JP6421590B2 - 回転機構、搬送装置、工作機械および半導体製造装置 - Google Patents

回転機構、搬送装置、工作機械および半導体製造装置 Download PDF

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Publication number
JP6421590B2
JP6421590B2 JP2014260473A JP2014260473A JP6421590B2 JP 6421590 B2 JP6421590 B2 JP 6421590B2 JP 2014260473 A JP2014260473 A JP 2014260473A JP 2014260473 A JP2014260473 A JP 2014260473A JP 6421590 B2 JP6421590 B2 JP 6421590B2
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Japan
Prior art keywords
rolling bearing
bearing portion
housing
inner ring
shaft member
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JP2014260473A
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Japanese (ja)
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JP2016121707A5 (enExample
JP2016121707A (ja
Inventor
中村　剛
中村　　剛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NSK Ltd
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NSK Ltd
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Priority to JP2014260473A priority Critical patent/JP6421590B2/ja
Publication of JP2016121707A publication Critical patent/JP2016121707A/ja
Publication of JP2016121707A5 publication Critical patent/JP2016121707A5/ja
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  • Sealing Of Bearings (AREA)
  • Rolling Contact Bearings (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Turning (AREA)
  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP2014260473A 2014-12-24 2014-12-24 回転機構、搬送装置、工作機械および半導体製造装置 Active JP6421590B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014260473A JP6421590B2 (ja) 2014-12-24 2014-12-24 回転機構、搬送装置、工作機械および半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014260473A JP6421590B2 (ja) 2014-12-24 2014-12-24 回転機構、搬送装置、工作機械および半導体製造装置

Publications (3)

Publication Number Publication Date
JP2016121707A JP2016121707A (ja) 2016-07-07
JP2016121707A5 JP2016121707A5 (enExample) 2018-02-01
JP6421590B2 true JP6421590B2 (ja) 2018-11-14

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JP2014260473A Active JP6421590B2 (ja) 2014-12-24 2014-12-24 回転機構、搬送装置、工作機械および半導体製造装置

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JP (1) JP6421590B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109003933B (zh) * 2018-09-07 2024-03-15 武汉灿光光电有限公司 一种to精密定位装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4992182B2 (ja) * 2005-01-07 2012-08-08 日本精工株式会社 回転機構付軸方向微動装置
JP2007193663A (ja) * 2006-01-20 2007-08-02 Nsk Ltd 回転機構付軸方向微動機構および粗微動位置決め装置
JP5962179B2 (ja) * 2012-04-26 2016-08-03 日本精工株式会社 モータ
JP6135304B2 (ja) * 2013-05-30 2017-05-31 日本精工株式会社 シールユニットの劣化警告システム、搬送装置および半導体製造装置

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JP2016121707A (ja) 2016-07-07

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