性樹脂組成物を有するプリント配線板、半導体装置の長期信頼性を維持できる。さらに、樹脂中の親水基の数が少ないため吸湿性や耐薬品性に優れる、という特徴がある。この変性PPEは、特開2004−59644号公報に記載されたとおりである。
(Where
R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 7 may be the same or different and are a hydrogen atom, a halogen atom, an alkyl group, a halogenated alkyl group or a phenyl group;
— (O—X—O) — is represented by the structural formula (8), wherein R 8 , R 9 , R 10 , R 14 , and R 15 may be the same or different, and include a halogen atom or a carbon atom. 6 or less alkyl group or phenyl group, R 11 , R 12 and R 13 may be the same or different and are a hydrogen atom, a halogen atom or an alkyl group or phenyl group having 6 or less carbon atoms,
-(YO)-is one kind of structure represented by Structural Formula (9) or two or more kinds of structures represented by Structural Formula (9) randomly arranged, wherein R 16 , R 17 may be the same or different and is a halogen atom or an alkyl group or a phenyl group having 6 or less carbon atoms, and R 18 and R 19 may be the same or different and a hydrogen atom, a halogen atom or a 6 or less carbon atom. An alkyl group or a phenyl group,
Z is an organic group having 1 or more carbon atoms, and may optionally include an oxygen atom, a nitrogen atom, a sulfur atom, and a halogen atom,
a, b is an integer of 0 to 300, at least one of which is not 0,
(c and d each represent an integer of 0 or 1), and a thermosetting polyphenylene ether oligomer having a phenyl group bonded to a vinyl group at both terminals (hereinafter, referred to as modified PPE) is preferable. When the modified PPE is used as the component (C1), in addition to having excellent high-frequency characteristics, it has excellent heat resistance, and the thermosetting resin composition after curing is unlikely to change over time. Long-term reliability of printed wiring boards and semiconductor devices having a conductive resin composition can be maintained. Further, the resin has a feature that it has excellent hygroscopicity and chemical resistance because of a small number of hydrophilic groups in the resin. This modified PPE is as described in JP-A-2004-59644.

一般式(7)で示される変性PPEの−(O−X−O)−についての構造式(8)において、R、R、R10、R14、R15は、好ましくは、炭素数3以下のアルキル基であり、R11、R12、R13は、好ましくは、水素原子又は炭素数3以下のアルキル基である。具体的には、構造式(10)が挙げられる。 In the structural formula (8) for — (O—X—O) — of the modified PPE represented by the general formula (7), R 8 , R 9 , R 10 , R 14 , and R 15 preferably have a carbon number of It is an alkyl group having 3 or less, and R 11 , R 12 and R 13 are preferably a hydrogen atom or an alkyl group having 3 or less carbon atoms. Specifically, structural formula (10) is given.

Figure 0006675183
Figure 0006675183

−(Y−O)−についての構造式(9)において、R16、R17は、好ましくは、炭素数3以下のアルキル基であり、R18、R19は、好ましくは、水素原子又は炭素数3以下のアルキル基である。具体的には、構造式(11)又は(12)が挙げられる。 In the structural formula (9) for — (YO) —, R 16 and R 17 are preferably an alkyl group having 3 or less carbon atoms, and R 18 and R 19 are preferably a hydrogen atom or a carbon atom. It is an alkyl group of number 3 or less. Specifically, structural formula (11) or (12) is given.

Figure 0006675183
Figure 0006675183

Zは、炭素数3以下のアルキレン基が挙げられ、具体的には、メチレン基である。   Z is an alkylene group having 3 or less carbon atoms, and specifically, is a methylene group.

a、bは少なくともいずれか一方が0でない、0〜300の整数を示し、好ましくは0〜30の整数を示す。   a and b each represent an integer of 0 to 300, at least one of which is not 0, and preferably an integer of 0 to 30.

末端にスチレン基を有する樹脂は、平均分子量分子量800〜3500であると好ましく、800〜3000である一般式(7)の変性PPEが、より好ましい。更に好ましくは、数平均分子量800〜2500である。数平均分子量は、ゲルパーミエーションクロマトグラフィー法(GPC)により、標準ポリスチレンによる検量線を用いた値とする。   The resin having a styrene group at the terminal preferably has an average molecular weight of 800 to 3,500, and more preferably a modified PPE of general formula (7) having an average molecular weight of 800 to 3,000. More preferably, the number average molecular weight is 800 to 2500. The number average molecular weight is determined by a gel permeation chromatography (GPC) using a standard polystyrene calibration curve.

