JP2016095305A - 歪み補償型加速度計 - Google Patents

歪み補償型加速度計 Download PDF

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Publication number
JP2016095305A
JP2016095305A JP2015221790A JP2015221790A JP2016095305A JP 2016095305 A JP2016095305 A JP 2016095305A JP 2015221790 A JP2015221790 A JP 2015221790A JP 2015221790 A JP2015221790 A JP 2015221790A JP 2016095305 A JP2016095305 A JP 2016095305A
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JP
Japan
Prior art keywords
accelerometer
strain
examples
monitoring device
detf
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Pending
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JP2015221790A
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English (en)
Japanese (ja)
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JP2016095305A5 (enExample
Inventor
ポール・ダブリュー・ドワイヤー
Paul W Dwyer
スティーヴン・エフ・ベッカ
Stephen F Becka
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Honeywell International Inc
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Honeywell International Inc
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Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of JP2016095305A publication Critical patent/JP2016095305A/ja
Publication of JP2016095305A5 publication Critical patent/JP2016095305A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/03—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses by using non-electrical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0817—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for pivoting movement of the mass, e.g. in-plane pendulum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0854—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration using a particular shape of the mass, e.g. annular
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
JP2015221790A 2014-11-14 2015-11-12 歪み補償型加速度計 Pending JP2016095305A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/542,277 2014-11-14
US14/542,277 US10823754B2 (en) 2014-11-14 2014-11-14 Accelerometer with strain compensation

Publications (2)

Publication Number Publication Date
JP2016095305A true JP2016095305A (ja) 2016-05-26
JP2016095305A5 JP2016095305A5 (enExample) 2018-12-20

Family

ID=54478646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015221790A Pending JP2016095305A (ja) 2014-11-14 2015-11-12 歪み補償型加速度計

Country Status (4)

Country Link
US (1) US10823754B2 (enExample)
EP (1) EP3021124B1 (enExample)
JP (1) JP2016095305A (enExample)
CN (1) CN105606844B (enExample)

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US10180445B2 (en) * 2016-06-08 2019-01-15 Honeywell International Inc. Reducing bias in an accelerometer via current adjustment
US20190025056A1 (en) * 2017-07-21 2019-01-24 Invensense, Inc. Electrostatic offset correction
US10859596B2 (en) * 2018-07-20 2020-12-08 Honeywell International Inc. Mechanically-isolated in-plane pendulous vibrating beam accelerometer
US11079227B2 (en) 2019-04-01 2021-08-03 Honeywell International Inc. Accelerometer system enclosing gas
US11119116B2 (en) 2019-04-01 2021-09-14 Honeywell International Inc. Accelerometer for determining an acceleration based on modulated optical signals
US10705112B1 (en) 2019-04-22 2020-07-07 Honeywell International Inc. Noise rejection for optomechanical devices
US10956768B2 (en) 2019-04-22 2021-03-23 Honeywell International Inc. Feedback cooling and detection for optomechanical devices
US11112246B2 (en) * 2019-06-14 2021-09-07 United States Government As Represented By The Secretary Of The Army Torsional oscillator micro electro mechanical systems accelerometer
US11119114B2 (en) * 2019-07-17 2021-09-14 Honeywell International Inc. Anchor structure for securing optomechanical structure
US11408911B2 (en) 2019-07-17 2022-08-09 Honeywell International Inc. Optomechanical structure with corrugated edge
US11150264B2 (en) 2019-08-13 2021-10-19 Honeywell International Inc. Feedthrough rejection for optomechanical devices using elements
US11408912B2 (en) 2019-08-13 2022-08-09 Honeywell International Inc. Feedthrough rejection for optomechanical devices
US11372019B2 (en) 2019-08-13 2022-06-28 Honeywell International Inc. Optomechanical resonator stabilization for optomechanical devices
US11493531B2 (en) * 2019-11-07 2022-11-08 Honeywell International Inc. Resonator electrode configuration to avoid capacitive feedthrough for vibrating beam accelerometers
CN111157760B (zh) * 2020-01-02 2021-01-19 西安交通大学 一种基于mems超谐同步加速度计的频率自动跟踪方法及系统
US11473909B2 (en) * 2020-03-04 2022-10-18 Invensense, Inc. Use of MEMS gyroscope for compensation of accelerometer stress induced errors
GB2595294B (en) * 2020-05-21 2025-04-02 Silicon Microgravity Ltd Single axis resonant accelerometer
CN111965388B (zh) * 2020-08-21 2022-08-05 西安交通大学 一种低温漂相对平面贴装差动型集成式谐振加速度计
US11459231B2 (en) 2020-11-23 2022-10-04 United States Government As Represented By The Secretary Of The Army Microelectronic isolation system
US11703521B2 (en) * 2020-12-04 2023-07-18 Honeywell International Inc. MEMS vibrating beam accelerometer with built-in test actuators
US20230366909A1 (en) * 2022-05-13 2023-11-16 Honeywell International Inc. Vibrating beam accelerometer
JP2024129357A (ja) * 2023-03-13 2024-09-27 株式会社東芝 センサ及び電子装置
CN118858697B (zh) * 2024-09-24 2025-01-24 东海实验室 一种mems加速度计的快速旋转标定方法

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Also Published As

Publication number Publication date
US10823754B2 (en) 2020-11-03
EP3021124A1 (en) 2016-05-18
CN105606844B (zh) 2021-07-13
CN105606844A (zh) 2016-05-25
EP3021124B1 (en) 2018-06-06
US20160139170A1 (en) 2016-05-19

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