JP2016095305A5 - - Google Patents

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Publication number
JP2016095305A5
JP2016095305A5 JP2015221790A JP2015221790A JP2016095305A5 JP 2016095305 A5 JP2016095305 A5 JP 2016095305A5 JP 2015221790 A JP2015221790 A JP 2015221790A JP 2015221790 A JP2015221790 A JP 2015221790A JP 2016095305 A5 JP2016095305 A5 JP 2016095305A5
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JP
Japan
Prior art keywords
strain
accelerometer
support substrate
amount
proof mass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2015221790A
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English (en)
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JP2016095305A (ja
Filing date
Publication date
Priority claimed from US14/542,277 external-priority patent/US10823754B2/en
Application filed filed Critical
Publication of JP2016095305A publication Critical patent/JP2016095305A/ja
Publication of JP2016095305A5 publication Critical patent/JP2016095305A5/ja
Pending legal-status Critical Current

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Claims (3)

  1. 装置であって、
    プルーフマスと、
    前記プルーフマスを支持するように構成され、前記プルーフマスが前記装置の加速度に応じて変位するように構成される支持基材と、
    前記プルーフマスを前記支持基材に柔軟に接続するように構成されるフレキシャと、を備え、
    前記支持基材は、前記支持基材の歪み量を測定するように構成される歪み監視装置を備え、
    前記歪み監視装置は、双音叉(DETF)を有し、
    前記プルーフマス、支持基材、歪み監視装置およびフレキシャは、一片の一体材料でできている、
    装置。
  2. 前記歪み監視装置が更に双音叉(DETF)の一端に取り付けられるばねを備える、請求項1に記載の装置。
  3. 加速度計の支持基材で前記歪み監視装置により測定されるとき、処理装置により加速度計から前記加速度計の歪み量の指示を受信し、前記歪み監視装置が双音叉(DETF)を備える、ステップと、
    前記処理装置により前記加速度計から前記加速度計の加速度量の指示を受信するステップと、
    前記処理装置により前記加速度計の前記歪み量の指示と前記加速度量の指示に少なくとも部分的に基づいて前記加速度計の修正加速度値を求めるステップと、
    前記処理装置により前記修正加速度値を出力するステップと
    を含む方法。
JP2015221790A 2014-11-14 2015-11-12 歪み補償型加速度計 Pending JP2016095305A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/542,277 2014-11-14
US14/542,277 US10823754B2 (en) 2014-11-14 2014-11-14 Accelerometer with strain compensation

Publications (2)

Publication Number Publication Date
JP2016095305A JP2016095305A (ja) 2016-05-26
JP2016095305A5 true JP2016095305A5 (ja) 2018-12-20

Family

ID=54478646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015221790A Pending JP2016095305A (ja) 2014-11-14 2015-11-12 歪み補償型加速度計

Country Status (4)

Country Link
US (1) US10823754B2 (ja)
EP (1) EP3021124B1 (ja)
JP (1) JP2016095305A (ja)
CN (1) CN105606844B (ja)

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