JP2017090618A - ペリクル収納容器の包装構造体及びその包装方法 - Google Patents
ペリクル収納容器の包装構造体及びその包装方法 Download PDFInfo
- Publication number
- JP2017090618A JP2017090618A JP2015219185A JP2015219185A JP2017090618A JP 2017090618 A JP2017090618 A JP 2017090618A JP 2015219185 A JP2015219185 A JP 2015219185A JP 2015219185 A JP2015219185 A JP 2015219185A JP 2017090618 A JP2017090618 A JP 2017090618A
- Authority
- JP
- Japan
- Prior art keywords
- packaging
- storage container
- pellicle storage
- pellicle
- package
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70983—Optical system protection, e.g. pellicles or removable covers for protection of mask
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D77/00—Packages formed by enclosing articles or materials in preformed containers, e.g. boxes, cartons, sacks or bags
- B65D77/04—Articles or materials enclosed in two or more containers disposed one within another
- B65D77/0406—Rigid containers in preformed flexible containers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
- B65D81/02—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage
- B65D81/025—Containers made of sheet-like material and having a shape to accommodate contents
- B65D81/027—Containers made of sheet-like material and having a shape to accommodate contents double-walled
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0012—Processes making use of the tackiness of the photolithographic materials, e.g. for mounting; Packaging for photolithographic material; Packages obtained by processing photolithographic materials
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Health & Medical Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Packaging Frangible Articles (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Packages (AREA)
Abstract
Description
ここで、軟質ポリ塩化ビニルとは、フタル酸エステル等からなる可塑剤を重量比で10%以上含有しているものを指す。
実施例1では、図1〜図3に示すようなペリクル収納容器の包装構造体10を製作した。この包装構造体10は、内側包装体11’と外側包装体12の二重の包装体で構成されており、内側包装体11’の内部には、平面状の包装シート11を用いて図5に示すペリクル収納容器50が梱包されている。
実施例2では、図6に示すようなペリクル収納容器の包装構造体60を製作した。この製作では、先ず、ペリクル収納容器64を平面状の包装シート61で梱包して内側包装体61’を構成し、これを袋状の外側包装体62に収納して包装構造体60を製作した。
11 平面状の包装シート
11’内側包装体
12 袋状の外側包装体
13 粘着テープ
14 粘着テープ
50 ペリクル収納容器
50a ペリクル収納容器外縁
50b ペリクル収納容器外縁
50c ペリクル収納容器外縁
50d ペリクル収納容器外縁
51 ペリクル収納容器本体
52 ペリクル収納容器蓋体
53 ペリクル
60 ペリクル収納容器の包装構造体
61a 平面状の包装シート
61b 平面状の包装シート
61c 平面状の包装シート
61’ 内側包装体
62 袋状の外側包装体
63 粘着テープ
64 ペリクル収納容器
64a ペリクル収納容器本体
64b ペリクル収納容器蓋体
64c ハンドル
64d ハンドル
64e 脚部
64f バックル
65 ペリクル
70 ペリクル収納容器の包装構造体
71 内側包装体
72 袋状の外側包装体
73 粘着テープ
Claims (5)
- 少なくとも一つの辺長が500mmを超えるペリクルを収納するペリクル収納容器の包装構造体であって、該包装構造体は、帯電防止性を有する平面状の包装シートでペリクル収納容器を覆って梱包してなる内側包装体と、該内側包装体を収納する袋状の外側包装体からなる、少なくとも二重の包装体で構成されていることを特徴とするペリクル収納容器の包装構造体。
- 前記平面状の包装シートは、軟質ポリ塩化ビニルまたはポリ塩化ビニリデンからなることを特徴とする請求項1に記載のペリクル収納容器の包装構造体。
- 前記平面状の包装シートの厚みは、50〜300μmであることを特徴とする請求項1または2に記載のペリクル収納容器の包装構造体。
- 前記外側包装体は、ポリエチレン、ポリプロピレン、ポリエチレンテレフタレートの何れかから成ることを特徴とする請求項1から3の何れかに記載のペリクル収納容器の包装構造体。
- 少なくとも一つの辺長が500mmを超えるペリクルを収納するためのペリクル収納容器の包装方法であって、帯電防止性を有する平面状の包装シートを複数回折り返して前記ペリクル収納容器を梱包することで内側包装体を作製する工程と、該内側包装体を袋状の外側包装体に収納する工程と、を含むことを特徴とするペリクル収納容器の包装方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015219185A JP6494111B2 (ja) | 2015-11-09 | 2015-11-09 | ペリクル収納容器の包装構造体及びその包装方法 |
KR1020160145784A KR20170054290A (ko) | 2015-11-09 | 2016-11-03 | 펠리클 수납 용기의 포장 구조체 및 그 포장 방법 |
TW105135830A TWI608969B (zh) | 2015-11-09 | 2016-11-04 | Dust film assembly storage container packaging structure and its packaging method |
CN201610980562.6A CN106672429A (zh) | 2015-11-09 | 2016-11-08 | 防尘薄膜组件收纳容器的包装构造体以及其包装方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015219185A JP6494111B2 (ja) | 2015-11-09 | 2015-11-09 | ペリクル収納容器の包装構造体及びその包装方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017090618A true JP2017090618A (ja) | 2017-05-25 |