エポキシ樹脂は、液状エポキシ樹脂であっても固形エポキシ樹脂であってもよい。エポキシ樹脂としては、アミノフェノール型エポキシ樹脂、ビスフェノールA型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、ナフタレン型エポキシ樹脂、ビフェニル型エポキシ樹脂、水添ビスフェノール型エポキシ樹脂、脂環式エポキシ樹脂、アルコールエーテル型エポキシ樹脂、環状脂肪族型エポキシ樹脂、フルオレン型エポキシ樹脂、シロキサン系エポキシ樹脂等が挙げられ、熱硬化性樹脂組成物の流動性、熱硬化性樹脂フィルムの柔軟性の観点から、液状ビスフェノールA型エポキシ樹脂、液状ビスフェノールF型エポキシ樹脂、液状ナフタレン型エポキシ樹脂、液状ビフェニル型エポキシ樹脂が、好ましい。耐熱性、耐久性の観点からは固形エポキシ樹脂であると好ましい。   The epoxy resin may be a liquid epoxy resin or a solid epoxy resin. Examples of the epoxy resin include aminophenol epoxy resin, bisphenol A epoxy resin, bisphenol F epoxy resin, naphthalene epoxy resin, biphenyl epoxy resin, hydrogenated bisphenol epoxy resin, alicyclic epoxy resin, and alcohol ether epoxy. Resin, cycloaliphatic epoxy resin, fluorene epoxy resin, siloxane epoxy resin, etc., from the viewpoint of fluidity of the thermosetting resin composition and flexibility of the thermosetting resin film, liquid bisphenol A type epoxy Resins, liquid bisphenol F type epoxy resins, liquid naphthalene type epoxy resins, and liquid biphenyl type epoxy resins are preferred. From the viewpoint of heat resistance and durability, a solid epoxy resin is preferable.

エポキシ樹脂の市販品としては、ビスフェノールA型エポキシ樹脂(例:ダイソー製LX−01、新日鐵化学製YDF8170、三菱化学製828、828EL)、アミノフェノール型エポキシ樹脂(例:三菱化学製JER630、JER630LSD)、ビスフェノールF型エポキシ樹脂(例:新日鐵化学製YDF870GS)、ナフタレン型エポキシ樹脂(例:DIC製HP4032D)、ビフェニル型エポキシ樹脂(例:日本化薬製NC−3000−H)、シロキサン系エポキシ樹脂(例:信越化学製TSL9906)等が挙げられる。   Commercially available epoxy resins include bisphenol A type epoxy resins (eg, LX-01 manufactured by Daiso, YDF8170 manufactured by Nippon Steel Chemical, 828, 828EL manufactured by Mitsubishi Chemical), and aminophenol type epoxy resins (eg, JER630 manufactured by Mitsubishi Chemical, JER630LSD), bisphenol F type epoxy resin (eg, NDF YGS870GS), naphthalene type epoxy resin (eg, HP4032D manufactured by DIC), biphenyl type epoxy resin (eg, Nippon Kayaku NC-3000-H), siloxane Epoxy resin (eg, TSL9906 manufactured by Shin-Etsu Chemical Co., Ltd.) and the like.

(C1)成分は、単独でも2種以上を併用してもよい。   The component (C1) may be used alone or in combination of two or more.

(C2)成分は、分子中の主鎖の不飽和二重結合が水添されたスチレン系ブロックコポリマーであり、この水添スチレン系ブロックコポリマーとしては、スチレン−エチレン/ブチレン−スチレンブロック共重合体(SEBS)や、スチレン−(エチレン−エチレン/プロピレン)−スチレンブロック共重合体(SEEPS)、スチレン−エチレン/プロピレン−スチレンブロック共重合体(SEPS)等が、挙げられ、SEBS、SEEPSが好ましい。SEBSやSEEPSは、誘電特性に優れ、(C1)成分の選択肢であるポリフェニレンエーテル(PPE)、変性PPE等と相溶性がよく、耐熱性をもつ熱硬化性樹脂組成物を形成できるからである。さらに、スチレン系ブロックコポリマーは、熱硬化性樹脂組成物の低弾性化にも寄与するため、熱硬化性樹脂フィルムに柔軟性を付与し、また熱硬化性樹脂組成物の硬化物に3GPa以下の低弾性が求められる用途に好適である。   The component (C2) is a styrene-based block copolymer in which unsaturated double bonds of the main chain in the molecule are hydrogenated, and the hydrogenated styrene-based block copolymer is a styrene-ethylene / butylene-styrene block copolymer. (SEBS), styrene- (ethylene-ethylene / propylene) -styrene block copolymer (SEEPS), styrene-ethylene / propylene-styrene block copolymer (SEPS), and the like, and SEBS and SEEPS are preferable. This is because SEBS and SEEPS have excellent dielectric properties, have good compatibility with polyphenylene ether (PPE), modified PPE, and the like, which are options for the component (C1), and can form a thermosetting resin composition having heat resistance. Further, the styrenic block copolymer contributes to lowering the elasticity of the thermosetting resin composition, and thus imparts flexibility to the thermosetting resin film, and gives a cured product of the thermosetting resin composition of 3 GPa or less. It is suitable for applications requiring low elasticity.

(C2)成分の重量平均分子量は、30,000〜200,000であるものが好ましく、80,000〜120,000であることがより好ましい。重量平均分子量は、ゲルパーミエーションクロマトグラフィー法(GPC)により、標準ポリスチレンによる検量線を用いた値とする。   The component (C2) preferably has a weight average molecular weight of 30,000 to 200,000, and more preferably 80,000 to 120,000. The weight average molecular weight is a value obtained by a gel permeation chromatography (GPC) using a calibration curve with standard polystyrene.

