JP2017082331A - 放熱銅箔およびグラフェン複合材 - Google Patents
放熱銅箔およびグラフェン複合材 Download PDFInfo
- Publication number
- JP2017082331A JP2017082331A JP2016211046A JP2016211046A JP2017082331A JP 2017082331 A JP2017082331 A JP 2017082331A JP 2016211046 A JP2016211046 A JP 2016211046A JP 2016211046 A JP2016211046 A JP 2016211046A JP 2017082331 A JP2017082331 A JP 2017082331A
- Authority
- JP
- Japan
- Prior art keywords
- copper foil
- heat dissipation
- graphene layer
- range
- graphene
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 199
- 239000011889 copper foil Substances 0.000 title claims abstract description 182
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 163
- 229910021389 graphene Inorganic materials 0.000 title claims abstract description 131
- 239000002131 composite material Substances 0.000 title claims abstract description 60
- 230000003746 surface roughness Effects 0.000 claims abstract description 52
- 229910052802 copper Inorganic materials 0.000 claims abstract description 17
- 239000010949 copper Substances 0.000 claims abstract description 17
- 239000010410 layer Substances 0.000 claims description 81
- 230000017525 heat dissipation Effects 0.000 claims description 53
- 238000001556 precipitation Methods 0.000 claims description 32
- 229910002804 graphite Inorganic materials 0.000 claims description 29
- 239000010439 graphite Substances 0.000 claims description 29
- 239000012790 adhesive layer Substances 0.000 claims description 20
- 238000004519 manufacturing process Methods 0.000 claims description 20
- 239000002002 slurry Substances 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 12
- 239000002245 particle Substances 0.000 claims description 11
- 230000008021 deposition Effects 0.000 claims description 9
- 238000001035 drying Methods 0.000 claims description 5
- 239000011230 binding agent Substances 0.000 claims description 2
- 239000000843 powder Substances 0.000 claims 3
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000006229 carbon black Substances 0.000 claims 1
- 239000004020 conductor Substances 0.000 claims 1
- 230000001747 exhibiting effect Effects 0.000 claims 1
- 238000000465 moulding Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 10
- 230000005855 radiation Effects 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- 235000019592 roughness Nutrition 0.000 description 8
- 239000011651 chromium Substances 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 239000004642 Polyimide Substances 0.000 description 5
- 229910000365 copper sulfate Inorganic materials 0.000 description 5
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 5
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- 238000012360 testing method Methods 0.000 description 5
