WO2018105753A3 - センサ基板、風速測定装置および風量測定装置 - Google Patents

センサ基板、風速測定装置および風量測定装置 Download PDF

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Publication number
WO2018105753A3
WO2018105753A3 PCT/JP2018/007907 JP2018007907W WO2018105753A3 WO 2018105753 A3 WO2018105753 A3 WO 2018105753A3 JP 2018007907 W JP2018007907 W JP 2018007907W WO 2018105753 A3 WO2018105753 A3 WO 2018105753A3
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WO
WIPO (PCT)
Prior art keywords
measurement device
sensor substrate
air
temperature sensor
sensor element
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Application number
PCT/JP2018/007907
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English (en)
French (fr)
Other versions
WO2018105753A2 (ja
Inventor
彰宏 北村
Original Assignee
株式会社村田製作所
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Application filed by 株式会社村田製作所 filed Critical 株式会社村田製作所
Publication of WO2018105753A2 publication Critical patent/WO2018105753A2/ja
Publication of WO2018105753A3 publication Critical patent/WO2018105753A3/ja

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/10Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
    • G01P5/12Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables using variation of resistance of a heated conductor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Indicating Or Recording The Presence, Absence, Or Direction Of Movement (AREA)

Abstract

発熱素子の影響を受けることなく、第2温度センサ素子によって、風の温度を正確に測定することができるセンサ基板を提供する。 発熱素子5(正特性サーミスタ)および第1温度センサ素子6(第1負特性サーミスタ)と、第2温度センサ素子7(第2負特性サーミスタ)との熱的分離を、基板1に、切欠き4a、4bを形成し、切欠き4a、4bの一方側に、発熱素子5および第1温度センサ素子6を実装し、切欠き4a、4bの他方側に、第2温度センサ素子7を実装することによりおこなう。
PCT/JP2018/007907 2017-05-08 2018-03-01 センサ基板、風速測定装置および風量測定装置 WO2018105753A2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-092419 2017-05-08
JP2017092419 2017-05-08

Publications (2)

Publication Number Publication Date
WO2018105753A2 WO2018105753A2 (ja) 2018-06-14
WO2018105753A3 true WO2018105753A3 (ja) 2018-08-09

Family

ID=62491978

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2018/007907 WO2018105753A2 (ja) 2017-05-08 2018-03-01 センサ基板、風速測定装置および風量測定装置

Country Status (1)

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WO (1) WO2018105753A2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7285056B2 (ja) 2018-09-21 2023-06-01 Koa株式会社 流量センサ装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110945364B (zh) * 2017-08-05 2021-08-03 株式会社村田制作所 风速测定装置和风量测定装置
JP7341595B2 (ja) * 2019-12-06 2023-09-11 Koa株式会社 流量センサ

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50150473A (ja) * 1974-05-22 1975-12-02
JPS60183866U (ja) * 1984-05-17 1985-12-06 株式会社トーキン 風速検知装置
JPS61194316A (ja) * 1985-02-25 1986-08-28 Nippon Soken Inc 直熱型流量センサ
JPS63134920A (ja) * 1986-11-08 1988-06-07 ローベルト・ボツシュ・ゲゼルシヤフト・ミット・ベシュレンクテル・ハフツング 流量測定装置
JPH03172716A (ja) * 1989-11-17 1991-07-26 Robert Bosch Gmbh 流体の流量を検出する測定抵抗の温度制御方法及び装置
JPH08313320A (ja) * 1995-05-19 1996-11-29 Hitachi Ltd 熱式空気流量計用測定素子及びそれを含む熱式空気流量計
JP2003121226A (ja) * 2001-10-19 2003-04-23 Yamatake Corp フローセンサ
JP2013524254A (ja) * 2010-04-14 2013-06-17 バサ アプライド テクノロシーズ リミテッド 流量計プローブ
US20140251004A1 (en) * 2011-10-26 2014-09-11 Weatherford Canada Partnership Method and system for flow measurement
JP2015068659A (ja) * 2013-09-27 2015-04-13 林 泰正 熱式流速・流量センサの製造方法及び熱式流速・流量センサ

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50150473A (ja) * 1974-05-22 1975-12-02
JPS60183866U (ja) * 1984-05-17 1985-12-06 株式会社トーキン 風速検知装置
JPS61194316A (ja) * 1985-02-25 1986-08-28 Nippon Soken Inc 直熱型流量センサ
JPS63134920A (ja) * 1986-11-08 1988-06-07 ローベルト・ボツシュ・ゲゼルシヤフト・ミット・ベシュレンクテル・ハフツング 流量測定装置
JPH03172716A (ja) * 1989-11-17 1991-07-26 Robert Bosch Gmbh 流体の流量を検出する測定抵抗の温度制御方法及び装置
JPH08313320A (ja) * 1995-05-19 1996-11-29 Hitachi Ltd 熱式空気流量計用測定素子及びそれを含む熱式空気流量計
JP2003121226A (ja) * 2001-10-19 2003-04-23 Yamatake Corp フローセンサ
JP2013524254A (ja) * 2010-04-14 2013-06-17 バサ アプライド テクノロシーズ リミテッド 流量計プローブ
US20140251004A1 (en) * 2011-10-26 2014-09-11 Weatherford Canada Partnership Method and system for flow measurement
JP2015068659A (ja) * 2013-09-27 2015-04-13 林 泰正 熱式流速・流量センサの製造方法及び熱式流速・流量センサ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7285056B2 (ja) 2018-09-21 2023-06-01 Koa株式会社 流量センサ装置

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WO2018105753A2 (ja) 2018-06-14

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