(C2)成分は、単独でも2種以上を併用してもよい。   The component (C2) may be used alone or in combination of two or more.

熱硬化性樹脂組成物は、さらに、(C3)アクリレートモノマーを含むと、接着力向上の観点から、好ましい。   It is preferable that the thermosetting resin composition further contains (C3) an acrylate monomer from the viewpoint of improving the adhesive strength.

また、(C1)としてエポキシ樹脂を使用する場合には、熱硬化性樹脂組成物は、さらに、硬化のために硬化触媒を含む。この硬化触媒としては、イミダゾール等が挙げられる。また、(C1)として末端にスチレン基を有する樹脂を使用する場合には、有機過酸化物のような硬化触媒を含むと、熱硬化性樹脂組成物の硬化性の観点から好ましい。   When an epoxy resin is used as (C1), the thermosetting resin composition further contains a curing catalyst for curing. Examples of the curing catalyst include imidazole. When a resin having a styrene group at the terminal is used as (C1), it is preferable from the viewpoint of the curability of the thermosetting resin composition that a curing catalyst such as an organic peroxide is included.

次に、(A)成分と(B)成分との合計は、(C)成分100質量部に対して、45〜90質量部が好ましく、50〜85質量部が、より好ましい。   Next, the total of the components (A) and (B) is preferably 45 to 90 parts by mass, more preferably 50 to 85 parts by mass, per 100 parts by mass of the component (C).

(A)成分は、(A)成分と(B)成分の合計100質量部に対し、60〜85質量部であることが好ましく、65〜80質量部であることが、より好ましい。難燃剤の割合をこの範囲とすることで、(A)成分と(B)成分の相乗効果を得ることができ、難燃効果をもたらすのに必要な難燃剤の絶対量を少なくすることができる。   Component (A) is preferably from 60 to 85 parts by mass, more preferably from 65 to 80 parts by mass, per 100 parts by mass of the total of components (A) and (B). By setting the proportion of the flame retardant in this range, a synergistic effect of the component (A) and the component (B) can be obtained, and the absolute amount of the flame retardant required for providing the flame retardant effect can be reduced. .

(C1)成分は、熱硬化性樹脂組成物の高周波特性、耐熱性、耐薬品性の観点から、(C)成分100質量部に対して、15〜55質量部が好ましい。   The component (C1) is preferably 15 to 55 parts by mass with respect to 100 parts by mass of the component (C) from the viewpoint of high-frequency characteristics, heat resistance, and chemical resistance of the thermosetting resin composition.

(C2)成分は、熱硬化性樹脂組成物の高周波特性、低弾性化の観点から、(C)成分100質量部に対して、40〜80質量部が好ましい。   The component (C2) is preferably 40 to 80 parts by mass with respect to 100 parts by mass of the component (C) from the viewpoint of high-frequency characteristics and low elasticity of the thermosetting resin composition.

(C3)成分は、(C)成分100質量部に対して、1〜5質量部が好ましい。硬化触媒は、(C)成分100質量部に対して、0.1〜4質量部が好ましい。   The component (C3) is preferably 1 to 5 parts by mass with respect to 100 parts by mass of the component (C). The curing catalyst is preferably used in an amount of 0.1 to 4 parts by mass based on 100 parts by mass of the component (C).

なお、熱硬化性樹脂組成物は、本発明の効果を損なわない範囲で、フィラー、シランカップリング剤等のカップリング剤、粘着性付与剤、消泡剤、流動調整剤、成膜補助剤、分散助剤等の添加剤を含むことができる。   In addition, the thermosetting resin composition is a filler, a coupling agent such as a silane coupling agent, a tackifier, a defoaming agent, a flow regulator, a film-forming auxiliary, within a range not impairing the effects of the present invention. An additive such as a dispersing aid can be included.

熱硬化性樹脂組成物は、樹脂組成物を構成する(A)、(B)、(C)成分等の原料を、有機溶剤に溶解又は分散等させることにより、作製することができる。これらの原料の溶解又は分散等の装置としては、特に限定されるものではないが、加熱装置を備えた攪拌機、デゾルバー、ライカイ機、3本ロールミル、ボールミル、プラネタリーミキサー、ビーズミル等を使用することができる。また、これら装置を適宜組み合わせて使用してもよい。   The thermosetting resin composition can be produced by dissolving or dispersing raw materials such as the components (A), (B), and (C) constituting the resin composition in an organic solvent. The apparatus for dissolving or dispersing these raw materials is not particularly limited, but a stirrer equipped with a heating device, a dissolver, a raikai machine, a three-roll mill, a ball mill, a planetary mixer, a bead mill, or the like is used. Can be. Further, these devices may be used in appropriate combination.

有機溶剤としては、芳香族系溶剤として、例えばトルエン、キシレン等、ケトン系溶剤として、例えばメチルエチルケトン、メチルイソブチルケトン等が挙げられる。有機溶剤は、単独でも、2種以上を組み合わせて用いてもよい。作業性の点から、熱硬化性樹脂組成物は、200〜3000mPa・sの粘度の範囲であることが好ましい。粘度は、E型粘度計を用いて、回転数10rpm、25℃で測定した値とする。   Examples of the organic solvent include aromatic solvents such as toluene and xylene, and examples of the ketone solvent include methyl ethyl ketone and methyl isobutyl ketone. The organic solvents may be used alone or in combination of two or more. From the viewpoint of workability, the thermosetting resin composition preferably has a viscosity in the range of 200 to 3000 mPa · s. The viscosity is a value measured at 25 ° C. at a rotation speed of 10 rpm using an E-type viscometer.