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
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- 238000012545 processing Methods 0.000 description 4
- 238000005336 cracking Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000008151 electrolyte solution Substances 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 239000006259 organic additive Substances 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 238000005096 rolling process Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
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- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
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- 229910052804 chromium Inorganic materials 0.000 description 2
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- 229910001416 lithium ion Inorganic materials 0.000 description 2
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- 229920002239 polyacrylonitrile Polymers 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 239000011343 solid material Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 229920003048 styrene butadiene rubber Polymers 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- 108010010803 Gelatin Proteins 0.000 description 1
- XXACTDWGHQXLGW-UHFFFAOYSA-M Janus Green B chloride Chemical compound [Cl-].C12=CC(N(CC)CC)=CC=C2N=C2C=CC(\N=N\C=3C=CC(=CC=3)N(C)C)=CC2=[N+]1C1=CC=CC=C1 XXACTDWGHQXLGW-UHFFFAOYSA-M 0.000 description 1
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- 230000005540 biological transmission Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
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- 235000019322 gelatine Nutrition 0.000 description 1
- 235000011852 gelatine desserts Nutrition 0.000 description 1
- 238000005087 graphitization Methods 0.000 description 1
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- 230000020169 heat generation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- FXNGWBDIVIGISM-UHFFFAOYSA-N methylidynechromium Chemical compound [Cr]#[C] FXNGWBDIVIGISM-UHFFFAOYSA-N 0.000 description 1
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- FRTIVUOKBXDGPD-UHFFFAOYSA-M sodium;3-sulfanylpropane-1-sulfonate Chemical compound [Na+].[O-]S(=O)(=O)CCCS FRTIVUOKBXDGPD-UHFFFAOYSA-M 0.000 description 1
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- 238000004381 surface treatment Methods 0.000 description 1
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- 238000009736 wetting Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
- H01L23/3672—Foil-like cooling fins or heat sinks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- B32B15/00—Layered products comprising a layer of metal
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
