JP2017048819A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2017048819A5 JP2017048819A5 JP2015170851A JP2015170851A JP2017048819A5 JP 2017048819 A5 JP2017048819 A5 JP 2017048819A5 JP 2015170851 A JP2015170851 A JP 2015170851A JP 2015170851 A JP2015170851 A JP 2015170851A JP 2017048819 A5 JP2017048819 A5 JP 2017048819A5
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- seal
- housing
- structure according
- seal structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007789 sealing Methods 0.000 claims description 5
- 230000002093 peripheral Effects 0.000 claims description 3
- 210000000088 Lip Anatomy 0.000 claims 5
- 230000001808 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000463 material Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Description
上記目的を達成するため、本発明に係るシール構造は、圧力の異なる2つの空間を隔てるシール構造であって、前記圧力の異なる2つの空間のうち高圧側の空間に配置される筒状のハウジングと、前記ハウジングに挿入されるシャフトと、前記シャフトの一端部に固定されて前記シャフトとともに回転または、軸方向に移動し、前記ハウジングに接して、前記シャフトの外径面と前記シャフトが挿入される前記ハウジングの貫通穴との間の隙間である第1隙間を密封する環状の第1シール部材と、を備えることを特徴とする。 In order to achieve the above object, a seal structure according to the present invention is a seal structure that separates two spaces having different pressures, and is a cylindrical housing that is disposed in a space on the high-pressure side of the two spaces having different pressures. A shaft inserted into the housing, and fixed to one end of the shaft and rotated or moved in the axial direction together with the shaft, and the outer diameter surface of the shaft and the shaft are inserted into contact with the housing An annular first seal member that seals a first gap that is a gap between the housing and the through hole .
本発明の望ましい態様として、前記第1シール部材と軸方向に所定の間隔を有して前記シャフトに固定されて前記シャフトとともに回転し、かつ側面が所定の大きさの隙間である第1隙間を有して前記ハウジングの内壁(内周面)と対向するシール固定部材と、前記シール固定部材に固定されて前記シール固定部材とともに回転し、前記ハウジングに接して、前記第1隙間を密封する環状の第2シール部材を、さらに備えることが好ましい。 As a desirable mode of the present invention, a first gap that is fixed to the shaft with a predetermined distance in the axial direction from the first seal member and rotates together with the shaft and whose side surface is a gap of a predetermined size is provided. A seal fixing member that opposes the inner wall (inner peripheral surface) of the housing, and an annular shape that is fixed to the seal fixing member and rotates together with the seal fixing member to contact the housing and seal the first gap. The second seal member is preferably further provided.
シール固定部32には、第1シール部材5が備えられている。第1シール部材5は、例えば、樹脂またはゴム等の非金属材料で形成されている。第1シール部材5は、回転中心軸Zrを中心とした環状の弾性部材であり、ハウジングの貫通孔22の内径面に接するようにシャフト81のシール固定凹部32bに嵌められるとともに、シャフト81のシール固定部32と可動部材33の胴部331の端面とで挟まれて固定されている。これにより、第1シール部材5は、シャフト81及び可動部材33とともに回転中心軸Zrを中心として回転する。第1シール部材5は、シャフト81の外径面82bとハウジング2の貫通穴22との間の隙間(第1隙間)15を密封する。 The seal fixing portion 32 is provided with a first seal member 5. The first seal member 5 is made of, for example, a nonmetallic material such as resin or rubber. The first seal member 5 is an annular elastic member centered on the rotation center axis Zr. The first seal member 5 is fitted in the seal fixing recess 32b of the shaft 81 so as to be in contact with the inner diameter surface of the through hole 22 of the housing. The fixed portion 32 and the end surface of the body portion 331 of the movable member 33 are sandwiched and fixed. Thereby, the first seal member 5 rotates around the rotation center axis Zr together with the shaft 81 and the movable member 33. The first seal member 5 seals a gap (first gap) 15 between the outer diameter surface 82 b of the shaft 81 and the through hole 22 of the housing 2.