得られる熱硬化性樹脂組成物は、周波数1.9GHzでの比誘電率(ε)が、3.0以下であると、好ましい。(A)成分および(B)成分は、熱硬化性樹脂組成物の比誘電率(ε)および誘電正接(tanδ)を、比較的高くしない難燃剤であるため、熱硬化性樹脂組成物の比誘電率(ε)および誘電正接(tanδ)を低く抑えることができる。   The obtained thermosetting resin composition preferably has a relative dielectric constant (ε) at a frequency of 1.9 GHz of 3.0 or less. The components (A) and (B) are flame retardants that do not relatively increase the relative dielectric constant (ε) and dielectric loss tangent (tan δ) of the thermosetting resin composition. The dielectric constant (ε) and the dielectric loss tangent (tan δ) can be kept low.

〔熱硬化性樹脂フィルム〕
次に、熱硬化性樹脂フィルムの形成方法について、説明する。熱硬化性樹脂フィルムは、熱硬化性樹脂組成物から、所望の形状に形成される。具体的には、熱硬化性樹脂フィルムは、上述の熱硬化性樹脂組成物を、支持体の上に、塗布した後、乾燥することにより、得ることができる。支持体は、特に限定されず、銅、アルミニウム等の金属箔、ポリエステル樹脂、ポリエチレン樹脂、ポリエチレンテレフタレート樹脂(PET)等の有機フィルム等が挙げられる。支持体はシリコーン系化合物等で離型処理されていてもよい。なお、熱硬化性樹脂組成物は、種々の形状で使用することができ、形状は特に限定されない。
(Thermosetting resin film)
Next, a method for forming a thermosetting resin film will be described. The thermosetting resin film is formed into a desired shape from the thermosetting resin composition. Specifically, the thermosetting resin film can be obtained by applying the above-described thermosetting resin composition on a support and then drying the same. The support is not particularly limited, and examples thereof include metal foils such as copper and aluminum, and organic films such as polyester resin, polyethylene resin, and polyethylene terephthalate resin (PET). The support may be release-treated with a silicone compound or the like. In addition, the thermosetting resin composition can be used in various shapes, and the shape is not particularly limited.

熱硬化性樹脂組成物を支持体に塗布する方法は、特に限定されないが、薄膜化・膜厚制御の点からはグラビア法、スロットダイ法、ドクターブレード法が好ましい。スロットダイ法により、熱硬化後の厚さが5〜300μmになる熱硬化性樹脂組成物の未硬化フィルム、すなわち熱硬化性樹脂フィルムを得ることができる。   The method of applying the thermosetting resin composition to the support is not particularly limited, but a gravure method, a slot die method, and a doctor blade method are preferable from the viewpoint of thinning and controlling the film thickness. By the slot die method, an uncured film of the thermosetting resin composition having a thickness of 5 to 300 μm after thermosetting, that is, a thermosetting resin film can be obtained.

乾燥条件は、熱硬化性樹脂組成物に使用される有機溶剤の種類や量、塗布の厚み等に応じて、適宜、設定することができ、例えば、50〜120℃で、1〜60分程度とすることができる。このようにして得られた熱硬化性樹脂フィルムは、良好な保存安定性を有する。なお、熱硬化性樹脂フィルムは、所望のタイミングで、支持体から剥離することができる。   Drying conditions can be appropriately set according to the type and amount of the organic solvent used in the thermosetting resin composition, the thickness of the coating, and the like. For example, at 50 to 120 ° C. for about 1 to 60 minutes. It can be. The thermosetting resin film thus obtained has good storage stability. The thermosetting resin film can be separated from the support at a desired timing.

熱硬化性樹脂フィルムの硬化は、例えば、150〜230℃で、30〜180分間の条件で行うことができる。熱硬化性樹脂フィルムの硬化は、銅箔等による配線が形成された基板間に熱硬化性樹脂フィルムを挟んでから行ってもよく、銅箔等による配線を形成した熱硬化性樹脂フィルムを、適宜積層した後に行ってもよい。また、熱硬化性樹脂フィルムは、基板上の配線を保護するカバーレイフィルムとして用いることもでき、その際の硬化条件も同様である。なお、熱硬化性樹脂組成物も、同様に硬化させることができる。   Curing of the thermosetting resin film can be performed, for example, at 150 to 230 ° C. for 30 to 180 minutes. The curing of the thermosetting resin film may be performed after sandwiching the thermosetting resin film between the substrates on which the wiring is formed by the copper foil or the like, and the thermosetting resin film having the wiring formed by the copper foil or the like may be used. It may be performed after appropriately laminating. Further, the thermosetting resin film can be used as a coverlay film for protecting the wiring on the substrate, and the curing conditions at that time are the same. In addition, the thermosetting resin composition can be similarly cured.