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- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
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Abstract
放熱銅箔およびグラフェン複合材を提供する。
【解決手段】
銅含有量が90%より多く、面積重量が280〜900(g/m2)の範囲にあり、ドラム面と析出面を含む銅箔であって、前記析出面の表面粗度(Rz)が1.0μm以下である放熱銅箔。
【選択図】図2
Description
ドラム面と析出面を含む銅箔であって、前記析出面の表面粗度(Rz)が1.0μm以下である放熱銅箔を開示する。
さらにもう一つの実施形態において、熱分解黒鉛シートと同等な放熱特性を有する放熱部品は、銅箔およびグラフェンの複合材の形態であってもよい。
本発明のいくつの態様は、図面に示される配列または手段に限られないと理解されたい。
図1(従来技術)では、Apple iPhone 4sの分解写真から分かるように、熱分解黒鉛シート10、11、12は携帯電話の部品の余熱を遮断するために使用される。携帯電話の中の余熱区域は熱分解黒鉛シート10、11と12に被覆されているトランジスタ、バックライトモジュールと電池(全部図示せず)である。
なお、銅含有量(%)=[面積重量(g/m2)/厚さ(μm)×8.96]×100>90。ここで厚さはマイクロメータにより測定する。
なお、粒径は、XRD(X線回折)ピークからシェラーの式(D(粒径)=Kλ/Bcosθ)より算出した。ここで、λは波長(Å)であり、Bは、機器の広がりに対して補正されたFWHM(ラジアン)であり、θはブラッグ角であり、Kが0.9〜1の結晶形状因子である。
●銅箔は2.5μmより大きい表面粗度(Rz)を有すると、銅箔の銅含有量が少なくなり、放熱性能が低下すること。
●光入射角度が60°である場合、銅箔のドラム面のMDグロスが180より大きいと、表面面積が小さくなり、熱の吸収が低下すること。
両銅箔のサンプル(a)と(b)は、同様な表面粗度(Rz)を有するが、(b)が(a)より低いMDグロスを有し、その故(b)は(a)より大きい表面面積を有することになる。銅箔はそのドラム面に高い表面粗度(Rz)と低いMDグロスを有するとき、ドラム面の表面面積が大きくなり、熱の吸収性能が良いことを意味する。しかしながら、グロスと表面粗度(Rz)は逆相関ではないことが理解できる。粗度表面に適度かつ平らでない波動(surge)を発生しないため、均一な低表面粗度(Rz)となる場合、外観は光沢になる。一方、粗度表面に適度かつ平らでない波動が発生するため、均一な低表面粗度(Rz)にならない場合、外観は半光沢または淡褐色になる。
析出面の表面粗度(Rz)が低い場合、グラフェン層の塗布はより均一になるが、析出面の表面粗度(Rz)が0.3μmより低くなると、銅箔とグラフェン層との接着性が低下する。
実施例
実施例1
電解銅箔の製造
銅線を50wt%の硫酸水溶液に溶解させ、320g/Lの硫酸銅(CuSO4・5H2O)と100g/Lの硫酸とを含む硫酸銅電解質溶液を用意した。硫酸銅電解液1リットル当たり、7.97mgのゼラチン(2CP:25Koei Chemical 社)、4.33mgの3−メルカプト−1−プロパンスルホン酸ナトリウム(MPS:HOPAX社)、1.5mgのヤヌスグリーンB(JGB)、および35mg塩素イオンを添加した。その後、液温50℃および電流密度50A/dm2で、厚さが35μmである電解銅箔を用意した。35μmの銅箔を製造した後、銅箔の表面をZn・Crで処理し、CrめっきまたはCrディッピングで酸化を防止する。銅箔の表面張力は、Zn・CrまたはCr処理の条件(例えば、Cr処理溶液のpH値)を変更することで調整できる。
溶媒とする水と、下記表2に示す材料とを固液比率73%(73gの固体材料、100gの水)で使用し、水性グラフェンスラリーを用意した。
銅箔表面のグラフェン層を乾燥した後、グラフェン・銅箔複合材を圧延した。圧延機のロールの寸法はφ250mm×250mmであり、ロールの硬度は62〜65°HRCであり、ロール材料は高炭素クロムメッキ鋼(SUJ2)である。グラフェン層の厚さが15μm(元厚さの半分)になるまでにグラフェン・銅箔複合材を1M/minの圧延速度と1000kgの圧力で圧延した。
表6(電解銅箔特性の比較)
表7(電解銅箔特性の比較)
* グラフェン層は電解銅箔の析出面に塗布される。
** グラフェン層の厚さは15μmである。
*** グラフェン層の特性(表面粗度(Rz)と明度L*)は同様であり、電解銅箔の特性のみ変更する。
**** 平衡温度は低い方がよい。
表8(グラフェン層特性の比較)
表9−(グラフェン層特性の比較)
* 電解銅箔の厚さは35umであり、銅含有量は約98%である。
** 電解銅箔の特性は同様であり、グラフェン層の特性のみ変更する。
*** 平衡温度は低いの方がよい。
銅含有量
銅含有量(%):[面積重量(g/m2)/(厚さ(μm)×8.96(g/cm3))]×100
論理銅密度=8.96g/cm3
(1)面積重量
1.銅箔試料を100mm×100mmのサイズにカットする。
2.電子天秤を用いて銅箔試料の重量を測る。電子天秤は±0.1mgの精度で重量を測 ることができる必要がある。
3.g/m2単位で面積重量に換算する。
(2)厚さ
高精度測微器(Mitutoyo 293−100 MDH−25M)で銅箔厚さ を測る。0.000005”/0.1μmの解像度で測量できる。
粗度は、JIS B 0601−1994に準じて、α−型表面粗度測定機(Kosaka Laboratory Ltd、SE 1700シリーズ)で測定された。
グロスはグロスメーター(BYK社製、型番micro−gloss60°型)を使用し、JIS Z8741に準じて測量した。すなわち、光線入射角60°でドラム面の機械方向(MD)と幅方向(TD)のグロスを測量した
銅箔の表面張力はダインペン(dyne pen)で測量した。まず、銅箔に低ダイン値のペンを使用した。インクは中断せずに銅箔表面を連続的にカバーしている場合、銅箔の表面張力はこのダイン値より大きい。次に、高いダイン値を有するペンを使用して上記プロセスを繰り返す。インクが中断したとき、銅箔の表面張力を決定した。本開示の表面処理された銅箔の表面張力44〜68dyne/cmの範囲にある。
