JP2017048819A5 - - Google Patents

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Publication number
JP2017048819A5
JP2017048819A5 JP2015170851A JP2015170851A JP2017048819A5 JP 2017048819 A5 JP2017048819 A5 JP 2017048819A5 JP 2015170851 A JP2015170851 A JP 2015170851A JP 2015170851 A JP2015170851 A JP 2015170851A JP 2017048819 A5 JP2017048819 A5 JP 2017048819A5
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JP
Japan
Prior art keywords
shaft
seal
housing
structure according
seal structure
Prior art date
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Application number
JP2015170851A
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English (en)
Japanese (ja)
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JP2017048819A (ja
JP6772440B2 (ja
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Priority to JP2015170851A priority Critical patent/JP6772440B2/ja
Priority claimed from JP2015170851A external-priority patent/JP6772440B2/ja
Publication of JP2017048819A publication Critical patent/JP2017048819A/ja
Publication of JP2017048819A5 publication Critical patent/JP2017048819A5/ja
Application granted granted Critical
Publication of JP6772440B2 publication Critical patent/JP6772440B2/ja
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JP2015170851A 2015-08-31 2015-08-31 シール構造、回転駆動装置、搬送装置、工作機械および半導体製造装置 Active JP6772440B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015170851A JP6772440B2 (ja) 2015-08-31 2015-08-31 シール構造、回転駆動装置、搬送装置、工作機械および半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015170851A JP6772440B2 (ja) 2015-08-31 2015-08-31 シール構造、回転駆動装置、搬送装置、工作機械および半導体製造装置

Publications (3)

Publication Number Publication Date
JP2017048819A JP2017048819A (ja) 2017-03-09
JP2017048819A5 true JP2017048819A5 (enExample) 2018-10-11
JP6772440B2 JP6772440B2 (ja) 2020-10-21

Family

ID=58278195

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015170851A Active JP6772440B2 (ja) 2015-08-31 2015-08-31 シール構造、回転駆動装置、搬送装置、工作機械および半導体製造装置

Country Status (1)

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JP (1) JP6772440B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6565499B2 (ja) * 2015-08-31 2019-08-28 日本精工株式会社 シール構造、回転駆動装置、搬送装置、工作機械および半導体製造装置
JP7441728B2 (ja) * 2020-05-29 2024-03-01 株式会社安川電機 搬送ロボットおよび搬送システム
CN115783520A (zh) * 2022-11-30 2023-03-14 上海衍梓智能科技有限公司 真空腔体用自旋转装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1137300A (ja) * 1997-07-15 1999-02-12 Eagle Ind Co Ltd 軸封装置
US6689221B2 (en) * 2000-12-04 2004-02-10 Applied Materials, Inc. Cooling gas delivery system for a rotatable semiconductor substrate support assembly
JP6015715B2 (ja) * 2013-12-10 2016-10-26 日本精工株式会社 シール機構、シール機構の駆動装置、搬送装置及び製造装置

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