JP2017072216A - 流体制御弁及びその制御プログラム - Google Patents
流体制御弁及びその制御プログラム Download PDFInfo
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- JP2017072216A JP2017072216A JP2015200289A JP2015200289A JP2017072216A JP 2017072216 A JP2017072216 A JP 2017072216A JP 2015200289 A JP2015200289 A JP 2015200289A JP 2015200289 A JP2015200289 A JP 2015200289A JP 2017072216 A JP2017072216 A JP 2017072216A
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- 239000012530 fluid Substances 0.000 title claims abstract description 61
- 238000001514 detection method Methods 0.000 claims abstract description 12
- 238000000926 separation method Methods 0.000 claims abstract description 5
- 238000005259 measurement Methods 0.000 description 44
- 230000007246 mechanism Effects 0.000 description 13
- 238000000034 method Methods 0.000 description 7
- 238000011144 upstream manufacturing Methods 0.000 description 7
- 238000012937 correction Methods 0.000 description 6
- 230000008859 change Effects 0.000 description 4
- 230000006870 function Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/34—Cutting-off parts, e.g. valve members, seats
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0075—For recording or indicating the functioning of a valve in combination with test equipment
- F16K37/0083—For recording or indicating the functioning of a valve in combination with test equipment by measuring valve parameters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/12—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with streamlined valve member around which the fluid flows when the valve is opened
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
- F16K31/007—Piezoelectric stacks
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0025—Electrical or magnetic means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0025—Electrical or magnetic means
- F16K37/0041—Electrical or magnetic means for measuring valve parameters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0075—For recording or indicating the functioning of a valve in combination with test equipment
- F16K37/0091—For recording or indicating the functioning of a valve in combination with test equipment by measuring fluid parameters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
- G01D3/02—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups with provision for altering or correcting the law of variation
- G01D3/022—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups with provision for altering or correcting the law of variation having an ideal characteristic, map or correction data stored in a digital memory
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8158—With indicator, register, recorder, alarm or inspection means
- Y10T137/8225—Position or extent of motion indicator
- Y10T137/8242—Electrical
