JP2017059637A - 半導体装置、および当該半導体装置を備えるインバータ装置 - Google Patents
半導体装置、および当該半導体装置を備えるインバータ装置 Download PDFInfo
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Abstract
【解決手段】本開示の半導体装置100は、第1導電型ドレイン層10と、ドレイン層10上の第1導電型ドリフト層20と、ドリフト層20の上面に位置する複数の第2導電型ベース領域22と、各ベース領域22の内側においてベース領域22の周縁から間隔を空けて配置され、周縁との間にチャネル領域220を形成する第1導電型ソース領域30と、ドリフト層20内において複数のベース領域22からそれぞれドレイン層10に向かって延びる複数の第2導電型コラム領域24とを備える。ドレイン−ソース電圧をVDS、ゲート−ソース容量をCgs、ゲート−ドレイン容量をCgdとするとき、VDSが5ボルトにおける(Cgs+Cgd)/Cgdが4以上30以下である。
【選択図】図8
Description
<SJ−MOSFETの概略構成>
まず、図8を参照して、本実施形態における半導体装置の基本構成の一例を説明する。図8は、本実施形態に係る半導体装置100の一部分を模式的に示す斜視図である。図8には、参考のため、互いに直交するX軸、Y軸、およびZ軸を持つXYZ座標が示されている。図8に示される構造は、X軸方向およびY軸方向に沿って広がる半導体装置100の一部分のみを切り出した構造であり、半導体装置100の全体を示すものではない。
次に、図9A、図9Bおよび図10を参照しながら、本実施形態の構成例を更に詳細に説明する。図9Aは、半導体結晶200の上面200aの一部を、その法線(Z軸)方向から見たときの平面図である。図9Bは、図9AのB−B線断面図である。簡単のため、図9Aおよび図9Bでは、半導体結晶200の上半分のみが記載されており、半導体結晶200の上半分以外の部分(n+型ドレイン層10、ドレイン電極12、ソース電極32、ゲート電極42など)の記載は省略されている。図10は、本実施形態における半導体装置100に含まれる1個のMOS構造とその周辺部を模式的に示す断面図である。現実の半導体装置100は、同一のMOS構造が周期的に配列された構成を備えている。
図11A〜図11Iを参照しながら、本実施形態における半導体装置100の製造方法の一例を説明する。本実施形態に係る半導体装置100は、この製造方法の例に限定されず、他の方法によっても製造され得る。
(b)ゲートサイズA=8μm、追加ドープ層あり(ドーズ量は1.0×1012cm-2)
(c)ゲートサイズA=10μm、追加ドープ層なし
(d)ゲートサイズA=9μm、追加ドープ層なし
(e)ゲートサイズA=8μm、追加ドープ層なし
図8の例において、p型コラム領域24はストライプ状に延びているが、p型コラム領域24の形状はストライプ形状に限定されない。p型コラム領域24は、文字通り、柱状に縦方向(Z軸方向)に延びていてもよい。図14は、p型コラム領域24がZ軸方向に延びる柱状形状を有する実施形態の一部分を示す斜視図である。図14において、図8の構成要素に対応する構成要素には同一の参照符号を付している。
まず、図19Aおよび図19Bを参照して本開示の半導体パッケージの概略形状を説明する。図19Aは、本開示の実施形態に係る半導体パッケージ500の全体の外形を示す上面図である。図19Bは、この半導体パッケージ500の側面図である。図19Aには、直交するX軸およびY軸を含むXY座標が記載され、図19Bには、直交するY軸およびZ軸を含むYZ座標が記載されている。
図21は、本開示の半導体装置100が使用され得るインバータ装置の実施形態を示すブロック図である。
GD11、GD12、GD13、GD21、GD22、GD23 ゲート駆動回路
10 n+型ドレイン層
12 ドレイン電極
14 初期成長層
18 p型不純物が選択的にドープされる領域
16a〜16g n-型ドリフト層を構成する半導体層(エピタキシャル層)
20 n-型ドリフト層
22 p型ベース領域
24 p型コラム領域
30 n+型ソース領域
32 ソース電極
40 ゲート絶縁層
42 ゲート電極
50 層間絶縁膜
60 コンタクトホール
100、100a、100b 半導体装置
120 電圧源
122 電流計
124 IGBTゲート駆動回路
125 抵抗
126 抵抗
127 インダクタ(コイル)
128 ショットキーダイオード
129 抵抗
130 パルスジェネレータ
132 第1パッド電極
142 第2パッド電極
200 半導体結晶
200a 半導体結晶の上面
220 チャネル領域
