JP2017067200A5 - - Google Patents

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Publication number
JP2017067200A5
JP2017067200A5 JP2015194786A JP2015194786A JP2017067200A5 JP 2017067200 A5 JP2017067200 A5 JP 2017067200A5 JP 2015194786 A JP2015194786 A JP 2015194786A JP 2015194786 A JP2015194786 A JP 2015194786A JP 2017067200 A5 JP2017067200 A5 JP 2017067200A5
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JP
Japan
Prior art keywords
vibration
positions
isolator
states
sensors
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JP2015194786A
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English (en)
Japanese (ja)
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JP6587487B2 (ja
JP2017067200A (ja
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Priority to JP2015194786A priority Critical patent/JP6587487B2/ja
Priority claimed from JP2015194786A external-priority patent/JP6587487B2/ja
Priority to CN201610648111.2A priority patent/CN106556460B/zh
Priority to TW105128151A priority patent/TWI698596B/zh
Priority to KR1020160124472A priority patent/KR102493122B1/ko
Publication of JP2017067200A publication Critical patent/JP2017067200A/ja
Publication of JP2017067200A5 publication Critical patent/JP2017067200A5/ja
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Publication of JP6587487B2 publication Critical patent/JP6587487B2/ja
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JP2015194786A 2015-09-30 2015-09-30 アクティブ除振装置及びそのセンサの設置方法 Active JP6587487B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2015194786A JP6587487B2 (ja) 2015-09-30 2015-09-30 アクティブ除振装置及びそのセンサの設置方法
CN201610648111.2A CN106556460B (zh) 2015-09-30 2016-08-09 主动去振装置及该主动去振装置的振动传感器的设置方法
TW105128151A TWI698596B (zh) 2015-09-30 2016-08-31 主動去振裝置及該主動去振裝置的振動感測器的設置方法
KR1020160124472A KR102493122B1 (ko) 2015-09-30 2016-09-28 능동형 제진장치 및 그 센서의 설치방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015194786A JP6587487B2 (ja) 2015-09-30 2015-09-30 アクティブ除振装置及びそのセンサの設置方法

Publications (3)

Publication Number Publication Date
JP2017067200A JP2017067200A (ja) 2017-04-06
JP2017067200A5 true JP2017067200A5 (enExample) 2018-10-04
JP6587487B2 JP6587487B2 (ja) 2019-10-09

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ID=58417385

Family Applications (1)

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JP2015194786A Active JP6587487B2 (ja) 2015-09-30 2015-09-30 アクティブ除振装置及びそのセンサの設置方法

Country Status (4)

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JP (1) JP6587487B2 (enExample)
KR (1) KR102493122B1 (enExample)
CN (1) CN106556460B (enExample)
TW (1) TWI698596B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107061591B (zh) * 2017-04-27 2019-03-08 武汉微搏科技有限公司 一种整体式金属弹簧主动减振台
JP2019121688A (ja) * 2018-01-05 2019-07-22 株式会社ニューフレアテクノロジー 制振システム及び、その制振システムを備える光学装置
JP7023121B2 (ja) * 2018-01-15 2022-02-21 倉敷化工株式会社 アクティブ除振装置
CN110319919B (zh) * 2018-03-29 2021-05-07 上海梅山钢铁股份有限公司 一种应用于风机混泥土基础的松动判别方法
CN113661016B (zh) * 2019-04-12 2023-04-04 株式会社佐竹 筛分装置
CN110360267B (zh) * 2019-07-17 2021-05-21 山东圣海光纤科技有限公司 一种主动消除光学系统外界震动干扰的装置
CN113884004B (zh) * 2021-09-08 2024-06-07 长江存储科技有限责任公司 特征尺寸测量用扫描电镜的气浮系统和扫描电镜
CN120946737B (zh) * 2025-10-15 2025-12-09 武汉格蓝若精密技术有限公司 减振系统、方法及半导体制造设备

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3282302B2 (ja) 1992-09-30 2002-05-13 株式会社島津製作所 加振装置または振動除去装置
JP2003130128A (ja) * 2001-10-30 2003-05-08 Canon Inc 能動除振装置
BR0306321A (pt) * 2002-09-12 2004-09-28 Luk Lamellen & Kupplungsbau Processo para a redução de oscilações de arrancamento
US8229598B2 (en) * 2007-09-06 2012-07-24 Okuma Corporation Vibration suppressing device for machine tool
JP2010085099A (ja) * 2008-09-29 2010-04-15 Bridgestone Corp 防振ゴムの劣化モニタリング装置および方法
CN101718333B (zh) * 2009-11-28 2012-01-18 山西太钢不锈钢股份有限公司 一种消除快速链振动的方法及其装置
CN102928073A (zh) * 2012-11-26 2013-02-13 昆山北极光电子科技有限公司 一种基于相位叠加的振动噪声滤除方法
JP6198556B2 (ja) * 2013-10-09 2017-09-20 倉敷化工株式会社 アクティブ除振装置
CN103557268A (zh) * 2013-11-14 2014-02-05 高乐（天津）科技发展有限公司 半主动型除振系统

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