本発明の熱硬化性樹脂フィルムは、難燃剤の量が少なくても硬化後に高い難燃性を付与することができる。このため、難燃剤の含有量を従来よりも少なくすることができ、硬化後の熱硬化性樹脂フィルムを強靭なものにすることができる。ここで、熱硬化性樹脂フィルム中の難燃剤の含有量が多いと、硬化後の熱硬化性樹脂フィルムがもろくなり易くなり、硬化膜強度が低下する。硬化膜強度の低下は、例えばクラック発生や接着性の低下等をもたらすため、好ましくない。従来、プリント基板で使用されているプリプレグ(繊維に樹脂を含浸させたシート)より、フィルムの方が難燃剤の量による影響が出やすい。   The thermosetting resin film of the present invention can impart high flame retardancy after curing even if the amount of the flame retardant is small. For this reason, the content of the flame retardant can be made smaller than before, and the cured thermosetting resin film can be made tough. Here, when the content of the flame retardant in the thermosetting resin film is large, the thermosetting resin film after curing becomes easily brittle, and the strength of the cured film decreases. A decrease in the strength of the cured film is not preferable because it causes, for example, cracks and a decrease in adhesiveness. Conventionally, a film is more likely to be affected by the amount of a flame retardant than a prepreg (a sheet in which fibers are impregnated with a resin) used for a printed circuit board.

〔プリント配線板〕
本発明のプリント配線板は、上述の熱硬化性樹脂組成物、または上述の熱硬化性樹脂フィルムを用い、これを硬化して作製する。このプリント配線板は、上記熱硬化性樹脂組成物の硬化物、または上記熱硬化性樹脂フィルムの硬化物により、誘電特性に優れ、難燃性が高い。プリント配線板の中では、フレキシブルプリント配線板(Flexible Printed Circuit,FPC)用のフレキシブル銅張積層板(Flexible Copper Clad Laminate,FCCL)、多層基板用の銅張積層板 (Copper Clad Laminate,CCL)、またはビルドアップ材などに適している。プリント配線板の製造方法は、特に、限定されず、一般的なプリプレグを使用してプリント配線板を作製する場合と同様の方法を、用いることができる。
[Printed wiring board]
The printed wiring board of the present invention is produced by using the above-described thermosetting resin composition or the above-described thermosetting resin film and curing the same. This printed wiring board has excellent dielectric properties and high flame retardancy due to the cured product of the thermosetting resin composition or the cured product of the thermosetting resin film. Among the printed wiring boards, a flexible copper-clad laminate (Flexible Copper Circuit, FCL) for a flexible printed wiring board (Flexible Printed Circuit, FCL), a copper-clad laminate for a multilayer board (Copper Clamin Laminate, CCL), Or it is suitable for build-up materials. The method for manufacturing the printed wiring board is not particularly limited, and a method similar to the method for manufacturing a printed wiring board using a general prepreg can be used.

〔本導体装置〕
本発明の半導体装置は、上述の熱硬化性樹脂組成物、または上述の熱硬化性樹脂フィルムを用い、これを硬化して作製する。この半導体装置は、上記熱硬化性樹脂組成物の硬化物、または上記熱硬化性樹脂フィルムの硬化物により、誘電特性に優れ、難燃性が高いため、高周波用途に適する。ここで、半導体装置とは、半導体特性を利用することで機能しうる装置全般を指し、電子部品、半導体回路、これらを組み込んだモジュール、電子機器等を含むものである。
(Main conductor device)
The semiconductor device of the present invention is manufactured by using the above-described thermosetting resin composition or the above-described thermosetting resin film and curing the same. This semiconductor device is suitable for high frequency applications because it has excellent dielectric properties and high flame retardancy due to the cured product of the thermosetting resin composition or the cured product of the thermosetting resin film. Here, the semiconductor device refers to all devices that can function by utilizing semiconductor characteristics, and includes electronic components, semiconductor circuits, modules incorporating these, electronic devices, and the like.

本発明について、実施例により説明するが、本発明はこれらに限定されるものではない。なお、以下の実施例において、部、%はことわりのない限り、質量部、質量%を示す。   The present invention will be described with reference to examples, but the present invention is not limited to these examples. In the following examples, parts and% indicate parts by mass and% by mass, respectively, unless otherwise specified.