250 n型不純物の追加ドープ層
264、266,268 リード
264a、268a ボンディングパッド部
270 ダイボンディングパッド(ダイパッド)
270a リード266の屈曲部
272、274 ワイヤ
300 直流電源
320 三相同期モータ
340 電流センサ
360 モータ制御回路
370 PWM回路
400 インバータ回路
500 半導体パッケージ
1000 インバータ装置
Claims (14)
- 第1導電型ドレイン層と、
前記ドレイン層上の第1導電型ドリフト層と、
前記ドリフト層の上面に位置する複数の第2導電型ベース領域と、
前記複数のベース領域のそれぞれの内側において前記ベース領域の周縁から間隔を空けて配置され、前記周縁との間にチャネル領域を形成する第1導電型ソース領域と、
前記チャネル領域を覆うゲート絶縁層と、
前記ゲート絶縁層上に位置し、前記チャネル領域に対向するゲート電極と、
前記ドリフト層内において前記複数のベース領域からそれぞれ前記ドレイン層に向かって延びる複数の第2導電型コラム領域と、
前記ドリフト層内のトラップレベル形成領域と、
前記ドレイン層に電気的に接続されたドレイン電極と、
前記ソース領域に電気的に接続されたソース電極と、
を備え、
ドレイン−ソース電圧をVDS、ゲート−ソース容量をCgs、ゲート−ドレイン容量をCgdとするとき、VDSが5ボルトにおける(Cgs+Cgd)/Cgdが4以上30以下である、半導体装置。 - 前記ドリフト層の前記上面に位置する第1導電型不純物追加ドープ層を更に備える、請求項1に記載の半導体装置。
- 前記不純物追加ドープ層における前記第1導電型不純物イオンの注入ドーズ量は、1.0×1012/cm2以上2.0×1012/cm2以下である、請求項2に記載の半導体装置。
- 前記ゲート電極の最小寸法は、8μm以上10μm以下である、請求項1から3のいずれかに記載の半導体装置。
- 前記ドリフト層の前記上面において隣接する2つのベース領域の間隔は、1μm以上2μm以下である、請求項4に記載の半導体装置。
- VDSが5ボルトにおける(Cgs+Cgd)/Cgdが5以上30以下である、請求項5に記載の半導体装置。
- ホディダイオードの逆回復時間trrは、150ナノ秒以下である、請求項1から6のいずれかに記載の半導体装置。
- 前記複数のベース領域および前記複数のコラム領域は、それぞれ、ストライプ状に配列されている、請求項1から7のいずれかに記載の半導体装置。
- 前記ゲート電極と前記ソース電極とを絶縁分離する層間絶縁膜であって、前記ソース電極を前記複数のソース領域のそれぞれに接触させる開口部を有する層間絶縁膜と、
前記層間絶縁膜上の第1パッド電極であって、前記ゲート電極に電気的に接続された第1パッド電極と、
前記ソース電極に電気的に接続された第2パッド電極と、
を更に備える請求項1から8のいずれかに記載の半導体装置。 - 1個または複数個の半導体チップと、
前記半導体チップを内部に含む樹脂成形体と、
を備える半導体パッケージであって、
前記1個または複数個の半導体チップの少なくとも1個は、請求項9に記載の半導体装置であり、
前記第1パッド電極に電気的に接続された第1リードと、
前記第2バッド電極に電気的に接続された第2リードと、
前記ドレイン電極に電気的に接続されたダイボンディングパッドであって、一端から第3リードが延びているダイボンディングパッドと、
を更に備え、
前記第1、第2、および第3リードのそれぞれの一部は、前記樹脂成形体から外部に突出している、半導体パッケージ。 - 前記第1パッド電極および第2パッド電極は、それぞれ、ワイヤボンディングによって前記第1リードおよび第2リードに接続されており、
前記ドレイン電極は、導電性接着層によって前記ダイボンディングパッドに接続されている、請求項10に記載の半導体パッケージ。 - それぞれがボディダイオードを内蔵する複数のスイッチング素子が形成するブリッジ回路と、
前記複数のスイッチング素子を駆動するゲート駆動回路と、
を備えるインバータ装置であって、
前記複数のスイッチング素子のそれぞれは、請求項1から9のいずれかに記載の半導体装置である、インバータ装置。 - 前記半導体装置の前記ソース電極および前記ドレイン電極の一方が誘導性負荷に接続される、請求項12に記載のインバータ装置。
- それぞれがボディダイオードを内蔵する複数のスイッチング素子が形成するブリッジ回路を備えるインバータ装置と、
前記インバータ装置に接続されたモータと、
を備え、
前記複数のスイッチング素子の少なくとも1個は、請求項1から9のいずれかに記載の半導体装置である、電気機器。
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