実施形態1に係るシール構造1は、シャフト81に固定されてシャフト81とともに回転する可動部材(シール押え部材)33を備える。また、第1シール部材5は、シャフト81の径方向内側に向かって突出しシール固定部32および可動部材(シール押え部材)33に挟まれて固定されるシールフランジ部54を備える。 Sealing structure 1 according to the first embodiment, it is fixed to the sheet Yafuto 8 1 comprises a movable member (seal pressing member) 33 that rotates with the shaft 81. The first seal member 5 includes a seal flange portion 54 that protrudes radially inward of the shaft 81 and is fixed between the seal fixing portion 32 and the movable member (seal pressing member) 33.
第2実施形態では、シャフト81と可動部材33との間に、シール固定部材35が設けられる。シール固定部材35は、軸方向両端に形成されたねじ部35aと、シャフト81及び可動部材33に形成されたねじ穴331a、35aによって互いに固定される。シール固定部材35のシャフト81側端面は、シャフト81のシール固定凹部32bに挿入された第1シール部材5のシールフランジ部54を挟み込み固定する。シール固定部材35の軸方向端面側端部にはシール固定凹部35bが形成されており、そこに挿入された第2シール部材50のフランジ部540を、可動部材33の軸方向端面で挟み込み固定する。
本実施例では、第2シール部材50は、第1シール部材5と同一のものを用いているが、同様の構成であれば、形状や大きさは異なっていても良い。例えば、シャフト81に対して、可動部材33の外径を大きく、又は小さく形成し、それに合わせて第1シール部材5に対して大きい、又は小さい第2シール部材50を使用しても良い。
In the second embodiment, a seal fixing member 35 is provided between the shaft 81 and the movable member 33. The seal fixing member 35 is fixed to each other by screw portions 35 a formed at both ends in the axial direction and screw holes 331 a and 35 a formed in the shaft 81 and the movable member 33. The shaft 81 side end surface of the seal fixing member 35 sandwiches and fixes the seal flange portion 54 of the first seal member 5 inserted into the seal fixing recess 32 b of the shaft 81. A seal fixing recess 35 b is formed at the end of the seal fixing member 35 in the axial direction end surface, and the flange portion 540 of the second seal member 50 inserted therein is sandwiched and fixed by the axial end surface of the movable member 33. .
In the present embodiment, the second seal member 50 is the same as the first seal member 5, but the shape and size may be different as long as they have the same configuration. For example, the outer diameter of the movable member 33 may be formed larger or smaller than the shaft 81, and the second seal member 50 larger or smaller than the first seal member 5 may be used accordingly.
上記実施形態によれば、ハウジング2とシャフト81、可動部材33及びシール固定部材35との間の隙間を第1シール部材5及び第2シール部材50で2重に密封することができるので、よりシール性能を向上させることができる。 According to the above embodiment, the gap between the housing 2 and the shaft 81, the movable member 33, and the seal fixing member 35 can be double sealed with the first seal member 5 and the second seal member 50. Sealing performance can be improved.
(実施形態3)
図5は、実施形態3に係るシール構造を模式的に示す断面図である。上述した実施形態2とは、ハウジング2の軸方向中間に形成された気体通路22bから、シャフト81、貫通孔22の内壁、第1シール部材5、及び、第2シール部材50で囲まれた空間Sの気体を排気する点が異なる。
(Embodiment 3)
FIG. 5 is a cross-sectional view schematically showing a seal structure according to the third embodiment. The embodiment 2 described above is a space surrounded by the shaft 81, the inner wall of the through hole 22 , the first seal member 5, and the second seal member 50 from the gas passage 22 b formed in the middle in the axial direction of the housing 2. The point which exhausts the gas of S differs.