色L*a*b*の測定は、JIS Z 8722(2000)に準じて、分光光度計(コニカミノルタ、CM2500c)を使用して行われた(「式の測定方法−反射および透過物体色」)。
20…銅箔
22…グラフェン層
24…接着層
25…表面
26…グラフェン層
40…放熱試験装置
41…加熱器
42…マザーボード
43…電池
44…アクリルシート
45、46…熱センサー
47…放熱シート
50…グラフェン層・銅箔複合材
53…銅箔
54…析出面
55…グラフェン層
56…表面
57…接着層
60…銅箔
62…銅箔
64…表面
66…粗面化された表面
101…銅箔
102…接着層
120…グラフェン層
121…熱源
122…銅箔
123…ドラム面
124…熱伝導性接着剤
125…析出面
126…電子装置
130、137…グラフェン層
131…熱源
132…銅箔
133…ドラム面
135…析出面
Claims (26)
- 銅含有量が90%より多く、
面積重量が280〜900(g/m2)の範囲にあり、
ドラム面と析出面を含む
銅箔であって、
前記析出面の表面粗度(Rz)が1.0μm以下である
放熱銅箔。 - 前記ドラム面の表面粗度(Rz)が2.5μm以下である、請求項1に記載の放熱銅箔。
- 光入射角度が60°である場合、前記ドラム面が180より低いMDグロスを示す、請求項1に記載の放熱銅箔。
- 前記銅箔は44〜68dyne/cmの範囲にある表面張力を示す、請求項1に記載の放熱銅箔。
- 前記ドラム面の表面粗度(Rz)が1.1〜2.5μmの範囲にある、請求項1に記載の放熱銅箔。
- 前記析出面の表面粗度(Rz)が0.3〜1.0μmの範囲にある、請求項1に記載の放熱銅箔。
- L*a*b*表色系に準じて、前記析出面の明度値L*が20〜40の範囲にある、請求項1に記載の放熱銅箔。
- L*a*b*表色系に準じて、前記析出面のa*値が6〜11の範囲にあり、前記析出面のb*値が3〜8の範囲にある、請求項7に記載の放熱銅箔。
- 前記銅箔が30nmより大きい粒径を有する、請求項1に記載の放熱銅箔。
- 請求項1に記載の銅箔と、
接着層と、
圧力成形されたグラフェン層とを含み、
前記接着層は、
前記グラフェン層の前記銅箔との接触面の反対の表面、あるいは、前記銅箔の前記グラフェン層との接触面の反対の表面にある、
複合放熱構造。 - 前記圧力成形されたグラフェン層は3〜50μmの範囲にある厚さを有する、請求項10に記載の複合放熱構造。
- 前記グラフェン層は、
前記銅箔と反対する側であって、L*a*b*表色系に準じて20〜60の範囲にある明度値L*を有する表面を有する、請求項10に記載の複合放熱構造。 - 前記ドラム面と前記析出面の両面と接触する圧力成形されたグラフェン層をさらに含む、
請求項1に記載の複合放熱構造。 - 前記圧力成形されたグラフェン層は、
水性バインダーと、
グラフェン粉末と、
カーボンブラック、黒鉛、およびこれらの組み合わせからなる群から選ばれる導電材と、
を含む、請求項10に記載の複合放熱構造。 - 電解銅箔と、前記電解銅箔と結合するグラフェン層とを含み、
前記電解銅箔は280〜900(g/m2)の範囲にある面積重量を有し、ドラム面と析出面とを含み、
前記析出面は0.3〜1.0μmの範囲にある表面粗度(Rz)を有し、
前記グラフェン層は、
前記ドラム面と前記析出面の少なくとも一つの面と接触し、
前記電解銅箔と反対する側であって、L*a*b*表色系に準じて20〜60の範囲にある明度値L*を有する表面を含む、
複合放熱構造。 - 前記ドラム面と前記析出面の両面と接触するグラフェン層をさらに含む、請求項15に記載の複合放熱構造。
- 前記ドラム面が1.1〜2.5μmの範囲にある表面粗度(Rz)を示す、請求項15に記載の複合放熱構造。
- 光入射角度が60°である場合、前記ドラム面が180より低いMDグロスを示す、請求項15に記載の複合放熱構造。
- 前記電解銅箔が、44〜68dyne/cmの範囲にある表面張力を示す、請求項15に記載の複合放熱構造。
- 接着層をさらに含み、
前記接着層は、
前記グラフェン層の前記電解銅箔との接触面の反対の表面、あるいは、前記銅箔の前記グラフェン層との接触面の反対の表面にある、請求項15に記載の複合放熱構造。 - 請求項20に記載の複合放熱構造を含む電子装置。
- 複合放熱構造の製造方法であって、
ドラム面と析出面を有し、前記析出面は0.3〜1.0μmの範囲にある表面粗度(Rz)を示す電解銅箔を提供する提供工程と、
前記析出面にグラフェン粉末のスラリーを塗布する塗布工程と、
前記スラリーを乾燥させ、前記析出面と接触して第一の厚さを有するグラフェン層を形成する第一形成工程と、
前記電解銅箔と結合するように前記グラフェン層を圧力の下に成形することにより、前記グラフェン層の厚さを減らし、前記電解銅箔と接触して厚さが減らされたグラフェン層を形成する第二形成工程と、
を含む、複合放熱構造の製造方法。 - 前記第二形成工程のあとに、前記グラフェン層に接着層を提供する工程をさらに含む、請求項22に記載の製造方法。
- 前記ドラム面にグラフェン粉末のスラリーを塗布する工程をさらに含む、請求項22に記載の製造方法。
- 前記スラリーは水性スラリーである、請求項22に記載の製造方法。
- 前記第二形成工程は、少なくとも1000kgのロールプレス機の圧力で、前記電解銅箔に前記グラフェン層を成形する工程を含む、請求項22に記載の製造方法。
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CN107017213A (zh) | 2017-08-04 |
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KR101849073B1 (ko) | 2018-04-16 |
JP6258441B2 (ja) | 2018-01-10 |
TWI614352B (zh) | 2018-02-11 |
US20170115074A1 (en) | 2017-04-27 |
US9709348B2 (en) | 2017-07-18 |
KR20170054264A (ko) | 2017-05-17 |
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