〔実施例1〜7、比較例1〜10〕
〈熱硬化性樹脂組成物の作製〉
表1〜3に示す配合で、樹脂、エラストマー、溶解性の(A)成分である芳香族縮合リン酸塩エステル(1)およびトルエンを容器に計り取り、加熱攪拌機を用いて加熱溶解し、室温まで冷却した後、そこに(B)成分であるメラミンシアヌレート、硬化触媒、添加剤を計り入れ、自転・公転式の攪拌機(マゼルスター)で3分間攪拌混合した後、ビーズミルを使用して分散し、トルエンで粘度調整して熱硬化性樹脂組成物を調整した。なお、非溶解性の(A)成分である芳香族縮合リン酸塩エステル(2)を使用する場合には、樹脂、エラストマーおよびトルエンを容器に計り取り、加熱攪拌機を用いて加熱溶解し、室温まで冷却した後に加えて、後は上記と同様に調整した。
[Examples 1 to 7, Comparative Examples 1 to 10]
<Preparation of thermosetting resin composition>
In the composition shown in Tables 1 to 3, the resin, elastomer, aromatic condensed phosphate ester (1) and the soluble (A) component, toluene and toluene were weighed into a container, and heated and dissolved using a heating stirrer. After cooling to room temperature, the melamine cyanurate (B) component, curing catalyst and additives were weighed out, stirred and mixed for 3 minutes with a rotation / revolution type stirrer (Mazellstar), and dispersed using a bead mill. The viscosity was adjusted with toluene to prepare a thermosetting resin composition. When using the aromatic condensed phosphate ester (2) which is the insoluble component (A), the resin, the elastomer and the toluene are weighed into a container, and heated and dissolved using a heating stirrer. After cooling to above, adjustments were made in the same manner as above.

〔評価方法〕
〈1.難燃性試験〉
得られた熱硬化性樹脂組成物を、離型剤を施した50μm厚のポリエチレンテレフタレート(PET)フィルム上に、乾燥塗膜が25±5μmの膜厚になるように塗布機を用いて塗布し、80℃×10分間乾燥し、熱硬化性樹脂フィルムを得た。得られた熱硬化性樹脂フィルムを、真空プレス機でプレス硬化(180℃×60分、圧力:0.5MPa)した後、200×50mmに裁断し、PETフィルムを剥がし、試験用試料を作製した。米国UL規格の垂直燃焼試験のUL94 VTM 試験方法に準じて、試験用試料の難燃性を、評価した。表1〜3に、結果を示す。
〔Evaluation methods〕
<1. Flame retardancy test>
The obtained thermosetting resin composition is applied on a 50 μm-thick polyethylene terephthalate (PET) film to which a release agent has been applied using a coating machine so that the dry coating film has a thickness of 25 ± 5 μm. And dried at 80 ° C. for 10 minutes to obtain a thermosetting resin film. After the obtained thermosetting resin film was press-cured (180 ° C. × 60 minutes, pressure: 0.5 MPa) with a vacuum press machine, it was cut into 200 × 50 mm, and the PET film was peeled off to prepare a test sample. . The flame retardancy of the test sample was evaluated according to the UL94 VTM test method of the vertical combustion test of the US UL standard. Tables 1 to 3 show the results.

〈2.比誘電率(ε)、誘電正接(tanδ)の測定〉
1.難燃性試験と同様の方法で、離型剤を施した50μm厚のPETフィルム上に、乾燥塗膜が25±5μmの膜厚になるように、熱硬化性樹脂組成物を、塗布、乾燥、硬化し、硬化した熱硬化性樹脂フィルムを得た。硬化した熱硬化性樹脂フィルムを、130×40mmに裁断した後、PETフィルムを剥がし、比誘電率・誘電正接測定用試料を作製した。スプリットポスト誘電体共振器(SPDR)により、誘電体共振周波数1.9GHzで、測定用試料の比誘電率(ε)、誘電正接(tanδ)を、測定した。比誘電率は、3.0以下、誘電正接は、0.0040以下であると、好ましい。表1〜2に、結果を示す。同様に、実施例で使用した(C)成分の比誘電率(ε)を測定した。
<2. Measurement of relative permittivity (ε) and dielectric tangent (tan δ)>
1. In the same manner as in the flame retardancy test, a thermosetting resin composition was applied on a 50 μm-thick PET film coated with a release agent so that the dried coating film had a thickness of 25 ± 5 μm, and then dried. And cured to obtain a cured thermosetting resin film. After the cured thermosetting resin film was cut into 130 × 40 mm, the PET film was peeled off, and a sample for measuring dielectric constant and dielectric loss tangent was prepared. The relative dielectric constant (ε) and the dielectric loss tangent (tan δ) of the measurement sample were measured at a dielectric resonance frequency of 1.9 GHz using a split post dielectric resonator (SPDR). The relative dielectric constant is preferably 3.0 or less, and the dielectric tangent is preferably 0.0040 or less. Tables 1 and 2 show the results. Similarly, the relative dielectric constant (ε) of the component (C) used in the examples was measured.

〈3.ピール強度試験〉
1.難燃性試験と同様の方法で、離型剤を施した50μm厚のPETフィルム上に、乾燥塗膜が25±5μmの膜厚になるように、熱硬化性樹脂組成物を、塗布、乾燥して得られた熱硬化性樹脂フィルムを、100×100mmに裁断し、PETフィルムを剥がした。剥がした熱硬化性樹脂フィルムの片面に12μm厚の銅箔光沢面を、もう一方の面には12μm厚のポリイミドフィルムを重ね合わせ、真空プレス機でプレス硬化(180℃×60分、圧力:0.5MPa)して接着し、ピール強度試験用試料を作製した。作製したピール強度試験用試料を、10mm幅にカットし、オートグラフで銅箔とポリイミドフィルムを引きはがしてピール強度を測定した。測定結果について、各N=5の平均値を計算した。ピール強度は、5.0N/cm以上であると、好ましい。表3に、結果を示す。
<3. Peel strength test>
1. In the same manner as in the flame retardancy test, a thermosetting resin composition was applied on a 50 μm-thick PET film coated with a release agent so that the dried coating film had a thickness of 25 ± 5 μm, and then dried. The resulting thermosetting resin film was cut into 100 × 100 mm, and the PET film was peeled off. One side of the peeled thermosetting resin film is overlaid with a 12-μm-thick copper foil glossy surface and the other side with a 12-μm-thick polyimide film, and press-cured with a vacuum press (180 ° C. × 60 minutes, pressure: 0). 0.5 MPa) and adhered to prepare a sample for a peel strength test. The prepared peel strength test sample was cut to a width of 10 mm, and the copper foil and the polyimide film were peeled off by an autograph to measure the peel strength. With respect to the measurement results, the average value of each N = 5 was calculated. The peel strength is preferably 5.0 N / cm or more. Table 3 shows the results.