気体通路22bは、ハウジング2の筒状部21Aの軸方向中間位置に形成される。
筒状部21Aの貫通孔22の内壁には環状溝22aが形成され、環状溝22aの底部に気体通路22bが開口している。環状溝22aは、シャフト81のハウジング2に対する軸方向移動の範囲において、常に第1シール部材5と、第2シール部材50との間に位置する様な位置に形成される。
The gas passage 22 b is formed at an intermediate position in the axial direction of the cylindrical portion 21 </ b> A of the housing 2.
An annular groove 22a is formed on the inner wall of the through hole 22 of the cylindrical portion 21A, and a gas passage 22b is opened at the bottom of the annular groove 22a. The annular groove 22 a is formed at a position that is always located between the first seal member 5 and the second seal member 50 in the range of the axial movement of the shaft 81 relative to the housing 2.
上記実施形態によれば、ハウジング2とシャフト81、可動部材33及びシール固定部材35と、第1シール部材5と、第2シール部材50で囲まれる空間を気体通路22bから排気することによって、よりシール性能を向上させることができる。 According to the above embodiment, the space surrounded by the housing 2, the shaft 81, the movable member 33 and the seal fixing member 35, the first seal member 5, and the second seal member 50 is exhausted from the gas passage 22b. Sealing performance can be improved.
Claims (11)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015170851A JP6772440B2 (en) | 2015-08-31 | 2015-08-31 | Seal structure, rotary drive device, transfer device, machine tool and semiconductor manufacturing equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015170851A JP6772440B2 (en) | 2015-08-31 | 2015-08-31 | Seal structure, rotary drive device, transfer device, machine tool and semiconductor manufacturing equipment |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2017048819A JP2017048819A (en) | 2017-03-09 |
JP2017048819A5 true JP2017048819A5 (en) | 2018-10-11 |
JP6772440B2 JP6772440B2 (en) | 2020-10-21 |
Family
ID=58278195
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015170851A Active JP6772440B2 (en) | 2015-08-31 | 2015-08-31 | Seal structure, rotary drive device, transfer device, machine tool and semiconductor manufacturing equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6772440B2 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6565499B2 (en) * | 2015-08-31 | 2019-08-28 | 日本精工株式会社 | SEAL STRUCTURE, ROTARY DRIVE DEVICE, CONVEYING DEVICE, MACHINE TOOL, AND SEMICONDUCTOR MANUFACTURING DEVICE |
JP7441728B2 (en) * | 2020-05-29 | 2024-03-01 | 株式会社安川電機 | Transfer robots and transfer systems |
-
2015
- 2015-08-31 JP JP2015170851A patent/JP6772440B2/en active Active
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR101453475B1 (en) | Squeeze packing | |
US10041562B2 (en) | Sealing structure | |
WO2016006535A1 (en) | Mechanical seal | |
KR101648921B1 (en) | Magnetic fluid seal | |
JP2015183750A (en) | shaft seal | |
JP2017048819A5 (en) | ||
WO2014054472A1 (en) | Sealing device | |
JP6581179B2 (en) | Mechanical seal device, double seal device and double mechanical seal device | |
US9590464B2 (en) | Electric motor having air tightness test holes | |
JP3196645U (en) | Mechanical seal device | |
JPWO2014042085A1 (en) | mechanical seal | |
JP5998943B2 (en) | Rotating mechanism, transfer device, and semiconductor manufacturing device | |
US9000643B2 (en) | Sealed rotational output unit and sealed motor assembly | |
JP5657824B1 (en) | Shaft seal | |
WO2015190350A1 (en) | Mechanical seal | |
JP6101417B2 (en) | Sealed structure and transfer robot equipped with the same | |
JP2018071724A5 (en) | ||
JP5985288B2 (en) | Rotating shaft seal | |
JP2018538496A5 (en) | ||
JP2018168732A5 (en) | ||
JP2017048818A5 (en) | ||
US10718321B2 (en) | Motor-integrated intake apparatus | |
JP2014052040A (en) | Rotation shaft seal forming device | |
JP2015121265A (en) | Magnetic fluid bearing device and vacuum chamber | |
JP2019203644A5 (en) |