JP2017096912A5 - - Google Patents

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Publication number
JP2017096912A5
JP2017096912A5 JP2016115553A JP2016115553A JP2017096912A5 JP 2017096912 A5 JP2017096912 A5 JP 2017096912A5 JP 2016115553 A JP2016115553 A JP 2016115553A JP 2016115553 A JP2016115553 A JP 2016115553A JP 2017096912 A5 JP2017096912 A5 JP 2017096912A5
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JP
Japan
Prior art keywords
scattered light
reflected
cylinder
inspection
inspection beam
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Application number
JP2016115553A
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English (en)
Japanese (ja)
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JP2017096912A (ja
JP6517734B2 (ja
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Priority to JP2016115553A priority Critical patent/JP6517734B2/ja
Priority claimed from JP2016115553A external-priority patent/JP6517734B2/ja
Publication of JP2017096912A publication Critical patent/JP2017096912A/ja
Publication of JP2017096912A5 publication Critical patent/JP2017096912A5/ja
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Publication of JP6517734B2 publication Critical patent/JP6517734B2/ja
Expired - Fee Related legal-status Critical Current
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JP2016115553A 2016-06-09 2016-06-09 散乱光検出ヘッド Expired - Fee Related JP6517734B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016115553A JP6517734B2 (ja) 2016-06-09 2016-06-09 散乱光検出ヘッド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016115553A JP6517734B2 (ja) 2016-06-09 2016-06-09 散乱光検出ヘッド

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2015225061A Division JP5961909B1 (ja) 2015-11-17 2015-11-17 欠陥検査装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2019043594A Division JP2019082496A (ja) 2019-03-11 2019-03-11 欠陥検査装置

Publications (3)

Publication Number Publication Date
JP2017096912A JP2017096912A (ja) 2017-06-01
JP2017096912A5 true JP2017096912A5 (enExample) 2018-05-17
JP6517734B2 JP6517734B2 (ja) 2019-05-22

Family

ID=58818184

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016115553A Expired - Fee Related JP6517734B2 (ja) 2016-06-09 2016-06-09 散乱光検出ヘッド

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JP (1) JP6517734B2 (enExample)

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53107865A (en) * 1977-03-02 1978-09-20 Hitachi Ltd Detector of minute undulations
US4601576A (en) * 1983-12-09 1986-07-22 Tencor Instruments Light collector for optical contaminant and flaw detector
JPS6117050A (ja) * 1984-05-14 1986-01-25 テンコ−ル・インスツルメンツ 欠陥検知装置
DE3540916A1 (de) * 1985-11-19 1987-05-21 Zeiss Carl Fa Verfahren und vorrichtung zur raster-lichtmikroskopischen darstellung von objekten im dunkelfeld
JP2002188999A (ja) * 2000-12-21 2002-07-05 Hitachi Ltd 異物・欠陥検出装置及び検出方法
JP2006313107A (ja) * 2005-05-09 2006-11-16 Lasertec Corp 検査装置及び検査方法並びにそれを用いたパターン基板の製造方法
JP4822548B2 (ja) * 2007-04-23 2011-11-24 レーザーテック株式会社 欠陥検査装置
JP4876019B2 (ja) * 2007-04-25 2012-02-15 株式会社日立ハイテクノロジーズ 欠陥検査装置およびその方法
JP5268061B2 (ja) * 2008-11-05 2013-08-21 レーザーテック株式会社 基板検査装置
JP5686394B1 (ja) * 2014-04-11 2015-03-18 レーザーテック株式会社 ペリクル検査装置
JP2015203658A (ja) * 2014-04-16 2015-11-16 株式会社日立ハイテクノロジーズ 検査装置

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