JP2016121707A5 - - Google Patents

Download PDF

Info

Publication number
JP2016121707A5
JP2016121707A5 JP2014260473A JP2014260473A JP2016121707A5 JP 2016121707 A5 JP2016121707 A5 JP 2016121707A5 JP 2014260473 A JP2014260473 A JP 2014260473A JP 2014260473 A JP2014260473 A JP 2014260473A JP 2016121707 A5 JP2016121707 A5 JP 2016121707A5
Authority
JP
Japan
Prior art keywords
rolling bearing
bearing portion
mechanism according
rotation mechanism
shaft member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014260473A
Other languages
English (en)
Japanese (ja)
Other versions
JP6421590B2 (ja
JP2016121707A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2014260473A priority Critical patent/JP6421590B2/ja
Priority claimed from JP2014260473A external-priority patent/JP6421590B2/ja
Publication of JP2016121707A publication Critical patent/JP2016121707A/ja
Publication of JP2016121707A5 publication Critical patent/JP2016121707A5/ja
Application granted granted Critical
Publication of JP6421590B2 publication Critical patent/JP6421590B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2014260473A 2014-12-24 2014-12-24 回転機構、搬送装置、工作機械および半導体製造装置 Active JP6421590B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014260473A JP6421590B2 (ja) 2014-12-24 2014-12-24 回転機構、搬送装置、工作機械および半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014260473A JP6421590B2 (ja) 2014-12-24 2014-12-24 回転機構、搬送装置、工作機械および半導体製造装置

Publications (3)

Publication Number Publication Date
JP2016121707A JP2016121707A (ja) 2016-07-07
JP2016121707A5 true JP2016121707A5 (enExample) 2018-02-01
JP6421590B2 JP6421590B2 (ja) 2018-11-14

Family

ID=56326517

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014260473A Active JP6421590B2 (ja) 2014-12-24 2014-12-24 回転機構、搬送装置、工作機械および半導体製造装置

Country Status (1)

Country Link
JP (1) JP6421590B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109003933B (zh) * 2018-09-07 2024-03-15 武汉灿光光电有限公司 一种to精密定位装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4992182B2 (ja) * 2005-01-07 2012-08-08 日本精工株式会社 回転機構付軸方向微動装置
JP2007193663A (ja) * 2006-01-20 2007-08-02 Nsk Ltd 回転機構付軸方向微動機構および粗微動位置決め装置
JP5962179B2 (ja) * 2012-04-26 2016-08-03 日本精工株式会社 モータ
JP6135304B2 (ja) * 2013-05-30 2017-05-31 日本精工株式会社 シールユニットの劣化警告システム、搬送装置および半導体製造装置

Similar Documents

Publication Publication Date Title
JP2018191437A5 (enExample)
JP2015156801A5 (enExample)
JP6070202B2 (ja) 転がり軸受装置、及びこれを用いた圧延機用バックアップロール
JP6495648B2 (ja) ロータリーアクチュエータ
JP2013060825A5 (enExample)
JP2015140844A5 (enExample)
JP2015178881A5 (enExample)
WO2016190745A3 (en) Rescue tool
JP2013212558A5 (enExample)
JP2015066993A5 (enExample)
ES2569458T3 (es) Limitador de par de torsión para actuador de válvula
EP4112428A4 (en) PUSH WHEEL SHAFT, PUSH WHEEL AND ACTUATING MACHINE
JP2012207778A5 (enExample)
JP2012172781A5 (enExample)
JP2016515303A5 (enExample)
JP2016121707A5 (enExample)
JP2015200393A (ja) シールリング付転がり軸受
CN203730561U (zh) 静压气体轴承
BR112018007916A2 (pt) conjunto de extremidade de roda para um sistema de inflamento de pneu
JP2017024143A5 (enExample)
MY199029A (en) Blowing device and fluid control device
BR112019007912A2 (pt) conjunto de junta rotativa para um sistema de enchimento de pneu para um veículo
WO2016124412A3 (en) Disc stack centrifugal separator
JP2017048819A5 (enExample)
JP2018151030A5 (enExample)