JP2016095305A5 - - Google Patents

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Publication number
JP2016095305A5
JP2016095305A5 JP2015221790A JP2015221790A JP2016095305A5 JP 2016095305 A5 JP2016095305 A5 JP 2016095305A5 JP 2015221790 A JP2015221790 A JP 2015221790A JP 2015221790 A JP2015221790 A JP 2015221790A JP 2016095305 A5 JP2016095305 A5 JP 2016095305A5
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JP
Japan
Prior art keywords
strain
accelerometer
support substrate
amount
proof mass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2015221790A
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English (en)
Japanese (ja)
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JP2016095305A (ja
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Publication date
Priority claimed from US14/542,277 external-priority patent/US10823754B2/en
Application filed filed Critical
Publication of JP2016095305A publication Critical patent/JP2016095305A/ja
Publication of JP2016095305A5 publication Critical patent/JP2016095305A5/ja
Pending legal-status Critical Current

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JP2015221790A 2014-11-14 2015-11-12 歪み補償型加速度計 Pending JP2016095305A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/542,277 2014-11-14
US14/542,277 US10823754B2 (en) 2014-11-14 2014-11-14 Accelerometer with strain compensation

Publications (2)

Publication Number Publication Date
JP2016095305A JP2016095305A (ja) 2016-05-26
JP2016095305A5 true JP2016095305A5 (enExample) 2018-12-20

Family

ID=54478646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015221790A Pending JP2016095305A (ja) 2014-11-14 2015-11-12 歪み補償型加速度計

Country Status (4)

Country Link
US (1) US10823754B2 (enExample)
EP (1) EP3021124B1 (enExample)
JP (1) JP2016095305A (enExample)
CN (1) CN105606844B (enExample)

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US11079227B2 (en) 2019-04-01 2021-08-03 Honeywell International Inc. Accelerometer system enclosing gas
US11119116B2 (en) 2019-04-01 2021-09-14 Honeywell International Inc. Accelerometer for determining an acceleration based on modulated optical signals
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US10956768B2 (en) 2019-04-22 2021-03-23 Honeywell International Inc. Feedback cooling and detection for optomechanical devices
US11112246B2 (en) * 2019-06-14 2021-09-07 United States Government As Represented By The Secretary Of The Army Torsional oscillator micro electro mechanical systems accelerometer
US11119114B2 (en) * 2019-07-17 2021-09-14 Honeywell International Inc. Anchor structure for securing optomechanical structure
US11408911B2 (en) 2019-07-17 2022-08-09 Honeywell International Inc. Optomechanical structure with corrugated edge
US11150264B2 (en) 2019-08-13 2021-10-19 Honeywell International Inc. Feedthrough rejection for optomechanical devices using elements
US11408912B2 (en) 2019-08-13 2022-08-09 Honeywell International Inc. Feedthrough rejection for optomechanical devices
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US11473909B2 (en) * 2020-03-04 2022-10-18 Invensense, Inc. Use of MEMS gyroscope for compensation of accelerometer stress induced errors
GB2595294B (en) * 2020-05-21 2025-04-02 Silicon Microgravity Ltd Single axis resonant accelerometer
CN111965388B (zh) * 2020-08-21 2022-08-05 西安交通大学 一种低温漂相对平面贴装差动型集成式谐振加速度计
US11459231B2 (en) 2020-11-23 2022-10-04 United States Government As Represented By The Secretary Of The Army Microelectronic isolation system
US11703521B2 (en) * 2020-12-04 2023-07-18 Honeywell International Inc. MEMS vibrating beam accelerometer with built-in test actuators
US20230366909A1 (en) * 2022-05-13 2023-11-16 Honeywell International Inc. Vibrating beam accelerometer
JP2024129357A (ja) * 2023-03-13 2024-09-27 株式会社東芝 センサ及び電子装置
CN118858697B (zh) * 2024-09-24 2025-01-24 东海实验室 一种mems加速度计的快速旋转标定方法

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