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Fluid Mechanics (AREA)
- Technology Law (AREA)
- Indication Of The Valve Opening Or Closing Status (AREA)
- Flow Control (AREA)
Abstract
Description
その他、弁体の開き始め位置を位置ゼロとして用いることにより、流体制御弁の個体差の影響を受けずに、流体制御を行うことができる。流体制御弁の個体差による流体制御の精度誤差を解消することができる。
具体的にこのマスフローコントローラ100は、図1に示すように、例えば半導体プロセス用ガス等の流体が流れる流路51が形成されたボディ5と、この流路51を流れる流体の流量を測定する流量測定機構2と、前記流路51を流れる流体の流量を制御する流体制御弁3と、前記流量測定機構2が出力する測定流量を予め定めた設定流量に近づけるべく流体制御弁3の弁開度を制御する制御機構4とを具備する。以下に各部を詳述する。
具体的に流体制御弁3は、図2に示すように、ボディ5内に収容された一対の弁部材たる弁座部材31及び弁体部材32と、前記弁体部材32を駆動して弁開度、すなわち弁座部材31と弁体部材32との離間距離を設定するアクチュエータ33とを備えている。
ピエゾスタック331の先端部は、中間接続部材334を介して作動体332に接続されている。
作動体332は、ダイアフラム部材332aと、当該ダイアフラム部材332aの中心に設けられて、弁体部材32に当接する接続棒332bとを有する。この接続棒332bは、前記弁座部材32の中心(本実施形態では内部流路32b)を貫通して弁座部材32に当接する。
そして、ピエゾスタック331に電圧が印加されるとピエゾスタック331が伸長して、作動体332が弁体部材32を開弁方向に付勢して移動させる。これにより、弁座面31aと着座面32aとが、印加電圧に応じた距離だけ離間する。この隙間を通じて上流側流路51(A)と下流側流路(B)とが連通する。なお、弁体部材32は、アクチュエータ33に電圧を印加しないノーマル状態においては閉状態となる。
ここで、位置ゼロに設定するとは、開き始め位置Xを数値ゼロ(数字0)に設定することの他、位置がゼロであることが認識できる数値、例えば一桁目から所定桁数までゼロが連続する区切りの良い所定値に設定することも含む。
位置出力部42は、アクチュエータ33に全閉信号を出力した状態における位置センサ7の位置測定信号と、同状態における位置センサ7の位置測定信号の初期値とのずれ量を用いて、既に設定された位置ゼロを前記ずれ量分ずらすことにより補正する。なお、初期値は、直近に開き始め位置Xを測定した際に取得した全閉状態における位置センサ7の位置測定信号である。
例えば、位置情報検知部7としては、前記実施形態の渦電流センサに限られず、静電容量センサであってもよいし、光干渉センサ等の光学センサであってもよいし、アクチュエータの駆動電圧を検知して位置情報を取得するものであってもよい。
31 ・・・弁座
31a・・・弁座面
32 ・・・弁体
32a・・・着座面
33 ・・・アクチュエータ
41 ・・・弁開度制御部
42 ・・・位置出力部
42 ・・・表示部
X ・・・開き始め位置
7 ・・・位置センサ
Claims (4)
- 弁座と、
前記弁座に対して接離可能に設けられた弁体と、
前記弁体を接離方向に移動させるアクチュエータと、
前記弁座に対する前記弁体の相対位置に応じた値を検出する位置情報検知部と、
前記弁体の開き始め位置において前記位置情報取得部により得られた位置情報に関わらず、前記開き始め位置を位置ゼロとする位置出力部とを備える流体制御弁。 - 前記位置出力部は、前記位置情報検知部により得られた位置情報が前記開き始め位置よりも弁座側の位置を示す場合にも、前記弁体の位置を位置ゼロとする請求項1記載の流体制御弁。
- 前記位置出力部が、前記アクチュエータに全閉信号を出力した状態における前記位置情報検知部により得られた位置情報と、同状態における前記位置情報検知部により得られた位置情報の初期値とのずれ量を用いて、前記位置ゼロを補正する請求項1又は2記載の流体制御弁。
- 弁座と、当該弁座に対して接離可能に設けられた弁体と、当該弁体を接離方向に移動させるアクチュエータと、前記弁座に対する前記弁体の相対位置に応じた値を検出する位置情報検知部とを備える流体制御弁を制御する制御プログラムであって、
前記弁体の開き始め位置において前記位置情報取得部により得られた位置情報に関わらず、前記開き始め位置を位置ゼロとする位置出力部としての機能をコンピュータに備えさせることを特徴とする制御プログラム。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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JP2015200289A JP6775288B2 (ja) | 2015-10-08 | 2015-10-08 | 流体制御弁及びその制御プログラム |
KR1020160124060A KR102525494B1 (ko) | 2015-10-08 | 2016-09-27 | 유체 제어 밸브 및 그 제어 프로그램을 기록한 기록 매체 |
CN201610874019.8A CN106931221B (zh) | 2015-10-08 | 2016-09-30 | 流体控制阀及其控制方法 |
US15/283,757 US10323771B2 (en) | 2015-10-08 | 2016-10-03 | Fluid control valve and recording medium with control program thereof recorded therein |
TW105132618A TWI697638B (zh) | 2015-10-08 | 2016-10-07 | 流體控制閥及內儲有控制程式的電腦可讀取記錄媒體 |
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JP2015200289A JP6775288B2 (ja) | 2015-10-08 | 2015-10-08 | 流体制御弁及びその制御プログラム |
