JP2016095305A5 - - Google Patents
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- JP2016095305A5 JP2016095305A5 JP2015221790A JP2015221790A JP2016095305A5 JP 2016095305 A5 JP2016095305 A5 JP 2016095305A5 JP 2015221790 A JP2015221790 A JP 2015221790A JP 2015221790 A JP2015221790 A JP 2015221790A JP 2016095305 A5 JP2016095305 A5 JP 2016095305A5
- Authority
- JP
- Japan
- Prior art keywords
- strain
- accelerometer
- support substrate
- amount
- proof mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 239000000758 substrate Substances 0.000 claims 6
- 230000001133 acceleration Effects 0.000 claims 5
- 239000000463 material Substances 0.000 claims 1
Claims (3)
- 装置であって、
プルーフマスと、
前記プルーフマスを支持するように構成され、前記プルーフマスが前記装置の加速度に応じて変位するように構成される支持基材と、
前記プルーフマスを前記支持基材に柔軟に接続するように構成されるフレキシャと、を備え、
前記支持基材は、前記支持基材の歪み量を測定するように構成される歪み監視装置を備え、
前記歪み監視装置は、双音叉(DETF)を有し、
前記プルーフマス、支持基材、歪み監視装置およびフレキシャは、一片の一体材料でできている、
装置。 - 前記歪み監視装置が更に双音叉(DETF)の一端に取り付けられるばねを備える、請求項1に記載の装置。
- 加速度計の支持基材で前記歪み監視装置により測定されるとき、処理装置により加速度計から前記加速度計の歪み量の指示を受信し、前記歪み監視装置が双音叉(DETF)を備える、ステップと、
前記処理装置により前記加速度計から前記加速度計の加速度量の指示を受信するステップと、
前記処理装置により前記加速度計の前記歪み量の指示と前記加速度量の指示に少なくとも部分的に基づいて前記加速度計の修正加速度値を求めるステップと、
前記処理装置により前記修正加速度値を出力するステップと
を含む方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/542,277 US10823754B2 (en) | 2014-11-14 | 2014-11-14 | Accelerometer with strain compensation |
US14/542,277 | 2014-11-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016095305A JP2016095305A (ja) | 2016-05-26 |
JP2016095305A5 true JP2016095305A5 (ja) | 2018-12-20 |
Family
ID=54478646
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015221790A Pending JP2016095305A (ja) | 2014-11-14 | 2015-11-12 | 歪み補償型加速度計 |
Country Status (4)
Country | Link |
---|---|
US (1) | US10823754B2 (ja) |
EP (1) | EP3021124B1 (ja) |
JP (1) | JP2016095305A (ja) |
CN (1) | CN105606844B (ja) |
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US11150264B2 (en) | 2019-08-13 | 2021-10-19 | Honeywell International Inc. | Feedthrough rejection for optomechanical devices using elements |
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US11567100B2 (en) * | 2019-11-07 | 2023-01-31 | Honeywell International Inc. | Vibrating beam accelerometer with additional support flexures to avoid nonlinear mechanical coupling |
CN111157760B (zh) * | 2020-01-02 | 2021-01-19 | 西安交通大学 | 一种基于mems超谐同步加速度计的频率自动跟踪方法及系统 |
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CN111965388B (zh) * | 2020-08-21 | 2022-08-05 | 西安交通大学 | 一种低温漂相对平面贴装差动型集成式谐振加速度计 |
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-
2014
- 2014-11-14 US US14/542,277 patent/US10823754B2/en active Active
-
2015
- 2015-11-09 EP EP15193762.0A patent/EP3021124B1/en active Active
- 2015-11-12 JP JP2015221790A patent/JP2016095305A/ja active Pending
- 2015-11-13 CN CN201510774038.9A patent/CN105606844B/zh active Active
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