Figure 0006675183
Figure 0006675183

Figure 0006675183
Figure 0006675183

Figure 0006675183
Figure 0006675183

表1、2からわかるように、実施例1〜7は、難燃性、比誘電率(ε)、誘電正接(tanδ)のすべてにおいて良好な結果であった。表には記載していないが、全ての(C)成分の比誘電率(ε)は、2.9以下であった。なお、実施例1において、難燃剤((A)成分+(B)成分)を抜いた場合の比誘電率(ε)は2.5、誘電正接(tanδ)は0.0028であり、難燃剤の添加による比誘電率(ε)、誘電正接(tanδ)の増加は、少なかった。これに対して、(A)成分を多量に含有し、(B)成分を使用しなかった比較例1は、難燃性試験の結果が悪かった。(A)と(B)を同量使用した比較例2は、難燃性試験の結果が悪かった。(C)成分100質量部に対する(A)成分と(B)成分の合計が45質量部未満の比較例3は、難燃性試験の結果が悪かった。(A)成分と(B)成分の代わりにポリリン酸アンモニウムを使用した比較例4は、比誘電率、誘電正接が高かった。(A)成分の代わりに、ポリリン酸メラミン・メラム・メレム複塩を使用した比較例5、ホスファフェナントレン系化合物(1)を使用した比較例6は、難燃性試験の結果が悪く、比誘電率、誘電正接が高かった。(A)成分の代わりにホスファフェナントレン系化合物(2)を使用した比較例7は、難燃性試験の結果が悪かった。(A)成分の代わりにホスファゼン化合物(1)を使用した比較例8は、誘電正接が高かった。(A)成分の代わりにホスファゼン化合物(2)を使用した比較例9は、難燃性試験の結果が悪く、誘電正接が高かった。   As can be seen from Tables 1 and 2, Examples 1 to 7 showed good results in all of the flame retardancy, the relative dielectric constant (ε), and the dielectric loss tangent (tan δ). Although not described in the table, the relative dielectric constant (ε) of all the components (C) was 2.9 or less. In Example 1, when the flame retardant ((A) component + (B) component) was omitted, the relative dielectric constant (ε) was 2.5, the dielectric loss tangent (tan δ) was 0.0028, and the flame retardant was removed. Did not increase the relative dielectric constant (ε) and dielectric tangent (tan δ). In contrast, Comparative Example 1, which contained a large amount of the component (A) and did not use the component (B), had poor flame retardancy test results. Comparative Example 2 in which (A) and (B) were used in the same amount had poor flame retardancy test results. In Comparative Example 3 in which the total of the components (A) and (B) was less than 45 parts by mass with respect to 100 parts by mass of the component (C), the result of the flame retardancy test was poor. Comparative Example 4, in which ammonium polyphosphate was used instead of the components (A) and (B), had a high relative dielectric constant and a high dielectric loss tangent. Comparative Example 5 using a melamine / melam / melem double salt instead of the component (A) and Comparative Example 6 using a phosphaphenanthrene-based compound (1) had poor flame retardancy test results. The dielectric constant and dielectric tangent were high. Comparative Example 7, in which the phosphaphenanthrene-based compound (2) was used instead of the component (A), had poor flame retardancy test results. Comparative Example 8 using the phosphazene compound (1) instead of the component (A) had a high dielectric loss tangent. In Comparative Example 9 using the phosphazene compound (2) instead of the component (A), the result of the flame retardancy test was poor, and the dielectric loss tangent was high.

表3からわかるように、実施例1、4は、ピール強度が高かった。これに対して、(A)成分を多量に含有し、(B)成分を使用しなかった比較例10は、ピール強度が低かった。なお、表3に記載していないが、実施例1〜7のピール強度は、すべて5.0N/cm以上であった。   As can be seen from Table 3, in Examples 1 and 4, the peel strength was high. On the other hand, in Comparative Example 10 in which the component (A) was contained in a large amount and the component (B) was not used, the peel strength was low. Although not shown in Table 3, the peel strengths of Examples 1 to 7 were all 5.0 N / cm or more.