JP6494111B2 JP6494111B2 (ja) | 2019-04-03 |
Family
ID=58771592
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015219185A Active JP6494111B2 (ja) | 2015-11-09 | 2015-11-09 | ペリクル収納容器の包装構造体及びその包装方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6494111B2 (ja) |
KR (1) | KR20170054290A (ja) |
CN (1) | CN106672429A (ja) |
TW (1) | TWI608969B (ja) |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01267110A (ja) * | 1988-04-15 | 1989-10-25 | Mitsubishi Kasei Corp | 包装装置 |
JPH04114880A (ja) * | 1990-08-29 | 1992-04-15 | Fujitsu Ltd | 梱包方法 |
JPH10305814A (ja) * | 1997-05-01 | 1998-11-17 | Mitsui Chem Inc | ペリクル包装具 |
JP2002210861A (ja) * | 2001-01-22 | 2002-07-31 | Akimasa Kondo | 半導体・電子部品用包装材料 |
US20050023187A1 (en) * | 2003-07-31 | 2005-02-03 | Golda Janice M. | Thermophoretic protection of reticles |
JP2006056034A (ja) * | 2004-08-17 | 2006-03-02 | Shin Etsu Polymer Co Ltd | 帯電防止性積層体及びその製造方法 |
JP2011007827A (ja) * | 2009-06-23 | 2011-01-13 | Shin Etsu Polymer Co Ltd | 大型精密部材収納容器 |
JP2011232388A (ja) * | 2010-04-23 | 2011-11-17 | Shin Etsu Chem Co Ltd | ペリクル収納容器 |
JP2011240946A (ja) * | 2010-05-17 | 2011-12-01 | Shin-Etsu Chemical Co Ltd | ペリクルを収納した容器の収納密閉方法 |
JP2012208158A (ja) * | 2011-03-29 | 2012-10-25 | Shin Etsu Chem Co Ltd | ペリクル収納方法 |
JP2012223942A (ja) * | 2011-04-18 | 2012-11-15 | Showa Denko Packaging Co Ltd | 自動包装適性に優れた無塵包装袋 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5863496A (en) * | 1996-11-25 | 1999-01-26 | Prepared Media Laboratory, Inc. | Sterile packaging |
US5881883A (en) * | 1997-05-23 | 1999-03-16 | Siegelman; Burt A. | Protective package having a plurality of pouches |
JP2003050445A (ja) * | 2001-08-06 | 2003-02-21 | Fuji Photo Film Co Ltd | 感光材料包装体 |
JP4391435B2 (ja) * | 2005-03-22 | 2009-12-24 | 信越化学工業株式会社 | ペリクル収納容器 |
JP4175433B2 (ja) * | 2007-02-09 | 2008-11-05 | ソニー株式会社 | 光学素子包装体、バックライトおよび液晶表示装置 |
JP2012046239A (ja) * | 2010-08-30 | 2012-03-08 | Shin-Etsu Chemical Co Ltd | ペリクル収納ケース用コーナークリップ |
-
2015
- 2015-11-09 JP JP2015219185A patent/JP6494111B2/ja active Active
-
2016
- 2016-11-03 KR KR1020160145784A patent/KR20170054290A/ko not_active Application Discontinuation
- 2016-11-04 TW TW105135830A patent/TWI608969B/zh active
- 2016-11-08 CN CN201610980562.6A patent/CN106672429A/zh active Pending
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01267110A (ja) * | 1988-04-15 | 1989-10-25 | Mitsubishi Kasei Corp | 包装装置 |
JPH04114880A (ja) * | 1990-08-29 | 1992-04-15 | Fujitsu Ltd | 梱包方法 |
JPH10305814A (ja) * | 1997-05-01 | 1998-11-17 | Mitsui Chem Inc | ペリクル包装具 |
JP2002210861A (ja) * | 2001-01-22 | 2002-07-31 | Akimasa Kondo | 半導体・電子部品用包装材料 |
US20050023187A1 (en) * | 2003-07-31 | 2005-02-03 | Golda Janice M. | Thermophoretic protection of reticles |
JP2006056034A (ja) * | 2004-08-17 | 2006-03-02 | Shin Etsu Polymer Co Ltd | 帯電防止性積層体及びその製造方法 |
JP2011007827A (ja) * | 2009-06-23 | 2011-01-13 | Shin Etsu Polymer Co Ltd | 大型精密部材収納容器 |
JP2011232388A (ja) * | 2010-04-23 | 2011-11-17 | Shin Etsu Chem Co Ltd | ペリクル収納容器 |
JP2011240946A (ja) * | 2010-05-17 | 2011-12-01 | Shin-Etsu Chemical Co Ltd | ペリクルを収納した容器の収納密閉方法 |
JP2012208158A (ja) * | 2011-03-29 | 2012-10-25 | Shin Etsu Chem Co Ltd | ペリクル収納方法 |
JP2012223942A (ja) * | 2011-04-18 | 2012-11-15 | Showa Denko Packaging Co Ltd | 自動包装適性に優れた無塵包装袋 |
Also Published As
Publication number | Publication date |
---|---|
TWI608969B (zh) | 2017-12-21 |
TW201716298A (zh) | 2017-05-16 |
KR20170054290A (ko) | 2017-05-17 |
CN106672429A (zh) | 2017-05-17 |
JP6494111B2 (ja) | 2019-04-03 |
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