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JP2017072216A true JP2017072216A (ja) | 2017-04-13 |
JP6775288B2 JP6775288B2 (ja) | 2020-10-28 |
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US (1) | US10323771B2 (ja) |
JP (1) | JP6775288B2 (ja) |
KR (1) | KR102525494B1 (ja) |
CN (1) | CN106931221B (ja) |
TW (1) | TWI697638B (ja) |
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KR20180133803A (ko) * | 2017-06-07 | 2018-12-17 | 가부시키가이샤 호리바 에스텍 | 유체 제어 장치, 기록 매체에 저장된 제어 프로그램, 및 제어 방법 |
KR20190079564A (ko) | 2017-12-27 | 2019-07-05 | 가부시키가이샤 호리바 에스텍 | 교정 데이터 작성 장치 및 교정 데이터 작성 방법, 및 유량 제어 장치 |
JP2022172471A (ja) * | 2021-05-04 | 2022-11-16 | サムヤン コンプレヘンシブ バルブ カンパニー リミテッド | 流量制御スマート弁とこれを用いた流量制御システム |
US11960308B2 (en) | 2018-08-10 | 2024-04-16 | Fujikin, Incorporated | Fluid control apparatus, fluid control device, and operation analysis system |
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2016
- 2016-09-27 KR KR1020160124060A patent/KR102525494B1/ko active IP Right Grant
- 2016-09-30 CN CN201610874019.8A patent/CN106931221B/zh active Active
- 2016-10-03 US US15/283,757 patent/US10323771B2/en active Active
- 2016-10-07 TW TW105132618A patent/TWI697638B/zh active
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Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
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KR20180133803A (ko) * | 2017-06-07 | 2018-12-17 | 가부시키가이샤 호리바 에스텍 | 유체 제어 장치, 기록 매체에 저장된 제어 프로그램, 및 제어 방법 |
JP2018206387A (ja) * | 2017-06-07 | 2018-12-27 | 株式会社堀場エステック | 流体制御装置、制御プログラム、及び、制御方法 |
KR102461589B1 (ko) * | 2017-06-07 | 2022-11-02 | 가부시키가이샤 호리바 에스텍 | 유체 제어 장치, 기록 매체에 저장된 제어 프로그램, 및 제어 방법 |
KR20190079564A (ko) | 2017-12-27 | 2019-07-05 | 가부시키가이샤 호리바 에스텍 | 교정 데이터 작성 장치 및 교정 데이터 작성 방법, 및 유량 제어 장치 |
JP2019117592A (ja) * | 2017-12-27 | 2019-07-18 | 株式会社堀場エステック | 校正データ作成装置及び校正データ作成方法、並びに、流量制御装置 |
US11036242B2 (en) | 2017-12-27 | 2021-06-15 | Horiba Stec, Co., Ltd. | Calibration data generation apparatus, calibration data generation method, and flow rate control device |
JP7008499B2 (ja) | 2017-12-27 | 2022-01-25 | 株式会社堀場エステック | 校正データ作成装置及び校正データ作成方法、並びに、流量制御装置 |
US11960308B2 (en) | 2018-08-10 | 2024-04-16 | Fujikin, Incorporated | Fluid control apparatus, fluid control device, and operation analysis system |
JP2022172471A (ja) * | 2021-05-04 | 2022-11-16 | サムヤン コンプレヘンシブ バルブ カンパニー リミテッド | 流量制御スマート弁とこれを用いた流量制御システム |
Also Published As
Publication number | Publication date |
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TWI697638B (zh) | 2020-07-01 |
US10323771B2 (en) | 2019-06-18 |
US20170102095A1 (en) | 2017-04-13 |
KR102525494B1 (ko) | 2023-04-25 |
CN106931221B (zh) | 2020-05-26 |
KR20170042227A (ko) | 2017-04-18 |
JP6775288B2 (ja) | 2020-10-28 |
CN106931221A (zh) | 2017-07-07 |
TW201713889A (zh) | 2017-04-16 |
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