上記のように、本発明の熱硬化性樹脂組成物は、ハロゲン系難燃剤を使用せずに、誘電特性に優れた材料を使用し、難燃性が高く、接着力の高い絶縁性フィルムを形成可能であり、非常に有用である。本発明のプリント配線板は、上記熱硬化性樹脂組成物の硬化物、または上記熱硬化性樹脂フィルムの硬化物により、誘電特性に優れ、難燃性が高い。本発明の半導体装置は、上記熱硬化性樹脂組成物の硬化物、または上記熱硬化性樹脂フィルムの硬化物により、誘電特性に優れ、難燃性が高いため、高周波用途に適する。   As described above, the thermosetting resin composition of the present invention uses a material having excellent dielectric properties without using a halogen-based flame retardant, and has a high flame retardancy and a high adhesive strength insulating film. Formable and very useful. The printed wiring board of the present invention has excellent dielectric properties and high flame retardancy due to the cured product of the thermosetting resin composition or the cured product of the thermosetting resin film. The semiconductor device of the present invention is excellent in dielectric properties and has high flame retardancy due to the cured product of the thermosetting resin composition or the cured product of the thermosetting resin film, and thus is suitable for high frequency applications.

Claims (5)

(A)芳香族縮合リン酸エステルであるビスジキシレニルホスフェートと、
(B)メラミンシアヌレートと、
(C)(C1)ビニル基が結合したフェニル基を両末端に持つ熱硬化性ポリフェニレンエーテルのオリゴマー体、および(C2)分子中の主鎖の不飽和二重結合が水添されたスチレン系ブロックコポリマーを含む、周波数1.9GHzでの比誘電率が2.9以下である樹脂と、
を含み、(C)成分100質量部に対する(A)成分と(B)成分との合計が45質量部以上であり、(A)成分は、(A)成分と(B)成分の合計100質量部に対し、60〜85質量部であり、(C1)成分は、(C)成分100質量部に対して、15〜55質量部であり、(C2)成分は、(C)成分100質量部に対して、40〜80質量部である
ことを特徴とする、熱硬化性樹脂組成物。
(A) bis-dixylenyl phosphate which is an aromatic condensed phosphate,
(B) melamine cyanurate;
(C) (C1) an oligomer of a thermosetting polyphenylene ether having a phenyl group bonded to a vinyl group at both terminals, and (C2) a styrene-based block in which unsaturated double bonds of a main chain in a molecule are hydrogenated. A resin having a relative dielectric constant of 2.9 or less at a frequency of 1.9 GHz, including a copolymer ;
Wherein the total of the component (A) and the component (B) is at least 45 parts by mass with respect to 100 parts by mass of the component (C), and the component (A) is a total of 100 parts by mass of the component (A) and the component (B). Parts by mass, 60 to 85 parts by mass, component (C1) is 15 to 55 parts by mass with respect to 100 parts by mass of component (C), and component (C2) is 100 parts by mass of component (C). The thermosetting resin composition is 40 to 80 parts by mass with respect to the thermosetting resin composition.
周波数1.9GHzでの比誘電率が、3.0以下である、請求項1記載の熱硬化性樹脂組成物。   The thermosetting resin composition according to claim 1, wherein a relative dielectric constant at a frequency of 1.9 GHz is 3.0 or less. 請求項1または2記載の熱硬化性樹脂組成物を用いる、熱硬化性樹脂フィルム。 Used claim 1 or 2 thermosetting resin composition according thermosetting resin film. 請求項1または2記載の熱硬化性樹脂組成物の硬化物、または請求項記載の熱硬化性樹脂フィルムの硬化物を用いる、プリント配線板。 A printed wiring board using a cured product of the thermosetting resin composition according to claim 1 or 2 , or a cured product of the thermosetting resin film according to claim 3 . 請求項1または2記載の樹脂組成物の硬化物、または請求項記載の熱硬化性樹脂フィルムの硬化物を用いる、半導体装置。 A semiconductor device using a cured product of the resin composition according to claim 1 or 2 , or a cured product of the thermosetting resin film according to claim 3 .
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JP2011148938A (en) * 2010-01-25 2011-08-04 Toray Ind Inc Epoxy resin composition, prepreg and fiber-reinforced composite material
KR20120112657A (en) * 2010-01-28 2012-10-11 미쓰이 가가쿠 가부시키가이샤 Metal-resin composite
JP5440948B2 (en) * 2010-04-13 2014-03-12 住友電気工業株式会社 Insulating film and flat cable using the same
CN103509329B (en) * 2012-06-28 2016-01-20 中山台光电子材料有限公司 Low dielectric resin constituent and apply its copper clad laminate and printed circuit board (PCB)
CN104629341B (en) * 2013-11-08 2017-01-04 中山台光电子材料有限公司 Low dielectric resin composition, applies its semi-solid preparation film, copper clad foil substrate, circuit board
CN103709717B (en) * 2013-12-17 2017-10-20 中山台光电子材料有限公司 Ethylene benzyl is etherified DOPO compound resins composition and preparation and application
CN103937200B (en) * 2014-03-19 2017-01-04 金发科技股份有限公司 A kind of poly (arylene ether) composition, preparation method and applications

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KR20180088659A (en) 2018-08-06
CN108368349A (en) 2018-08-03
KR102570161B1 (en) 2023-08-23

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